公开(公告)号：US20100212425A1

公开(公告)日：2010-08-26

申请号：US12556433

申请日：2009-09-09

申请人： Chia-Pao Hsu ,  Weileun Fang ,  Ming-Ching Wu

发明人： Chia-Pao Hsu ,  Weileun Fang ,  Ming-Ching Wu

IPC分类号： G01P15/125

CPC分类号： G01P15/18 ,  G01P15/0802 ,  G01P15/125

摘要： Disclosed is a novel three-axis capacitive-type accelerometer implemented on SOI wafer. The accelerometer consists of four springs, one proof mass, four pairs of gap-closing sensing electrodes (each pair of gap-closing sensing electrode containing one movable electrode and one stationary electrode), and several metal-vias as the electrical interconnections. The movable electrodes are on the proof mass, whereas the stationary electrodes are fixed to the substrate. The three-axis accelerometer has five merits. (1) The sensitivity of the accelerometer is improved since the proof-mass is increased by containing both device and handling silicon layers; (2) The sensitivity is also improved by the gap-closing differential capacitive sensing electrodes design; (3) The parasitic capacitance at bond pad is reduced by the existing of metal-vias between the device Si layer and handling Si layer; (4) The sensing gap thickness is precisely defined by the buried oxide of SOI wafer; (5) The stationary sensing electrodes anchored to the substrate also act as the limit stops to protect the accelerometer.

摘要翻译： 公开了一种在SOI晶片上实现的新型三轴电容式加速度计。 加速度计包括四个弹簧，一个检测质量块，四对间隙闭合感测电极（每对间隙闭合感测电极，包含一个可移动电极和一个固定电极）和几个金属通孔作为电互连。 可移动电极位于检测质量上，而固定电极固定在基板上。 三轴加速度计有五个优点。 （1）加速度传感器的灵敏度提高，因为通过容纳硅层和处理硅层来提高质量; （2）间隙闭合差分电容式感应电极的设计灵敏度也得到提高; （3）通过在器件Si层和处理Si层之间存在金属通孔来减小接合焊盘处的寄生电容; （4）传感间隙厚度由SOI晶片的埋入氧化物精确定义; （5）固定在基板上的固定感应电极也作为限位装置来保护加速度计。

公开(公告)号：US08443670B2

公开(公告)日：2013-05-21

申请号：US12556433

申请日：2009-09-09

申请人： Chia-Pao Hsu ,  Weileun Fang ,  Ming-Ching Wu

发明人： Chia-Pao Hsu ,  Weileun Fang ,  Ming-Ching Wu

IPC分类号： G01P15/125

CPC分类号： G01P15/18 ,  G01P15/0802 ,  G01P15/125

摘要： Disclosed is a novel three-axis capacitive-type accelerometer implemented on SOI wafer. The accelerometer consists of four springs, one proof mass, four pairs of gap-closing sensing electrodes (each pair of gap-closing sensing electrode containing one movable electrode and one stationary electrode), and several metal-vias as the electrical interconnections. The movable electrodes are on the proof mass, whereas the stationary electrodes are fixed to the substrate. The three-axis accelerometer has five merits. (1) The sensitivity of the accelerometer is improved since the proof-mass is increased by containing both device and handling silicon layers; (2) The sensitivity is also improved by the gap-closing differential capacitive sensing electrodes design; (3) The parasitic capacitance at bond pad is reduced by the existing of metal-vias between the device Si layer and handling Si layer; (4) The sensing gap thickness is precisely defined by the buried oxide of SOI wafer; (5) The stationary sensing electrodes anchored to the substrate also act as the limit stops to protect the accelerometer.

摘要翻译： 公开了一种在SOI晶片上实现的新型三轴电容式加速度计。 加速度计包括四个弹簧，一个检测质量块，四对间隙闭合感测电极（每对间隙闭合感测电极，包含一个可移动电极和一个固定电极）和几个金属通孔作为电互连。 可移动电极位于检测质量上，而固定电极固定在基板上。 三轴加速度计有五个优点。 （1）加速度传感器的灵敏度提高，因为通过容纳硅层和处理硅层来提高质量; （2）间隙闭合差分电容式感应电极的设计灵敏度也得到提高; （3）通过在器件Si层和处理Si层之间存在金属通孔来减小接合焊盘处的寄生电容; （4）传感间隙厚度由SOI晶片的埋入氧化物精确定义; （5）固定在基板上的固定感应电极也作为限位装置来保护加速度计。

公开(公告)号：US08436435B2

公开(公告)日：2013-05-07

申请号：US12844436

申请日：2010-07-27

申请人： Chun-Kai Chan ,  Weileun Fang

发明人： Chun-Kai Chan ,  Weileun Fang

IPC分类号： H01L29/84

CPC分类号： H04R19/005 ,  H04R19/04 ,  H04R2201/003

摘要： The present invention discloses an MEMS capacitive microphone including a rigid diaphragm arranged on an elastic element. When a sound wave acts on the rigid diaphragm, the rigid diaphragm is moved parallel to a normal of a back plate by elasticity of the elastic element. Thereby the variation of the capacitance is obtained between the rigid diaphragm and the back plate.

摘要翻译： 本发明公开了一种MEMS电容麦克风，其包括布置在弹性元件上的刚性隔膜。 当声波作用在刚性隔膜上时，刚性隔膜通过弹性元件的弹性平行于背板的法线移动。 从而在刚性隔膜和背板之间获得电容的变化。

公开(公告)号：US20110179870A1

公开(公告)日：2011-07-28

申请号：US12692906

申请日：2010-01-25

申请人： Chun-Kai CHAN ,  Weileun Fang

发明人： Chun-Kai CHAN ,  Weileun Fang

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P2015/0848

摘要： A dual-axis acceleration detection element comprises a first detection element, a second detection element and a stationary unit. The first detection element is movable relative to the second detection element. The second detection element is movable relative to the stationary unit. The relative movements take place on different axes to detect acceleration on two different axes. The first detection element and the second detection element are interposed by corresponding detection electrodes, and the second detection element and the stationary unit also are interposed by other corresponding detection electrodes. Hence when the relative movements occur among the first and second detection elements and the stationary unit, overlapped areas of the detection electrodes change to generate and output a capacitance difference, thereby acceleration alteration can be detected.

摘要翻译： 双轴加速度检测元件包括第一检测元件，第二检测元件和固定单元。 第一检测元件可相对于第二检测元件移动。 第二检测元件可相对于固定单元移动。 相对运动发生在不同的轴上以检测两个不同轴上的加速度。 第一检测元件和第二检测元件由相应的检测电极插入，第二检测元件和固定单元也被其它相应的检测电极插入。 因此，当在第一和第二检测元件和固定单元之间发生相对运动时，检测电极的重叠区域改变以产生并输出电容差，从而可以检测加速度变化。

公开(公告)号：US07981329B2

公开(公告)日：2011-07-19

申请号：US12357039

申请日：2009-01-21

申请人： Chih-Chun Lee ,  Sheng-Yi Hsiao ,  Weileun Fang

发明人： Chih-Chun Lee ,  Sheng-Yi Hsiao ,  Weileun Fang

IPC分类号： B29D11/00 ,  B29C39/00 ,  G02B1/00

CPC分类号： B29D11/00009 ,  B29C39/006 ,  B29C39/26 ,  B29C41/12 ,  B29L2011/00

摘要： A method of manufacturing an optical component is provided. The method comprises steps of providing a first liquid; providing a fluid, disposed above the first liquid, wherein an interface exists between the first liquid and the fluid; providing a polymer precursor at the interface; and solidifying the polymer precursor so as to form the optical component made by a polymer.

摘要翻译： 提供了一种制造光学部件的方法。 该方法包括提供第一液体的步骤; 提供设置在所述第一液体上方的流体，其中在所述第一液体和所述流体之间存在界面; 在界面处提供聚合物前体; 并固化聚合物前体以形成由聚合物制成的光学部件。

公开(公告)号：US07623303B2

公开(公告)日：2009-11-24

申请号：US11877421

申请日：2007-10-23

申请人： Weileun Fang ,  Sz-Yuan Lee ,  Hsi-Wen Tung ,  Wen-Chih Chen

发明人： Weileun Fang ,  Sz-Yuan Lee ,  Hsi-Wen Tung ,  Wen-Chih Chen

IPC分类号： G02B1/04 ,  G02B13/00 ,  G02B3/14

CPC分类号： G02B26/0866

摘要： A solid tunable micro optical device for an micro-optical system is provided. The sold tunable micro optical device includes a first annular piece, a micro-lens with a spherical surface configured on the first annular piece, and a deforming device coupled to the first annular piece for deforming the micro-lens.

摘要翻译： 提供了一种用于微光学系统的固体可调谐微型光学器件。 所销售的可调谐微型光学装置包括第一环形件，具有构造在第一环形件上的球形表面的微透镜，以及联接到第一环形件的变形装置，用于使微透镜变形。

公开(公告)号：US20090090184A1

公开(公告)日：2009-04-09

申请号：US11944291

申请日：2007-11-21

申请人： Chuanwei WANG ,  Ming Han Tsai ,  Chih Ming Sun ,  Weileun Fang

发明人： Chuanwei WANG ,  Ming Han Tsai ,  Chih Ming Sun ,  Weileun Fang

IPC分类号： G01P15/13

CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P2015/082 ,  G01P2015/084

摘要： An out-of-plane sensing device is provided. A proof mass is movable with respect to a substrate. A frame is positioned on the substrate and encloses the proof mass. At least one spring connects the proof mass to the frame so that the spring will exert a force on the proof mass to make the proof mass move back to its equilibrium position when the proof mass moves perpendicularly to the substrate. An electrode extends from the proof mass toward the frame. A counter electrode extends from the frame toward the proof mass, wherein the projection of the electrode onto the substrate overlaps with that of the counter electrode onto the substrate.

摘要翻译： 提供了一种平面外感测装置。 证明物质可相对于基底移动。 框架定位在基板上并包围检测质量块。 至少一个弹簧将检测质量块连接到框架上，使得弹簧将在证明物质上施加力，以使证明物质在垂直于基底移动时使证明物质移回到其平衡位置。 电极从防弹块向框架延伸。 反电极从框架朝向证明物质延伸，其中电极到基板上的突起与对电极的突起重叠在基板上。

公开(公告)号：US20090047527A1

公开(公告)日：2009-02-19

申请号：US12013843

申请日：2008-01-14

申请人： Hsueh-An Yang ,  Weileun Fang ,  Tsung-Lin TANG

发明人： Hsueh-An Yang ,  Weileun Fang ,  Tsung-Lin TANG

IPC分类号： B32B15/04 ,  B44C1/22

CPC分类号： B81C1/00142 ,  B81B3/0021 ,  B81B2201/042 ,  B81C1/0019 ,  H01F7/122 ,  H01F7/14 ,  H01F41/041 ,  H01F2007/068 ,  H02K33/18

摘要： A magnetic element and its manufacturing method are provided. A magnetic element includes an actuation part having a first surface and a second surface, a torsion bar connected to the actuation part, and a frame connected to the first torsion bar, wherein the first surface of the actuation part is an uneven surface. The manufacturing method of the magnetic element starts with forming an passivation layer on a substrate and defining a special area by the mask method, then continues with forming the adhesion layer and electroplate-initializing layer on the substrate sequentially. The photoresist layer are formed and the magnetic-inductive material is electroformed on the electroplate area. Finally, the substrate is etched and the passivation layer is removed to obtain the magnetic element. The manufacturing method of magnetic element of the present invention can be applied in the microelectromechanical system field and other categories.

摘要翻译： 提供了磁性元件及其制造方法。 磁性元件包括具有第一表面和第二表面的致动部件，连接到致动部件的扭杆和连接到第一扭杆的框架，其中致动部件的第一表面是不平坦的表面。 磁性元件的制造方法首先在基板上形成钝化层，通过掩模法形成特殊区域，然后依次在基板上形成粘合层和电镀初始化层。 形成光致抗蚀剂层，并且将磁感应材料电铸在电镀区域上。 最后，蚀刻衬底并去除钝化层以获得磁性元件。 本发明的磁性元件的制造方法可以应用于微机电系统领域等。

公开(公告)号：US20120111096A1

公开(公告)日：2012-05-10

申请号：US13343643

申请日：2012-01-04

申请人： Mingching Wu ,  Hsueh-An Yang ,  Hung-Yi Lin ,  Weileun Fang

发明人： Mingching Wu ,  Hsueh-An Yang ,  Hung-Yi Lin ,  Weileun Fang

IPC分类号： G01M3/34

CPC分类号： B81C1/00301 ,  B81B2201/042 ,  B81B2207/097

摘要： A method for manufacturing an MEMS device is provided. The method includes steps of a) providing a first substrate having a concavity located thereon, b) providing a second substrate having a connecting area and an actuating area respectively located thereon, c) forming plural microstructures in the actuating area, d) mounting a conducting element in the connecting area and the actuating area, e) forming an insulating layer on the conducting element and f) connecting the first substrate to the connecting area to form the MEMS device. The concavity contains the plural microstructures.

摘要翻译： 提供了一种用于制造MEMS器件的方法。 该方法包括以下步骤：a）提供具有位于其上的凹面的第一基底，b）提供具有分别位于其上的连接区域和致动区域的第二基底，c）在致动区域中形成多个微结构，d） 在所述连接区域和所述致动区域中的元件，e）在所述导电元件上形成绝缘层，以及f）将所述第一基板连接到所述连接区域以形成所述MEMS器件。 凹面包含多个微结构。

公开(公告)号：US20120107545A1

公开(公告)日：2012-05-03

申请号：US13343187

申请日：2012-01-04

申请人： Chuanwei Wang ,  Ming Han Tsai ,  Chih Ming Sun ,  Weileun Fang

发明人： Chuanwei Wang ,  Ming Han Tsai ,  Chih Ming Sun ,  Weileun Fang

IPC分类号： B32B3/08 ,  B32B3/10

CPC分类号： H01L28/60 ,  H01L29/84 ,  Y10T428/22

摘要： A micromachined structure includes a substrate and a suspended structure. The substrate has a cavity formed thereon. The suspended structure is formed on the cavity of the substrate. The suspended structure includes a first metal layer, a second metal layer, and a first dielectric layer positioned between the first and second metal layers, wherein the first dielectric layer has a first opening in communication with the cavity through an opening formed in the first metal layer.

摘要翻译： 微加工结构包括基底和悬挂结构。 基板具有形成在其上的空腔。 悬浮结构形成在基板的空腔上。 悬浮结构包括第一金属层，第二金属层和位于第一和第二金属层之间的第一介电层，其中第一介电层具有通过形成在第一金属中的开口与空腔连通的第一开口 层。