公开(公告)号：US20230168139A1

公开(公告)日：2023-06-01

申请号：US17537807

申请日：2021-11-30

Applicant: Applied Materials, Inc.

Inventor： Sukti Chatterjee ,  David Masayuki Ishikawa ,  Yuriy V. Melnik ,  David A. Britz ,  Lance A. Scudder

IPC: G01L13/00

CPC classification number: G01L13/00 ,  B05B12/006

Abstract: Exemplary backpressure monitoring apparatuses may include a fluid supply source having a fluid port. The backpressure monitoring apparatuses may include a flow control mechanism fluidly coupled with the fluid port. The backpressure monitoring apparatuses may include a delivery tube fluidly coupled with the flow control mechanism and the fluid port. The backpressure monitoring apparatuses may include a pressure differential gauge fluidly coupled with the delivery tube. The pressure differential gauge may include an interface mechanism that is engageable with an outlet of a fluid flow device.

公开(公告)号：US11794382B2

公开(公告)日：2023-10-24

申请号：US16542968

申请日：2019-08-16

Applicant: Applied Materials, Inc.

Inventor： David A. Britz

IPC: B29C37/00 ,  F01D9/02 ,  C23C16/02 ,  C23C18/12 ,  B08B9/00 ,  B64F5/10 ,  B64F5/60 ,  B05D1/36 ,  B05D5/00 ,  C23C16/32 ,  C23C16/455 ,  C23C16/30 ,  C23C16/40 ,  C23C16/04 ,  C23C16/56 ,  C23C16/48

CPC classification number: B29C37/0025 ,  B29C37/0067 ,  C23C16/0227 ,  C23C18/1208 ,  F01D9/02 ,  B05D1/36 ,  B05D5/00 ,  B08B9/00 ,  B64F5/10 ,  B64F5/60 ,  C23C16/04 ,  C23C16/30 ,  C23C16/32 ,  C23C16/40 ,  C23C16/455 ,  C23C16/45525 ,  C23C16/45563 ,  C23C16/48 ,  C23C16/56

Abstract: Embodiments of the present disclosure generally relate to protective coatings on an aerospace component and methods for depositing the protective coatings. The protective coating can be anti-coking coatings to reduce or suppress coke formation when the aerospace component is heated in the presence of a fuel. In one or more embodiments, a method for depositing the protective coating on an aerospace component includes exposing the aerospace component to a cleaning process to produce a cleaned surface on the aerospace component and sequentially exposing the aerospace component to a precursor and a reactant to form a protective coating on the cleaned surface of the aerospace component by an atomic layer deposition (ALD) process. The aerospace component can be one or more of a fuel nozzle, a combustor liner, a combustor shield, a heat exchanger, a fuel line, a fuel valve, or any combination thereof.

公开(公告)号：US11953390B2

公开(公告)日：2024-04-09

申请号：US17537807

申请日：2021-11-30

Applicant: Applied Materials, Inc.

Inventor： Sukti Chatterjee ,  David Masayuki Ishikawa ,  Yuriy V. Melnik ,  David A. Britz ,  Lance A. Scudder

IPC: G01L13/00 ,  B05B12/00 ,  G01F1/34

CPC classification number: G01L13/00 ,  G01F1/34 ,  B05B12/006

Abstract: Exemplary backpressure monitoring apparatuses may include a fluid supply source having a fluid port. The backpressure monitoring apparatuses may include a flow control mechanism fluidly coupled with the fluid port. The backpressure monitoring apparatuses may include a delivery tube fluidly coupled with the flow control mechanism and the fluid port. The backpressure monitoring apparatuses may include a pressure differential gauge fluidly coupled with the delivery tube. The pressure differential gauge may include an interface mechanism that is engageable with an outlet of a fluid flow device.

公开(公告)号：US11732353B2

公开(公告)日：2023-08-22

申请号：US16850856

申请日：2020-04-16

Applicant: Applied Materials, Inc.

Inventor： Sukti Chatterjee ,  Lance A. Scudder ,  Yuriy Melnik ,  David A. Britz ,  Thomas Knisley ,  Kenichi Ohno ,  Pravin K. Narwankar

IPC: C23C16/40 ,  C23C16/455 ,  C23C28/02 ,  C23C16/56 ,  B64F5/40

CPC classification number: C23C16/403 ,  C23C16/405 ,  C23C16/45525 ,  C23C16/56 ,  C23C28/02 ,  B64F5/40

Abstract: Embodiments of the present disclosure generally relate to protective coatings on an aerospace component and methods for depositing the protective coatings. In one or more embodiments, a method for depositing a coating on an aerospace component includes depositing one or more layers on a surface of the aerospace component using an atomic layer deposition or chemical vapor deposition process, and performing a partial oxidation and annealing process to convert the one or more layers to a coalesced layer having a preferred phase crystalline assembly. During oxidation cycles, an aluminum depleted region is formed at the surface of the aerospace component, and an aluminum oxide region is formed between the aluminum depleted region and the coalesced layer. The coalesced layer forms a protective coating, which decreases the rate of aluminum depletion from the aerospace component and the rate of new aluminum oxide scale formation.

公开(公告)号：US11697879B2

公开(公告)日：2023-07-11

申请号：US16560838

申请日：2019-09-04

Applicant: Applied Materials, Inc.

Inventor： Sukti Chatterjee ,  Kenichi Ohno ,  Lance A. Scudder ,  Yuriy Melnik ,  David A. Britz ,  Pravin K. Narwankar ,  Thomas Knisley ,  Mark Saly ,  Jeffrey Anthis

IPC: C23C16/56 ,  C23C16/40 ,  C22C19/03

CPC classification number: C23C16/56 ,  C22C19/03 ,  C23C16/405

Abstract: Embodiments of the present disclosure generally relate to protective coatings on aerospace components and methods for depositing the protective coatings. In one or more embodiments, a method for producing a protective coating on an aerospace component includes depositing a metal oxide template layer on the aerospace component containing nickel and aluminum (e.g., nickel-aluminum superalloy) and heating the aerospace component containing the metal oxide template layer during a thermal process and/or an oxidation process. The thermal process and/or oxidation process includes diffusing aluminum contained within the aerospace component towards a surface of the aerospace component containing the metal oxide template layer, oxidizing the diffused aluminum to produce an aluminum oxide layer disposed between the aerospace component and the metal oxide template layer, and removing at least a portion of the metal oxide template layer while leaving the aluminum oxide layer.