公开(公告)号：US06955178B1

公开(公告)日：2005-10-18

申请号：US10626517

申请日：2003-07-25

申请人： Masaki Kuzumoto ,  Seiji Noda ,  Izumi Oya ,  Makoto Miyamoto ,  Hideo Horibe ,  Tatsuo Kataoka ,  Tetsuji Oishi

发明人： Masaki Kuzumoto ,  Seiji Noda ,  Izumi Oya ,  Makoto Miyamoto ,  Hideo Horibe ,  Tatsuo Kataoka ,  Tetsuji Oishi

IPC分类号： B08B7/00 ,  C23G5/00 ,  G03F7/42 ,  H01L21/00 ,  H01L21/027 ,  H01L21/302 ,  H01L21/3065 ,  B08B5/00 ,  H01L21/461

CPC分类号： H01L21/6708 ,  B08B7/00 ,  G03F7/422 ,  Y10S134/902

摘要： A substrate treatment apparatus includes a substrate heating device for maintaining a substrate at a temperature higher than room temperature, a wetting device for producing a wet ozone-containing gas by wetting an ozone-containing gas with a treatment solution, and a supply device for supplying the wet ozone-containing gas from the wetting device to a work object on a surface of the substrate. The supply device includes a gas disperser including apertures aligned in rows in a width direction of the work object. The apertures in adjacent rows are not aligned with each other in a direction perpendicular to the rows. At least one of the gas disperser and the substrate is movable in a direction perpendicular to the rows. A gas conduit connects the wetting device to the supply device. A wet ozone-containing gas heating device heats the wet ozone-containing gas to a temperature at least equal to the temperature of the substrate.

摘要翻译： 一种基板处理装置，具备：将基板保持在比室温以上的温度下的基板加热装置，通过用处理液润湿含臭氧的气体来生产含湿臭氧的气体的润湿装置，以及供给装置 来自润湿装置的湿臭氧的气体到基板表面上的工件。 供给装置包括气体分散器，其包括在工作对象的宽度方向上成行排列的孔。 相邻行中的孔在垂直于行的方向上彼此不对齐。 气体分散器和基板中的至少一个可以在垂直于行的方向上移动。 气体管道将润湿装置连接到供应装置。 含湿臭氧的气体加热装置将含湿臭氧的气体加热至至少等于基板温度的温度。

公开(公告)号：US06616773B1

公开(公告)日：2003-09-09

申请号：US09686061

申请日：2000-10-11

申请人： Masaki Kuzumoto ,  Seiji Noda ,  Izumi Oya ,  Makoto Miyamoto ,  Hideo Horibe ,  Tatsuo Kataoka ,  Tetsuji Oishi

发明人： Masaki Kuzumoto ,  Seiji Noda ,  Izumi Oya ,  Makoto Miyamoto ,  Hideo Horibe ,  Tatsuo Kataoka ,  Tetsuji Oishi

IPC分类号： B08B300

CPC分类号： H01L21/6708 ,  B08B7/00 ,  G03F7/422 ,  Y10S134/902

摘要： A substrate treatment assembly for treating a work object on a surface of a substrate by supplying to the work object a wet ozone-containing gas wetted with a treatment solution includes a substrate heating device for maintaining a substrate at a temperature higher than room temperature, a wetting device for producing a wet ozone-containing gas by wetting an ozone-containing gas with a treatment solution, a supply device for supplying the wet ozone-containing gas to a work object on a surface of the substrate, a gas conduit connecting the wetting device to the supply device, and a heating device for heating the wet ozone-containing gas to a temperature approximately equal to or greater than the temperature of the substrate.

摘要翻译： 一种基板处理组件，用于通过向处理对象物供给湿润的含臭氧的气体来处理基板表面上的工件，所述基底处理组件包括用于将基板保持在高于室温的温度的基板加热装置， 润湿装置，用于通过用处理溶液润湿含臭氧的气体来产生含湿臭氧的气体;供应装置，用于将湿的含臭氧的气体供应到基板的表面上的工件;连接润湿剂的气体导管 装置，以及用于将含湿臭氧的气体加热到大约等于或大于基板的温度的温度的加热装置。

公开(公告)号：US06715944B2

公开(公告)日：2004-04-06

申请号：US10134481

申请日：2002-04-30

申请人： Izumi Oya ,  Seiji Noda ,  Makoto Miyamoto ,  Masaki Kuzumoto ,  Masashi Ohmori ,  Tatsuo Kataoka

发明人： Izumi Oya ,  Seiji Noda ,  Makoto Miyamoto ,  Masaki Kuzumoto ,  Masashi Ohmori ,  Tatsuo Kataoka

IPC分类号： G03D302

CPC分类号： H01L21/67075 ,  G03F7/42 ,  G03F7/422 ,  G03F7/423 ,  G03F7/428 ,  Y10S134/902

摘要： An apparatus for removing a photoresist film includes a substrate cassette for fixing a substrate having a surface covered with a photoresist film, an ozone feed tube for supplying ozone, a liquid feed tube for supplying a liquid photoresist film removing solution, and a processing tank for recovering and processing at least one of ozone and the liquid photoresist film removing solution, wherein the liquid photoresist film removing solution is supplied through the liquid feed tube as a liquid or mist, at least one of ozone and the photoresist film removing solution being continuously supplied.

摘要翻译： 一种用于去除光致抗蚀剂膜的设备包括用于固定具有被光致抗蚀剂膜覆盖的表面的基板的基板盒，用于供应臭氧的臭氧供给管，用于供给液态光致抗蚀剂膜去除溶液的液体供给管，以及用于 回收和处理臭氧和液体光致抗蚀剂去除溶液中的至少一种，其中液态光致抗蚀剂去除溶液作为液体或雾通过液体供给管提供，臭氧和光致抗蚀剂去膜溶液中的至少一种被连续供应 。

公开(公告)号：US06517999B1

公开(公告)日：2003-02-11

申请号：US09614258

申请日：2000-07-12

申请人： Izumi Oya ,  Seiji Noda ,  Makoto Miyamoto ,  Masaki Kuzumoto ,  Masashi Ohmori ,  Tatsuo Kataoka

发明人： Izumi Oya ,  Seiji Noda ,  Makoto Miyamoto ,  Masaki Kuzumoto ,  Masashi Ohmori ,  Tatsuo Kataoka

IPC分类号： G03F742

CPC分类号： H01L21/67075 ,  G03F7/42 ,  G03F7/422 ,  G03F7/423 ,  G03F7/428

摘要： A method of removing photoresist film with high efficiency of removal and friendliness with the environment while reducing the material consumption and the cost for the ventilation facility, and an apparatus used for the method are provided. Particularly the present invention provides a method of removing a photoresist film provided on a surface of a substrate, comprising steps of in a sealed system, disposing the substrate surface having the photoresist film to contact with a photoresist film removing solution, making ozone exist in gas phase and/or solution phase in the vicinity of the liquid surface of the photoresist film removing solution, and changing a relative position between the surface of the substrate and the liquid surface of the solution to decompose or remove the photoresist film from the substarate, characterized in that the relative position is changed continuously or intermittently within a range between a position where a bottom edge of the substrate is present above the liquid surface of the solution, and another position where a top edge of the substrate is present below the liquid surface of the solution. The present invention also provides an apparatus used for the method.

摘要翻译： 提供了一种去除光致抗蚀剂膜的方法，同时降低了通风设备的材料消耗和成本，同时具有高度的去除效率和环境友好性，并且提供了用于该方法的设备。 特别地，本发明提供一种除去设置在基板表面上的光致抗蚀剂膜的方法，包括以下步骤：在密封系统中，设置具有光致抗蚀剂膜的基板表面与光致抗蚀剂膜去除溶液接触，使臭氧存在于气体中 相位和/或溶液相位在光致抗蚀剂膜去除溶液的液面附近，并且改变基板的表面和溶液的液面之间的相对位置，以从底层分解或去除光致抗蚀剂膜，其特征在于 因为相对位置在溶液的液面之上存在基板的底部边缘的位置与基板的上边缘的另一位置之间的范围内连续地或间歇地变化， 解决方案。 本发明还提供了一种用于该方法的装置。

公开(公告)号：US07965372B2

公开(公告)日：2011-06-21

申请号：US10134508

申请日：2002-04-30

申请人： Seiji Noda ,  Masaki Kuzumoto ,  Izumi Oya ,  Makoto Miyamoto

发明人： Seiji Noda ,  Masaki Kuzumoto ,  Izumi Oya ,  Makoto Miyamoto

IPC分类号： G03B27/32 ,  G03B27/52

CPC分类号： G03F7/427 ,  G03F7/42

摘要： A photoresist film removing apparatus includes a reacting chamber, an ozonizer producing a gas supplied to the reacting chamber, and an exhaust system that exhausts the gas from the reacting chamber. A source of a photoresist film-remover is located opposite a stage carrying a substrate covered with photoresist. Photoresist film-remover and the gas are supplied to the substrate through apertures. An electric field may be generated between the source of the photoresist film-remover and the substrate. Alternatively, a centrally located feed tube supplies only one of the gas and the photoresist film-remover through a single aperture and a reservoir discharges the other through apertures. The reservoir surrounds and is sealed to the feed tube. The apparatus may include a container holding a liquid photoresist film-remover and a mixture of the gas and remover is supplied from outside the reacting chamber to the substrate.

摘要翻译： 光致抗蚀剂膜去除装置包括反应室，产生供应到反应室的气体的臭氧发生器和从反应室排出气体的排气系统。 光致抗蚀剂膜去除剂的来源位于载有被光致抗蚀剂覆盖的基底的阶段上。 光致抗蚀剂去除剂和气体通过孔提供给基材。 可以在光致抗蚀剂去膜剂的源和基板之间产生电场。 或者，位于中心的进料管仅通过单个孔提供气体和光致抗蚀剂膜去除剂中的一个，并且储存器通过孔排出另一个。 储存器周围并密封到进料管。 该装置可以包括容纳液体光致抗蚀剂膜去除剂的容器，并且将气体和去除剂的混合物从反应室外部供应到基底。

公开(公告)号：US06517998B1

公开(公告)日：2003-02-11

申请号：US09614252

申请日：2000-07-12

申请人： Seiji Noda ,  Masaki Kuzumoto ,  Izumi Oya ,  Makoto Miyamoto

发明人： Seiji Noda ,  Masaki Kuzumoto ,  Izumi Oya ,  Makoto Miyamoto

IPC分类号： G03F742

CPC分类号： G03F7/427 ,  G03F7/42

摘要： A method of removing a photoresist film with high efficiency of removal and friendliness with the environment while reducing material consumption and cost for a ventilation facility, and an apparatus used for the method. The method of removing a photoresist film in a sealed system, includes supplying a photoresist film-removal mixture containing an ozonized gas and a photoresist film-remover to a photoresist film on a surface of a substrate through a photoresist film-remover supplier opposed to the photoresist film.

摘要翻译： 一种去除光致抗蚀剂膜的方法，其具有高的去除效率和环境友好性，同时减少通风设备的材料消耗和成本，以及用于该方法的设备。 在密封系统中除去光致抗蚀剂膜的方法包括通过与光致抗蚀剂膜相反的光致抗蚀剂去除剂供应器将含有臭氧化气体和光致抗蚀剂膜去除剂的光致抗蚀剂膜去除混合物供应到基板表面上的光致抗蚀剂膜 光致抗蚀剂膜。

公开(公告)号：US20070006904A1

公开(公告)日：2007-01-11

申请号：US11474486

申请日：2006-06-26

申请人： Takehiro Hagiwara ,  Tatsuo Kataoka ,  Seiji Noda ,  Takafumi Nakai

发明人： Takehiro Hagiwara ,  Tatsuo Kataoka ,  Seiji Noda ,  Takafumi Nakai

IPC分类号： B08B3/00 ,  B08B3/12

CPC分类号： H01L21/67051 ,  B08B3/02 ,  B08B2203/007 ,  B08B2230/01

摘要： A substrate cleaning system that cleans a glass substrate by supplying liquid and gas to spray nozzles and by spraying fluid, where the liquid and the gas are mixed in the spray nozzles, onto the substrate in order to effectively remove foreign objects attached on the end surface of substrate after performing mechanical cut-off or polishing treatment, the system has: liquid heating means for heating the liquid to be supplied to the spray nozzles to control the temperature of the liquid, in which the temperature of the liquid at the inlet of the spray nozzles is controlled at 40° C. to 100° C.

摘要翻译： 一种基板清洁系统，其通过向喷嘴供应液体和气体并且通过将液体和气体在喷嘴中混合的喷雾流体喷射到基板上来清洁玻璃基板，以便有效地去除附着在端面上的异物 在进行机械切断或抛光处理之后，该系统具有：用于加热供给喷嘴的液体以控制液体的温度的液体加热装置，其中液体的入口温度为 喷嘴控制在40°C至100°C

公开(公告)号：US06346070B1

公开(公告)日：2002-02-12

申请号：US09470664

申请日：1999-12-22

申请人： Takeshi Ohmatsuzawa ,  Fujito Ehara ,  Hideshi Hori ,  Kazuo Toyota ,  Kenzaburou Fukutani ,  Junichi Imuta ,  Akiyoshi Shimizu ,  Takayuki Onogi ,  Seiji Noda ,  Masayuki Sakai ,  Shoji Hiraoka ,  Koji Nakamachi ,  Michio Tsugawa ,  Satoru Miyazoe

发明人： Takeshi Ohmatsuzawa ,  Fujito Ehara ,  Hideshi Hori ,  Kazuo Toyota ,  Kenzaburou Fukutani ,  Junichi Imuta ,  Akiyoshi Shimizu ,  Takayuki Onogi ,  Seiji Noda ,  Masayuki Sakai ,  Shoji Hiraoka ,  Koji Nakamachi ,  Michio Tsugawa ,  Satoru Miyazoe

IPC分类号： C08G6378

CPC分类号： C08G63/85 ,  C08G63/183 ,  C08G63/82 ,  C08G63/88

摘要： The present invention provides a catalyst for polyester production capable of producing a polyester with high catalytic activity and a process for producing a polyester using the catalyst. The catalyst for polyester production comprises a solid titanium compound which is obtained by dehydro-drying a hydrolyzate obtained by hydrolysis of a titanium halide and which has a molar ratio (OH/Ti) of a hydroxyl group (OH) to titanium (Ti) exceeding 0.09 and less than 4. The present invention also provides a method to obtain a polyester having a small increase of the acetaldehyde content during the molding. This method comprises bringing a polyester, which is obtained by the use of a titanium compound catalyst and in which the reaction has been completed, into contact with a phosphoric ester aqueous solution or the like having a concentration of not less than 10 ppm in terms of phosphorus atom. The present invention further provides a polyester having excellent transparency and tint and molded products of the polyester such as a blow molded article, a film, a sheet and a fiber. The polyester is obtained by polycondensing an aromatic dicarboxylic acid or an ester-forming derivative thereof and an aliphatic diol or an ester-forming derivative thereof in the presence of a catalyst for polyester production which comprises a polycondensation catalyst component comprising a solid titanium compound and a co-catalyst component comprising a magnesium compound. This polyester has a titanium content of 1 to 100 ppm, a magnesium content of 1 to 200 ppm and a weight ratio (Mg/Ti) of magnesium to titanium of not less than 0.01.

摘要翻译： 本发明提供一种能够生产具有高催化活性的聚酯的聚酯制造催化剂和使用该催化剂生产聚酯的方法。 用于聚酯生产的催化剂包括固体钛化合物，其通过脱水干燥由卤化钛水解得到的水解产物并且具有羟基（OH）与钛（Ti）的摩尔比（OH / Ti）超过钛 0.09以上且低于4.本发明还提供一种在成型时获得乙醛含量增加少的聚酯的方法。 该方法包括使通过使用钛化合物催化剂获得的反应已完成的聚酯与浓度不小于10ppm的磷酸酯水溶液等接触，换算为 磷原子。 本发明还提供一种聚酯，其具有优异的透明度和色调，并且聚酯的成型产品如吹塑制品，薄膜，片材和纤维。 在聚酯制造用催化剂的存在下，通过将芳香族二羧酸或其成酯性衍生物和脂肪族二醇或其成酯衍生物缩聚得到聚酯，该催化剂包括含有固体钛化合物的缩聚催化剂组分和 助催化剂组分包含镁化合物。 该聚酯的钛含量为1〜100ppm，镁含量为1〜200ppm，镁与钛的重量比（Mg / Ti）为0.01以上。

公开(公告)号：US20110283728A1

公开(公告)日：2011-11-24

申请号：US13146298

申请日：2010-01-15

申请人： Seiji Furukawa ,  Seiji Noda ,  Toshiyuki Kamiya ,  Tadashi Saito ,  Isamu Hirashiki

发明人： Seiji Furukawa ,  Seiji Noda ,  Toshiyuki Kamiya ,  Tadashi Saito ,  Isamu Hirashiki

IPC分类号： F24H4/04 ,  C23F13/00

CPC分类号： F24D19/0092 ,  C02F1/008 ,  C02F1/4602 ,  C02F1/74 ,  C02F2201/46115 ,  C02F2201/4613 ,  C02F2201/46145 ,  C02F2201/4619 ,  F24H1/106

摘要： Provided is a water heater, which allows efficient deposition of a scale component dissolved in water so as to reduce adhesion of the scale to a heat-transfer channel. The water heater includes: scale deposition means including a tank, an anode and a cathode provided in the tank so as to be opposed to each other, and a first power supply for applying a voltage between the anode and the cathode, the scale deposition means depositing a scale component dissolved in water retained in the tank; a heat-transfer channel provided at downstream of the scale deposition means, for guiding the water; and a heat source for heating the water by heat exchange in the heat-transfer channel, in which the scale deposition means includes oxygen-gas supplying/dissolving means for supplying an oxygen gas to a water feed pipe for feeding the water to the tank and dissolving the oxygen gas in the water.

摘要翻译： 提供了一种热水器，其允许有效地沉积溶解在水中的水垢成分，以便降低水垢与传热通道的粘附。 热水器包括：沉积装置，包括设置在罐中以相互对置的罐，阳极和阴极，以及用于在阳极和阴极之间施加电压的第一电源，刻度淀积装置 沉积溶解在储存在水箱中的水中的水垢组分; 设置在刻度沉积装置的下游的用于引导水的传热通道; 以及用于通过在传热通道中进行热交换来加热水的热源，其中，所述水垢沉积装置包括氧气供应/溶解装置，用于将氧气供应到用于将水供给到所述罐的给水管， 将氧气溶解在水中。

公开(公告)号：US5519112A

公开(公告)日：1996-05-21

申请号：US360601

申请日：1994-12-21

申请人： Hirofumi Harazoe ,  Masamitsu Matsuno ,  Seiji Noda

发明人： Hirofumi Harazoe ,  Masamitsu Matsuno ,  Seiji Noda

IPC分类号： C08G63/78 ,  C08F6/00

CPC分类号： C08G63/78

摘要： The invention provides a method of manufacturing polyesters which comprises an esterifying step wherein a dicarboxylic acid and a dihydroxyl compound are esterified and the next liquid phase polycondensation step wherein the resulting ester is subjected to liquid phase polycondensation in the presence of a polycondensation catalyst while a distillate which contains an reacted dihydroxyl compound and the polycondensation catalyst is distilled, wherein the distillate is subjected to a purification treatment comprising:(a) a distilling step;(b) a filtering step; and(c) a decoloring stepand then the thus purified distillate is recovered and supplied to the esterifying step. A further method comprises a purification treatment comprising:(a) a distilling step;(b) a depolymerizing step; and(c) a decoloring step.

摘要翻译： 本发明提供一种制造聚酯的方法，其包括酯化步骤，其中二羧酸和二羟基化合物被酯化，以及下一个液相缩聚步骤，其中所得酯在缩聚催化剂存在下进行液相缩聚，同时馏出物 其含有反应的二羟基化合物，并且所述缩聚催化剂被蒸馏，其中所述馏出物进行纯化处理，包括：（a）蒸馏步骤; （b）过滤步骤; 和（c）脱色步骤，然后将如此纯化的馏出物回收并提供给酯化步骤。 另一种方法包括净化处理，其包括：（a）蒸馏步骤; （b）解聚步骤; 和（c）消色步骤。