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公开(公告)号：US6156435A
公开(公告)日：2000-12-05
申请号：US280377
申请日：1999-03-29
IPC分类号： B05D7/24 , C08F2/46 , C23C16/46 , C23C16/515 , H01L21/312 , H01L23/532 , B32B27/00
CPC分类号： C23C16/463 , B05D1/62 , C23C16/46 , C23C16/515 , H01L21/3127 , H01L23/5329 , H01L2924/0002 , Y10T428/21 , Y10T428/2933 , Y10T428/2938 , Y10T428/3154 , Y10T428/31544
摘要： Provided are methods for forming a fluorocarbon polymer thin film on the surface of a structure. In one method, a monomer gas is exposed to a source of heat having a temperature sufficient to pyrolyze the monomer gas and produce a source of reactive CF.sub.2 species in the vicinity of the structure surface. The structure surface is maintained substantially at a temperature lower than that of the heat source to induce deposition and polymerization of the CF.sub.2 species on the structure surface. In another method for forming a fluorocarbon polymer thin film, the structure is exposed to a plasma environment in which a monomer gas is ionized to produce reactive CF.sub.2 species. The plasma environment is produced by application to the monomer gas of plasma excitation power characterized by an excitation duty cycle having alternating intervals in which excitation power is applied and in which no excitation power is applied to the monomer gas. The monomer gas employed in the methods preferably includes hexafluoropropylene oxide. The monomer gas pyrolysis and plasma excitation methods can be carried out individually, sequentially, or simultaneously. Flexible fluorocarbon polymer thin films can thusly be produced on wires, twisted wires, neural probes, tubing, complex microstructures, substrates, microfabricated circuits, and other structures. The thin films have a compositional CF.sub.2 fraction of at least about 50%, a dielectric constant of less than about 1.95, and a crosslinking density of less than about 35%.
摘要翻译： 提供了在结构的表面上形成氟碳聚合物薄膜的方法。 在一种方法中，将单体气体暴露于具有足以热解单体气体并在结构表面附近产生反应性CF 2物质源的热源。 结构表面基本保持在比热源低的温度下，以引起CF2物质在结构表面上的沉积和聚合。 在形成氟碳聚合物薄膜的另一种方法中，该结构暴露于其中单体气体被离子化以产生反应性CF 2物质的等离子体环境中。 等离子体环境通过应用于等离子体激发功率的单体气体产生，其特征在于具有施加激发功率的交替间隔的激发占空比，并且其中没有激发功率施加到单体气体。 在该方法中使用的单体气体优选包括六氟环氧丙烷。 单体气体热解和等离子体激发方法可以单独，顺序或同时进行。 柔性氟碳聚合物薄膜因此可以在电线，绞线，神经探针，管道，复合微结构，基板，微结构电路和其他结构上生产。 薄膜具有至少约50％的组成CF 2分数，小于约1.95的介电常数和小于约35％的交联密度。
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公开(公告)号：US06153269A
公开(公告)日：2000-11-28
申请号：US280196
申请日：1999-03-29
IPC分类号： B05D7/24 , C08F2/46 , C23C16/46 , C23C16/515 , H01L21/312 , H01L23/532 , C08J7/18
CPC分类号： C23C16/463 , B05D1/62 , C23C16/46 , C23C16/515 , H01L21/3127 , H01L23/5329 , H01L2924/0002 , Y10T428/21 , Y10T428/2933 , Y10T428/2938 , Y10T428/3154 , Y10T428/31544
摘要： Provided are methods for forming a fluorocarbon polymer thin film on the surface of a structure. In one method, a monomer gas is exposed to a source of heat having a temperature sufficient to pyrolyze the monomer gas and produce a source of reactive CF.sub.2 species in the vicinity of the structure surface. The structure surface is maintained substantially at a temperature lower than that of the heat source to induce deposition and polymerization of the CF.sub.2 species on the structure surface. In another method for forming a fluorocarbon polymer thin film, the structure is exposed to a plasma environment in which a monomer gas is ionized to produce reactive CF.sub.2 species. The plasma environment is produced by application to the monomer gas of plasma excitation power characterized by an excitation duty cycle having alternating intervals in which excitation power is applied and in which no excitation power is applied to the monomer gas. The monomer gas employed in the methods preferably includes hexafluoropropylene oxide. The monomer gas pyrolysis and plasma excitation methods can be carried out individually, sequentially, or simultaneously. Flexible fluorocarbon polymer thin films can thusly be produced on wires, twisted wires, neural probes, tubing, complex microstructures, substrates, microfabricated circuits, and other structures. The thin films have a compositional CF.sub.2 fraction of at least about 50%, a dielectric constant of less than about 1.95, and a crosslinking density of less than about 35%.
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公开(公告)号：US5888591A
公开(公告)日：1999-03-30
申请号：US643721
申请日：1996-05-06
IPC分类号： B05D7/24 , C08F2/46 , C23C16/46 , C23C16/515 , H01L21/312 , H01L23/532
CPC分类号： C23C16/463 , B05D1/62 , C23C16/46 , C23C16/515 , H01L21/3127 , H01L23/5329 , H01L2924/0002 , Y10T428/21 , Y10T428/2933 , Y10T428/2938 , Y10T428/3154 , Y10T428/31544
摘要： Provided are methods for forming a fluorocarbon polymer thin film on the surface of a structure. In one method, a monomer gas is exposed to a source of heat having a temperature sufficient to pyrolyze the monomer gas and produce a source of reactive CF.sub.2 species in the vicinity of the structure surface. The structure surface is maintained substantially at a temperature lower than that of the heat source to induce deposition and polymerization of the CF.sub.2 species on the structure surface. In another method for forming a fluorocarbon polymer thin film, the structure is exposed to a plasma environment in which a monomer gas is ionized to produce reactive CF.sub.2 species. The plasma environment is produced by application to the monomer gas of plasma excitation power characterized by an excitation duty cycle having alternating intervals in which excitation power is applied and in which no excitation power is applied to the monomer gas. The monomer gas employed in the methods preferably includes hexafluoropropylene oxide. The monomer gas pyrolysis and plasma excitation methods can be carried out individually, sequentially, or simultaneously. Flexible fluorocarbon polymer thin films can thusly be produced on wires, twisted wires, neural probes, tubing, complex microstructures, substrates, microfabricated circuits, and other structures. The thin films have a compositional CF.sub.2 fraction of at least about 50%, a dielectric constant of less than about 1.95, and a crosslinking density of less than about 35%.
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公开(公告)号：US10519326B2
公开(公告)日：2019-12-31
申请号：US14246858
申请日：2014-04-07
申请人： Karen K. Gleason , Rong Yang
发明人： Karen K. Gleason , Rong Yang
IPC分类号： C09D5/16 , B01D65/08 , C09D139/08 , B01D61/02 , B01D67/00
摘要： Disclosed are methods of preparing antifouling and chlorine-resistant coatings on reverse osmosis membranes with initiated chemical vapor deposition. The coatings enhance the stability and lifetime of membranes without sacrificing performance characteristics, such as permeability or salt retention.
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公开(公告)号：US20190022594A1
公开(公告)日：2019-01-24
申请号：US16041169
申请日：2018-07-20
申请人： Minghui Wang , Karen K. Gleason , Peter Kovacik
发明人： Minghui Wang , Karen K. Gleason , Peter Kovacik
摘要： Disclosed are methods of preparing antifouling coatings on reverse osmosis membranes with initiated vapor deposition or oxidative vapor deposition. The coatings enhance the stability and lifetime of membranes without sacrificing performance characteristics, such as permeability or salt retention.
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公开(公告)号：US09448219B2
公开(公告)日：2016-09-20
申请号：US13893699
申请日：2013-05-14
CPC分类号： G01N33/0057 , G01N27/128 , Y10T436/147777 , Y10T436/163333 , Y10T436/173076 , Y10T436/173845
摘要： One aspect of the invention relates to an ultrathin micro-electromechanical chemical sensing device which uses swelling or straining of a reactive organic material for sensing. In certain embodiments, the device comprises a contact on-off switch chemical sensor. For example, the device can comprises a small gap separating two electrodes, wherein the gap can be closed as a result of the swelling or stressing of an organic polymer coating on one or both sides of the gap. In certain embodiments, the swelling or stressing is due to the organic polymer reacting with a target analyte.
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公开(公告)号：US20140186620A1
公开(公告)日：2014-07-03
申请号：US14085275
申请日：2013-11-20
申请人： Karen K. Gleason , Rong Yang , Yaron Segal , Tonio Buonassisi , Baby Reeja Jayan
发明人： Karen K. Gleason , Rong Yang , Yaron Segal , Tonio Buonassisi , Baby Reeja Jayan
IPC分类号： B05D1/00
CPC分类号： B05D1/60 , H01L21/02118 , H01L21/02271 , H01L31/1868 , Y02E10/50 , Y02P70/521 , Y10T428/265
摘要： Embodiments described herein are related to methods for processing substrates such as silicon substrates. In some cases, the method may provide the ability to passivate a silicon surface at relatively low temperatures and/or in the absence of a solvent. Methods described herein may be useful in the fabrication of a wide range of devices, including electronic devices such as photovoltaic devices, solar cells, organic light-emitting diodes, sensors, and the like.
摘要翻译： 本文描述的实施例涉及用于处理诸如硅衬底的衬底的方法。 在一些情况下，该方法可提供在较低温度和/或不存在溶剂的情况下钝化硅表面的能力。 本文描述的方法可用于制造宽范围的装置，包括诸如光伏器件，太阳能电池，有机发光二极管，传感器等的电子器件。
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8.发明申请Single-Unit Reactor Design for Combined Oxidative, Initiated, and Plasma-Enhanced Chemical Vapor Deposition 有权用于组合氧化，起始和等离子体增强化学气相沉积的单一单元反应器设计公开(公告)号：US20130224380A1
公开(公告)日：2013-08-29
申请号：US13407075
申请日：2012-02-28
IPC分类号： C23C16/00
CPC分类号： C23C16/509
摘要： Described herein are reactors capable of sequentially or simultaneously depositing thin-film polymers onto a substrate by oxidative chemical vapor deposition (oCVD), initiated chemical vapor deposition (iCVD), and plasma-enhanced chemical vapor deposition (PECVD). The single-unit CVD reactors allow for the use of more than one CVD process on the same substrate without the risk of inadvertently exposing the substrate to ambient conditions when switching processes. Furthermore, the ability to deposit simultaneously polymers made by two different CVD processes allows for the exploration of new materials. In addition to assisting in the deposition of polymer films, plasma processes may be used to pretreat substrate surfaces before polymer deposition, or to clean the internal surfaces of the reactor between experiments.
摘要翻译： 这里描述的是能够通过氧化化学气相沉积（oCVD），起始化学气相沉积（iCVD）和等离子体增强化学气相沉积（PECVD）将薄膜聚合物顺序或同时沉积到基底上的反应器。 单个单元CVD反应器允许在同一衬底上使用多于一个CVD工艺，而不会在切换工艺时不经意地将衬底暴露于环境条件的风险。 此外，同时沉积通过两种不同CVD工艺制备的聚合物的能力允许探索新材料。 除了辅助聚合物膜的沉积之外，还可以使用等离子体工艺来在聚合物沉积之前预处理衬底表面，或者在实验之间清洁反应器的内表面。
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公开(公告)号：US08441081B2
公开(公告)日：2013-05-14
申请号：US12507283
申请日：2009-07-22
IPC分类号： G01P15/08
CPC分类号： G01N33/0057 , G01N27/128 , Y10T436/147777 , Y10T436/163333 , Y10T436/173076 , Y10T436/173845
摘要： One aspect of the invention relates to an ultrathin micro-electromechanical chemical sensing device which uses swelling or straining of a reactive organic material for sensing. In certain embodiments, the device comprises a contact on-off switch chemical sensor. For example, the device can comprises a small gap separating two electrodes, wherein the gap can be closed as a result of the swelling or stressing of an organic polymer coating on one or both sides of the gap. In certain embodiments, the swelling or stressing is due to the organic polymer reacting with a target analyte.
摘要翻译： 本发明的一个方面涉及使用用于感测的反应性有机材料的溶胀或应变的超薄微机电化学感测装置。 在某些实施例中，该装置包括接触开 - 关开关化学传感器。 例如，该装置可以包括分开两个电极的小间隙，其中间隙可以由于间隙的一侧或两侧上的有机聚合物涂层的膨胀或应力而封闭。 在某些实施方案中，溶胀或应激是由于有机聚合物与靶分析物反应。
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公开(公告)号：US08106420B2
公开(公告)日：2012-01-31
申请号：US12479181
申请日：2009-06-05
IPC分类号： H01L33/00
CPC分类号： H01L51/0037 , H01L51/5048
摘要： A light emitting device can have a layered structure and include a plurality of semiconductor nanocrystals. The layers of the device can be covalently bonded to each other. The device can include continuous chain of covalent bonds extending from the first electrode to the second electrode.
摘要翻译： 发光器件可以具有层状结构并且包括多个半导体纳米晶体。 该装置的层可以彼此共价键合。 该装置可以包括从第一电极延伸到第二电极的连续的共价键链。
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