公开(公告)号：US08997566B2

公开(公告)日：2015-04-07

申请号：US13116821

申请日：2011-05-26

Applicant: Torsten Ohms ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel ,  Rolf Scheben

Inventor： Torsten Ohms ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel ,  Rolf Scheben

IPC: G01C19/56 ,  G01C19/5747

CPC classification number: G01C19/5747

Abstract: A yaw rate sensor is described which includes a drive device, at least one Coriolis element, and a detection device having at least two detection elements which are coupled to one another with the aid of a coupling device, the drive device being connected to the Coriolis element for driving a vibration of the Coriolis element, and an additional coupling device which is connected to the detection device and to the Coriolis element for coupling a deflection in the plane of vibration of the Coriolis element to the detection device in a direction orthogonal to the vibration.

Abstract translation: 描述了一种横摆速度传感器，其包括驱动装置，至少一个科里奥利元件和具有至少两个检测元件的检测装置，该至少两个检测元件借助耦合装置相互耦合，驱动装置连接到科里奥利 用于驱动科里奥利元件的振动的元件，以及连接到检测装置和科里奥利斯元件的附加耦合装置，用于将Coriolis元件的振动平面中的偏转与检测装置沿垂直于 振动。

公开(公告)号：US08943891B2

公开(公告)日：2015-02-03

申请号：US13365740

申请日：2012-02-03

Applicant: Torsten Ohms ,  Burkhard Kuhlmann ,  Robert Sattler ,  Rolf Scheben ,  Daniel Christoph Meisel

Inventor： Torsten Ohms ,  Burkhard Kuhlmann ,  Robert Sattler ,  Rolf Scheben ,  Daniel Christoph Meisel

IPC: G01C19/56 ,  G01C19/5747

CPC classification number: G01C19/5747

Abstract: A yaw-rate sensor and a method for operating a yaw-rate sensor having a first Coriolis element and a second Coriolis element are proposed, the yaw-rate sensor having a substrate having a main plane of extension, the yaw-rate sensor having a first drive element for driving the first Coriolis element in parallel to a second axis, the yaw-rate sensor having a second drive element for driving the second Coriolis element in parallel to the second axis, the yaw-rate sensor having detection means for detecting deflections of the first Coriolis element and of the second Coriolis element in parallel to a first axis due to a Coriolis force, the second axis being situated perpendicularly to the first axis, the first and second axis being situated in parallel to the main plane of extension, the first and second drive elements being mechanically coupled to each other via a drive coupling element.

Abstract translation: 提出了一种摆动速率传感器和用于操作具有第一科里奥利元件和第二科里奥利元件的偏航率传感器的方法，所述偏航速率传感器具有具有主平面延伸的基板，偏航速率传感器具有 用于与第二轴平行地驱动第一科里奥利元件的第一驱动元件，所述偏航速率传感器具有用于平行于所述第二轴驱动所述第二科里奥利元件的第二驱动元件，所述偏航率传感器具有用于检测偏转的检测装置 的第一科里奥利元件和由于科里奥利力而与第一轴平行的第二科里奥利元件，第二轴线垂直于第一轴线定位，第一和第二轴线平行于主平面延伸， 所述第一和第二驱动元件经由驱动联接元件彼此机械耦合。

公开(公告)号：US20120272735A1

公开(公告)日：2012-11-01

申请号：US13453425

申请日：2012-04-23

Applicant: Reinhard Neul ,  Torsten Ohms ,  Mirko Hattass ,  Daniel Christoph Meisel

Inventor： Reinhard Neul ,  Torsten Ohms ,  Mirko Hattass ,  Daniel Christoph Meisel

IPC: G01P15/00

CPC classification number: G01P15/097

Abstract: The disclosure relates to a micromechanical rotary acceleration sensor including a substrate with at least one anchoring device and at least two flywheel masses. At least one of the flywheel masses is connected to at least one anchoring device by means of a coupling element. The at least one anchoring device is designed in such a manner that the at least two flywheel masses are elastically deflectable from a respective rest position about at least one axis of rotation. The at least two flywheel masses is designed in such a manner that they have different natural frequencies.

Abstract translation: 本公开涉及一种微机械式旋转加速度传感器，其包括具有至少一个锚固装置和至少两个飞轮块的基板。 至少一个飞轮质量通过联接元件连接到至少一个锚定装置。 所述至少一个锚定装置被设计成使得所述至少两个飞轮块可以围绕至少一个旋转轴线从相应的静止位置弹性偏转。 至少两个飞轮质量被设计成使得它们具有不同的固有频率。

公开(公告)号：US20120060604A1

公开(公告)日：2012-03-15

申请号：US12734228

申请日：2008-10-02

Applicant: Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

Inventor： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

IPC: G01P3/44 ,  F16F3/00

CPC classification number: G01C19/574 ,  F16F1/025 ,  G01C19/5747 ,  G01P3/44

Abstract: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

Abstract translation: 具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕 第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。

公开(公告)号：US20110120208A1

公开(公告)日：2011-05-26

申请号：US12927345

申请日：2010-11-12

Applicant: Torsten Ohms ,  Axel Franke

Inventor： Torsten Ohms ,  Axel Franke

IPC: G01P21/00 ,  G01P15/125

CPC classification number: G01P15/125 ,  G01P15/18 ,  G01P21/00 ,  G01P2015/082

Abstract: A method for adjusting an acceleration sensor which includes a substrate and a seismic mass, the acceleration sensor having first and further first electrodes attached to the substrate on a first side, counter-electrodes of the seismic mass being situated between the first and further first electrodes, the acceleration sensor having further second electrodes on a second side and further fourth electrodes on a fourth side opposite the second side, an essentially equal first excitation voltage being applied to the first and further first electrodes in a first step for exciting a first deflection of the seismic mass along a first direction, the first deflection being compensated in a second step by applying a first compensation voltage to the further second and further fourth electrodes.

Abstract translation: 一种用于调整加速度传感器的方法，所述加速度传感器包括基板和地震块，所述加速度传感器具有在第一侧上附接到所述基板的第一和另外的第一电极，所述地震质量块的对电极位于所述第一和第二电极之间 加速度传感器在第二侧具有另外的第二电极，在与第二侧相反的第四侧具有另外的第四电极，在第一步骤中将基本上相等的第一激励电压施加到第一和第二电极，用于激发第一偏转 所述地震质量沿着第一方向，所述第一偏转在第二步骤中通过向所述另外的第二和第四电极施加第一补偿电压来补偿。

公开(公告)号：US20050229711A1

公开(公告)日：2005-10-20

申请号：US11107510

申请日：2005-04-15

Applicant: Torsten Ohms ,  Oliver Stoll

Inventor： Torsten Ohms ,  Oliver Stoll

IPC: G01L9/00 ,  B81B3/00 ,  B81B7/00 ,  G01L9/12 ,  H01G7/00 ,  H01L29/84

CPC classification number: G01L9/0073

Abstract: A capacitive pressure sensor made up of two silicon on insulator (SOI) wafers lying opposite of each other and joined to each other in a vacuum-tight manner, a recess being formed between the two wafers. The first wafer exclusively supports the evaluation circuits required for measuring the applied pressure and a capacitive electrode, and the second wafer has a recess formed by surface micromechanics processes, in which the counter electrode to the capacitive electrode of the first wafer is situated. The second wafer at the same time forms a cover for the first wafer.

Abstract translation: 由两个彼此相对并且以真空密封的方式彼此接合的绝缘体上硅（SOI）晶片构成的电容式压力传感器，在两个晶片之间形成凹部。 第一晶片专门支持测量所施加的压力所需的评估电路和电容电极，并且第二晶片具有通过表面微机械工艺形成的凹部，其中与第一晶片的电容电极对置电极。 第二晶片同时形成第一晶片的盖。

公开(公告)号：US20140326070A1

公开(公告)日：2014-11-06

申请号：US14334407

申请日：2014-07-17

Applicant: Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

Inventor： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

IPC: G01P3/44 ,  F16F1/02 ,  G01C19/574

CPC classification number: G01C19/574 ,  F16F1/025 ,  G01C19/5747 ,  G01P3/44

Abstract: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

Abstract translation: 具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕 第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。

公开(公告)号：US08875575B2

公开(公告)日：2014-11-04

申请号：US13134024

申请日：2011-05-25

Applicant: Torsten Ohms ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel ,  Rolf Scheben

Inventor： Torsten Ohms ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel ,  Rolf Scheben

IPC: G01C19/56 ,  G01C19/5755

CPC classification number: G01C19/5755

Abstract: A yaw rate sensor includes: at least one Coriolis element; a drive device connected to the Coriolis element and configured to drive a vibration of the Coriolis element; a detection device having at least one rotor; and a coupling device connected to the detection device and to the Coriolis element. The coupling device is configured to couple a deflection in the plane of vibration of the Coriolis element to the detection device in a direction orthogonal to the vibration, so that when the Coriolis element is deflected a torque for driving the at least one rotor is transmitted from the Coriolis element to the at least one rotor.

Abstract translation: 横摆率传感器包括：至少一个科里奥利元件; 连接到科里奥利元件并被配置为驱动科里奥利元件的振动的驱动装置; 具有至少一个转子的检测装置; 以及连接到检测装置和科里奥利元件的耦合装置。 联接装置被配置成将Coriolis元件的振动平面中的偏转与垂直于振动的方向耦合到检测装置，使得当科里奥利元件偏转时，用于驱动至少一个转子的转矩从 科里奥利元件至少一个转子。

公开(公告)号：US08746065B2

公开(公告)日：2014-06-10

申请号：US13293874

申请日：2011-11-10

Applicant: Torsten Ohms ,  Daniel Christoph Meisel

Inventor： Torsten Ohms ,  Daniel Christoph Meisel

IPC: G01C19/56

CPC classification number: G01C19/574

Abstract: A rotational rate sensor includes: a substrate having a main plane of extension; a first Coriolis element; and a second Coriolis element. The first Coriolis element and the second Coriolis element have a first and a second center of gravity, respectively, and the elements are drivable along a drive direction. In the idle state of the rotational rate sensor, (i) the distance between the first center of gravity and the second center of gravity along the detection direction is less than a first value, and (ii) the distance between the first center of gravity and the second center of gravity along the third direction is less than a second value.

Abstract translation: 旋转速率传感器包括：具有主平面延伸的基板; 第一个科里奥利元素; 和第二个科里奥利元素。 第一科里奥利元件和第二科里奥利元件分别具有第一和第二重心，元件沿驱动方向可驱动。 在转速传感器的空闲状态下，（i）第一重心与第二重心之间的距离沿检测方向小于第一值，（ii）第一重心之间的距离 并且所述第二重心沿着所述第三方向小于第二值。

公开(公告)号：US08561465B2

公开(公告)日：2013-10-22

申请号：US12587487

申请日：2009-10-06

Applicant: Johannes Classen ,  Torsten Ohms ,  Daniel Christoph Meisel ,  Joerg Hauer

Inventor： Johannes Classen ,  Torsten Ohms ,  Daniel Christoph Meisel ,  Joerg Hauer

IPC: G01C19/00

CPC classification number: G01C19/5755 ,  G01C19/574 ,  G01C19/5747 ,  G01C19/5762

Abstract: A rotation rate sensor includes: a mounting device; a first drive frame having a drive, which is designed to set the first drive frame into a first oscillatory motion along an axis of oscillation relative to the mounting device; a first stator electrode; a first actuator electrode coupled to the first drive frame in such a way that in a rotary motion of the rotation rate sensor due to a Coriolis force, the first actuator electrode being displaceable in a first deflection direction relative to the first stator electrode; and an evaluation device configured to determine a voltage applied between the first stator electrode and the first actuator electrode, and to specify information regarding the rotary motion of the rotation rate sensor while taking the determined voltage value into account.

Abstract translation: 旋转速率传感器包括：安装装置; 具有驱动器的第一驱动框架，其被设计成将第一驱动框架相对于安装装置沿着振荡轴线设置为第一振荡运动; 第一定子电极; 第一致动器电极，其以这样的方式联接到第一驱动框架，使得在旋转速度传感器由于科里奥利力的旋转运动中，第一致动器电极可相对于第一定子电极在第一偏转方向上移位; 以及评估装置，被配置为确定施加在第一定子电极和第一致动器电极之间的电压，并且在考虑所确定的电压值的同时指定关于旋转速率传感器的旋转运动的信息。