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1.发明授权公开(公告)号：US07109842B1
公开(公告)日：2006-09-19
申请号：US09656694
申请日：2000-09-07
IPC分类号： H01C7/02
CPC分类号： G01F1/6842 , G01F1/6845 , G01F5/00 , G01N1/2247 , G01N25/18 , G01N25/488 , G01N33/0014 , G01N2001/2285
摘要： A robust sensor that incorporates the necessary physical structure and thermal characteristics is capable of measuring fluid flow and properties under harsh environmental conditions. The sensor die is made of a material with thermal conductivity tailored to provide the thermal transmission characteristics necessary to avoid saturation of the sensor, thus enabling the measurement of high mass flux airflow and liquid properties under high pressure and often harsh environments not previously available for silicon based sensors. The robust sensor further has internal vias for back-side electrical connection, thus avoiding electrical and mechanical interference with the measurements. All of these features come together to provide a microsensor which is capable of reliable, i.e. stable, wide dynamic range and rapid-response operation under harsh environments.
摘要翻译： 结合必要的物理结构和热特性的坚固的传感器能够在恶劣的环境条件下测量流体流动和性能。 传感器芯片由具有导热性的材料制成，以提供避免传感器饱和所必需的热传递特性，从而能够在高压和常常恶劣的环境下测量高质量通量气流和液体性能，以前不可用于硅 基于传感器。 坚固的传感器还具有用于背面电气连接的内部通孔，从而避免了电气和机械干扰测量。 所有这些特征汇集在一起，以提供能够在恶劣环境下可靠，即稳定，宽动态范围和快速响应操作的微型传感器。
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公开(公告)号：US07975525B2
公开(公告)日：2011-07-12
申请号：US11803968
申请日：2007-05-16
IPC分类号： G01N21/00
CPC分类号： G01N33/0006
摘要： Embodiments of the present invention relate to a gas sensor comprising a flow channel, a concentration modulator positioned in the flow channel, a gas generator in contact with the flow channel, one or more gas detectors positioned downstream of the concentration modulator and gas generator and a pump.
摘要翻译： 本发明的实施例涉及一种气体传感器，其包括流动通道，位于流动通道中的浓度调节器，与流动通道接触的气体发生器，位于浓缩调节器和气体发生器下游的一个或多个气体检测器和 泵。
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公开(公告)号：US06597438B1
公开(公告)日：2003-07-22
申请号：US09630924
申请日：2000-08-02
申请人： Cleopatra Cabuz , J. David Zook , James Allen Cox , Thomas Raymond Ohnstein , Ulrich Bonne , Eugen Loan Cabuz , Ernest Allen Satren , Aravind Padmanabhan , Teresa M. Marta
发明人： Cleopatra Cabuz , J. David Zook , James Allen Cox , Thomas Raymond Ohnstein , Ulrich Bonne , Eugen Loan Cabuz , Ernest Allen Satren , Aravind Padmanabhan , Teresa M. Marta
IPC分类号： G01N3349
CPC分类号： G01N15/1404 , A61B5/150022 , A61B5/15003 , A61B5/150221 , A61B5/150343 , A61B5/150351 , A61B5/150809 , A61B5/150824 , A61B5/157 , B01L3/5027 , G01N2015/1486 , Y10T436/101666
摘要： A portable or wearable cytometer that can be used at remote locations, such as in the field or at home. The flow cytometer of the present invention may help improve the healthcare of many weak, sick or elderly people by providing early detection of infection. By detecting the infection early, the infection may be more readily treatable. In military applications, the portable cytometer of the present invention may help save lives by providing early detection of infection due to biological agents.
摘要翻译： 便携式或可穿戴式的血细胞计数仪，可在远程位置使用，如在野外或家中使用。 本发明的流式细胞仪可以通过提供早期检测感染来帮助改善许多弱者，病人或老年人的医疗保健。 通过早期检测感染，感染可能更容易治疗。 在军事应用中，本发明的便携式血细胞计数器可以通过提供由于生物制剂引起的感染的早期检测来帮助挽救生命。
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公开(公告)号：US20080010821A1
公开(公告)日：2008-01-17
申请号：US11781197
申请日：2007-07-20
CPC分类号： G01F5/00 , G01F1/684 , G01F1/6842 , G01F1/6845 , G01F1/6847 , G01F15/14 , G01F15/18 , G01F15/185 , G01N1/2247 , G01N25/18 , G01N25/488 , G01N33/0014 , G01N2001/2285 , Y10T29/49117 , Y10T29/4913 , Y10T29/49135 , Y10T29/49147 , Y10T29/49798
摘要： A flow sensor is provided having a substrate with a sensing element and flow channel aligned over the sensing element. The sensing element senses at least one property of a fluid. The flow channel is aligned by one or more guide elements formed in an alignment layer. The flow channel across the sensing area is accurately and precisely aligned due to the guide elements provided at the wafer-level, facilitating reliable, low-cost, and consistent results among multiple flow sensors. The flow sensor is adapted for use in harsh environments.
摘要翻译： 提供了一种流量传感器，其具有基底，该基底具有在感测元件上对准的感测元件和流动通道。 感测元件感测流体的至少一个性质。 流动通道由形成在对准层中的一个或多个引导元件对准。 由于提供在晶片级的引导元件，穿过感测区域的流动通道精确而准确地对准，从而促进了多个流量传感器之间的可靠，低成本和一致的结果。 流量传感器适用于恶劣环境。
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公开(公告)号：US07258003B2
公开(公告)日：2007-08-21
申请号：US10930546
申请日：2004-08-31
IPC分类号： G01F1/68
CPC分类号： G01F5/00 , G01F1/684 , G01F1/6842 , G01F1/6845 , G01F1/6847 , G01F15/14 , G01F15/18 , G01F15/185 , G01N1/2247 , G01N25/18 , G01N25/488 , G01N33/0014 , G01N2001/2285 , Y10T29/49117 , Y10T29/4913 , Y10T29/49135 , Y10T29/49147 , Y10T29/49798
摘要： A flow sensor is provided having a substrate with a sensing element and flow channel aligned over the sensing element. The sensing element senses at least one property of a fluid. The flow channel is aligned by one or more guide elements formed in an alignment layer. The flow channel across the sensing area is accurately and precisely aligned due to the guide elements provided at the wafer-level, facilitating reliable, low-cost, and consistent results among multiple flow sensors. The flow sensor is adapted for use in harsh environments.
摘要翻译： 提供了一种流量传感器，其具有基底，该基底具有在感测元件上对准的感测元件和流动通道。 感测元件感测流体的至少一个性质。 流动通道由形成在对准层中的一个或多个引导元件对准。 由于提供在晶片级的引导元件，穿过感测区域的流动通道精确而准确地对准，从而促进了多个流量传感器之间的可靠，低成本和一致的结果。 流量传感器适用于恶劣环境。
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公开(公告)号：US20050022594A1
公开(公告)日：2005-02-03
申请号：US10930546
申请日：2004-08-31
CPC分类号： G01F5/00 , G01F1/684 , G01F1/6842 , G01F1/6845 , G01F1/6847 , G01F15/14 , G01F15/18 , G01F15/185 , G01N1/2247 , G01N25/18 , G01N25/488 , G01N33/0014 , G01N2001/2285 , Y10T29/49117 , Y10T29/4913 , Y10T29/49135 , Y10T29/49147 , Y10T29/49798
摘要： A flow sensor is provided having a substrate with a sensing element and flow channel aligned over the sensing element. The sensing element senses at least one property of a fluid. The flow channel is aligned by one or more guide elements formed in an alignment layer. The flow channel across the sensing area is accurately and precisely aligned due to the guide elements provided at the wafer-level, facilitating reliable, low-cost, and consistent results among multiple flow sensors. The flow sensor is adapted for use in harsh environments.
摘要翻译： 提供了一种流量传感器，其具有基底，该基底具有在感测元件上对准的感测元件和流动通道。 感测元件感测流体的至少一个性质。 流动通道由形成在对准层中的一个或多个引导元件对准。 由于提供在晶片级的引导元件，穿过感测区域的流动通道精确而准确地对准，从而促进了多个流量传感器之间的可靠，低成本和一致的结果。 流量传感器适用于恶劣环境。
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公开(公告)号：US06184773B2
公开(公告)日：2001-02-06
申请号：US09207165
申请日：1998-12-07
申请人： Ulrich Bonne , Aravind Padmanabhan
发明人： Ulrich Bonne , Aravind Padmanabhan
IPC分类号： H01L304
CPC分类号： G01F1/6845
摘要： A thermal fluid flow or property sensor having no exposed contact wires or contact pads in the fluid flow path to obstruct measurements, flat fully passivated sensor surfaces and high corrosion resistance is implemented over a honeycombed thermal isolation chamber.
摘要翻译： 在流体流动路径中没有暴露的接触线或接触垫以阻塞测量，平坦完全钝化的传感器表面和高耐腐蚀性的热流体流动或性质传感器在蜂窝式热隔离室上实现。
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公开(公告)号：US07331224B2
公开(公告)日：2008-02-19
申请号：US11005968
申请日：2004-12-07
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/6842 , G01F1/692
摘要： A flow sensor is provided having a substrate with a sensing element and flow channel over the sensing element. The sensing element senses at least one property of a fluid. The flow channel is configured such that tilting the flow sensor does not have a significant effect on the measured signal. A device for measuring tilt in a system having a fluid flow path is also provided.
摘要翻译： 提供了一种流量传感器，其具有在感测元件上方具有感测元件和流动通道的基底。 感测元件感测流体的至少一个性质。 流动通道被配置为使得流动传感器的倾斜对测量的信号没有显着影响。 还提供了一种用于测量具有流体流路的系统中的倾斜的装置。
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公开(公告)号：US07793410B2
公开(公告)日：2010-09-14
申请号：US11781197
申请日：2007-07-20
IPC分类号： H05K3/30
CPC分类号： G01F5/00 , G01F1/684 , G01F1/6842 , G01F1/6845 , G01F1/6847 , G01F15/14 , G01F15/18 , G01F15/185 , G01N1/2247 , G01N25/18 , G01N25/488 , G01N33/0014 , G01N2001/2285 , Y10T29/49117 , Y10T29/4913 , Y10T29/49135 , Y10T29/49147 , Y10T29/49798
摘要： A method of making a plurality of flow sensors is provided, each flow sensor having a substrate with a sensing element and flow channel aligned over the sensing element. The sensing element senses at least one property of a fluid. The flow channel is aligned by one or more guide elements formed in an alignment layer. The flow channel across the sensing area is accurately and precisely aligned due to the guide elements provided at the wafer-level, facilitating reliable, low-cost, and consistent results among multiple flow sensors. The flow sensor is adapted for use in harsh environments.
摘要翻译： 提供了一种制造多个流量传感器的方法，每个流量传感器具有一个具有检测元件的基底和在该感测元件上对齐的流动通道。 感测元件感测流体的至少一个性质。 流动通道由形成在对准层中的一个或多个引导元件对准。 由于提供在晶片级的引导元件，穿过感测区域的流动通道精确而准确地对准，从而促进了多个流量传感器之间的可靠，低成本和一致的结果。 流量传感器适用于恶劣环境。
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公开(公告)号：US20080282765A1
公开(公告)日：2008-11-20
申请号：US11803968
申请日：2007-05-16
CPC分类号： G01N33/0006
摘要： Embodiments of the present invention relate to a gas sensor comprising a flow channel, a concentration modulator positioned in the flow channel, a gas generator in contact with the flow channel, one or more gas detectors positioned downstream of the concentration modulator and gas generator and a pump.
摘要翻译： 本发明的实施例涉及一种气体传感器，其包括流动通道，位于流动通道中的浓度调节器，与流动通道接触的气体发生器，位于浓缩调节器和气体发生器下游的一个或多个气体检测器和 泵。
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