Micro-fabricated device with thermoelectric device and method of making
    3.
    发明授权
    Micro-fabricated device with thermoelectric device and method of making 有权
    具有热电装置的微制造装置及其制造方法

    公开(公告)号:US07205675B2

    公开(公告)日:2007-04-17

    申请号:US10353632

    申请日:2003-01-29

    IPC分类号: H01L23/38 H01L27/16 F25B21/02

    摘要: A micro-fabricated device, includes a support structure having an aperture formed therein, and a device substrate disposed within the aperture. The micro-fabricated device further includes a thermally isolating structure thermally coupling the device substrate to the support structure. The thermally isolating structure includes at least one n-doped region and at least one p-doped region formed on or in the thermally isolating structure and separated from each other. In addition, the thermally isolating structure includes an electrical interconnect connecting at least one n-doped region and at least one p-doped region, forming an integrated thermoelectric device.

    摘要翻译: 微制造装置包括其中形成有孔的支撑结构和设置在孔内的装置基板。 微制造装置还包括将装置基板热耦合到支撑结构的热隔离结构。 热隔离结构包括至少一个n掺杂区域和形成在隔热结构上或隔热结构中并且彼此分离的至少一个p掺杂区域。 此外,隔热结构包括连接至少一个n掺杂区域和至少一个p掺杂区域的电互连,形成集成的热电装置。