Deformable polymer testing device
    2.
    发明授权
    Deformable polymer testing device 有权
    可变形聚合物检测装置

    公开(公告)号:US08906696B2

    公开(公告)日:2014-12-09

    申请号:US13593319

    申请日:2012-08-23

    Inventor: Archit Giridhar

    Abstract: A testing device uses a selectively deformable substrate to capture and retain spherical beads for genetic experimentation. A method of fabricating the device is described in which a silicon substrate can be coated with a photosensitive, bio-compatible polymer for photolithographic patterning using a single mask exposure. The polymer is patterned with a matrix of wells, each well capable of expansion to accept placement of a bead in the well, and contraction to secure the bead in the well. The polymer can exhibit piezoelectric properties that cause it to respond mechanically to a selected electrical excitation.

    Abstract translation: 测试装置使用选择性可变形的基底来捕获和保留用于遗传实验的球形珠粒。 描述了一种制造该器件的方法,其中硅衬底可以用感光的生物相容的聚合物涂覆,以使用单一掩模曝光进行光刻图案化。 聚合物用孔基体图案化,每个孔能够膨胀以容纳珠在孔中的放置,以及收缩以将珠固定在孔中。 该聚合物可以表现出使其能够对所选择的电激发进行机械响应的压电特性。

    MULTI-AXIAL LINEAR AND ROTATIONAL DISPLACEMENT SENSOR
    4.
    发明申请
    MULTI-AXIAL LINEAR AND ROTATIONAL DISPLACEMENT SENSOR 有权
    多轴线性和旋转位移传感器

    公开(公告)号:US20100257933A1

    公开(公告)日:2010-10-14

    申请号:US12669539

    申请日:2008-07-15

    Abstract: A MEMS multiaxial inertial sensor of angular and linear displacements, velocities or accelerations has four comb drive capacitive sensing elements (18) integrated on a planar substrate (12), each having an output responsive to displacement along a Z axis, and responsive to a displacement along X or Y axes. The sensing elements are located at different parts of the substrate on both sides of the X axis and the Y axis, the outputs being suitable for subsequently deriving linear displacements along any of the X, Y or Z axes and angular displacements about any of the X, Y or Z axes. Fewer sensing elements are needed to sense in multiple directions, making the device more cost effective or smaller. Linear or angular movement is determined from combinations of the sensor signals.

    Abstract translation: 角度和线性位移,速度或加速度的MEMS多轴惯性传感器具有集成在平面基板(12)上的四个梳状驱动电容感测元件(18),每个具有响应于沿Z轴的位移的输出,并响应于位移 沿X或Y轴。 感测元件位于X轴和Y轴两侧的基板的不同部分,输出适用于随后沿X,Y或Z轴中的任何一个导出线性位移,并且围绕任何X ,Y或Z轴。 需要在多个方向上感测元件更少的感测元件,从而使设备更具成本效益或更小。 根据传感器信号的组合确定线性或角度运动。

    Multi-axial linear and rotational displacement sensor
    5.
    发明授权
    Multi-axial linear and rotational displacement sensor 有权
    多轴线性和旋转位移传感器

    公开(公告)号:US08397570B2

    公开(公告)日:2013-03-19

    申请号:US12669539

    申请日:2008-07-15

    Abstract: A MEMS multiaxial inertial sensor of angular and linear displacements, velocities, or accelerations has four comb drive capacitive sensing elements integrated on a planar substrate, each sensing element having an output responsive to displacement along a Z axis, and responsive to a displacement along X or Y axes. The sensing elements are located at different parts of the substrate on both sides of the X axis and the Y axis, the outputs being suitable for subsequently deriving linear and angular displacements about any of the X, Y or Z axes. Linear or angular movement is determined from combinations of the sensor signals.

    Abstract translation: 角度和线性位移,速度或加速度的MEMS多轴惯性传感器具有集成在平面基板上的四个梳状驱动电容感测元件,每个感测元件具有响应于沿着Z轴的位移的输出,并且响应于沿着X或 Y轴。 感测元件位于X轴和Y轴两侧的基板的不同部分,输出适用于随后导出关于X,Y或Z轴中任何一个的线性和角位移。 根据传感器信号的组合确定线性或角度运动。

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