公开(公告)号：US20030007262A1

公开(公告)日：2003-01-09

申请号：US09984814

申请日：2001-10-31

Applicant: Fujitsu Limited

Inventor： Osamu Tsuboi ,  Satoshi Ueda ,  Yoshihiro Mizuno ,  Ippei Sawaki ,  Hisao Okuda

IPC: G02B026/08 ,  G02F001/29 ,  G02B005/08 ,  G02B007/188

CPC classification number: G02B26/085 ,  G02B26/0841 ,  Y10S359/904

Abstract: A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.

Abstract translation: 提供了一种微镜单元，其包括框架，形成有镜面的反射镜形成基座以及连接到反射镜形成基座的第一端和连接到框架的第二端的扭转连接器。 扭转连接器限定了旋转轴线，镜子形成基座围绕该轴线相对于框架旋转。 扭转连接器具有在与镜面平行且垂直于旋转轴线的方向上测量的宽度。 第一端扭转连接器的宽度相对较大。 宽度从第一端朝向第二端逐渐变小。

公开(公告)号：US20040232107A1

公开(公告)日：2004-11-25

申请号：US10686764

申请日：2003-10-17

Applicant: FUJITSU LIMITED ,  FUJITSU MEDIA DEVICES LIMITED

Inventor： Norinao Kouma ,  Yoshihiro Mizuno ,  Osamu Tsuboi ,  Hisao Okuda ,  Hiromitsu Soneda ,  Satoshi Ueda ,  Ippei Sawaki ,  Yoshitaka Nakamura

IPC: B44C001/22

CPC classification number: B81C1/00182 ,  B81B2201/0235 ,  B81B2201/033 ,  B81B2201/042 ,  B81C2201/014 ,  B81C2201/0174 ,  G02B26/0841

Abstract: A method is for manufacturing a microstructure having a thin-walled portion with use of a material substrate. The material substrate has a laminated structure which includes a first conductor layer 101, a second conductor layer 102, a third conductor layer 103, a first insulating layer 104 interposed between the first conductor layer and the second conductor layer, and a second insulating layer 105 interposed between the second conductor layer and the third conductor layer. The first insulating layer is patterned to have a first masking part for covering a thin-wall forming region of the second conductor layer. The second insulating layer is patterned to have a second masking part for covering the thin-wall forming region of the second conductor layer. The method includes forming the thin-walled portion in the second conductor portion by etching the material substrate from the first conductor layer down to the second insulating layer via a mask pattern 58 including a non-masking region corresponding to the thin-wall forming region of the second conductor layer.

Abstract translation: 一种使用材料基板制造具有薄壁部分的微结构的方法。 材料基板具有包括第一导体层101，第二导体层102，第三导体层103，插入在第一导体层和第二导体层之间的第一绝缘层104和第二绝缘层105的层叠结构 插入在第二导体层和第三导体层之间。 第一绝缘层被图案化以具有用于覆盖第二导体层的薄壁形成区域的第一掩模部分。 图案化第二绝缘层以具有用于覆盖第二导体层的薄壁形成区域的第二掩模部分。 该方法包括：通过掩模图案58将材料基板从第一导体层蚀刻到第二绝缘层，从而在第二导体部分中形成薄壁部分，掩模图案58包括对应于薄壁形成区域的非屏蔽区域 第二导体层。

公开(公告)号：US20030218793A1

公开(公告)日：2003-11-27

申请号：US10331500

申请日：2002-12-31

Applicant: FUJITSU LIMITED ,  FUJITSU MEDIA DEVICES LIMITED

Inventor： Hiromitsu Soneda ,  Satoshi Ueda ,  Hisao Okuda ,  Ippei Sawaki ,  Osamu Tsuboi ,  Yoshihiro Mizuno ,  Norinao Kouma ,  Yoshitaka Nakamura ,  Fumio Yamagishi

IPC: G02B026/00

CPC classification number: G02B6/3518 ,  G02B6/3556 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/4232 ,  G02B26/0841 ,  Y10S359/904

Abstract: A micro mirror unit includes a micro mirror substrate, a wiring substrate and an electroconductive spacer disposed between these substrates. The micro mirror substrate includes a moving part, a frame and torsion bars connecting the moving part to the frame. The moving part is provided with a mirror-formed portion. The wiring substrate is formed with a wiring pattern. The electroconductive spacer electrically connects the frame to the wiring pattern, while also providing a space between the micro mirror substrate and the wiring substrate.

Abstract translation: 微镜单元包括微镜基板，布线基板和布置在这些基板之间的导电间隔件。 微镜基板包括移动部件，框架和将移动部件连接到框架的扭杆。 移动部分设置有镜形部分。 布线基板形成有布线图案。 导电间隔物将框架电连接到布线图案，同时还在微反射镜基板和布线基板之间提供空间。

公开(公告)号：US20030035192A1

公开(公告)日：2003-02-20

申请号：US09995588

申请日：2001-11-29

Applicant: FUJITSU LIMITED

Inventor： Yoshihiro Mizuno ,  Satoshi Ueda ,  Osamu Tsuboi ,  Ippei Sawaki ,  Hisao Okuda ,  Fumio Yamagishi ,  Norinao Kouma

IPC: G02B026/00

CPC classification number: G02B26/0841 ,  B01D53/885 ,  B01J8/0453 ,  B01J8/0496 ,  B01J2208/00212 ,  B01J2208/00309 ,  B01J2208/025 ,  B81B2201/045 ,  B81B2203/0136 ,  B81C1/00142 ,  B81C1/00626 ,  B81C2201/0142 ,  C01B3/16 ,  C01B2203/0288 ,  C01B2203/045 ,  C01B2203/0485 ,  Y10S359/904

Abstract: A method of making a micromirror unit is provided. In accordance with the method, a micromirror unit is made from a material substrate having a multi-layer structure composed of silicon layers and at least one intermediate layer. The resulting micromirror unit includes a mirror forming base, a frame and a torsion bar. The method includes the following steps. First, a pre-torsion bar is formed by subjecting one of the silicon layers to etching. The obtained pre-torsion bar is rendered smaller in thickness than the mirror forming base and is held in contact with the intermediate layer. Then, the desired torsion bar is obtained by removing the intermediate layer contacting with the pre-torsion bar.

Abstract translation: 提供了制造微镜单元的方法。 根据该方法，微镜单元由具有由硅层和至少一个中间层构成的多层结构的材料基板制成。 所得到的微镜单元包括反射镜形成基座，框架和扭杆。 该方法包括以下步骤。 首先，通过使一个硅层进行蚀刻来形成预扭杆。 所获得的预扭杆的厚度比反射镜形成基座的厚度小，并与中间层保持接触。 然后，通过去除与预扭杆接触的中间层来获得所需的扭力杆。

公开(公告)号：US20040141894A1

公开(公告)日：2004-07-22

申请号：US10755339

申请日：2004-01-13

Applicant: FUJITSU LIMITED ,  FUJITSU MEDIA DEVICES LIMITED

Inventor： Yoshihiro Mizuno ,  Satoshi Ueda ,  Osamu Tsuboi ,  Ippei Sawaki ,  Hisao Okuda ,  Fumio Yamagishi ,  Norinao Kouma

IPC: F28D007/00

CPC classification number: G02B26/0841 ,  B01D53/885 ,  B01J8/0453 ,  B01J8/0496 ,  B01J2208/00212 ,  B01J2208/00309 ,  B01J2208/025 ,  B81B2201/045 ,  B81B2203/0136 ,  B81C1/00142 ,  B81C1/00626 ,  B81C2201/0142 ,  C01B3/16 ,  C01B2203/0288 ,  C01B2203/045 ,  C01B2203/0485 ,  Y10S359/904

Abstract: A method of making a micromirror unit is provided. In accordance with the method, a micromirror unit is made from a material substrate having a multi-layer structure composed of silicon layers and at least one intermediate layer. The resulting micromirror unit includes a mirror forming base, a frame and a torsion bar. The method includes the following steps. First, a pre-torsion bar is formed by subjecting one of the silicon layers to etching. The obtained pre-torsion bar is rendered smaller in thickness than the mirror forming base and is held in contact with the intermediate layer. Then, the desired torsion bar is obtained by removing the intermediate layer contacting with the pre-torsion bar.

公开(公告)号：US20030227700A1

公开(公告)日：2003-12-11

申请号：US10327855

申请日：2002-12-26

Applicant: FUJITSU LIMITED ,  FUJITSU MEDIA DEVICES LIMITED

Inventor： Yoshihiro Mizuno ,  Satoshi Ueda ,  Osamu Tsuboi ,  Ippei Sawaki ,  Hisao Okuda ,  Norinao Kouma ,  Hiromitsu Soneda ,  Fumio Yamagishi

IPC: G02B026/08

CPC classification number: G02B26/0841 ,  B81B2201/045 ,  B81B2203/0136 ,  B81C1/00182 ,  B81C2203/0109 ,  Y10S359/904

Abstract: A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.

Abstract translation: 微镜单元包括承载镜部分的移动部分，框架和将移动部件连接到框架的扭杆。 移动部件，框架和扭杆从材料基板形成为一体。 框架包括比移动部分更厚的部分。

公开(公告)号：US20020051281A1

公开(公告)日：2002-05-02

申请号：US09803014

申请日：2001-03-12

Applicant: Fujitsu Limited

Inventor： Satoshi Ueda ,  Ippei Sawaki ,  Yoshihiro Mizuno

IPC: B44C001/22

CPC classification number: G02B26/0841 ,  G11B7/08564 ,  Y10T156/1052

Abstract: A method of making a galvano-mirror is provided. It includes the following steps. First, a first material substrate formed with a plurality of mirror plate regions is prepared. The mirror plate regions correspond in arrangement to the mirror plate of the galvano-mirror. Then, a second material substrate formed with a plurality of driver plate regions is prepared. The driver plate regions correspond in arrangement to the driver plate of the galvano-mirror. Then, the first and the second material substrates are attached to each other so that each of the mirror plate regions faces a relevant one of the driver plate regions. Finally, the attached first and second material substrates are divided into individual gaslvano-mirrors.

公开(公告)号：US20010030805A1

公开(公告)日：2001-10-18

申请号：US09810775

申请日：2001-03-16

Applicant: FUJITSU LIMITED

Inventor： Ippei Sawaki ,  Michio Miura ,  Fumitaka Abe

IPC: G02F001/1335 ,  H01L029/04 ,  H01L031/036 ,  H01L031/0376 ,  H01L031/20 ,  G03B021/60

CPC classification number: G02B27/0018 ,  G02B3/005 ,  G02B3/0056 ,  G02B3/0062 ,  G02B3/0068 ,  G02B3/0075 ,  G02F1/133526 ,  H04N9/30

Abstract: An optical device comprising an image formation unit consisting of a plurality of lens substrates each formed on the front and rear faces thereof with lens arrays and a display unit disposed on an object surface with respect to the image formation unit and displaying an image to be projected by the image formation unit, characterized in that the lens array is a cylindrical lens array and the generating line of a cylindrical array formed on the front face and the generating line of a cylindrical array formed on the rear face cross each other. The lens substrate formed on the front and rear faces thereof with cylindrical lens array is used to provide a small lightweight optical device of a full-size or magnified image system.

Abstract translation: 一种光学装置，包括由多个透镜基板组成的图像形成单元，每个透镜基板在其前后面上形成有透镜阵列，以及显示单元，其相对于图像形成单元设置在物体表面上，并且显示要投影的图像 通过图像形成单元，其特征在于，透镜阵列是柱面透镜阵列，并且形成在前表面上的圆柱形阵列的生成线和形成在后表面上的圆柱形阵列的生成线彼此交叉。 在其前后形成有透镜阵列的透镜基板用于提供全尺寸或放大图像系统的小型轻型光学装置。

公开(公告)号：US20040228015A1

公开(公告)日：2004-11-18

申请号：US10766040

申请日：2004-01-29

Applicant: Fujitsu Limited ,  Fujitsu Media Devices Limited

Inventor： Osamu Tsuboi ,  Satoshi Ueda ,  Yoshihiro Mizuno ,  Ippei Sawaki ,  Hisao Okuda

IPC: G02B026/08 ,  G02B005/08 ,  G02B007/182

CPC classification number: G02B26/085 ,  G02B26/0841 ,  Y10S359/904

Abstract: A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.

公开(公告)号：US20040014300A1

公开(公告)日：2004-01-22

申请号：US10352001

申请日：2003-01-28

Applicant: FUJITSU LIMITED ,  FUJITSU MEDIA DEVICES LIMITED

Inventor： Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Ippei Sawaki ,  Osamu Tsuboi ,  Yoshitaka Nakamura

IPC: H01L021/00

CPC classification number: G02B26/0841 ,  Y10S359/90

Abstract: A plurality of micromirror chips are collectively made from a common substrate. Each of the micromirror chips is formed with a micromirror unit including a frame, a mirror-forming portion separate from the frame via spaces, and torsion bars connecting the mirror-forming portion to the frame. The common substrate is subjected to etching to provide the spaces and make division grooves for dividing the common substrate into the individual micromirror chips. The etching for the spaces and the etching for the division grooves are performed in parallel with each other.

Abstract translation: 多个微镜芯片由共同的基板共同制成。 每个微镜芯片由微镜单元形成，该微镜单元包括框架，通过空间与框架分离的镜形成部分以及将镜子形成部分连接到框架的扭杆。 对公共基板进行蚀刻以提供空间，并且制成用于将公共基板分成单个微镜芯片的划分凹槽。 空间的蚀刻和分割槽的蚀刻彼此并行地进行。