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公开(公告)号：US07920317B2
公开(公告)日：2011-04-05
申请号：US12221606
申请日：2008-08-04
申请人： Kar Yue Lee , Eugene E. Fike, III , Mark B. Andersson , John J. Fijol , Jorma Antero Peltola , Susan Oakley , Roger W. Barton
发明人： Kar Yue Lee , Eugene E. Fike, III , Mark B. Andersson , John J. Fijol , Jorma Antero Peltola , Susan Oakley , Roger W. Barton
CPC分类号： G02B26/004
摘要： The invention relates to a display apparatus including a first substrate supporting an array of light modulators, a second substrate separated from the first substrate by a gap, a fluid substantially filling the gap, sealing material joining the first substrate to the second substrate, and a bubble trapping region within a space enclosed by the sealing material for substantially constraining a location of a bubble trapped within the gap. In some embodiments, the bubble trapping region extends along a majority of a side of at least one of the substrates. In some embodiments, the fluid has a viscosity less than 70 centipoise.
摘要翻译： 本发明涉及一种显示装置，包括：支撑光调制器阵列的第一基板，通过间隙与第一基板隔开的第二基板，基本上填充间隙的流体，将第一基板连接到第二基板的密封材料，以及 在由密封材料包围的空间内的气泡捕获区域，用于基本上限制在间隙内捕获的气泡的位置。 在一些实施例中，气泡捕获区沿着至少一个基底的一侧的大部分延伸。 在一些实施方案中，流体的粘度小于70厘泊。
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公开(公告)号：US20100027100A1
公开(公告)日：2010-02-04
申请号：US12221606
申请日：2008-08-04
申请人： Kar Yue Lee , Eugene E. Fike, III , Mark B. Andersson , John J. Fijol , Jorma Antero Peltola , Susan Oakley , Roger W. Barton
发明人： Kar Yue Lee , Eugene E. Fike, III , Mark B. Andersson , John J. Fijol , Jorma Antero Peltola , Susan Oakley , Roger W. Barton
CPC分类号： G02B26/004
摘要： The invention relates to a display apparatus including a first substrate supporting an array of light modulators, a second substrate separated from the first substrate by a gap, a fluid substantially filling the gap, sealing material joining the first substrate to the second substrate, and a bubble trapping region within a space enclosed by the sealing material for substantially constraining a location of a bubble trapped within the gap. In some embodiments, the bubble trapping region extends along a majority of a side of at least one of the substrates. In some embodiments, the fluid has a viscosity less than 70 centipoise.
摘要翻译： 本发明涉及一种显示装置，包括：支撑光调制器阵列的第一基板，通过间隙与第一基板隔开的第二基板，基本上填充间隙的流体，将第一基板连接到第二基板的密封材料，以及 在由密封材料包围的空间内的气泡捕获区域，用于基本上限制在间隙内捕获的气泡的位置。 在一些实施例中，气泡捕获区沿着至少一个基底的一侧的大部分延伸。 在一些实施方案中，流体的粘度小于70厘泊。
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公开(公告)号：US20090195855A1
公开(公告)日：2009-08-06
申请号：US12370471
申请日：2009-02-12
申请人： Jasper Lodewyk Steyn , Timothy J. Brosnihan , Joyce H. Wu , Mark B. Andersson , Richard S. Payne , John J. Fijol , Roger W. Barton , Nesbitt W. Hagood
发明人： Jasper Lodewyk Steyn , Timothy J. Brosnihan , Joyce H. Wu , Mark B. Andersson , Richard S. Payne , John J. Fijol , Roger W. Barton , Nesbitt W. Hagood
IPC分类号： G02B26/00
CPC分类号： G02B26/00 , G02B26/02 , G02B26/0841 , G09G3/2022 , G09G3/3406 , G09G3/3433 , G09G2300/08 , G09G2310/0235 , G09G2320/0633
摘要： The invention relates to a spatial light modulator including a substrate having a surface and a modulation assembly coupled to the substrate including a modulation element and a compliant beam. The modulation assembly is configured to limit the bending of the compliant beam towards an opposing surface that would otherwise be caused by inherent stresses within the compliant beam. The invention also relates to a method of manufacturing a spatial light modulator including the steps of forming and releasing a modulation assembly that has a modulation element and a compliant beam formed in a pre-release position to have an intended inherent stress state. As a result of the stress state in the compliant beam, upon release of the compliant beam, the compliant beam bends into a rest position which is different than the pre-release position, where the rest position is based in part on the intended inherent stress state.
摘要翻译： 本发明涉及一种空间光调制器，其包括具有表面的基板和耦合到该基板的调制组件，该调制组件包括调制元件和柔性梁。 调制组件被配置为将柔性梁的弯曲限制在相反的表面，否则将由柔性梁内的固有应力引起。 本发明还涉及一种制造空间光调制器的方法，包括以下步骤：形成和释放调制组件，该调制组件具有形成在预释放位置中的调制元件和柔性梁，以具有预期的固有应力状态。 由于柔性梁中的应力状态，在释放柔性梁时，柔性梁弯曲成与预释放位置不同的静止位置，其中静止位置部分地基于预期的固有应力 州。
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公开(公告)号：US08526096B2
公开(公告)日：2013-09-03
申请号：US12370471
申请日：2009-02-12
申请人： Jasper Lodewyk Steyn , Timothy J. Brosnihan , Joyce H. Wu , Mark B. Andersson , Richard S. Payne , John J. Fijol , Roger W. Barton , Nesbitt W. Hagood
发明人： Jasper Lodewyk Steyn , Timothy J. Brosnihan , Joyce H. Wu , Mark B. Andersson , Richard S. Payne , John J. Fijol , Roger W. Barton , Nesbitt W. Hagood
CPC分类号： G02B26/00 , G02B26/02 , G02B26/0841 , G09G3/2022 , G09G3/3406 , G09G3/3433 , G09G2300/08 , G09G2310/0235 , G09G2320/0633
摘要： The invention relates to a spatial light modulator including a substrate having a surface and a modulation assembly coupled to the substrate including a modulation element and a compliant beam. The modulation assembly is configured to limit the bending of the compliant beam towards an opposing surface that would otherwise be caused by inherent stresses within the compliant beam. The invention also relates to a method of manufacturing a spatial light modulator including the steps of forming and releasing a modulation assembly that has a modulation element and a compliant beam formed in a pre-release position to have an intended inherent stress state. As a result of the stress state in the compliant beam, upon release of the compliant beam, the compliant beam bends into a rest position which is different than the pre-release position, where the rest position is based in part on the intended inherent stress state.
摘要翻译： 本发明涉及一种空间光调制器，其包括具有表面的基板和耦合到该基板的调制组件，该调制组件包括调制元件和柔性梁。 调制组件被配置为将柔性梁的弯曲限制在相反的表面，否则将由柔性梁内的固有应力引起。 本发明还涉及一种制造空间光调制器的方法，包括以下步骤：形成和释放调制组件，该调制组件具有形成在预释放位置中的调制元件和柔性梁，以具有预期的固有应力状态。 由于柔性梁中的应力状态，在释放柔性梁时，柔性梁弯曲成与预释放位置不同的静止位置，其中静止位置部分地基于预期的固有应力 州。
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公开(公告)号：US09213181B2
公开(公告)日：2015-12-15
申请号：US13474532
申请日：2012-05-17
CPC分类号： G02B26/02 , B81B7/0067 , B81B2201/038 , B81B2201/047 , B81C1/00 , B81C1/00039 , B81C1/00261 , B81C2203/054 , G09G3/3413 , G09G3/3433 , G09G3/3466 , G09G2320/041 , G09G2360/144 , H01L23/544 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/32 , H01L24/73 , H01L24/81 , H01L24/83 , H01L24/97 , H01L2223/54426 , H01L2224/1132 , H01L2224/114 , H01L2224/11462 , H01L2224/131 , H01L2224/16238 , H01L2224/2612 , H01L2224/29011 , H01L2224/32238 , H01L2224/73201 , H01L2224/81121 , H01L2224/81192 , H01L2224/81815 , H01L2224/83007 , H01L2224/83121 , H01L2924/01029 , H01L2924/12041 , H01L2924/12042 , H01L2924/12043 , H01L2924/12044 , H01L2924/1461 , H01L2924/15788 , Y10T428/24157 , Y10T428/24744 , H01L2924/014 , H01L2924/00014 , H01L2924/00
摘要： A display apparatus includes a first substrate, a plurality of microelectromechanical systems (MEMS) light modulators formed from a structural material coupled to the first substrate and a second substrate separated from the first substrate. A plurality of spacers extend from the first substrate to keep the second substrate a minimum distance away from the plurality of light modulators. The spacers include a first polymer layer having a surface in contact with the first substrate, a second polymer layer encapsulating the first polymer layer and a layer of the structural material encapsulating the second polymer layer. The spacers can be used as fluid barriers and configured to surround more than one but less than all of the MEMS light modulators in the display apparatus.
摘要翻译： 显示装置包括第一基板，由耦合到第一基板的结构材料形成的多个微机电系统（MEMS）光调制器和与第一基板分离的第二基板。 多个间隔件从第一基板延伸以使第二基板保持离开多个光调制器的最小距离。 间隔物包括具有与第一基底接触的表面的第一聚合物层，包封第一聚合物层的第二聚合物层和包封第二聚合物层的结构材料层。 间隔件可以用作流体屏障并且被配置为围绕显示装置中的多于一个但是不到所有的MEMS光调制器。
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公开(公告)号：US20120295058A1
公开(公告)日：2012-11-22
申请号：US13474532
申请日：2012-05-17
CPC分类号： G02B26/02 , B81B7/0067 , B81B2201/038 , B81B2201/047 , B81C1/00 , B81C1/00039 , B81C1/00261 , B81C2203/054 , G09G3/3413 , G09G3/3433 , G09G3/3466 , G09G2320/041 , G09G2360/144 , H01L23/544 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/32 , H01L24/73 , H01L24/81 , H01L24/83 , H01L24/97 , H01L2223/54426 , H01L2224/1132 , H01L2224/114 , H01L2224/11462 , H01L2224/131 , H01L2224/16238 , H01L2224/2612 , H01L2224/29011 , H01L2224/32238 , H01L2224/73201 , H01L2224/81121 , H01L2224/81192 , H01L2224/81815 , H01L2224/83007 , H01L2224/83121 , H01L2924/01029 , H01L2924/12041 , H01L2924/12042 , H01L2924/12043 , H01L2924/12044 , H01L2924/1461 , H01L2924/15788 , Y10T428/24157 , Y10T428/24744 , H01L2924/014 , H01L2924/00014 , H01L2924/00
摘要： A display apparatus includes a first substrate, a plurality of microelectromechanical systems (MEMS) light modulators formed from a structural material coupled to the first substrate and a second substrate separated from the first substrate. A plurality of spacers extend from the first substrate to keep the second substrate a minimum distance away from the plurality of light modulators. The spacers include a first polymer layer having a surface in contact with the first substrate, a second polymer layer encapsulating the first polymer layer and a layer of the structural material encapsulating the second polymer layer. The spacers can be used as fluid barriers and configured to surround more than one but less than all of the MEMS light modulators in the display apparatus.
摘要翻译： 显示装置包括第一基板，由耦合到第一基板的结构材料形成的多个微机电系统（MEMS）光调制器和与第一基板分离的第二基板。 多个间隔件从第一基板延伸以使第二基板保持离开多个光调制器的最小距离。 间隔物包括具有与第一基底接触的表面的第一聚合物层，包封第一聚合物层的第二聚合物层和包封第二聚合物层的结构材料层。 间隔件可以用作流体屏障并且被配置为围绕显示装置中的多于一个但是不到所有的MEMS光调制器。
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公开(公告)号：US08599463B2
公开(公告)日：2013-12-03
申请号：US13449906
申请日：2012-04-18
IPC分类号： G02B26/02
CPC分类号： G02B26/02 , B81B1/00 , B81B3/0035 , B81B2203/0307 , G02B26/0833
摘要： The invention relates to an improved apparatus and method for the design and manufacture of MEMS anchoring structures for light modulators in order to address the stresses of beams mounted on them.
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公开(公告)号：US20110255146A1
公开(公告)日：2011-10-20
申请号：US13123859
申请日：2009-10-27
CPC分类号： G02B26/00 , G02B26/02 , G02B26/0841 , G09G3/2022 , G09G3/3406 , G09G3/3433 , G09G2300/08 , G09G2310/0235 , G09G2320/0633
摘要： The invention relates, in various aspects, to systems and methods for MEMS actuated displays that can be driven at high speeds and at low voltages for improved image quality and reduced power consumption.
摘要翻译： 本发明在各方面涉及用于MEMS致动显示器的系统和方法，其可以在高速和低电压下驱动以改善图像质量和降低功耗。
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公开(公告)号：US09809445B2
公开(公告)日：2017-11-07
申请号：US13591842
申请日：2012-08-22
CPC分类号： B81B3/007 , B81B2201/047 , B81B2203/0109 , B81B2203/0163 , B81B2203/0307 , B81B2203/051 , G02B26/023 , G09G3/346 , G09G3/3473 , G09G2300/08
摘要： This disclosure provides systems, methods and apparatus for an electromechanical systems (EMS) assembly. The EMS assembly includes a substrate, an anchor disposed on the substrate, and a suspended planar body supported over the substrate by the anchor. The suspended planar body includes at least one depression extending out of a plane of the suspended planar body and protruding towards the substrate. The suspended planar body also includes a substantially horizontal portion corresponding to a gap in the at least one depression. An extent of the gap is up to 20% of a length of the suspended planar body.
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公开(公告)号：US20120200906A1
公开(公告)日：2012-08-09
申请号：US13449906
申请日：2012-04-18
CPC分类号： G02B26/02 , B81B1/00 , B81B3/0035 , B81B2203/0307 , G02B26/0833
摘要： The invention relates to an improved apparatus and method for the design and manufacture of MEMS anchoring structures for light modulators in order to address the stresses of beams mounted on them.
摘要翻译： 本发明涉及一种用于设计和制造用于光调制器的MEMS锚固结构的改进的装置和方法，以便解决安装在它们上的梁的应力。
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