公开(公告)号：US12216263B2

公开(公告)日：2025-02-04

申请号：US17442287

申请日：2020-03-26

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Jiro Yamashita ,  Yasuyuki Tanabe ,  Shunsuke Matsuda ,  Hirotoshi Terada

IPC: G02B21/00

Abstract: Embodiments are for a confocal microscope unit attached to a connection port of a microscope including: light sources which output irradiation light to a sample to be observed; photodetectors which detect observation light generated from a sample in response to the irradiation light; a scan mirror which scans the irradiation light on the sample and guides the observation light generated from the sample to the photodetectors; a scan lens which guides the irradiation light scanned by the scan mirror to the microscope optical system and guides the observation light focused by the microscope optical system to the scan mirror; a lens barrel to which the scan lens is fixed; an attachment portion which attaches the lens barrel to the connection port ; and a movable portion which supports the lens barrel so that an angle of the lens barrel with respect to the attachment portion is changeable.

公开(公告)号：US12117600B2

公开(公告)日：2024-10-15

申请号：US17442238

申请日：2020-03-26

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Jiro Yamashita ,  Yasuyuki Tanabe ,  Shunsuke Matsuda ,  Hirotoshi Terada

IPC: G02B21/16 ,  G01N21/64 ,  G02B21/00 ,  G02B26/08 ,  G02B27/14

CPC classification number: G02B21/0048 ,  G01N21/6458 ,  G02B21/0032 ,  G02B21/0076 ,  G02B21/16 ,  G02B26/0833 ,  G02B27/14

Abstract: A confocal microscope unit according to an embodiment includes: a first subunit which includes a light source, a pinhole plate, and a photodetector; a second subunit which includes a light source, a pinhole plate, and a photodetector; a scan mirror which scans excitation light on a sample and guides fluorescence generated from the sample to the first and second subunits; a scan lens which guides the excitation light and guides the fluorescence to the scan mirror; and a main housing which is attachable to a connection port and to which the scan mirror, the scan lens, and the subunits are fixed, wherein the first subunit includes a dichroic mirror that separates the excitation light and fluorescence handled by the own unit from those handled by the second subunit.

公开(公告)号：US11913888B2

公开(公告)日：2024-02-27

申请号：US17264588

申请日：2019-04-09

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Xiangguang Mao ,  Masanori Kobayashi ,  Hirotoshi Terada ,  Ikuo Arata ,  Masataka Ikesu

IPC: G01N21/88 ,  G01N21/95 ,  G02B21/02 ,  G02B21/33 ,  G02B21/36

CPC classification number: G01N21/8806 ,  G01N21/9505 ,  G02B21/02 ,  G02B21/33 ,  G02B21/361

Abstract: A solid immersion lens unit includes a solid immersion lens having a contact surface for coming into contact with semiconductor device formed of a silicon substrate and a spherical surface to be disposed to face an objective lens; a holder holding the solid immersion lens; and an optical element held by the holder to be positioned between the objective lens and the solid immersion lens. The solid immersion lens transmits light having at least a part of wavelength in a range of 200 nm or greater and 1100 nm or lower. The optical element corrects aberration caused by a difference in refractive indices between the silicon substrate and the solid immersion lens.

公开(公告)号：US11967061B2

公开(公告)日：2024-04-23

申请号：US17607155

申请日：2020-05-19

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Hirotoshi Terada ,  Yoshitaka Iwaki

IPC: G06V10/00 ,  G06T7/00 ,  G06T7/70 ,  G06T11/00

CPC classification number: G06T7/0004 ,  G06T7/70 ,  G06T11/00 ,  G06T2207/30148

Abstract: A semiconductor apparatus examination method includes a step of detecting light from a plurality of positions in a semiconductor apparatus (D) and acquiring a waveform corresponding to each of the plurality of positions, a step of extracting a waveform corresponding to a specific timing from the waveform corresponding to each of the plurality of positions and generating an image corresponding to the specific timing based on the extracted waveform, and a step of extracting a feature point based on a brightness distribution correlation value in the image corresponding to the specific timing and identifying a position of a drive element in the semiconductor apparatus based on the feature point.

公开(公告)号：US10312166B2

公开(公告)日：2019-06-04

申请号：US15547858

申请日：2016-01-08

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Shinsuke Suzuki ,  Hirotoshi Terada ,  Shunsuke Matsuda

IPC: H01L23/544 ,  H01L21/66 ,  B23K26/70 ,  B23K26/362 ,  G06T7/00 ,  H01L21/67 ,  B23K26/00 ,  B23K26/03 ,  B23K26/402 ,  B23K26/359 ,  B23K26/364 ,  B23K26/352 ,  G02B5/20 ,  B23K101/42 ,  B23K103/10 ,  B23K103/16

Abstract: An inspection system includes a laser light source, an optical system for laser marking that irradiates a semiconductor device with laser light from a metal layer side, a control unit that controls the laser light source to control laser marking, a two-dimensional camera that detects light from the semiconductor device on a substrate side and outputs an optical reflection image, and an analysis unit that generates a pattern image of the semiconductor device, and the control unit controls the laser light source so that laser marking is performed until a mark image appears in a pattern image.

公开(公告)号：US10607900B2

公开(公告)日：2020-03-31

申请号：US16360424

申请日：2019-03-21

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Shinsuke Suzuki ,  Hirotoshi Terada ,  Shunsuke Matsuda

IPC: H01L21/66 ,  B23K26/00 ,  B23K26/03 ,  B23K26/402 ,  B23K26/359 ,  B23K26/364 ,  B23K26/352 ,  B23K26/361 ,  B23K26/70 ,  B23K26/362 ,  G06T7/00 ,  H01L21/67 ,  H01L23/544 ,  B23K101/42 ,  B23K103/10 ,  B23K103/16 ,  G02B5/20

Abstract: An inspection system includes a laser light source, an optical system for laser marking that irradiates a semiconductor device with laser light from a metal layer side, a control unit that controls the laser light source to control laser marking, a two-dimensional camera that detects light from the semiconductor device on a substrate side and outputs an optical reflection image, and an analysis unit that generates a pattern image of the semiconductor device, and the control unit controls the laser light source so that laser marking is performed until a mark image appears in a pattern image.

公开(公告)号：US10545309B2

公开(公告)日：2020-01-28

申请号：US15507252

申请日：2015-09-24

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Hirotoshi Terada ,  Ikuo Arata ,  Masataka Ikesu

IPC: G02B7/02 ,  G02B7/16 ,  G02B21/00 ,  G02B21/02 ,  G02B21/26 ,  G02B21/33 ,  G02B21/36

Abstract: A solid immersion lens holder includes a first member having a first opening disposing a spherical face portion therein so that a part of the spherical face portion protrudes toward an objective lens side and a second member having a second opening disposing a contact portion therein so that a contact face protrudes toward a side opposite to the objective lens side. The first member includes three plate members disposed on the objective lens side with respect to the first opening. Each of the three plate members is provided with a protrusion portion capable of contacting the spherical face portion.

公开(公告)号：US10302569B2

公开(公告)日：2019-05-28

申请号：US15858818

申请日：2017-12-29

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Naoya Matsumoto ,  Koyo Watanabe ,  Hirotoshi Terada

IPC: G01N21/64 ,  G02B21/00 ,  G02B27/00 ,  G01B9/021 ,  G01B11/24 ,  G02B21/08 ,  G02B21/26 ,  G03H1/00 ,  G02B21/36 ,  G02B5/32

Abstract: A microscope apparatus (1A) includes a biological sample table (11) that supports the biological sample (B), an objective lens (12) disposed to face the biological sample table (11), a laser light source (13) that outputs light with which the biological sample (B) is irradiated via the objective lens (12), a shape measurement unit (20) that acquires a surface shape of the biological sample (B), a control unit (40) that generates aberration correction hologram data for correcting an aberration caused by the surface shape of the biological sample (B) on the basis of information acquired in the shape measurement unit (20), a first spatial light modulator (33) to which a hologram based on the aberration correction hologram data is presented and that modulates the light output from the laser light source (31), and a photodetector (37) that detects an intensity of light to be detected (L2) generated in the biological sample (B). Thus, a microscope apparatus and an image acquisition method capable of suppressing a decrease in condensing intensity of irradiation light inside a biological sample and spreading of a condensing shape are realized.

公开(公告)号：US09891172B2

公开(公告)日：2018-02-13

申请号：US15311912

申请日：2015-05-18

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Naoya Matsumoto ,  Koyo Watanabe ,  Hirotoshi Terada

IPC: G01N21/64 ,  G01B9/021 ,  G01B11/24 ,  G02B21/08 ,  G02B21/26 ,  G03H1/00

CPC classification number: G01N21/6458 ,  G01B9/021 ,  G01B11/24 ,  G01N21/64 ,  G01N21/6486 ,  G01N2201/06113 ,  G02B5/32 ,  G02B21/00 ,  G02B21/08 ,  G02B21/26 ,  G02B27/0068 ,  G03H1/0005 ,  G03H2001/005

Abstract: A microscope apparatus includes an objective lens; a light source for outputting light with which a biological sample is irradiated via the objective lens; a shape acquisition unit for acquiring information on at least one of a surface shape of the biological sample and a structure directly under the surface of the biological sample; a hologram generation unit for generating aberration correction hologram data for correcting an aberration caused by the at least one on the basis of the information acquired by the shape acquisition unit; a spatial light modulator to which a hologram based on the aberration correction hologram data is presented and for modulating the light output from the light source; a photodetector for detecting an intensity of light generated in the biological sample and outputs a detection signal.

公开(公告)号：US09784980B2

公开(公告)日：2017-10-10

申请号：US14782015

申请日：2014-03-25

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Takashi Inoue ,  Hirotoshi Terada

IPC: G02B27/10 ,  G02B27/28 ,  G02F1/135 ,  B23K26/067 ,  B23K26/064 ,  G02B27/09 ,  B23K26/06

CPC classification number: G02B27/1006 ,  B23K26/064 ,  B23K26/0648 ,  B23K26/067 ,  B23K26/0676 ,  G02B27/0905 ,  G02B27/283 ,  G02B27/286 ,  G02F1/135

Abstract: An optical module (1A) includes a polarization beam splitter (10A), polarization elements (20 and 40) having nonreciprocal optical activity and respectively arranged on an optical path of a first polarization component (L2) transmitted through a light splitting surface (11) in irradiation light (L1) and an optical path of a second polarization component (L4) reflected in the light splitting surface (11), a first reflective SLM (30) that modulates and reflects a first polarization component (L2) passing through the first polarization element (20), and a second reflective SLM (50) that modulates and reflects the second polarization component (L4) passing through the second polarization element (40). First modulation light (L3) passing through the polarization element (20) again and then reflected by the light splitting surface (11) and second modulation light (L5) passing through the polarization element (40) again and then transmitted through the light splitting surface (11) are combined with each other.