-
公开(公告)号：US20120091546A1
公开(公告)日：2012-04-19
申请号：US13265535
申请日：2010-04-20
申请人： Geert Langereis , Twan Van Lippen , Freddy Roozeboom , Hilco Suy , Klaus Reimann , Jozef Thomas Martinus Van Beek , Casper Van Der Avoort , Johannes Van Wingerden , Kim Phan Le , Martijn Goosens , Peter Gerard Steeneken
发明人： Geert Langereis , Twan Van Lippen , Freddy Roozeboom , Hilco Suy , Klaus Reimann , Jozef Thomas Martinus Van Beek , Casper Van Der Avoort , Johannes Van Wingerden , Kim Phan Le , Martijn Goosens , Peter Gerard Steeneken
CPC分类号： H04R19/005 , B81B3/0072 , B81B2201/0257 , B81B2203/0127 , H04R7/18 , H04R19/04 , H04R31/006
摘要： A microphone comprises a substrate (20), a microphone membrane (10) defining an acoustic input surface and a backplate (11) supported with respect to the membrane with a fixed spacing between the backplate (11) and the membrane (10). A microphone periphery area comprises parallel corrugations (24) in the membrane (10) and backplate (11). By using the same corrugated suspension for both the membrane and the backplate, the sensitivity to body noise is optimally suppressed.
摘要翻译： 麦克风包括基板（20），限定声输入表面的麦克风膜（10）和相对于膜支撑的背板（11），所述背板（11）在背板（11）和膜（10）之间具有固定的间隔。 麦克风外围区域包括膜（10）和背板（11）中的平行波纹（24）。 通过对膜和背板使用相同的波纹悬挂，对身体噪声的敏感性被最佳地抑制。
-
公开(公告)号：US08717111B2
公开(公告)日：2014-05-06
申请号：US13122754
申请日：2009-10-08
摘要： An oscillator device comprises a resonator mass which is connected by a spring arrangement to a substrate and a feedback element for controlling oscillation of the resonator mass, which comprises a piezoresistive element connected between the resonator mass and the substrate. The invention provides an oscillator device in which the two parts (resonator and circuit to close the oscillation loop) are combined inside one single oscillator device, which can be a MEMS device.
摘要翻译： 振荡器装置包括通过弹簧装置连接到基板的谐振器质量块和用于控制谐振器质量块的振荡的反馈元件，该谐振器组件包括连接在谐振器体和基片之间的压阻元件。 本发明提供了一种振荡器装置，其中两个部分（谐振器和闭合振荡环路的电路）组合在一个可以是MEMS器件的单个振荡器装置内。
-
公开(公告)号：US20120262241A1
公开(公告)日：2012-10-18
申请号：US13446398
申请日：2012-04-13
IPC分类号： H03B5/30
CPC分类号： H03H9/02448 , H03H9/02259 , H03H9/2426 , H03H2009/02496
摘要： A MEMS resonator has a component which provides a capacitance associated with the transduction gap which has a temperature-dependent dielectric characteristic, which varies in the same direction (i.e. the slope has the same sign) as the Young's modulus of the material of the resonator versus temperature. This means that the resonant frequency is less dependent on temperature.
摘要翻译： MEMS谐振器具有提供与换能间隙相关联的电容的元件，该电容具有温度相关的介电特性，其在与谐振器材料的杨氏模量相同的方向（即斜率具有相同的符号）上变化， 温度。 这意味着谐振频率较少依赖于温度。
-
公开(公告)号：US08803623B2
公开(公告)日：2014-08-12
申请号：US13446398
申请日：2012-04-13
IPC分类号： H03B5/32 , H01L41/047 , H03H9/13 , H03H9/52
CPC分类号： H03H9/02448 , H03H9/02259 , H03H9/2426 , H03H2009/02496
摘要： A MEMS resonator has a component which provides a capacitance associated with the transduction gap which has a temperature-dependent dielectric characteristic, which varies in the same direction (i.e. the slope has the same sign) as the Young's modulus of the material of the resonator versus temperature. This means that the resonant frequency is less dependent on temperature.
摘要翻译： MEMS谐振器具有提供与换能间隙相关联的电容的元件，该电容具有温度相关的介电特性，其在与谐振器材料的杨氏模量相同的方向（即斜率具有相同的符号）上变化， 温度。 这意味着谐振频率较少依赖于温度。
-
公开(公告)号：US20110193449A1
公开(公告)日：2011-08-11
申请号：US13122754
申请日：2009-10-08
IPC分类号： H01L41/09
摘要： An oscillator device comprises a resonator mass which is connected by a spring arrangement to a substrate and a feedback element for controlling oscillation of the resonator mass, which comprises a piezoresistive element connected between the resonator mass and the substrate. The invention provides an oscillator device in which the two parts (resonator and circuit to close the oscillation loop) are combined inside one single oscillator device, which can be a MEMS device.
摘要翻译： 振荡器装置包括通过弹簧装置连接到基板的谐振器质量块和用于控制谐振器质量块的振荡的反馈元件，该谐振器组件包括连接在谐振器体和基片之间的压阻元件。 本发明提供了一种振荡器装置，其中两个部分（谐振器和闭合振荡环路的电路）组合在一个可以是MEMS器件的单个振荡器装置内。
-
公开(公告)号：US08018307B2
公开(公告)日：2011-09-13
申请号：US10561854
申请日：2004-06-23
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01G5/40 , H01H2059/0027 , H01H2059/0045
摘要： The MEMS element of the invention has a first, a second and an intermediate third electrode. It is given an increased dynamic range in that the switchable capacitor constituted by the second and the third electrode is provided in the signal path between input and output, and that the switchable capacitor constituted by the first and third electrode is provided between the signal path and ground. The MEMS element of the invention is very suitable for integration in a network of passive components.
摘要翻译： 本发明的MEMS元件具有第一，第二和第三中间第三电极。 给予增加的动态范围，其中由第二和第三电极构成的可切换电容器设置在输入和输出之间的信号路径中，并且由第一和第三电极构成的可切换电容器设置在信号路径和 地面。 本发明的MEMS元件非常适合于集成在无源元件网络中。
-
公开(公告)号：US07554425B2
公开(公告)日：2009-06-30
申请号：US10570435
申请日：2004-08-23
CPC分类号： H03H9/2405 , H03H9/02448 , H03H9/2463 , H03H2009/02496 , H03L1/04
摘要： The electromechanical transducer (1) has a resonator element (20) and an actuator (30) for inducing an elastic deformation of the resonator element (20) dependent on the electrical input signal. For temperature stabilization, the electromechanical transducer (1) has a sensing element (40) for providing an electrical sensing signal has a function of a temperature of the resonator element (20), and a heating element (50) for heating the resonator element to reduce the temperature dependent frequency deviation to keep the resonance frequency equal to the nominal frequency at operating temperature. The heating element (50) is controlled by an electrical heating signal based on the electrical sensing signal. The resonator element may have the hating element or the sensing element; it may be part of a wheatstone bridge; it may consist of two longitudinally extendable parts (201, 202) extending in opposite directions, being attached in a support area (204) in a deformation free part (203).
摘要翻译： 机电换能器（1）具有谐振元件（20）和致动器（30），用于根据电输入信号引起谐振元件（20）的弹性变形。 为了温度稳定，机电换能器（1）具有用于提供具有谐振元件（20）的温度的功能的电感测信号的感测元件（40）和用于将谐振元件加热到 降低温度相关的频率偏差，以保持谐振频率等于工作温度下的额定频率。 加热元件（50）由基于电感测信号的电加热信号控制。 谐振器元件可以具有憎恨元件或感测元件; 它可能是惠斯通电桥的一部分; 它可以包括沿相反方向延伸的两个纵向延伸的部分（201,202），它们连接在无变形部分（203）中的支撑区域（204）中。
-
公开(公告)号：US20090026882A1
公开(公告)日：2009-01-29
申请号：US12159769
申请日：2006-09-08
IPC分类号： H01L41/04
CPC分类号： H03B5/32
摘要： An oscillator circuit is described comprising a piezoresistive resonator and a phase changing devices. Oscillator circuits with piezoresistive resonators do have the advantage that they can perform self-sustaining oscillation without additional active devices as e.g. transistors since they can be used as amplifiers. Phase changing devices as capacitors, coils and further piezoresistive resonator are used in order to compensate the π/2 phase shift of the piezoresistive resonator.
摘要翻译： 描述了包括压阻谐振器和相变装置的振荡器电路。 具有压阻谐振器的振荡器电路确实具有这样的优点：它们可以执行自维持振荡，而不需要额外的有源器件，例如， 晶体管，因为它们可以用作放大器。 使用相变装置作为电容器，线圈和其它压阻谐振器，以便补偿压阻谐振器的π/ 2相移。
-
公开(公告)号：US08546712B2
公开(公告)日：2013-10-01
申请号：US13203624
申请日：2010-03-04
IPC分类号： H01H57/00
CPC分类号： B81B3/0078 , B81B2201/014 , B81B2201/016 , H01G5/011 , H01G5/16
摘要： A MEMS device comprises first and second opposing electrode arrangements (22,28), wherein the second electrode arrangement (28) is electrically movable to vary the electrode spacing between facing sides of the first and second electrode arrangements. At least one of the facing sides has a non-flat surface with at least one peak and at least one trough. The height of the peak and depth of the trough is between 0.01t and 0.1t where t is the thickness of the movable electrode.
摘要翻译： MEMS器件包括第一和第二相对电极布置（22,28），其中第二电极布置（28）可电可移动以改变第一和第二电极布置的相对侧之间的电极间距。 至少一个相对侧具有具有至少一个峰和至少一个槽的非平坦表面。 槽的高度和深度在0.01t到0.1t之间，其中t是可动电极的厚度。
-
公开(公告)号：US20120043188A1
公开(公告)日：2012-02-23
申请号：US13203624
申请日：2010-03-04
CPC分类号： B81B3/0078 , B81B2201/014 , B81B2201/016 , H01G5/011 , H01G5/16
摘要： A MEMS device comprises first and second opposing electrode arrangements (22,28), wherein the second electrode arrangement (28) is electrically movable to vary the electrode spacing between facing sides of the first and second electrode arrangements. At least one of the facing sides has a non-flat surface with at least one peak and at least one trough. The height of the peak and depth of the trough is between 0.01t and 0.1t where t is the thickness of the movable electrode.
摘要翻译： MEMS器件包括第一和第二相对电极布置（22,28），其中第二电极布置（28）可电可移动以改变第一和第二电极布置的相对侧之间的电极间距。 至少一个相对侧具有具有至少一个峰和至少一个槽的非平坦表面。 槽的高度和深度在0.01t到0.1t之间，其中t是可动电极的厚度。
-
-
-
-
-
-
-
-
-
搜索结果
36 条记录 (耗时 0.022 秒)
