INDUCTIVELY COUPLED PLASMA ETCHING APPARATUS, AND INDUCTIVELY COUPLED PLASMA ETCHING METHOD USING SAME

    公开(公告)号:US20240055226A1

    公开(公告)日:2024-02-15

    申请号:US18487581

    申请日:2023-10-16

    IPC分类号: H01J37/32 H01L21/3065

    摘要: Provided is an inductively coupled plasma etching apparatus comprising: a reaction chamber having an inner space to which a gas source is provided; an upper coil part for inducing an electric field into the inner space of the reaction chamber and configured to form an inductively coupled plasma from the gas source by the electric field; a mounting part which faces the upper coil part and on which an object to be etched by the inductively coupled plasma is disposed; and a lower electrode part provided on the lower side of the mounting part to induce at least any one of ions and neutral active species constituting the inductively coupled plasma and involved in etching toward the object to be etched disposed on the mounting part, wherein the frequency of the lower electrode part is lower than the frequency of the upper coil part. In addition, provided is a method in which power of a lower frequency than the frequency applied to an upper electrode is applied to a lower electrode so that an object to be etched, which has been patterned with a mask material, is etched vertically using an inductively coupled plasma apparatus.

    ANTIGEN COMPOSITION FOR PREVENTING OR TREATING VIRAL INFECTIOUS DISEASES

    公开(公告)号:US20240042006A1

    公开(公告)日:2024-02-08

    申请号:US17997703

    申请日:2021-01-15

    IPC分类号: A61K39/145 A61P31/16

    摘要: The present invention relates to an antigen composition for preventing or treating viral infectious diseases, comprising, as an active ingredient, a multiple variant protein of a recombinant hemagglutinin monomeric protein in an influenza virus. In addition, the present invention relates to an antigen composition for preventing or treating viral infectious diseases, comprising a scaffold-based fusion protein. The antigen composition for preventing or treating viral infectious diseases, according to the present invention, has an outstanding preventive effect of inhibiting the proliferation and replication of viruses having various mutations, and is recyclable and safe by means of using a recombinant protein, and thus can be widely used in various industrial fields, such as the medicine and life science fields.

    Desalting apparatus using solvent and the method thereof

    公开(公告)号:US11858831B2

    公开(公告)日:2024-01-02

    申请号:US17227581

    申请日:2021-04-12

    摘要: Disclosed is a desalination apparatus using a solvent extraction scheme. The desalination apparatus using a solvent extraction scheme includes a source water supply module configured to supply source water including salt of a first concentration and water, a functional solvent supply module configured to supply a functional solvent, of which the solubility in water varies according to temperature, a mixing module configured to mix the source water from the source water supply module and the functional solvent from the functional solvent supply module, a first separation module configured to receive mixture water, in which the source water and the functional solvent are mixed, from the mixing module, and dissolve the water contained in the source water in the functional solvent, a salt crystallization module configured to receive the source water including salt of a second concentration that is higher than the first concentration, from which the water has been removed, from the first separation module, and a second separation module configured to receive the functional solvent, in which the water has been dissolved, from the first separation module, and thermally separate the water and the functional solvent at a second temperature that is higher than the first temperature.

    STRETCHABLE DISPLAY
    9.
    发明申请

    公开(公告)号:US20210313527A1

    公开(公告)日:2021-10-07

    申请号:US17352872

    申请日:2021-06-21

    IPC分类号: H01L51/00 H01L27/32

    摘要: Provided is a stretchable display partitioned into a high-stretchable region and a low-stretchable region having a modulus higher than a modulus of the high-stretchable region, in which the low-stretchable region has a shape of a plurality of islands spaced apart from each other, and the high-stretchable region includes: a stretchable substrate surrounding the island-shaped low-stretchable region; and a plurality of pixel portions provided in each island-shaped low-stretchable region, and including a light emitting layer for emitting a specific color and a driving device for controlling a driving of the light emitting layer.