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公开(公告)号：US20180195853A1
公开(公告)日：2018-07-12
申请号：US15741558
申请日：2015-07-10
IPC分类号： G01B9/02
CPC分类号： G01B9/02049 , G01B9/02015 , G01B9/02027 , G01B9/02051 , G01J3/0205 , G01J3/021 , G01J3/0262 , G01J3/45 , G01J3/453 , G01J3/4535
摘要： An optical interferometer includes a branching-combining unit, a first optical system, a second optical system, and a drive unit, which can be MEMS-based components. The branching-combining unit includes a branching surface, an incident surface, an output surface, and a combining surface on an interface between the interior and the exterior of a transparent member. The branching-combining unit, on the branching surface, partially reflects incident light and outputs as first branched light, and transmits the rest of the incident light into the interior as second branched light. The branching-combining unit, on the combining surface, outputs the first branched light to the outside, reflects the second branched light, and combines the light beams to be output to the outside as combined light.
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公开(公告)号：US20220085095A1
公开(公告)日：2022-03-17
申请号：US17310780
申请日：2020-02-25
发明人： Ryosuke OKUMURA , Yuki YOSHIDA , Yoshinori TSUKADA
IPC分类号： H01L27/146 , H01L31/18
摘要： A method for manufacturing a light detection device includes a first process of preparing a semiconductor wafer having a first main surface and a second main surface, a second process of providing a first support substrate on the first main surface, a third process of cutting the semiconductor wafer and the first support substrate in a state where the first support substrate is provided on the first main surface, and obtaining a light receiving element in a state where a support member is provided on a first surface, a fourth process of, by using a plurality of connection members arranged between a second surface and a mounting surface of a circuit structure, electrically and physically connecting the light receiving element and the circuit structure in a state where the support member is provided on the first surface, and a fifth process of removing the support member from the first surface.
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公开(公告)号：US20190033136A1
公开(公告)日：2019-01-31
申请号：US16072634
申请日：2017-02-02
CPC分类号： G01J3/4535 , B81B5/00 , G01B9/02051 , G01B9/02071 , G01B11/00 , G01B11/02 , G01J3/02 , G01J3/0202 , G01J3/0256 , G01J3/06 , G02B26/06
摘要： An optical module includes an actuator that includes a movable part to be moved along a predetermined direction; a first interference optical system that includes a first movable mirror, a first stationary mirror, and a first beam splitter; and a second interference optical system that includes a second movable mirror, a second stationary mirror, and a second beam splitter. The first interference optical system is adapted so that first light reciprocates m times (m is a natural number) between the first beam splitter and the first movable mirror along the predetermined direction. The second interference optical system is adapted so that second light reciprocates n times (n is a natural number greater than m) between the second beam splitter and the second movable mirror along the predetermined direction.
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公开(公告)号：US20180217001A1
公开(公告)日：2018-08-02
申请号：US15748286
申请日：2015-09-03
摘要： An optical interferometer includes a branching-combining unit, a first optical system, a second optical system, and a drive unit. The branching-combining unit includes a branching surface, an incident surface, a first output surface, a combining surface, and a second output surface on an interface of a transparent member, the branching surface partially reflects incident light and outputs as first branched light, and transmits the rest of the incident light into the interior as second branched light, the combining surface partially combines the first branched light and the second branched light to be output to the outside as first combined light, and combines the rest of the first branched light and the second branched light to be propagated into the interior as second combined light, and the second output surface partially outputs the second combined light to the outside.
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