摘要:
An atmospheric pressure, elevated temperature gas desorption apparatus which enables quanitiative analysis of impurities absorbed in or on the surface of a solid sample (semiconductor wafer, optical disc, etc.) is disclosed. The atmospheric pressure, elevated temperature gas desorption apparatus for desorbing impurities absorbed in or on the surface of a plate-like solid sample 18 into a carrier gas 19 in a chamber 6 under an atmospheric pressure while increasing the temperature of the solid sample 18 includes a desorption room 7A provided in the chamber 6 and connected through to a first gas supply system 1 for supplying the carrier gas 19, for desorbing impurities absorbed in or on the surface of the solid sample 18 into the carrier gas 19. A sample support room 7B is provided in the chamber 6 and is separated from the desorption room 7A by a partition member 6A. The solid sample 18 is in close contact with the partition member 6A. A heater 8 for heating the solid sample 18 is in close contact with the partition member 6A. A reserve room 9 is connected to the sample support room 7B and to a second gas supply system 13 for supplying a purge gas.
摘要:
A mass spectrometer for analyzing trace impurities on a level between ppt and ppb contained in silicon material gas such as monosilane gas. The mass spectrometer includes an ion formation region, reaction region, and mass analysis region. Ion formation gas is introduced into the ion formation region and sample gas (silicon material gas) is introduced into the reaction region. The ion formation region ionizes ion formation gas by an ionizer and forms primary ions. When the pressure of ion formation gas is made higher than the pressure of sample gas, the ion formation gas flows into the reaction region from the ion formation region together with primary ions and is mixed with the sample gas. In the reaction region, an ion-molecule reaction is produced between the primary ions and trace impurities contained in the sample gas and the trace impurities contained in the sample gas are ionized. The ion intensity of trace impunities, the concentration of trace impurities in the sample gas is determined using a calibration curve. When the gas pressure in the reaction region is kept at almost 1 atmosphere, the reaction is promoted and when the ion-molecule reaction time is optimized according to the size of the reaction region and the voltage condition, impurities on a level between ppt and ppb can be detected and determined.
摘要:
Ultra-low concentrations of impurities such as water in a highly-purified gas are analyzed by a system having an ion source chamber and a drift chamber. The ion source chamber ionizes one of a sample gas and a carrier gas to produce main component ions, and the other of the sample gas and carrier gas is introduced into the drift chamber. The invention controls the residence time of main component ions in one of the first and second chambers to be shorter than the mean reaction time of main component ions and impurity molecules of the sample gas in the one of the first and second chambers.
摘要:
A transmission electron microscope makes it possible to search for defects without applying an undesirable treatment to a specimen by using a reference specimen prepared separately from a specimen to be observed. A pair of specimen holders detachable from the column of the electron microscope are adjacently arranged at upper and lower stages respectively along an electron beam axis to position the specimens closely to each other in an electron beam illuminating position. The pair of holders can be independently set to or removed from the electron beam illuminating position. The specimen holders include devices for selectively finely adjusting the spacing between the specimens, the angle of the specimen with respect to the electron beam axis and with respect to a plane perpendicular to the electron beam axis.
摘要:
A navigation system includes: a map information acquiring unit 31 for acquiring map information; an HOV lane decision unit 38 for deciding whether an HOV lane is included in a road represented by the map information acquired by the map information acquiring unit 31 or not; a road number processing unit 43 for performing, when the HOV lane decision unit 38 decides that the HOV lane is included, processing of adding information representing the HOV lane to a road number of the road including the HOV lane; and a display processing unit 44 or a voice information unit 46 for causing the road number passing through the processing by the road number processing unit 43 to be displayed on the guide map or output in voice.
摘要:
A navigation system includes: a map information acquiring unit for acquiring map information; an HOV lane decision unit for deciding whether an HOV lane is included in a road represented by the map information acquired by the map information acquiring unit or not; a road number processing unit for performing, when the HOV lane decision unit decides that the HOV lane is included, processing of adding information representing the HOV lane to a road number of the road including the HOV lane; and a display processing unit or a voice information unit for causing the road number passing through the processing by the road number processing unit to be displayed on the guide map or output in voice.
摘要:
A travel interval division part and a low fuel consumption travel pattern generation part are included, the travel interval division part dividing, based on a reference travel pattern indicating a speed and a travel time period in a case where a vehicle travels without consideration of energy consumption and based on travel route information indicating a travel route that the vehicle travels, the travel route into a plurality of travel intervals at a plurality of reference points, the low fuel consumption travel pattern generation part determining a low fuel consumption travel pattern in which a travel time period of each travel interval falls within a predetermined range of a travel time period of each travel interval of the reference travel pattern and a cumulative speed increase amount in each travel interval is smaller than that of the reference travel pattern.
摘要:
It is an object of the present invention to provide a clear coating composition which is desirably controllable for sagging prevention and can form a coating film having various physical properties such as smoothness, good appearance, weather resistance, and water resistance required as a clear coating film and a clear coating film formation method using the coating composition.A clear coating composition containing a UV curable compound (U-1) having an unsaturated bond, a photopolymerization initiator (U-2), a half ester group-containing acrylic copolymer (A-1), and an epoxy group-containing acrylic copolymer (A-2).
摘要:
A fluorescence analyzing method includes the steps of irradiating a board, to which oligonucleotide is fixed, with light for fluorescence measurement; focusing produced fluorescence to form an image; and detecting the fluorescence with a two-dimensional sensor. Here, the board is provided with plural regions to which the oligonucleotide is fixed, and the plural regions are spaced apart from one another on the board substantially equidistantly in the vertical and horizontal directions. A fluorescent image is detected in a condition where the following equation is satisfied: dd=ds×M/n where ds denotes the interval between the regions, M denotes the imaging magnification of an optical focusing/imaging system, dd denotes the pixel pitch of the two-dimensional sensor, and n denotes an integer (n=1, 2, 3, 4, 5).
摘要:
Adenylation of a DNA fragment with a DNA polymerase occurs in the course of PCR, and thus two peaks are detected. To prevent the peak splitting, it is necessary to raise efficiency of adenylation a single peak to occur without changing reaction conditions. To this end, four types of PCR primers which, respectively, have an anchor sequence at 5′ terminus so that any of A, C, G or T is attached to at the 5′ terminus of the anchor sequence, and PCR is carried out by use of the respective primers to determine efficiencies of adenylation. Subsequently, an anchor sequence that is more likely to undergo adenylation is screened to decide an anchor sequence more likely undergo adenylation, followed by PCR by use of a primer having the decided anchor sequence.