公开(公告)号：US20200246929A1

公开(公告)日：2020-08-06

申请号：US16854207

申请日：2020-04-21

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Guang Lu ,  Mehmet E. Alpay ,  Mike Tyler ,  Qian XU ,  Jan Kleinert ,  Zhibin Lin ,  James D. Brookhyser ,  Ho Wai Lo ,  Kurt M. Eaton

IPC: B23Q15/14 ,  G05B19/19 ,  G05B19/402

Abstract: One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.

公开(公告)号：US20170305780A9

公开(公告)日：2017-10-26

申请号：US14094656

申请日：2013-12-02

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Haibin ZHANG ,  Qian XU

IPC: C03B33/02 ,  B23K26/40 ,  B23K26/06 ,  B23K26/00 ,  B23K26/0622 ,  B23K26/364 ,  B23K26/082 ,  C03C23/00 ,  B23K103/00

CPC classification number: C03B33/0222 ,  B23K26/0006 ,  B23K26/0604 ,  B23K26/0624 ,  B23K26/082 ,  B23K26/359 ,  B23K26/364 ,  B23K26/40 ,  B23K2103/50 ,  C03C23/0025 ,  Y10T428/24488

Abstract: Methods and apparatus for separating substrates are disclosed, as are articles formed from the separated substrates. A method of separating a substrate having first and second surfaces includes directing a beam of laser light to pass through the first surface and, thereafter, to pass through the second surface. The beam of laser light has a beam waist located at a surface of the substrate or outside the substrate. Relative motion between the beam of laser light and the substrate is caused to scan a spot on a surface of the substrate to be scanned along a guide path. Portions of the substrate illuminated within the spot absorb light within the beam of laser light so that the substrate can be separated along the guide path.

公开(公告)号：US20140084040A1

公开(公告)日：2014-03-27

申请号：US14033305

申请日：2013-09-20

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Haibin Zhang ,  Glenn Simenson ,  Qian XU ,  Hisashi Matsumoto

IPC: B26F3/00

CPC classification number: B26F3/00 ,  C03B33/02 ,  C03B33/03 ,  C03B33/033 ,  C03B33/09 ,  Y10T225/14 ,  Y10T225/30

Abstract: The invention is an apparatus, for performing the method, and the method including the steps of providing a workpiece, contacting a portion of an exterior surface of the workpiece to an acoustic couplant such that an interface between the acoustic couplant and the portion of the exterior surface is at least substantially continuous across the portion of the exterior surface, and propagating a crack through the workpiece. A portion of the acoustic couplant at the interface has acoustic impedance relative to the acoustic energy that is greater than 400 kg·m−2·s−1.

Abstract translation: 本发明是一种用于执行该方法的方法，该方法包括以下步骤：提供工件，使工件的外表面的一部分与声耦合剂接触，使得声耦合剂与外部部分之间的界面 表面至少基本上连续穿过外表面的部分，并且将裂纹传播通过工件。 界面处的声耦合器的一部分相对于大于400kg·m-2·s-1的声能具有声阻抗。

公开(公告)号：US20140083983A1

公开(公告)日：2014-03-27

申请号：US14032829

申请日：2013-09-20

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Haibin Zhang ,  Fang SHAN ,  Mathew Rekow ,  Min Zhang ,  Glenn Simenson ,  Qian XU ,  James Brookhyser ,  Joe Frankel ,  Michael Darwin ,  Jack Rundel ,  Matthew Pysher

IPC: B23K26/36

CPC classification number: B23K26/364 ,  B23K26/0006 ,  B23K26/57 ,  B23K2103/50

Abstract: The present invention is a method for separating a workpiece from a common substrate. It includes the steps of providing the workpiece, generating, within a beam source, a beam of laser pulses configured to modify a portion of the workpiece, determining a depth for creating a modified region based upon a characteristic of the workpiece and modifying a plurality of regions within the workpiece to form a plurality of modified regions. Modifying the plurality of regions includes directing the beam of laser pulses from an output of the beam source onto the workpiece, causing relative motion between the workpiece and the output of the beam source while directing the beam of laser pulses onto workpiece, and modifying a characteristic of the pulses of the beam upon generating a number of pulses which generally correspond to creating the modified regions to the determined depth.

Abstract translation: 本发明是用于从共用基板分离工件的方法。 其包括以下步骤：提供工件，在光束源内产生构造成修改工件的一部分的激光脉冲束，基于工件的特性确定用于产生修改区域的深度，并修改多个 区域，以形成多个修改区域。 修改多个区域包括将激光脉冲束从射束源的输出引导到工件上，引起工件和光束源的输出之间的相对运动，同时将激光脉冲束引导到工件上，并修改特性 产生多个脉冲的波束的脉冲，这些脉冲通常对应于将修改的区域创建到确定的深度。

公开(公告)号：US20180243872A1

公开(公告)日：2018-08-30

申请号：US15966615

申请日：2018-04-30

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Guang Lu ,  Mehmet E. Alpay ,  Mike Tyler ,  Qian XU ,  Jan Kleinert ,  Zhibin Lin ,  Jim D. Brookhyser ,  Ho Wai Lo ,  Kurt M. Eaton

IPC: B23Q15/14 ,  G05B19/402

CPC classification number: B23Q15/14 ,  G05B19/19 ,  G05B19/402 ,  G05B2219/34015 ,  G05B2219/41196 ,  G05B2219/41217 ,  G05B2219/41427 ,  G05B2219/50218

Abstract: One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.

公开(公告)号：US20160368110A1

公开(公告)日：2016-12-22

申请号：US15188496

申请日：2016-06-21

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Guang Lu ,  Mehmet E. Alpay ,  Mike Tyler ,  Qian XU ,  Jan Kleinert ,  Zhibin Lin ,  James D. Brookhyser ,  Ho Wai Lo ,  Kurt M. Eaton

IPC: B23Q15/14 ,  G05B19/402

CPC classification number: B23Q15/14 ,  G05B19/402 ,  G05B2219/34015 ,  G05B2219/50218

Abstract: One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.

Abstract translation: 本发明的一个实施例可以被表征为一种用于控制多轴机床的方法，包括获得初步旋转致动器命令（其中旋转致动器指令的频率含量超过旋转致动器的带宽），产生处理旋转 至少部分地基于初步旋转致动器命令，所述处理的旋转致动器命令具有在旋转致动器的带宽内的频率含量，并且至少部分地基于第一线性致动器命令和第二线性致动器命令产生第二线性致动器命令 在加工的旋转执行器命令上。 经处理的旋转致动器命令可以被输出到旋转致动器，第一线性致动器命令可被输出到第一线性致动器，并且第二线性致动器命令可被输出到第二线性致动器。

公开(公告)号：US20140093693A1

公开(公告)日：2014-04-03

申请号：US14094656

申请日：2013-12-02

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Haibin ZHANG ,  Qian XU

IPC: C03B33/02

CPC classification number: C03B33/0222 ,  B23K26/0006 ,  B23K26/0604 ,  B23K26/0624 ,  B23K26/082 ,  B23K26/359 ,  B23K26/364 ,  B23K26/40 ,  B23K2103/50 ,  C03C23/0025 ,  Y10T428/24488

Abstract: Methods and apparatus for separating substrates are disclosed, as are articles formed from the separated substrates. A method of separating a substrate having first and second surfaces includes directing a beam of laser light to pass through the first surface and, thereafter, to pass through the second surface. The beam of laser light has a beam waist located at a surface of the substrate or outside the substrate. Relative motion between the beam of laser light and the substrate is caused to scan a spot on a surface of the substrate to be scanned along a guide path. Portions of the substrate illuminated within the spot absorb light within the beam of laser light so that the substrate can be separated along the guide path.

Abstract translation: 公开了用于分离衬底的方法和装置，以及由分离的衬底形成的制品。 分离具有第一和第二表面的衬底的方法包括引导一束激光通过第一表面，然后穿过第二表面。 激光束具有位于基板表面或基板外部的光束腰。 使激光束与基板之间的相对运动沿着引导路径扫描待扫描的基板的表面上的点。 在该点内照射的基板的部分吸收激光束内的光，使得基板可以沿着引导路径分离。

公开(公告)号：US20130224439A1

公开(公告)日：2013-08-29

申请号：US13778950

申请日：2013-02-27

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Haibin ZHANG ,  Qian XU

IPC: C03B33/02

CPC classification number: C03B33/0222 ,  B23K26/40 ,  B23K2103/50 ,  Y10T428/24479 ,  Y10T428/24488

Abstract: Methods and apparatus for separating substrates are disclosed, as are articles formed from the separated substrates. A method of separating a substrate having first and second surfaces includes directing a beam of laser light to pass through the first surface and, thereafter, to pass through the second surface. The beam of laser light has a beam waist located at a surface of the substrate or outside the substrate. Relative motion between the beam of laser light and the substrate is caused to scan a spot on a surface of the substrate to be scanned along a guide path. Portions of the substrate illuminated within the spot absorb light within the beam of laser light so that the substrate can be separated along the guide path.

Abstract translation: 公开了用于分离衬底的方法和装置，以及由分离的衬底形成的制品。 分离具有第一和第二表面的衬底的方法包括引导一束激光通过第一表面，然后穿过第二表面。 激光束具有位于基板表面或基板外部的光束腰。 使激光束与基板之间的相对运动沿着引导路径扫描待扫描的基板的表面上的点。 在该点内照射的基板的部分吸收激光束内的光，使得基板可以沿着引导路径分离。