Self-calibrating sensor
    1.
    发明授权
    Self-calibrating sensor 有权
    自校准传感器

    公开(公告)号:US07975525B2

    公开(公告)日:2011-07-12

    申请号:US11803968

    申请日:2007-05-16

    IPC分类号: G01N21/00

    CPC分类号: G01N33/0006

    摘要: Embodiments of the present invention relate to a gas sensor comprising a flow channel, a concentration modulator positioned in the flow channel, a gas generator in contact with the flow channel, one or more gas detectors positioned downstream of the concentration modulator and gas generator and a pump.

    摘要翻译: 本发明的实施例涉及一种气体传感器,其包括流动通道,位于流动通道中的浓度调节器,与流动通道接触的气体发生器,位于浓缩调节器和气体发生器下游的一个或多个气体检测器和 泵。

    Robust fluid flow and property microsensor made of optimal material
    3.
    发明授权
    Robust fluid flow and property microsensor made of optimal material 失效
    坚固的流体流动和性能微传感器由最佳材料制成

    公开(公告)号:US07109842B1

    公开(公告)日:2006-09-19

    申请号:US09656694

    申请日:2000-09-07

    IPC分类号: H01C7/02

    摘要: A robust sensor that incorporates the necessary physical structure and thermal characteristics is capable of measuring fluid flow and properties under harsh environmental conditions. The sensor die is made of a material with thermal conductivity tailored to provide the thermal transmission characteristics necessary to avoid saturation of the sensor, thus enabling the measurement of high mass flux airflow and liquid properties under high pressure and often harsh environments not previously available for silicon based sensors. The robust sensor further has internal vias for back-side electrical connection, thus avoiding electrical and mechanical interference with the measurements. All of these features come together to provide a microsensor which is capable of reliable, i.e. stable, wide dynamic range and rapid-response operation under harsh environments.

    摘要翻译: 结合必要的物理结构和热特性的坚固的传感器能​​够在恶劣的环境条件下测量流体流动和性能。 传感器芯片由具有导热性的材料制成,以提供避免传感器饱和所必需的热传递特性,从而能够在高压和常常恶劣的环境下测量高质量通量气流和液体性能,以前不可用于硅 基于传感器。 坚固的传感器还具有用于背面电气连接的内部通孔,从而避免了电气和机械干扰测量。 所有这些特征汇集在一起​​,以提供能够在恶劣环境下可靠,即稳定,宽动态范围和快速响应操作的微型传感器。

    Tilt-insensitive flow sensor
    5.
    发明授权
    Tilt-insensitive flow sensor 有权
    倾斜不敏感流量传感器

    公开(公告)号:US07331224B2

    公开(公告)日:2008-02-19

    申请号:US11005968

    申请日:2004-12-07

    IPC分类号: G01F1/68

    摘要: A flow sensor is provided having a substrate with a sensing element and flow channel over the sensing element. The sensing element senses at least one property of a fluid. The flow channel is configured such that tilting the flow sensor does not have a significant effect on the measured signal. A device for measuring tilt in a system having a fluid flow path is also provided.

    摘要翻译: 提供了一种流量传感器,其具有在感测元件上方具有感测元件和流动通道的基底。 感测元件感测流体的至少一个性质。 流动通道被配置为使得流动传感器的倾斜对测量的信号没有显着影响。 还提供了一种用于测量具有流体流路的系统中的倾斜的装置。

    Tilt-insensitive flow sensor
    7.
    发明申请
    Tilt-insensitive flow sensor 有权
    倾斜不敏感流量传感器

    公开(公告)号:US20060117845A1

    公开(公告)日:2006-06-08

    申请号:US11005968

    申请日:2004-12-07

    IPC分类号: G01F1/68

    摘要: A flow sensor is provided having a substrate with a sensing element and flow channel over the sensing element. The sensing element senses at least one property of a fluid. The flow channel is configured such that tilting the flow sensor does not have a significant effect on the measured signal. A device for measuring tilt in a system having a fluid flow path is also provided.

    摘要翻译: 提供了一种流量传感器,其具有在感测元件上方具有感测元件和流动通道的基底。 感测元件感测流体的至少一个性质。 流动通道被配置为使得流动传感器的倾斜对测量的信号没有显着影响。 还提供了一种用于测量具有流体流路的系统中的倾斜的装置。

    Microsensor housing
    8.
    发明授权
    Microsensor housing 有权
    微传感器外壳

    公开(公告)号:US06322247B1

    公开(公告)日:2001-11-27

    申请号:US09368621

    申请日:1999-08-05

    IPC分类号: G01K108

    摘要: A microsensor housing having a structure with at least one inlet at one end and a thermal property sensor at the other end. Situated between the inlet and the sensor is a convection shield. Sampled fluid is taken in the inlet from a channel carrying the fluid to be sampled. The convection flow lines of the fluid are barred by the convection shield. The fluid is diffused into a cavity between the shield and sensor. The sensor detects a thermal property of the diffused fluid. One preferred shield has holes about its perimeter with a solid center part of the shield covering at a distance the sensor. The channel carrying the fluid may have screens to reduce turbulence noise and to aid in fluid transport to and from the sensor housing.

    摘要翻译: 具有在一端具有至少一个入口的结构的微传感器外壳和另一端的热性传感器。 位于入口和传感器之间的是对流屏蔽。 采样流体从携带要采样的流体的通道进入入口。 流体的对流流线被对流屏蔽体所禁止。 流体扩散到屏蔽和传感器之间的空腔中。 传感器检测扩散流体的热性质。 一个优选的屏蔽件围绕其周边具有孔,屏蔽件的实心中心部分在传感器的一定距离处覆盖。 承载流体的通道可以具有筛网以减少湍流噪声并且有助于流体传输到传感器壳体和从传感器壳体传输。