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公开(公告)号：US20180195853A1
公开(公告)日：2018-07-12
申请号：US15741558
申请日：2015-07-10
IPC分类号： G01B9/02
CPC分类号： G01B9/02049 , G01B9/02015 , G01B9/02027 , G01B9/02051 , G01J3/0205 , G01J3/021 , G01J3/0262 , G01J3/45 , G01J3/453 , G01J3/4535
摘要： An optical interferometer includes a branching-combining unit, a first optical system, a second optical system, and a drive unit, which can be MEMS-based components. The branching-combining unit includes a branching surface, an incident surface, an output surface, and a combining surface on an interface between the interior and the exterior of a transparent member. The branching-combining unit, on the branching surface, partially reflects incident light and outputs as first branched light, and transmits the rest of the incident light into the interior as second branched light. The branching-combining unit, on the combining surface, outputs the first branched light to the outside, reflects the second branched light, and combines the light beams to be output to the outside as combined light.
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公开(公告)号：US20190033136A1
公开(公告)日：2019-01-31
申请号：US16072634
申请日：2017-02-02
CPC分类号： G01J3/4535 , B81B5/00 , G01B9/02051 , G01B9/02071 , G01B11/00 , G01B11/02 , G01J3/02 , G01J3/0202 , G01J3/0256 , G01J3/06 , G02B26/06
摘要： An optical module includes an actuator that includes a movable part to be moved along a predetermined direction; a first interference optical system that includes a first movable mirror, a first stationary mirror, and a first beam splitter; and a second interference optical system that includes a second movable mirror, a second stationary mirror, and a second beam splitter. The first interference optical system is adapted so that first light reciprocates m times (m is a natural number) between the first beam splitter and the first movable mirror along the predetermined direction. The second interference optical system is adapted so that second light reciprocates n times (n is a natural number greater than m) between the second beam splitter and the second movable mirror along the predetermined direction.
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公开(公告)号：US20180217001A1
公开(公告)日：2018-08-02
申请号：US15748286
申请日：2015-09-03
摘要： An optical interferometer includes a branching-combining unit, a first optical system, a second optical system, and a drive unit. The branching-combining unit includes a branching surface, an incident surface, a first output surface, a combining surface, and a second output surface on an interface of a transparent member, the branching surface partially reflects incident light and outputs as first branched light, and transmits the rest of the incident light into the interior as second branched light, the combining surface partially combines the first branched light and the second branched light to be output to the outside as first combined light, and combines the rest of the first branched light and the second branched light to be propagated into the interior as second combined light, and the second output surface partially outputs the second combined light to the outside.
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公开(公告)号：US20160202037A1
公开(公告)日：2016-07-14
申请号：US14911583
申请日：2014-07-31
CPC分类号： G01B9/02051 , G01J3/0256 , G01J3/4532 , G01J3/4535
摘要： A method of manufacturing an optical interferometer includes a first step of forming a first semiconductor portion for a beam splitter and a second semiconductor portion for a movable mirror on a main surface of a support substrate and a first insulating layer formed on the main surface, a second step of disposing a first wall portion between a first side surface of the first semiconductor portion and a second side surface in the second semiconductor portion, and a third step of forming a mirror surface in the second semiconductor portion by forming a first metal film on the second side surface using a shadow mask. In the third step, the first side surface is masked by the mask portion and the first wall portion and the first metal film is formed in a state in which the second side portion is exposed from an opening portion.
摘要翻译： 一种制造光干涉仪的方法包括：形成用于分束器的第一半导体部分和在支撑基板的主表面上形成的可移动反射镜的第二半导体部分和形成在主表面上的第一绝缘层的第一步骤， 在第一半导体部分的第一侧表面和第二半导体部分中的第二侧表面之间布置第一壁部分的第二步骤，以及通过在第二半导体部分中形成第一金属膜来形成第二半导体部分中的镜面的第三步骤 第二侧面使用荫罩。 在第三步骤中，第一侧表面被掩模部分掩蔽，并且第一壁部分和第一金属膜形成在第二侧部分从开口部分露出的状态。
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