PHOTOIONIZATION GAS SENSOR
    1.
    发明公开

    公开(公告)号:US20230176011A1

    公开(公告)日:2023-06-08

    申请号:US17709567

    申请日:2022-03-31

    CPC classification number: G01N27/66

    Abstract: Disclosed is a photoionization gas sensor including an ultraviolet generating module having a first substrate, a second substrate, and a third substrate sequentially coupled in a vertical direction, and configured to generate ultraviolet by applying an electric field to a noble gas filling a first cavity, the first cavity formed in a central portion of the second substrate, and a measuring module configured to collect an electrical signal, the electrical signal being generated such that an electric field is applied to a passage, through which gas ionized by ultraviolet passes, so as to allow the ionized gas to come into contact with an electrode, thereby having a small volume and being operated at a low voltage.

Patent Agency Ranking