ORGANIC-INORGANIC COMPOSITE FILM AND METHOD FOR MANUFACTURING THE SAME
    3.
    发明申请
    ORGANIC-INORGANIC COMPOSITE FILM AND METHOD FOR MANUFACTURING THE SAME 审中-公开
    有机无机复合膜及其制造方法

    公开(公告)号:US20150065642A1

    公开(公告)日:2015-03-05

    申请号:US14070777

    申请日:2013-11-04

    CPC classification number: C23C14/3464 C08J7/06 C08J2367/02 C23C14/06

    Abstract: Disclosed is a method of manufacturing an organic-inorganic composite film. The method includes co-sputtering an inorganic target and a fluorine-containing organic polymer target, thereby simultaneously depositing atoms from the inorganic target and atoms from the fluorine-containing organic polymer target on a substrate. As such, an organic-inorganic composite film is obtained. The organic-inorganic composite film includes a homogeneous, amorphous, and nonporous material composed of carbon, fluorine, oxygen and/or nitrogen, and M. M can be silicon, titanium, aluminum, chromium, or combinations thereof.

    Abstract translation: 公开了一种制造有机 - 无机复合膜的方法。 该方法包括共溅射无机靶和含氟有机聚合物靶,从而同时将来自无机靶的原子和来自含氟有机聚合物靶的原子沉积在基底上。 因此,得到有机 - 无机复合膜。 有机 - 无机复合膜包括由碳,氟,氧和/或氮组成的均匀,无定形和无孔材料,M可以是硅,钛,铝,铬或其组合。

    ORGANIC-INORGANIC COMPOSITE FILM AND METHOD FOR MANUFACTURING THE SAME
    5.
    发明申请
    ORGANIC-INORGANIC COMPOSITE FILM AND METHOD FOR MANUFACTURING THE SAME 审中-公开
    有机无机复合膜及其制造方法

    公开(公告)号:US20150126681A1

    公开(公告)日:2015-05-07

    申请号:US14590633

    申请日:2015-01-06

    CPC classification number: C23C14/3464 C08J7/06 C23C14/06

    Abstract: A method of manufacturing an organic-inorganic composite film is provided. The method includes co-sputtering an inorganic target and a fluorine-containing organic polymer target, thereby simultaneously depositing atoms from the inorganic target and atoms from the fluorine-containing organic polymer target on a substrate. As such, an organic-inorganic composite film is obtained. The organic-inorganic composite film includes a homogeneous, amorphous, and nonporous material composed of carbon, fluorine and/or chlorine, oxygen and/or nitrogen, and inorganic element M. The inorganic element M forms chemical bondings with carbon, fluorine, chlorine, oxygen and/or nitrogen, and wherein the bond length forms therefore is less than 2.78 Å.

    Abstract translation: 提供了制造有机 - 无机复合膜的方法。 该方法包括共溅射无机靶和含氟有机聚合物靶,从而同时将来自无机靶的原子和来自含氟有机聚合物靶的原子沉积在基底上。 因此,得到有机 - 无机复合膜。 有机 - 无机复合膜包括由碳,氟和/或氯,氧和/或氮和无机元素M组成的均匀,无定形和无孔材料。无机元素M与碳,氟,氯, 氧和/或氮,并且其中所述键长度因此小于2.78。

    REACTION DEVICE AND MANUFACTURE METHOD FOR CHEMICAL VAPOR DEPOSITION
    6.
    发明申请
    REACTION DEVICE AND MANUFACTURE METHOD FOR CHEMICAL VAPOR DEPOSITION 有权
    用于化学气相沉积的反应装置和制造方法

    公开(公告)号:US20140370689A1

    公开(公告)日:2014-12-18

    申请号:US14096390

    申请日:2013-12-04

    Abstract: A reaction device for chemical vapor deposition is disclosed. The reaction device includes a chamber, a susceptor, an inlet pipe unit and an outlet pipe. The susceptor is disposed within the chamber. The inlet pipe unit includes a plurality of feeding openings horizontally facing the peripheral area of the susceptor to input at least one reaction gas into the chamber. The at least one reaction gas is guided to move from the peripheral area of the susceptor and along a surface of the susceptor to reach the center of the susceptor. The outlet pipe includes a discharge opening whose position is corresponding to the center of the susceptor so as to discharge the reaction gas flowing to the center of the susceptor out of the chamber.

    Abstract translation: 公开了用于化学气相沉积的反应装置。 反应装置包括室,基座,入口管单元和出口管。 基座设置在室内。 入口管单元包括水平地面对基座的周边区域的多个供给开口,以将至少一个反应气体输入到室中。 引导至少一个反应气体从基座的周边区域和基座的表面移动以到达基座的中心。 出口管包括排出口,该排出口的位置对应于基座的中心,以便将流过基座中心的反应气体排出室外。

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