公开(公告)号：US07416977B2

公开(公告)日：2008-08-26

申请号：US11109642

申请日：2005-04-20

申请人： Kunihiko Fukuchi ,  Toshiyuki Isa ,  Gen Fujii

发明人： Kunihiko Fukuchi ,  Toshiyuki Isa ,  Gen Fujii

IPC分类号： H01L21/44

CPC分类号： H01L27/1292 ,  G02F1/13439 ,  H01L27/3244 ,  H01L27/3297 ,  H01L51/56 ,  H01L2251/5315 ,  H01L2251/5323

摘要： An object of the present invention is to provide a method for manufacturing a display device with few steps and high yield. One feature of the invention is to form a first mask pattern having low wettability over a conductive layer, form a second mask pattern having high wettability over the conductive layer using the first mask pattern as a mask, and form a mask pattern for etching the conductive layer by removing the first mask pattern. Another feature is to form a pixel electrode by etching the conductive layer.

摘要翻译： 本发明的目的是提供一种制造具有几个步骤和高产率的显示装置的方法。 本发明的一个特征是形成在导电层上具有低润湿性的第一掩模图案，使用第一掩模图案作为掩模形成在导电层上具有高润湿性的第二掩模图案，并形成蚀刻导电性的掩模图案 通过去除第一掩模图案。 另一个特征是通过蚀刻导电层来形成像素电极。

公开(公告)号：US20050244995A1

公开(公告)日：2005-11-03

申请号：US11109642

申请日：2005-04-20

申请人： Kunihiko Fukuchi ,  Toshiyuki Isa ,  Gen Fujii

发明人： Kunihiko Fukuchi ,  Toshiyuki Isa ,  Gen Fujii

IPC分类号： G02F1/1343 ,  H01L21/768 ,  H01L21/77 ,  H01L21/84 ,  H01L27/32 ,  H01L51/56

CPC分类号： H01L27/1292 ,  G02F1/13439 ,  H01L27/3244 ,  H01L27/3297 ,  H01L51/56 ,  H01L2251/5315 ,  H01L2251/5323

摘要： An object of the present invention is to provide a method for manufacturing a display device with few steps and high yield. One feature of the invention is to form a first mask pattern having low wettability over a conductive layer, form a second mask pattern having high wettability over the conductive layer using the first mask pattern as a mask, and form a mask pattern for etching the conductive layer by removing the first mask pattern. Another feature is to form a pixel electrode by etching the conductive layer.

摘要翻译： 本发明的目的是提供一种制造具有几个步骤和高产率的显示装置的方法。 本发明的一个特征是形成在导电层上具有低润湿性的第一掩模图案，使用第一掩模图案作为掩模形成在导电层上具有高润湿性的第二掩模图案，并形成蚀刻导电性的掩模图案 通过去除第一掩模图案。 另一个特征是通过蚀刻导电层来形成像素电极。

公开(公告)号：US20090325333A1

公开(公告)日：2009-12-31

申请号：US12552305

申请日：2009-09-02

申请人： Kunihiko Fukuchi ,  Gen Fujii ,  Osamu Nakamura ,  Shinji Maekawa

发明人： Kunihiko Fukuchi ,  Gen Fujii ,  Osamu Nakamura ,  Shinji Maekawa

IPC分类号： H01L33/00

CPC分类号： H01L29/78678 ,  C25D5/022 ,  G02F2001/136295 ,  H01L21/288 ,  H01L21/76802 ,  H01L21/76838 ,  H01L27/12 ,  H01L27/1285 ,  H01L27/1292 ,  H01L27/3244 ,  H01L29/42384 ,  H01L29/66765 ,  H01L29/78696 ,  H01L51/56 ,  H01L2224/73204 ,  H01L2224/73265

摘要： According to one aspect of the present invention, at least one or more of patterns required for manufacturing a display device, such as a conductive layer which forms a wiring or an electrode and a mask, is formed by a droplet discharging method. At that time, a portion of the gate insulating film where is not located under the semiconductor layer is removed during manufacturing steps of the present invention.

摘要翻译： 根据本发明的一个方面，通过液滴喷射法形成制造显示装置所需的至少一种或多种图案，例如形成布线的导电层或电极和掩模。 此时，在本发明的制造工序中，除去不在半导体层下方的栅极绝缘膜的一部分。

公开(公告)号：US07273773B2

公开(公告)日：2007-09-25

申请号：US11042518

申请日：2005-01-26

申请人： Shunpei Yamazaki ,  Osamu Nakamura ,  Shinji Maekawa ,  Gen Fujii ,  Toshiyuki Isa

发明人： Shunpei Yamazaki ,  Osamu Nakamura ,  Shinji Maekawa ,  Gen Fujii ,  Toshiyuki Isa

IPC分类号： H01L21/84

CPC分类号： H01L51/0022 ,  G09G3/3208 ,  G09G3/3225 ,  G09G2300/0842 ,  G09G2300/0861 ,  G09G2310/0251 ,  H01L27/1285 ,  H01L27/1292 ,  H01L27/3244 ,  H01L51/055 ,  H01L51/529

摘要： The invention provides a display device and a method for manufacturing thereof by increasing a material efficiently as well as simplifying steps. Also, the invention provides a technique for forming a pattern such as a wiring, that is used for forming a display device, to have a predetermined shape with an excellent controllability. The method for manufacturing a display device includes the steps of: forming a lyophobic region; selectively irradiating laser beam in the lyophobic region to form a lyophilic region; selectively discharging a composition, that contains a conductive material, in the lyophilic region to form a gate electrode layer; forming a gate insulating layer and a semiconductor layer over the gate electrode layer; discharging a composition containing a conductive material over the semiconductor layer to form a source electrode layer and a drain electrode layer; and forming a pixel electrode layer on the source or drain electrode layer.

摘要翻译： 本发明提供一种显示装置及其制造方法，其通过有效地增加材料以及简化步骤来制造。 此外，本发明提供了一种用于形成用于形成显示装置的布线等图案以具有优异的可控性的预定形状的技术。 制造显示装置的方法包括以下步骤：形成疏液区域; 选择性地将激光束照射在疏液区域以形成亲液性区域; 选择性地将含有导电材料的组合物在亲液区域中排出以形成栅极电极层; 在栅电极层上形成栅极绝缘层和半导体层; 在半导体层上排出含有导电材料的组合物，以形成源电极层和漏电极层; 以及在源极或漏极电极层上形成像素电极层。

公开(公告)号：US07883912B2

公开(公告)日：2011-02-08

申请号：US12552305

申请日：2009-09-02

申请人： Kunihiko Fukuchi ,  Gen Fujii ,  Osamu Nakamura ,  Shinji Maekawa

发明人： Kunihiko Fukuchi ,  Gen Fujii ,  Osamu Nakamura ,  Shinji Maekawa

IPC分类号： H01L21/00

CPC分类号： H01L29/78678 ,  C25D5/022 ,  G02F2001/136295 ,  H01L21/288 ,  H01L21/76802 ,  H01L21/76838 ,  H01L27/12 ,  H01L27/1285 ,  H01L27/1292 ,  H01L27/3244 ,  H01L29/42384 ,  H01L29/66765 ,  H01L29/78696 ,  H01L51/56 ,  H01L2224/73204 ,  H01L2224/73265

摘要： According to one aspect of the present invention, at least one or more of patterns required for manufacturing a display device, such as a conductive layer which forms a wiring or an electrode and a mask, is formed by a droplet discharging method. At that time, a portion of the gate insulating film where is not located under the semiconductor layer is removed during manufacturing steps of the present invention.

摘要翻译： 根据本发明的一个方面，通过液滴喷射法形成制造显示装置所需的至少一种或多种图案，例如形成布线的导电层或电极和掩模。 此时，在本发明的制造工序中，除去不在半导体层下方的栅极绝缘膜的一部分。

公开(公告)号：US07601994B2

公开(公告)日：2009-10-13

申请号：US10576819

申请日：2004-11-05

申请人： Kunihiko Fukuchi ,  Gen Fujii ,  Osamu Nakamura ,  Shinji Maekawa

发明人： Kunihiko Fukuchi ,  Gen Fujii ,  Osamu Nakamura ,  Shinji Maekawa

IPC分类号： H01L27/10

CPC分类号： H01L29/78678 ,  C25D5/022 ,  G02F2001/136295 ,  H01L21/288 ,  H01L21/76802 ,  H01L21/76838 ,  H01L27/12 ,  H01L27/1285 ,  H01L27/1292 ,  H01L27/3244 ,  H01L29/42384 ,  H01L29/66765 ,  H01L29/78696 ,  H01L51/56 ,  H01L2224/73204 ,  H01L2224/73265

摘要： According to one aspect of the present invention, at least one or more of patterns required for manufacturing a display device, such as a conductive layer which forms a wiring or an electrode and a mask, is formed by a droplet discharging method. At that time, a portion of the gate insulating film where is not located under the semiconductor layer is removed during manufacturing steps of the present invention.

摘要翻译： 根据本发明的一个方面，通过液滴喷射法形成制造显示装置所需的至少一种或多种图案，例如形成布线的导电层或电极和掩模。 此时，在本发明的制造工序中，除去不在半导体层下方的栅极绝缘膜的一部分。

公开(公告)号：US20070057258A1

公开(公告)日：2007-03-15

申请号：US10576819

申请日：2004-11-05

申请人： Kunihiko Fukuchi ,  Gen Fujii ,  Osamu Nakamura ,  Shinji Maekawa

发明人： Kunihiko Fukuchi ,  Gen Fujii ,  Osamu Nakamura ,  Shinji Maekawa

IPC分类号： H01L29/04

CPC分类号： H01L29/78678 ,  C25D5/022 ,  G02F2001/136295 ,  H01L21/288 ,  H01L21/76802 ,  H01L21/76838 ,  H01L27/12 ,  H01L27/1285 ,  H01L27/1292 ,  H01L27/3244 ,  H01L29/42384 ,  H01L29/66765 ,  H01L29/78696 ,  H01L51/56 ,  H01L2224/73204 ,  H01L2224/73265

摘要： According to one aspect of the present invention, at least one or more of patterns required for manufacturing a display device, such as a conductive layer which forms a wiring or an electrode and a mask, is formed by a droplet discharging method. At that time, a portion of the gate insulating film where is not located under the semiconductor layer is removed during manufacturing steps of the present invention.

摘要翻译： 根据本发明的一个方面，通过液滴喷射法形成制造显示装置所需的至少一种或多种图案，例如形成布线的导电层或电极和掩模。 此时，在本发明的制造工序中，除去不在半导体层下方的栅极绝缘膜的一部分。

公开(公告)号：US08518760B2

公开(公告)日：2013-08-27

申请号：US13050117

申请日：2011-03-17

申请人： Shunpei Yamazaki ,  Osamu Nakamura ,  Shinji Maekawa ,  Gen Fujii ,  Toshiyuki Isa

发明人： Shunpei Yamazaki ,  Osamu Nakamura ,  Shinji Maekawa ,  Gen Fujii ,  Toshiyuki Isa

IPC分类号： H01L21/84

CPC分类号： H01L51/0022 ,  G09G3/3208 ,  G09G3/3225 ,  G09G2300/0842 ,  G09G2300/0861 ,  G09G2310/0251 ,  H01L27/1285 ,  H01L27/1292 ,  H01L27/3244 ,  H01L51/055 ,  H01L51/529

摘要： The invention provides a display device and a method for manufacturing thereof by increasing a material efficiently as well as simplifying steps. Also, the invention provides a technique for forming a pattern such as a wiring, that is used for forming a display device, to have a predetermined shape with an excellent controllability. The method for manufacturing a display device includes the steps of: forming a lyophobic region; selectively irradiating laser beam in the lyophobic region to form a lyophilic region; selectively discharging a composition, that contains a conductive material, in the lyophilic region to form a gate electrode layer; forming a gate insulating layer and a semiconductor layer over the gate electrode layer; discharging a composition containing a conductive material over the semiconductor layer to form a source electrode layer and a drain electrode layer; and forming a pixel electrode layer on the source or drain electrode layer.

摘要翻译： 本发明提供一种显示装置及其制造方法，其通过有效地增加材料以及简化步骤来制造。 此外，本发明提供了一种用于形成用于形成显示装置的布线等图案以具有优异的可控性的预定形状的技术。 制造显示装置的方法包括以下步骤：形成疏液区域; 选择性地将激光束照射在疏液区域以形成亲液性区域; 选择性地将含有导电材料的组合物在亲液区域中排出以形成栅极电极层; 在栅电极层上形成栅极绝缘层和半导体层; 在半导体层上排出含有导电材料的组合物，以形成源电极层和漏电极层; 以及在源极或漏极电极层上形成像素电极层。

公开(公告)号：US07939888B2

公开(公告)日：2011-05-10

申请号：US11857729

申请日：2007-09-19

申请人： Shunpei Yamazaki ,  Osamu Nakamura ,  Shinji Maekawa ,  Gen Fujii ,  Toshiyuki Isa

发明人： Shunpei Yamazaki ,  Osamu Nakamura ,  Shinji Maekawa ,  Gen Fujii ,  Toshiyuki Isa

IPC分类号： H01L27/01 ,  H01L27/12 ,  H01L31/0392

CPC分类号： H01L51/0022 ,  G09G3/3208 ,  G09G3/3225 ,  G09G2300/0842 ,  G09G2300/0861 ,  G09G2310/0251 ,  H01L27/1285 ,  H01L27/1292 ,  H01L27/3244 ,  H01L51/055 ,  H01L51/529

摘要： The invention provides a display device and a method for manufacturing thereof by increasing a material efficiently as well as simplifying steps. Also, the invention provides a technique for forming a pattern such as a wiring, that is used for forming a display device, to have a predetermined shape with an excellent controllability. The method for manufacturing a display device includes the steps of: forming a lyophobic region; selectively irradiating laser beam in the lyophobic region to form a lyophilic region; selectively discharging a composition, that contains a conductive material, in the lyophilic region to form a gate electrode layer; forming a gate insulating layer and a semiconductor layer over the gate electrode layer; discharging a composition containing a conductive material over the semiconductor layer to form a source electrode layer and a drain electrode layer; and forming a pixel electrode layer on the source or drain electrode layer.

摘要翻译： 本发明提供一种显示装置及其制造方法，其通过有效地增加材料以及简化步骤来制造。 此外，本发明提供了一种用于形成用于形成显示装置的布线等图案以具有优异的可控性的预定形状的技术。 制造显示装置的方法包括以下步骤：形成疏液区域; 选择性地将激光束照射在疏液区域以形成亲液性区域; 选择性地将含有导电材料的组合物在亲液区域中排出以形成栅极电极层; 在栅电极层上形成栅极绝缘层和半导体层; 在半导体层上排出含有导电材料的组合物，以形成源电极层和漏电极层; 以及在源极或漏极电极层上形成像素电极层。

公开(公告)号：US07635889B2

公开(公告)日：2009-12-22

申请号：US11333701

申请日：2006-01-17

申请人： Toshiyuki Isa ,  Gen Fujii ,  Masafumi Morisue ,  Ikuko Kawamata

发明人： Toshiyuki Isa ,  Gen Fujii ,  Masafumi Morisue ,  Ikuko Kawamata

IPC分类号： H01L23/48

CPC分类号： H01L21/288 ,  H01L21/02672 ,  H01L21/76838 ,  H01L27/12 ,  H01L27/124 ,  H01L27/1285 ,  H01L27/1292 ,  H01L27/3248 ,  H01L27/3276 ,  H01L51/0019 ,  H01L51/0022 ,  H01L51/0023 ,  H01L2924/0002 ,  Y02P80/30 ,  H01L2924/00

摘要： Conductive layers having knots are adjacently formed with uniform distance therebetween. Droplets of the conductive layers are discharged to stagger centers of the droplets in a length direction of wirings so that the centers of the discharged droplets are not on the same line in a line width direction between the adjacent conductive layers. Since the centers of the droplets are staggered, parts of the conductive layers each having a widest line width (the widest width of knot) are not connected to each other, and the conductive layers can be formed adjacently with a shorter distance therebetween.

摘要翻译： 具有结的导电层相邻地形成，其间具有均匀的距离。 导电层的液滴在布线的长度方向上被排出到液滴的错开中心，使得排出的液滴的中心在相邻导电层之间的线宽方向上不在相同的线上。 由于液滴的中心是错开的，所以每个具有最宽的线宽（结的最宽的宽度）的导电层的部分彼此不连接，导电层可以以较短的距离相邻地形成。