公开(公告)号：US20240105770A1

公开(公告)日：2024-03-28

申请号：US17954291

申请日：2022-09-27

Applicant: Intel Corporation

Inventor： Tao CHU ,  Guowei XU ,  Chia-Ching LIN ,  Minwoo JANG ,  Feng ZHANG ,  Ting-Hsiang HUNG

IPC: H01L29/06 ,  H01L21/8234 ,  H01L29/778 ,  H01L29/786

CPC classification number: H01L29/0673 ,  H01L21/823412 ,  H01L29/778 ,  H01L29/78696

Abstract: Embodiments disclosed herein include transistors and methods of forming transistors. In an embodiment, a transistor comprises a source, a drain, and a pair of spacers between the source and the drain. In an embodiment, a semiconductor channel is between the source and the drain, where the semiconductor channel passes through the pair of spacers. In an embodiment, the semiconductor channel has a first thickness within the pair of spacers and a second thickness between the pair of spacers, where the second thickness is less than the first thickness. In an embodiment, the transistor further comprises a gate stack over the semiconductor channel between the pair of spacers.

公开(公告)号：US20240008290A1

公开(公告)日：2024-01-04

申请号：US17855626

申请日：2022-06-30

Applicant: INTEL CORPORATION

Inventor： Chia-Ching LIN ,  Shriram SHIVARAMAN ,  Kevin P. O'BRIEN ,  Ashish Verma PENUMATCHA ,  Chelsey DOROW ,  Kirby MAXEY ,  Carl H. NAYLOR ,  Sudarat LEE ,  Uygar E. AVCI ,  Sou-Chi CHANG

IPC: H01L27/11507 ,  H01L29/51 ,  H01L29/66 ,  H01L29/78 ,  H01L23/48

CPC classification number: H01L27/11507 ,  H01L29/516 ,  H01L29/6684 ,  H01L29/78391 ,  H01L23/481

Abstract: Embodiments described herein may be related to apparatuses, processes, systems, and/or techniques directed to creating back end of line 2D transistors that include a metal-ferroelectric-metal-insulator-semiconductor structure used as a memory cell. In embodiments, a combination wet etch and dry etch process may be used to form the 2D transistors. Other embodiments may be described and/or claimed.

公开(公告)号：US20230420511A1

公开(公告)日：2023-12-28

申请号：US17850623

申请日：2022-06-27

Applicant: Intel Corporation

Inventor： Carl H. NAYLOR ,  Kirby MAXEY ,  Kevin P. O'BRIEN ,  Chelsey DOROW ,  Sudarat LEE ,  Ashish Verma PENUMATCHA ,  Uygar E. AVCI ,  Matthew V. METZ ,  Scott B. CLENDENNING ,  Chia-Ching LIN ,  Carly ROGAN ,  Arnab SEN GUPTA

IPC: H01L29/06 ,  H01L29/778 ,  H01L29/786 ,  H01L29/18 ,  H01L21/02

CPC classification number: H01L29/0673 ,  H01L29/778 ,  H01L29/78696 ,  H01L21/02568 ,  H01L21/02645 ,  H01L21/02598 ,  H01L21/02485 ,  H01L29/18

Abstract: Embodiments described herein may be related to apparatuses, processes, systems, and/or techniques for a transistor structure that includes stacked nanoribbons as a single crystal or monolayer, such as a transition metal dichalcogenide (TMD) layer, grown on a silicon wafer using a seeding material. Other embodiments may be described and/or claimed.

公开(公告)号：US20220310901A1

公开(公告)日：2022-09-29

申请号：US17211736

申请日：2021-03-24

Applicant: Intel Corporation

Inventor： Kaan OGUZ ,  Tanay GOSAVI ,  Emily WALKER ,  Chia-Ching LIN ,  Ian A. YOUNG

IPC: H01L43/02 ,  H01L27/22 ,  H01L43/06 ,  H01L43/10

Abstract: Spin orbit torque (SOT) devices with topological insulator (TI) and heavy metal insert are described. In an example, an integrated circuit structure includes a spin orbit coupling (SOC) interconnect including a TI material. A magnetic layer is above the SOC interconnect. An insert layer includes a heavy metal between and in contact with the TI material and the magnetic layer.

公开(公告)号：US20200006643A1

公开(公告)日：2020-01-02

申请号：US16024712

申请日：2018-06-29

Applicant: Intel Corporation

Inventor： Tanay GOSAVI ,  Sasikanth MANIPATRUNI ,  Chia-Ching LIN ,  Gary ALLEN ,  Scott B. CLENDENING ,  Ian YOUNG

IPC: H01L43/12 ,  H01L43/02 ,  H01F10/32 ,  H01F41/34 ,  G11C11/16 ,  H01L27/22

Abstract: Embodiments herein relate to manufacturing a magnetic random access memory (MRAM). In particular, a process may include coupling a side of a magnetic free layer of a magnetic tunnel junction (MTJ) to a first side of a hybrid spin orbit torque (SOT) electrode-insert layer, coupling a first side of an atomic layer etching (ALE) etch layer to a second side of the hybrid SOT electrode-insert layer opposite the first side, applying an interlayer dielectric (ILD) layer to edges of the MTJ, the SOT electrode and the etch layers, the ILD layer in a plane substantially perpendicular to a plane of the MTJ, SOT electrode and ALE etch layers, and etching the ALE etch layer using ALE until the SOT layer is exposed.

公开(公告)号：US20240006521A1

公开(公告)日：2024-01-04

申请号：US17855620

申请日：2022-06-30

Applicant: Intel Corporation

Inventor： Chia-Ching LIN ,  Shriram SHIVARAMAN ,  Kevin P. O'BRIEN ,  Ashish Verma PENUMATCHA ,  Chelsey DOROW ,  Kirby MAXEY ,  Carl H. NAYLOR ,  Sudarat LEE ,  Uygar E. AVCI

IPC: H01L29/775 ,  H01L27/12 ,  H01L29/78 ,  H01L29/40 ,  H01L29/66 ,  H01L29/417

CPC classification number: H01L29/775 ,  H01L27/1255 ,  H01L29/78391 ,  H01L29/401 ,  H01L29/66969 ,  H01L29/41733 ,  H01L27/1259 ,  H01L29/0673

Abstract: Embodiments described herein may be related to apparatuses, processes, systems, and/or techniques directed to creating back end of line 2D transistors that may be used as access transistors for a memory cell. In embodiments, a combination wet etch and dry etch process may be used to form the 2D transistors. Other embodiments may be described and/or claimed.

公开(公告)号：US20240006484A1

公开(公告)日：2024-01-04

申请号：US17855639

申请日：2022-06-30

Applicant: Intel Corporation

Inventor： Ashish Verma PENUMATCHA ,  Kevin P. O'BRIEN ,  Kirby MAXEY ,  Carl H. NAYLOR ,  Chelsey DOROW ,  Uygar E. AVCI ,  Matthew V. METZ ,  Sudarat LEE ,  Chia-Ching LIN ,  Sean T. MA

IPC: H01L29/06 ,  H01L29/778 ,  H01L29/423 ,  H01L29/786

CPC classification number: H01L29/0673 ,  H01L29/78696 ,  H01L29/42392 ,  H01L29/778

Abstract: Embodiments disclosed herein include transistors and methods of forming transistors. In an embodiment, the transistor comprises a channel with a first end and a second end opposite from the first end, a first spacer around the first end of the channel, a second spacer around the second end of the channel, and a gate stack over the channel, where the gate stack is between the first spacer and the second spacer. In an embodiment, the transistor may further comprise a first extension contacting the first end of the channel; and a second extension contacting the first end of the channel. In an embodiment, the transistor further comprises conductive layers over the first extension and the second extension outside of the first spacer and the second spacer.

公开(公告)号：US20230420510A1

公开(公告)日：2023-12-28

申请号：US17850078

申请日：2022-06-27

Applicant: Intel Corporation

Inventor： Carl H. NAYLOR ,  Kirby MAXEY ,  Kevin P. O'BRIEN ,  Chelsey DOROW ,  Sudarat LEE ,  Ashish Verma PENUMATCHA ,  Uygar E. AVCI ,  Matthew V. METZ ,  Scott B. CLENDENNING ,  Jiun-Ruey CHEN ,  Chia-Ching LIN ,  Carly ROGAN

IPC: H01L29/06 ,  H01L29/778 ,  H01L29/786 ,  H01L29/18 ,  H01L21/02

CPC classification number: H01L29/0673 ,  H01L29/778 ,  H01L29/78696 ,  H01L29/18 ,  H01L21/02499 ,  H01L21/02568 ,  H01L21/02485

Abstract: Embodiments described herein may be related to apparatuses, processes, and techniques directed to creating a transistor structure by selectively growing a 2D TMD directly in a stacked channel configuration, such as a stacked nanowire or nanoribbon formation. In embodiments, this TMD growth may occur for all of the nanowires or nanoribbons in the transistor structure in one stage. Placement of a SAM on a plurality of dielectric layers within the transistor structure stack facilitates channel deposition and channel geometry in the stacked channel configuration. Other embodiments may be described and/or claimed.

公开(公告)号：US20210408288A1

公开(公告)日：2021-12-30

申请号：US16913835

申请日：2020-06-26

Applicant: Intel Corporation

Inventor： Kevin P. O'Brien ,  Carl NAYLOR ,  Chelsey DOROW ,  Kirby MAXEY ,  Tanay GOSAVI ,  Ashish Verma PENUMATCHA ,  Shriram SHIVARAMAN ,  Chia-Ching LIN ,  Sudarat LEE ,  Uygar E. AVCI

IPC: H01L29/78 ,  H01L29/423 ,  H01L29/06 ,  H01L29/24 ,  H01L29/66

Abstract: Embodiments disclosed herein comprise semiconductor devices with two dimensional (2D) semiconductor channels and methods of forming such devices. In an embodiment, the semiconductor device comprises a source contact and a drain contact. In an embodiment, a 2D semiconductor channel is between the source contact and the drain contact. In an embodiment, the 2D semiconductor channel is a shell.

公开(公告)号：US20200212055A1

公开(公告)日：2020-07-02

申请号：US16236047

申请日：2018-12-28

Applicant: Intel Corporation

Inventor： Chia-Ching LIN ,  Sasikanth MANIPATRUNI ,  Tanay GOSAVI ,  Dmitri NIKONOV ,  Sou-Chi CHANG ,  Uygar E. AVCI ,  Ian A. YOUNG

IPC: H01L27/11507

Abstract: A memory device comprises a trench within an insulating layer. A bottom electrode material is along sidewalls and a bottom of the trench, the bottom electrode material conformal to a top surface of the insulating layer. A ferroelectric material is conformal to the bottom electrode. A top electrode material is conformal to the ferroelectric material, wherein the bottom electrode material, the ferroelectric material and the top electrode material all extend above and across the top surface of the insulating layer.