公开(公告)号：US20140051199A1

公开(公告)日：2014-02-20

申请号：US13993757

申请日：2011-12-09

申请人： Adolf Muenzer ,  Andreas Teppe ,  Jan Schoene ,  Mathias Hein ,  Jens Kruemberg ,  Sandra Kruemberg

发明人： Adolf Muenzer ,  Andreas Teppe ,  Jan Schoene ,  Mathias Hein ,  Jens Kruemberg ,  Sandra Kruemberg

IPC分类号： H01L31/0236

CPC分类号： H01L31/0236 ,  H01L31/02363 ,  H01L31/056 ,  Y02E10/52

摘要： Method for producing a silicon solar cell which is smoothly etched on one side, in which a front side and a rear side of a silicon substrate are etched (10) to form a smooth texture, a dielectric coating is then formed (14, 16) on the rear side of the silicon substrate and the front side of the silicon substrate is subsequently textured (20) by means of a texture etching medium, the dielectric coating formed on the rear side of the silicon substrate being used as an etching mask against the texture etching medium.

摘要翻译： 制造在硅衬底的前侧和后侧蚀刻（10）以形成光滑纹理的一侧平滑蚀刻的硅太阳能电池的方法，然后形成电介质涂层（14,16） 在硅衬底的后侧，随后通过纹理蚀刻介质对硅衬底的前侧进行纹理化（20），形成在硅衬底的后侧上的电介质涂层用作抗蚀剂掩模 纹理蚀刻介质。

公开(公告)号：US20130014819A1

公开(公告)日：2013-01-17

申请号：US13582499

申请日：2011-03-03

申请人： Andreas Teppe ,  Matthias Geiger ,  Reinhold Schlosser ,  Adolf Muenzer ,  Jan Schoene ,  Joerg Isenberg ,  Tino Kuehn ,  Steffen Keller

发明人： Andreas Teppe ,  Matthias Geiger ,  Reinhold Schlosser ,  Adolf Muenzer ,  Jan Schoene ,  Joerg Isenberg ,  Tino Kuehn ,  Steffen Keller

IPC分类号： H01L31/0236 ,  H01L31/18

CPC分类号： H01L31/068 ,  H01L21/02587 ,  H01L21/02675 ,  H01L21/268 ,  H01L31/1804 ,  H01L31/1872 ,  Y02E10/547 ,  Y02P70/521

摘要： A method for doping a semiconductor substrate includes heating the semiconductor substrate by irradiation with laser radiation and at the same time diffusing dopant from a dopant source into the semiconductor substrate in heated regions. The semiconductor substrate is heated by the irradiation with laser radiation. A surface portion of the semiconductor substrate that is less than 10% of the total surface of all irradiated regions is melted and recrystallized. There is also provided a solar cell.

摘要翻译： 掺杂半导体衬底的方法包括通过用激光辐射照射加热半导体衬底，并且同时将掺杂剂从掺杂剂源扩散到加热区域中的半导体衬底中。 通过激光辐射照射来加热半导体衬底。 半导体衬底的表面部分小于所有照射区域的总表面的10％，熔化并重结晶。 还提供了太阳能电池。

公开(公告)号：US20130061924A1

公开(公告)日：2013-03-14

申请号：US13582502

申请日：2011-03-03

申请人： Adolf Münzer ,  Andreas Teppe ,  Jan Schöne ,  Reinhold Schlosser ,  Steffen Keller

发明人： Adolf Münzer ,  Andreas Teppe ,  Jan Schöne ,  Reinhold Schlosser ,  Steffen Keller

IPC分类号： H01L31/0232 ,  H01L31/18

CPC分类号： H01L31/0547 ,  H01L31/02167 ,  H01L31/022425 ,  H01L31/056 ,  H01L31/068 ,  H01L31/1804 ,  H01L31/1864 ,  Y02E10/52 ,  Y02E10/547 ,  Y02P70/521

摘要： In a method for producing a solar cell, a layer stack of dielectric layers is applied to a back of a solar cell substrate and the layer stack is heated and is held at temperatures of at least 700° C. during a time period of at least 5 minutes. The novel solar cell has a layer stack of dielectric layers on its back. At least one of the dielectric layers of the layer stack is densified so that its resistivity to firing-through of pastes with glass components is enhanced.

摘要翻译： 在制造太阳能电池的方法中，将电介质层的层叠层施加到太阳能电池基板的背面，并且层叠体被加热并且在至少700℃的温度下保持至少 5分钟。 新型太阳能电池的背面有一层电介质层。 层叠体的电介质层中的至少一个被致密化，使得其具有玻璃成分的糊状物的通孔的电阻率增强。

公开(公告)号：US09276155B2

公开(公告)日：2016-03-01

申请号：US13582502

申请日：2011-03-03

申请人： Adolf Muenzer ,  Andreas Teppe ,  Jan Schoene ,  Reinhold Schlosser ,  Steffen Keller

发明人： Adolf Muenzer ,  Andreas Teppe ,  Jan Schoene ,  Reinhold Schlosser ,  Steffen Keller

IPC分类号： H01L21/00 ,  H01L21/44 ,  H01L31/068 ,  H01L31/0224 ,  H01L31/18 ,  H01L31/056

CPC分类号： H01L31/0547 ,  H01L31/02167 ,  H01L31/022425 ,  H01L31/056 ,  H01L31/068 ,  H01L31/1804 ,  H01L31/1864 ,  Y02E10/52 ,  Y02E10/547 ,  Y02P70/521

摘要： In a method for producing a solar cell, a layer stack of dielectric layers is applied to a back of a solar cell substrate and the layer stack is heated and is held at temperatures of at least 700° C. during a time period of at least 5 minutes. The novel solar cell has a layer stack of dielectric layers on its back. At least one of the dielectric layers of the layer stack is densified so that its resistivity to firing-through of pastes with glass components is enhanced.

摘要翻译： 在制造太阳能电池的方法中，将电介质层的层叠层施加到太阳能电池基板的背面，并且层叠体被加热并且在至少700℃的温度下保持至少 5分钟。 新型太阳能电池的背面有一层电介质层。 层叠体的电介质层中的至少一个被致密化，使得其具有玻璃成分的糊状物的通孔的电阻率增强。

公开(公告)号：US20130312823A1

公开(公告)日：2013-11-28

申请号：US13879593

申请日：2011-10-14

申请人： Andreas Teppe ,  Adolf Muenzer ,  Jan Schoene ,  Mathias Hein ,  Peter Winter

发明人： Andreas Teppe ,  Adolf Muenzer ,  Jan Schoene ,  Mathias Hein ,  Peter Winter

IPC分类号： H01L31/052 ,  H01L31/18

CPC分类号： H01L31/056 ,  H01L31/022425 ,  H01L31/18 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： Solar cell (11; 21; 31) having a dielectric coating arranged on a back side of the solar cell (11; 21; 31) which is at least partly covered by at least one planar contact (12; 22; 32), a boundary line (14; 24; 34) of the at least one planar contact (12; 22; 32) having at least one recess (16a, 16b; 26a, 26b, 26c), and method for producing same.

摘要翻译： 具有布置在太阳能电池（11; 21; 31）的背侧上的电介质涂层的太阳能电池（11; 21; 31），其至少部分被至少一个平面触点（12; 22; 32）覆盖， 所述至少一个平面接触件（12; 22; 32）的边界线（14; 24; 34）具有至少一个凹部（16a，16b; 26a，26b，26c）及其制造方法。

公开(公告)号：US20090211628A1

公开(公告)日：2009-08-27

申请号：US11918271

申请日：2006-04-11

申请人： Peter Engelhart ,  Andreas Teppe ,  Rainer Grischke ,  Robert Wade

发明人： Peter Engelhart ,  Andreas Teppe ,  Rainer Grischke ,  Robert Wade

IPC分类号： H01L31/0224 ,  H01L21/28

CPC分类号： H01L31/022458 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： The invention concerns a solar cell (1) and a method for making same, said solar cell (1) comprising on its rear surface (3) both the emission contact (43) and the base contact (45), those two contacts (43, 45) being electrically isolated from each other by flanks (5) whereof the metal coating has been removed. The emitting zones (4) of the rear surface (3) of the cell are connected by channels to the transmitter (9) of the front face (8) of the cell. The emitting zones (4) of the rear surface (3) of the cell and the channels (7) consist of a laser. The metal coating of the side walls is removed by selective etching, said metal coating being removed only in the zone of the flanks (5) where the etching barrier layer (11) is insufficient.

摘要翻译： 本发明涉及一种太阳能电池（1）及其制造方法，所述太阳能电池（1）在其后表面（3）上包括发射触点（43）和基底触点（45），这两个触点（43 ，45）通过已经去除了金属涂层的侧面（5）彼此电隔离。 电池的后表面（3）的发射区（4）通过通道连接到电池的正面（8）的发射器（9）。 电池的后表面（3）的发射区（4）和通道（7）由激光器组成。 通过选择性蚀刻去除侧壁的金属涂层，所述金属涂层仅在蚀刻阻挡层（11）不足的侧面（5）的区域中被去除。

公开(公告)号：US08563440B2

公开(公告)日：2013-10-22

申请号：US13059560

申请日：2009-09-29

申请人： Andreas Teppe ,  Berthold Schum ,  Dieter Franke ,  Ingo Schwirtlich ,  Knut Vaas ,  Wilfried Schmidt

发明人： Andreas Teppe ,  Berthold Schum ,  Dieter Franke ,  Ingo Schwirtlich ,  Knut Vaas ,  Wilfried Schmidt

IPC分类号： H01L21/302

CPC分类号： H01L21/30604 ,  H01L21/67057 ,  H01L21/67086 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： A method for chemically treating a disc-shaped substrate having a bottom surface, a top surface and side surfaces by contacting a process medium that is fluid-chemically active with at least the bottom surface of the substrate. The substrate is moved relative to the process medium while forming a triple line between the substrate, the substrate medium and the atmosphere surrounding the substrate and medium. In order to chemically remove errors, particularly in the side surfaces, relative motion should be carried out while avoiding a contacting of the process medium with the top surface of the substrate, where the triple line is formed at a desired height of the side surface facing away from the process medium flow side in relation to the relative motion between the substrate and the process medium.

摘要翻译： 一种用于通过使具有流体化学活性的处理介质与至少底物的底表面接触来化学处理具有底表面，顶表面和侧表面的盘形基底的方法。 衬底相对于处理介质移动，同时在衬底，衬底介质和围绕衬底和介质的气氛之间形成三线。 为了化学去除错误，特别是在侧表面中，应当进行相对运动，同时避免处理介质与基板的顶表面的接触，其中三线形成在面向侧面的所需高度 相对于衬底和处理介质之间的相对运动而离开工艺介质流动侧。

公开(公告)号：US20110183524A1

公开(公告)日：2011-07-28

申请号：US13059560

申请日：2009-09-29

申请人： Andreas Teppe ,  Berthold Schum ,  Dieter Franke ,  Ingo Schwirtlich ,  Knut Vaas ,  Wilfried Schmidt

发明人： Andreas Teppe ,  Berthold Schum ,  Dieter Franke ,  Ingo Schwirtlich ,  Knut Vaas ,  Wilfried Schmidt

IPC分类号： H01L21/306

CPC分类号： H01L21/30604 ,  H01L21/67057 ,  H01L21/67086 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： A method for chemically treating a disc-shaped substrate having a bottom surface, a top surface and side surfaces by contacting a process medium that is fluid-chemically active with at least the bottom surface of the substrate. The substrate is moved relative to the process medium while forming a triple line between the substrate, the substrate medium and the atmosphere surrounding the substrate and medium. In order to chemically remove errors, particularly in the side surfaces, relative motion should be carried out while avoiding a contacting of the process medium with the top surface of the substrate, where the triple line is formed at a desired height of the side surface facing away from the process medium flow side in relation to the relative motion between the substrate and the process medium. In this way, the atmosphere can be adjusted in relation to the partial pressures of the components in the process medium such that the top surface preserves hydrophobic characteristics.

摘要翻译： 一种用于通过使具有流体化学活性的处理介质与至少底物的底表面接触来化学处理具有底表面，顶表面和侧表面的盘形基底的方法。 衬底相对于处理介质移动，同时在衬底，衬底介质和围绕衬底和介质的气氛之间形成三线。 为了化学去除错误，特别是在侧表面中，应当进行相对运动，同时避免处理介质与基板的顶表面的接触，其中三线形成在面向侧面的所需高度 相对于衬底和处理介质之间的相对运动而离开工艺介质流动侧。 以这种方式，可以相对于处理介质中的组分的分压来调整气氛，使得顶表面保持疏水特性。

公开(公告)号：US20110053312A1

公开(公告)日：2011-03-03

申请号：US12881714

申请日：2010-09-14

申请人： Andreas Teppe ,  Peter Engelhart ,  Jörg Müller

发明人： Andreas Teppe ,  Peter Engelhart ,  Jörg Müller

IPC分类号： H01L31/0224

CPC分类号： H01L31/18 ,  H01L31/022433 ,  H01L31/022441 ,  H01L31/022458 ,  H01L31/0682 ,  Y02E10/547

摘要： A method for fabricating a solar cell comprising a semiconductor substrate is proposed where electrical contacting is made on the back side of the semiconductor substrate. The back side of the semiconductor substrate has locally doped regions. The adjacent regions exhibit different doping from the region. The two regions are initially coated with electrically conductive material over the entire area. So that the conductive material does not short-circuit the solar cell, the two regions are covered with a thin electrically insulating layer at least at the region boundaries.The electrically conductive layer is separated by applying an etch barrier layer over the entire surface which is then removed free from masking and selectively e.g. by laser ablation, locally above the insulating layer. The conductive layer is locally removed in the area of the openings of the etch barrier layer by subsequent action of an etching solution.

摘要翻译： 提出一种制造包括半导体衬底的太阳能电池的方法，其中在半导体衬底的背侧进行电接触。 半导体衬底的背面具有局部掺杂区域。 相邻区域表现出与该区域不同的掺杂。 这两个区域最初在整个区域上涂覆有导电材料。 因此，导电材料不会使太阳能电池短路，至少在区域边界处，两个区域被薄的电绝缘层覆盖。 通过在整个表面上施加蚀刻阻挡层来分离导电层，然后将其去除而不被掩蔽，并且选择性地例如被除去。 通过激光烧蚀局部在绝缘层上方。 通过蚀刻溶液的后续作用，在蚀刻阻挡层的开口的区域中局部去除导电层。

公开(公告)号：US10115851B2

公开(公告)日：2018-10-30

申请号：US13879593

申请日：2011-10-14

申请人： Andreas Teppe ,  Adolf Muenzer ,  Jan Schoene ,  Mathias Hein ,  Peter Winter

发明人： Andreas Teppe ,  Adolf Muenzer ,  Jan Schoene ,  Mathias Hein ,  Peter Winter

IPC分类号： H01L31/052 ,  H01L31/0224 ,  H01L31/18 ,  H01L31/056

摘要： Solar cell (11; 21; 31) having a dielectric coating arranged on a back side of the solar cell (11; 21; 31) which is at least partly covered by at least one planar contact (12; 22; 32), a boundary line (14; 24; 34) of the at least one planar contact (12; 22; 32) having at least one recess (16a, 16b; 26a, 26b, 26c), and method for producing same.