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公开(公告)号：US20210155471A1
公开(公告)日：2021-05-27
申请号：US16625695
申请日：2018-07-06
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tatsuya SUGIMOTO , Tomofumi SUZUKI , Kyosuke KOTANI
Abstract: An optical device includes an elastic support portion which includes a torsion bar which extends along a second direction perpendicular to a first direction and a nonlinearity relaxation spring which is connected between the torsion bar and a movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. A comb electrode is disposed along an outer edge of the movable portion.
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公开(公告)号：US20210191106A1
公开(公告)日：2021-06-24
申请号：US16761294
申请日：2018-08-02
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tatsuya SUGIMOTO , Tomofumi SUZUKI , Kyosuke KOTANI , Yutaka KURAMOTO , Daiki SUZUKI
Abstract: A method for manufacturing an optical device includes: preparing a semiconductor substrate that includes a portion corresponding to a base, a movable unit, and an elastic support portion; forming a first resist layer in a region corresponding to the base on a surface of a first semiconductor layer which is opposite to an insulating layer; forming a depression in the first semiconductor layer by etching the first semiconductor layer using the first resist layer as a mask; forming a second resist layer in a region corresponding to a rib portion on a bottom surface of the depression, a side surface of the depression, and the surface of the first semiconductor layer which is opposite to the insulating layer; and forming the rib portion by etching the first semiconductor layer until reaching the insulating layer using the second resist layer as a mask.
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公开(公告)号：US20200049977A1
公开(公告)日：2020-02-13
申请号：US16492684
申请日：2018-03-14
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomofumi SUZUKI , Tatsuya SUGIMOTO , Kyosuke KOTANI
Abstract: An optical module includes a support layer, a device layer which is provided on the support layer, and a movable mirror which is mounted in the device layer. The device layer has a mounting region in which the movable mirror is mounted, and a driving region which is connected to the mounting region. A space corresponding to at least the mounting region and the driving region is formed between the support layer and the device layer. The mounting region is disposed between a pair of elastic support regions included in the driving region and is supported by the pair of elastic support regions.
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公开(公告)号：US20180120156A1
公开(公告)日：2018-05-03
申请号：US15792984
申请日：2017-10-25
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomofumi SUZUKI , Kyosuke KOTANI
Abstract: Provided is a position detection method including splitting detection light into first and second light, the first light being incident on a returning optical path, a portion of the first light being transmitted through a beam splitter and a remaining portion of the first light being reflected by the beam splitter to reach the beam splitter through a movable mirror every time the first light reaches the beam splitter through the movable mirror, combining the first light transmitted though the beam splitter and the second light to generate multiple interference light, extracting a second interference light signal having a wavelength of 1/p (p is a natural number) of a wavelength of detection light from a first interference light signal of the multiple interference light, and calculating a position of the movable portion in a predetermined direction based on the second interference light signal.
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公开(公告)号：US20240192483A1
公开(公告)日：2024-06-13
申请号：US18584740
申请日：2024-02-22
Applicant: Hamamatsu Photonics K.K.
Inventor： Tatsuya SUGIMOTO , Tomofumi SUZUKI , Kyosuke KOTANI , Yutaka KURAMOTO , Daiki SUZUKI
CPC classification number: G02B26/0841 , B81B3/0045 , B81C1/00555 , G02B7/1821 , G02B26/105 , H02N1/008 , B81B2201/042 , B81C2201/013 , B81C2201/0174 , B81C2201/0198
Abstract: An optical device includes a support portion, a movable portion; and a pair of torsion bars. An optical function portion is provided on one surface of the movable portion and a rib portion is provided on the other surface of the movable portion. The rib portion includes eight extending portions of first to eighth extending portions. When setting directions in which the first to eighth extending portions extend as first to eighth extending directions respectively, and setting an angle between the first and second extending directions as a first angle, an angle between the third and fourth extending directions as a second angle, an angle between the fifth and sixth extending directions as a third angle, and an angle between the seventh and eighth extending directions as a fourth angle, each of the first and second angle is larger than each of the third and fourth angle.
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Patent Agency Ranking
公开(公告)号：US20220099430A1
公开(公告)日：2022-03-31
申请号：US17426325
申请日：2020-01-17
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomofumi SUZUKI , Yuya IWAZAKI , Kyosuke KOTANI , Tatsuya SUGIMOTO , Hiromichi TOZUKA
IPC: G01B9/02015 , G01J3/45
Abstract: A processer of an optical module is configured to control a voltage signal having a frequency for causing a movable mirror to resonate, and perform an intensity acquisition process. The intensity acquisition process is a process of acquiring a measurement light intensity of the interference light of the measurement light M times at a first time interval based on the frequency in each of a plurality of cycles among P cycles continuous in the voltage signal, acquiring an addition value of a plurality of the measurement light intensities mutually corresponding for the same number of times, acquiring a laser light intensity of the interference light of the laser light N times at a second time interval based on the frequency in each of the plurality of cycles, and acquiring an addition value of a plurality of the laser light intensities mutually corresponding for the same number of times.
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公开(公告)号：US20210148690A1
公开(公告)日：2021-05-20
申请号：US16625681
申请日：2018-07-06
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomofumi SUZUKI , Kyosuke KOTANI , Tatsuya SUGIMOTO
Abstract: An optical module includes a mirror unit and a beam splitter unit. The mirror unit includes a base with a main surface, a movable mirror, a first fixed mirror, and a drive unit. The beam splitter unit constitutes a first interference optical system for measurement light along with the movable mirror and the first fixed mirror. A mirror surface of the movable mirror and a mirror surface of the first fixed mirror follow a plane parallel to the main surface and face one side in a first direction perpendicular to the main surface. The movable mirror, the drive unit, and at least a part of an optical path between the beam splitter unit and the first fixed mirror are disposed in an airtight space.
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公开(公告)号：US20210132368A1
公开(公告)日：2021-05-06
申请号：US16625702
申请日：2018-07-06
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tatsuya SUGIMOTO , Tomofumi SUZUKI , Kyosuke KOTANI
Abstract: An optical device includes: a base that includes a main surface; a movable unit that includes an optical function unit; and an elastic support unit that is connected between the base and the movable unit, and supports the movable unit so that the movable unit is movable along a first direction perpendicular to the main surface. The elastic support unit includes a lever, a first torsion support portion that extends along a second direction perpendicular to the first direction and is connected between the lever and the movable unit, and a second torsion support portion that extends along the second direction and is connected between the lever and the base. A torsional spring constant of the first torsion support portion is greater than a torsional spring constant of the second torsion support portion.
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公开(公告)号：US20210132364A1
公开(公告)日：2021-05-06
申请号：US16625684
申请日：2018-07-06
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tomofumi SUZUKI , Kyosuke KOTANI , Tatsuya SUGIMOTO , Yutaka KURAMOTO , Katsumi SHIBAYAMA , Noburo HOSOKAWA , Hirokazu YAMAMOTO , Takuo KOYAMA
Abstract: A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The mirror device 20 is provided with a light passage portion 24 that constitutes a first portion of an optical path between the beam splitter unit 3 and the fixed mirror 16. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a second portion of the optical path between the beam splitter unit 3 and the fixed mirror 16. A second surface 21b of the base 21 and a third surface 13a of the optical function member 13 are joined to each other.
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公开(公告)号：US20180195853A1
公开(公告)日：2018-07-12
申请号：US15741558
申请日：2015-07-10
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yoshihisa WARASHINA , Tomofumi SUZUKI , Kohei KASAMORI , Ryosuke OKUMURA , Kyosuke KOTANI
IPC: G01B9/02
CPC classification number: G01B9/02049 , G01B9/02015 , G01B9/02027 , G01B9/02051 , G01J3/0205 , G01J3/021 , G01J3/0262 , G01J3/45 , G01J3/453 , G01J3/4535
Abstract: An optical interferometer includes a branching-combining unit, a first optical system, a second optical system, and a drive unit, which can be MEMS-based components. The branching-combining unit includes a branching surface, an incident surface, an output surface, and a combining surface on an interface between the interior and the exterior of a transparent member. The branching-combining unit, on the branching surface, partially reflects incident light and outputs as first branched light, and transmits the rest of the incident light into the interior as second branched light. The branching-combining unit, on the combining surface, outputs the first branched light to the outside, reflects the second branched light, and combines the light beams to be output to the outside as combined light.
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