公开(公告)号：US20150299856A1

公开(公告)日：2015-10-22

申请号：US14625846

申请日：2015-02-19

Applicant: Applied Materials, Inc.

Inventor： Ning LI ,  Wenbo YAN ,  Victor NGUYEN ,  Cong TRINH ,  Mihaela BALSEANU ,  Li-Qun XIA

IPC: C23C16/455 ,  H01L21/3065

CPC classification number: C23C16/45534 ,  C23C16/045 ,  H01L21/02164 ,  H01L21/0217 ,  H01L21/02274 ,  H01L21/0228 ,  H01L21/3065

Abstract: Embodiments disclosed herein generally relate to the processing of substrates, and more particularly, relate to methods for accurate control of film thickness using deposition-etch cycles. Particularly, embodiments of the present disclosure may be used in controlling film thickness during filling high aspect ratio features.

Abstract translation: 本文公开的实施例通常涉及衬底的处理，更具体地涉及使用沉积蚀刻循环来精确控制膜厚度的方法。 特别地，本公开的实施例可以用于在填充高纵横比特征期间控制膜厚度。

公开(公告)号：US20150252477A1

公开(公告)日：2015-09-10

申请号：US14616206

申请日：2015-02-06

Applicant: Applied Materials, Inc.

Inventor： Victor NGUYEN ,  Mihaela BALSEANU ,  Ning LI ,  Steven D. MARCUS ,  Mark SALY ,  David THOMPSON ,  Li-Qun XIA

IPC: C23C16/455 ,  C23C16/458 ,  C23C16/34 ,  C23C16/24 ,  C23C16/50

CPC classification number: C23C16/45525 ,  C23C16/24 ,  C23C16/30 ,  C23C16/345 ,  C23C16/347 ,  C23C16/36 ,  C23C16/45531 ,  C23C16/45542 ,  C23C16/45551 ,  C23C16/458 ,  C23C16/50

Abstract: Embodiments disclosed herein generally relate to the processing of substrates, and more particularly, relate to methods for forming a dielectric film. In one embodiment, the method includes placing a plurality of substrates inside a processing chamber and performing a sequence of exposing the substrates to a first reactive gas comprising silicon, and then exposing the substrates to a plasma of a second reactive gas comprising nitrogen and at least one of oxygen or carbon, and repeating the sequence to form the dielectric film comprising silicon carbon nitride or silicon carbon oxynitride on each of the substrates.

Abstract translation: 本文公开的实施方案通常涉及衬底的处理，更具体地涉及形成电介质膜的方法。 在一个实施例中，该方法包括将多个基板放置在处理室内并执行将基板暴露于包含硅的第一反应气体的顺序，然后将基板暴露于包含氮气的至少第二反应气体的等离子体 一个氧或碳，并且重复该顺序以在每个基板上形成包含氮化碳或氮氧化硅的电介质膜。

公开(公告)号：US20230010568A1

公开(公告)日：2023-01-12

申请号：US17719502

申请日：2022-04-13

Applicant: Applied Materials, Inc.

Inventor： Suketu PARIKH ,  Mihaela A. BALSEANU ,  Bhaskar Jyoti BHUYAN ,  Ning LI ,  Mark Joseph SALY ,  Aaron Michael DANGERFIELD ,  David THOMPSON ,  Abhijit B. MALLICK

IPC: H01L21/768 ,  H01L21/02 ,  H01L21/311

Abstract: Methods and apparatus for processing a substrate are provided herein. For example, a method of processing a substrate comprises a) removing oxide from a metal layer disposed in a dielectric layer on the substrate disposed in a processing chamber, b) selectively depositing a self-assembled monolayer (SAM) on the metal layer using atomic layer deposition, c) depositing a precursor while supplying water to form one of an aluminum oxide (AlO) layer on the dielectric layer or a low-k dielectric layer on the dielectric layer, d) supplying at least one of hydrogen (H2) or ammonia (NH3) to remove the self-assembled monolayer (SAM), and e) depositing one of a silicon oxycarbonitride (SiOCN) layer or a silicon nitride (SiN) layer atop the metal layer and the one of the aluminum oxide (AlO) layer on the dielectric layer or the low-k dielectric layer on the dielectric layer.

公开(公告)号：US20150255324A1

公开(公告)日：2015-09-10

申请号：US14630757

申请日：2015-02-25

Applicant: Applied Materials, Inc.

Inventor： Ning LI ,  Victor NGUYEN ,  Mihaela BALSEANU ,  Li-Qun XIA ,  Steven D. MARCUS ,  Haichun YANG ,  Keiichi TANAKA

IPC: H01L21/762 ,  H01L21/02 ,  H01L21/311

CPC classification number: H01L21/76224 ,  C23C16/045 ,  C23C16/345 ,  C23C16/402 ,  C23C16/45551 ,  H01L21/02164 ,  H01L21/0217 ,  H01L21/02274 ,  H01L21/0228 ,  H01L21/31116

Abstract: Embodiments disclosed herein generally relate to forming dielectric materials in high aspect ratio features. In one embodiment, a method for filling high aspect ratio trenches in one processing chamber is disclosed. The method includes placing a substrate inside a processing chamber, where the substrate has a surface having a plurality of high aspect ratio trenches and the surface is facing a gas/plasma distribution assembly. The method further includes performing a sequence of depositing a layer of dielectric material on the surface of the substrate and inside each of the plurality of trenches, where the layer of dielectric material is on a bottom and side walls of each trench, and removing a portion of the layer of dielectric material disposed on the surface of the substrate, where an opening of each trench is widened. The sequence repeats until the trenches are filled seamlessly with the dielectric material.

Abstract translation: 本文公开的实施方案通常涉及以高纵横比特征形成介电材料。 在一个实施例中，公开了一种用于在一个处理室中填充高纵横比沟槽的方法。 该方法包括将衬底放置在处理室内，其中衬底具有多个高纵横比沟槽的表面，并且该表面面向气体/等离子体分布组件。 该方法还包括执行在衬底的表面上以及多个沟槽的每一个内部沉积介电材料层的顺序，其中介电材料层位于每个沟槽的底部和侧壁上，并且移除部分 设置在基板的表面上的介电材料层，其中每个沟槽的开口被加宽。 该序列重复直到沟槽与电介质材料无缝填充。