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公开(公告)号：US11656374B2
公开(公告)日：2023-05-23
申请号：US17502424
申请日：2021-10-15
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tadashi Maruno , Eiji Toda , Mao Nakajima , Teruo Takahashi , Takafumi Higuchi
IPC: G01T1/24 , H04N5/374 , H04N5/3745 , H01L27/146 , G01J1/02 , H04N5/376 , H04N5/363 , H04N5/378 , G01T1/208
CPC classification number: G01T1/247 , H04N5/363 , H04N5/376 , H04N5/378 , H04N5/3742 , H04N5/37455 , H04N5/37457 , G01T1/208
Abstract: A photon counting device includes a plurality of pixels each including a photoelectric conversion element configured to convert input light to charge, and an amplifier configured to amplify the charge converted by the photoelectric conversion element and convert the charge to a voltage, an A/D converter configured to convert the voltages output from the amplifiers of the plurality of pixels to digital values; and a conversion unit configured to convert the digital value output from the A/D converter to the number of photons by referring to reference data, for each of the plurality of pixels, and the reference data is created based on a gain and an offset value for each of the plurality of pixels.
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公开(公告)号：US11204432B2
公开(公告)日：2021-12-21
申请号：US16764066
申请日：2018-06-18
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tadashi Maruno , Eiji Toda , Mao Nakajima , Teruo Takahashi , Takafumi Higuchi
Abstract: A photon counting device includes a plurality of pixels each including a photoelectric conversion element configured to convert input light to charge, and an amplifier configured to amplify the charge converted by the photoelectric conversion element and convert the charge to a voltage, an A/D converter configured to convert the voltages output from the amplifiers of the plurality of pixels to digital values; and a conversion unit configured to convert the digital value output from the A/D converter to the number of photons by referring to reference data, for each of the plurality of pixels, and the reference data is created based on a gain and an offset value for each of the plurality of pixels.
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公开(公告)号：US20240257490A1
公开(公告)日：2024-08-01
申请号：US18408737
申请日：2024-01-10
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomochika TAKESHIMA , Akari Ito , Takafumi Higuchi , Yoshinori Hashimoto
CPC classification number: G06V10/44 , G06V10/761
Abstract: A focal position estimation method is a method of estimating a focal position when in focus corresponding to an estimation target image, and includes: an estimation target image acquisition step for acquiring an estimation target image; and a focal position estimation step for estimating a focal position when in focus corresponding to the estimation target image and according to a position in the estimation target image, from the estimation target image acquired in the estimation target image acquisition step, by using a focal position estimation model that is generated through machine learning training and that receives information based on an image as its input and outputs information indicating a focal position when in focus according to a position in the image.
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公开(公告)号：US11921245B2
公开(公告)日：2024-03-05
申请号：US18133578
申请日：2023-04-12
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tadashi Maruno , Eiji Toda , Mao Nakajima , Teruo Takahashi , Takafumi Higuchi
IPC: G01T1/24 , G01T1/208 , H04N25/65 , H04N25/74 , H04N25/75 , H04N25/767 , H04N25/772 , H04N25/778
CPC classification number: G01T1/247 , H04N25/65 , H04N25/74 , H04N25/75 , H04N25/767 , H04N25/772 , H04N25/778 , G01T1/208
Abstract: A photon counting device includes a plurality of pixels each including a photoelectric conversion element configured to convert input light to charge, and an amplifier configured to amplify the charge converted by the photoelectric conversion element and convert the charge to a voltage, an A/D converter configured to convert the voltages output from the amplifiers of the plurality of pixels to digital values; and a conversion unit configured to convert the digital value output from the A/D converter to the number of photons by referring to reference data, for each of the plurality of pixels, and the reference data is created based on a gain and an offset value for each of the plurality of pixels.
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公开(公告)号：US11835667B2
公开(公告)日：2023-12-05
申请号：US17501398
申请日：2021-10-14
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tadashi Maruno , Eiji Toda , Mao Nakajima , Teruo Takahashi , Takafumi Higuchi
IPC: G01T1/24 , H04N25/65 , H04N25/74 , H04N25/75 , H04N25/767 , H04N25/772 , H04N25/778 , G01T1/208
CPC classification number: G01T1/247 , H04N25/65 , H04N25/74 , H04N25/75 , H04N25/767 , H04N25/772 , H04N25/778 , G01T1/208
Abstract: A photon counting device includes a plurality of pixels each including a photoelectric conversion element configured to convert input light to charge, and an amplifier configured to amplify the charge converted by the photoelectric conversion element and convert the charge to a voltage, an A/D converter configured to convert the voltage output from the amplifier of each of the plurality of pixels to a digital value and output the digital value, a correction unit configured to correct the digital value output from the A/D converter so that an influence of a variation in a gain and an offset value among the plurality of pixels is curbed, a calculation unit configured to output a summed value obtained by summing the corrected digital values corresponding to at least two pixels, and a conversion unit configured to convert the summed value output from the calculation unit to a number of photons.
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Patent Agency Ranking
公开(公告)号：US12094138B2
公开(公告)日：2024-09-17
申请号：US17608833
申请日：2020-04-16
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomochika Takeshima , Takafumi Higuchi , Kazuhiro Hotta
IPC: G06T7/30 , G06T11/00 , G06F30/392
CPC classification number: G06T7/30 , G06T11/00 , G06F30/392 , G06T2207/20081 , G06T2207/30148 , G06T2210/32
Abstract: An observation system includes a detector that detects light from a semiconductor device and outputs a detection signal, a 2D camera, an optical device that guides light to the detector and the 2D camera, an image processing unit that generates a first optical image of the semiconductor device based on the detection signal and receives an input of a first CAD image, an image analysis unit that learns a conversion process of the first CAD image by machine learning using the first optical image as training data, and converts the first CAD image into a second CAD image resembling the first optical image by the conversion process based on a result of the learning, and an alignment unit that performs alignment based on a second optical image and the second CAD image.
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公开(公告)号：US11796692B2
公开(公告)日：2023-10-24
申请号：US17501398
申请日：2021-10-14
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tadashi Maruno , Eiji Toda , Mao Nakajima , Teruo Takahashi , Takafumi Higuchi
IPC: G01T1/24 , H04N25/65 , H04N25/74 , H04N25/75 , H04N25/767 , H04N25/772 , H04N25/778 , G01T1/208
CPC classification number: G01T1/247 , H04N25/65 , H04N25/74 , H04N25/75 , H04N25/767 , H04N25/772 , H04N25/778 , G01T1/208
Abstract: A photon counting device includes a plurality of pixels each including a photoelectric conversion element configured to convert input light to charge, and an amplifier configured to amplify the charge converted by the photoelectric conversion element and convert the charge to a voltage, an A/D converter configured to convert the voltage output from the amplifier of each of the plurality of pixels to a digital value and output the digital value, a correction unit configured to correct the digital value output from the A/D converter so that an influence of a variation in a gain and an offset value among the plurality of pixels is curbed, a calculation unit configured to output a summed value obtained by summing the corrected digital values corresponding to at least two pixels, and a conversion unit configured to convert the summed value output from the calculation unit to a number of photons.
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公开(公告)号：US11215717B2
公开(公告)日：2022-01-04
申请号：US16764053
申请日：2018-06-18
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tadashi Maruno , Eiji Toda , Mao Nakajima , Teruo Takahashi , Takafumi Higuchi
Abstract: A photon counting device includes a plurality of pixels each including a photoelectric conversion element configured to convert input light to charge, and an amplifier configured to amplify the charge converted by the photoelectric conversion element and convert the charge to a voltage, an A/D converter configured to convert the voltage output from the amplifier of each of the plurality of pixels to a digital value and output the digital value, a correction unit configured to correct the digital value output from the A/D converter so that an influence of a variation in a gain and an offset value among the plurality of pixels is curbed, a calculation unit configured to output a summed value obtained by summing the corrected digital values corresponding to at least two pixels, and a conversion unit configured to convert the summed value output from the calculation unit to a number of photons.
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公开(公告)号：US12211199B2
公开(公告)日：2025-01-28
申请号：US17608857
申请日：2020-04-16
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomochika Takeshima , Takafumi Higuchi , Kazuhiro Hotta
IPC: G06T7/00 , G06T3/4053 , G06T7/30 , G06F30/392
Abstract: A semiconductor inspection method by an observation system includes a step of acquiring a first pattern image showing a pattern of a semiconductor device, a step of acquiring a second pattern image showing a pattern of the semiconductor device and having a different resolution from a resolution of the first pattern image, a step of learning a reconstruction process of the second pattern image using the first pattern image as training data by machine learning, and reconstructing the second pattern image into a reconstructed image having a different resolution from a resolution of the second pattern image by the reconstruction process based on a result of the learning, and a step of performing alignment based on a region calculated to have a high degree of certainty by the reconstruction process in the reconstructed image and the first pattern image.
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公开(公告)号：US12078767B2
公开(公告)日：2024-09-03
申请号：US18206806
申请日：2023-06-07
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tadashi Maruno , Eiji Toda , Mao Nakajima , Teruo Takahashi , Takafumi Higuchi
IPC: G01T1/24 , H04N25/65 , H04N25/74 , H04N25/75 , H04N25/767 , H04N25/772 , H04N25/778 , G01T1/208
CPC classification number: G01T1/247 , H04N25/65 , H04N25/74 , H04N25/75 , H04N25/767 , H04N25/772 , H04N25/778 , G01T1/208
Abstract: A photon counting device includes a plurality of pixels each including a photoelectric conversion element configured to convert input light to charge, and an amplifier configured to amplify the charge converted by the photoelectric conversion element and convert the charge to a voltage, an A/D converter configured to convert the voltage output from the amplifier of each of the plurality of pixels to a digital value and output the digital value, a correction unit configured to correct the digital value output from the A/D converter so that an influence of a variation in a gain and an offset value among the plurality of pixels is curbed, a calculation unit configured to output a summed value obtained by summing the corrected digital values corresponding to at least two pixels, and a conversion unit configured to convert the summed value output from the calculation unit to a number of photons.
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