公开(公告)号：US20240186416A1

公开(公告)日：2024-06-06

申请号：US18414290

申请日：2024-01-16

Applicant: Intel Corporation

Inventor： Kevin P. O'Brien ,  Carl NAYLOR ,  Chelsey DOROW ,  Kirby MAXEY ,  Tanay GOSAVI ,  Ashish Verma PENUMATCHA ,  Shriram SHIVARAMAN ,  Chia-Ching LIN ,  Sudarat LEE ,  Uygar E. AVCI

IPC: H01L29/78 ,  H01L21/02 ,  H01L29/06 ,  H01L29/24 ,  H01L29/423 ,  H01L29/66

CPC classification number: H01L29/7853 ,  H01L29/0673 ,  H01L29/24 ,  H01L29/42392 ,  H01L29/6653 ,  H01L29/6681 ,  H01L21/02568 ,  H01L21/0262

Abstract: Embodiments disclosed herein comprise semiconductor devices with two dimensional (2D) semiconductor channels and methods of forming such devices. In an embodiment, the semiconductor device comprises a source contact and a drain contact. In an embodiment, a 2D semiconductor channel is between the source contact and the drain contact. In an embodiment, the 2D semiconductor channel is a shell.

公开(公告)号：US20230087668A1

公开(公告)日：2023-03-23

申请号：US17481250

申请日：2021-09-21

Applicant: Intel Corporation

Inventor： Chelsey DOROW ,  Kevin P. O'BRIEN ,  Carl NAYLOR ,  Kirby MAXEY ,  Sudarat LEE ,  Ashish Verma PENUMATCHA ,  Uygar E. AVCI

IPC: H01L29/786 ,  H01L29/10 ,  H01L29/423

Abstract: Thin film transistors having strain-inducing structures integrated with two-dimensional (2D) channel materials are described. In an example, an integrated circuit structure includes a two-dimensional (2D) material layer above a substrate. A gate stack is on the 2D material layer, the gate stack having a first side opposite a second side. A first gate spacer is on the 2D material layer and adjacent to the first side of the gate stack. A second gate spacer is on the 2D material layer and adjacent to the second side of the gate stack. The first gate spacer and the second gate spacer induce a strain on the 2D material layer. A first conductive structure is on the 2D material layer and adjacent to the first gate spacer. A second conductive structure is on the 2D material layer and adjacent to the second gate spacer.

公开(公告)号：US20210408288A1

公开(公告)日：2021-12-30

申请号：US16913835

申请日：2020-06-26

Applicant: Intel Corporation

Inventor： Kevin P. O'Brien ,  Carl NAYLOR ,  Chelsey DOROW ,  Kirby MAXEY ,  Tanay GOSAVI ,  Ashish Verma PENUMATCHA ,  Shriram SHIVARAMAN ,  Chia-Ching LIN ,  Sudarat LEE ,  Uygar E. AVCI

IPC: H01L29/78 ,  H01L29/423 ,  H01L29/06 ,  H01L29/24 ,  H01L29/66

Abstract: Embodiments disclosed herein comprise semiconductor devices with two dimensional (2D) semiconductor channels and methods of forming such devices. In an embodiment, the semiconductor device comprises a source contact and a drain contact. In an embodiment, a 2D semiconductor channel is between the source contact and the drain contact. In an embodiment, the 2D semiconductor channel is a shell.

公开(公告)号：US20230090093A1

公开(公告)日：2023-03-23

申请号：US17479769

申请日：2021-09-20

Applicant: Intel Corporation

Inventor： Ashish Verma PENUMATCHA ,  Uygar E. AVCI ,  Chelsey DOROW ,  Tanay GOSAVI ,  Chia-Ching LIN ,  Carl NAYLOR ,  Nazila HARATIPOUR ,  Kevin P. O'BRIEN ,  Seung Hoon SUNG ,  Ian A. YOUNG ,  Urusa ALAAN

IPC: H01L29/423 ,  H01L29/10 ,  H01L29/08

Abstract: Thin film transistors having semiconductor structures integrated with two-dimensional (2D) channel materials are described. In an example, an integrated circuit structure includes a two-dimensional (2D) material layer above a substrate. A gate stack is above the 2D material layer, the gate stack having a first side opposite a second side. A semiconductor structure including germanium is included, the semiconductor structure laterally adjacent to and in contact with the 2D material layer adjacent the first side of the gate stack. A first conductive structure is adjacent the first side of the second gate stack, the first conductive structure over and in direct electrical contact with the semiconductor structure. The semiconductor structure is intervening between the first conductive structure and the 2D material layer. A second conductive structure is adjacent the second side of the second gate stack, the second conductive structure over and in direct electrical contact with the 2D material layer.

公开(公告)号：US20230086499A1

公开(公告)日：2023-03-23

申请号：US17479155

申请日：2021-09-20

Applicant: Intel Corporation

Inventor： Kirby MAXEY ,  Ashish Verma PENUMATCHA ,  Kevin P. O'BRIEN ,  Chelsey DOROW ,  Uygar E. AVCI ,  Sudarat LEE ,  Carl NAYLOR ,  Tanay GOSAVI

IPC: H01L29/786 ,  H01L29/78

Abstract: Thin film transistors having fin structures integrated with two-dimensional (2D) channel materials are described. In an example, an integrated circuit structure includes a plurality of insulator fins above a substrate. A two-dimensional (2D) material layer is over the plurality of insulator fins. A gate dielectric layer is on the 2D material layer. A gate electrode is on the gate dielectric layer. A first conductive contact is on the 2D material layer adjacent to a first side of the gate electrode. A second conductive contact is on the 2D material layer adjacent to a second side of the gate electrode, the second side opposite the first side.

公开(公告)号：US20220149192A1

公开(公告)日：2022-05-12

申请号：US17093452

申请日：2020-11-09

Applicant: Intel Corporation

Inventor： Kirby MAXEY ,  Ashish Verma PENUMATCHA ,  Carl NAYLOR ,  Chelsey DOROW ,  Kevin P. O'BRIEN ,  Shriram SHIVARAMAN ,  Tanay GOSAVI ,  Uygar E. AVCI ,  Sudarat LEE

IPC: H01L29/76 ,  H01L29/24 ,  H01L29/786 ,  H01L29/66

Abstract: Thin film transistors having electrostatic double gates are described. In an example, an integrated circuit structure includes an insulator layer above a substrate. A first gate stack is on the insulator layer. A 2D channel material layer is on the first gate stack. A second gate stack is on a first portion of the 2D channel material layer, the second gate stack having a first side opposite a second side. A first conductive contact is adjacent the first side of the second gate stack, the first conductive contact on a second portion of the 2D channel material layer. A second conductive contact is adjacent the second side of the second gate stack, the second conductive contact on a third portion of the 2D channel material layer. A gate electrode of the first gate stack extends beneath a portion of the first conductive contact and beneath a portion of the second conductive contact.

公开(公告)号：US20210090991A1

公开(公告)日：2021-03-25

申请号：US16580149

申请日：2019-09-24

Applicant: Intel Corporation

Inventor： Abhishek A. SHARMA ,  Carl NAYLOR ,  Urusa ALAAN

IPC: H01L23/522 ,  H01L23/528 ,  H01L23/532

Abstract: Integrated circuit structures having linerless self-forming barriers, and methods of fabricating integrated circuit structures having linerless self-forming barriers, are described. In an example, an integrated circuit structure includes a dielectric material above a substrate. An interconnect structure is in a trench in the dielectric material. The interconnect structure includes a conductive fill material and a two-dimensional (2D) crystalline liner. The 2D crystalline liner is in direct contact with the dielectric material and with the conductive fill material. The 2D crystalline liner includes a same metal species as the conductive fill material.

公开(公告)号：US20230113614A1

公开(公告)日：2023-04-13

申请号：US17485185

申请日：2021-09-24

Applicant: Intel Corporation

Inventor： Kevin P. O'BRIEN ,  Chelsey DOROW ,  Carl NAYLOR ,  Kirby MAXEY ,  Sudarat LEE ,  Ashish Verma PENUMATCHA ,  Uygar E. AVCI ,  Scott B. CLENDENNING ,  Urusa ALAAN ,  Tristan A. TRONIC

IPC: H01L29/423 ,  H01L29/786 ,  H01L27/12

Abstract: Thin film transistors having CMOS functionality integrated with two-dimensional (2D) channel materials are described. In an example, an integrated circuit structure includes a first device including a first two-dimensional (2D) material layer, and a first gate stack around the first 2D material layer. The first gate stack has a gate electrode around a gate dielectric layer. A second device is stacked on the first device. The second device includes a second 2D material layer, and a second gate stack around the second 2D material layer. The second gate stack has a gate electrode around a gate dielectric layer. The second 2D material layer has a composition different than a composition of the first 2D material layer.

公开(公告)号：US20220199799A1

公开(公告)日：2022-06-23

申请号：US17131706

申请日：2020-12-22

Applicant: Intel Corporation

Inventor： Kevin P. O'BRIEN ,  Chelsey DOROW ,  Carl NAYLOR ,  Kirby MAXEY ,  Tanay GOSAVI ,  Uygar E. AVCI ,  Ashish Verma PENUMATCHA ,  Chia-Ching LIN ,  Shriram SHIVARAMAN ,  Sudarat LEE

IPC: H01L29/49 ,  H01L29/51 ,  H01L29/786 ,  H01L29/06 ,  H01L29/24 ,  H01L29/66

Abstract: Thin film transistors having boron nitride integrated with two-dimensional (2D) channel materials are described. In an example, an integrated circuit structure includes a first gate stack above a substrate. A 2D channel material layer is above the first gate stack. A second gate stack is above the 2D channel material layer, the second gate stack having a first side opposite a second side. A first conductive contact is adjacent the first side of the second gate stack and in contact with the 2D channel material layer. A second conductive contact is adjacent the second side of the second gate stack and in contact with the 2D channel material layer. A hexagonal boron nitride (hBN) layer is included between the first gate stack and the 2D channel material layer, between the second gate stack and the 2D channel material layer, or both.

公开(公告)号：US20220148917A1

公开(公告)日：2022-05-12

申请号：US17648821

申请日：2022-01-25

Applicant: Intel Corporation

Inventor： Carl NAYLOR ,  Ashish AGRAWAL ,  Kevin LIN ,  Abhishek Anil SHARMA ,  Mauro KOBRINSKY ,  Christopher JEZEWSKI ,  Urusa ALAAN

IPC: H01L21/768 ,  H01L21/683 ,  H01L23/532

Abstract: An aspect of the disclosure relates to an integrated circuit. The integrated circuit includes a first electrically conductive structure, a thin film crystal layer located on the first electrically conductive structure, and a second electrically conductive structure including metal e.g. copper. The second electrically conductive structure is located on the thin film crystal layer. The first electrically conductive structure is electrically connected to the second electrically conductive structure through the thin film crystal layer. The thin film crystal layer may be provided as a copper diffusion barrier.