公开(公告)号：US20190385827A1

公开(公告)日：2019-12-19

申请号：US16553988

申请日：2019-08-28

Applicant: NHK SPRING CO., LTD.

Inventor： Go TAKAHARA ,  Toshihiko HANAMACHI ,  Arata TATSUMI

IPC: H01J37/32 ,  H01L21/687 ,  H01L21/67

Abstract: A substrate supporting unit is provided. The substrate supporting unit possesses a shaft, a first heater, and a stage. The first heater is located in the shaft and is configured to heat an upper portion of the shaft. The stage is located over the shaft and includes a first plate, a second plate over the first plate, and a second heater between the first plate and the second plate.

公开(公告)号：US20210217638A1

公开(公告)日：2021-07-15

申请号：US17219316

申请日：2021-03-31

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko HANAMACHI ,  Arata TATSUMI ,  Kenji SEKIYA ,  Naoya AIKAWA ,  Masaya TAKANASHI

IPC: H01L21/67 ,  C23C16/46 ,  H01J37/32 ,  H05B3/28 ,  C23C16/458 ,  H01J37/34 ,  H01L21/687

Abstract: Disclosed is a stage including a first supporting plate, a second supporting plate under the first supporting plate, a shaft under the second supporting plate and overlapping with the first supporting plate and the second supporting plate, and at least one sheath heater passing through the second supporting plate. The at least one sheath heater is arranged so as to extend on a first surface and a second surface which are parallel to an upper surface of the second supporting plate and which are different in distance from the first supporting plate from each other.

公开(公告)号：US20200045779A1

公开(公告)日：2020-02-06

申请号：US16653094

申请日：2019-10-15

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko HANAMACHI ,  Kenji SEKIYA ,  Daisuke HASHIMOTO ,  Satoshi HIRANO ,  Masaru TAKIMOTO ,  Go TAKAHARA ,  Yoshihito ARAKI ,  Arata TATSUMI ,  Takashi KAWASAKI ,  Yuki TOYAMA ,  Satoshi ANZAI

IPC: H05B3/48 ,  H05B3/18 ,  H05B3/03

Abstract: A small diameter sheath heater with improved reliability is provided. The sheath heater according to one embodiment of the present invention includes a metal sheath, a heating wire having a band shape, the heating wire arranged with a gap within the metal sheath so as to rotate with respect to an axis direction of the metal sheath, an insulating material arranged in the gap, and connection terminals arranged at one end of the metal sheath, the connection terminals electrically connected with both ends of the heating wire respectively.

公开(公告)号：US20210235550A1

公开(公告)日：2021-07-29

申请号：US17232519

申请日：2021-04-16

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko HANAMACHI ,  Arata TATSUMI ,  Kenji SEKIYA ,  Naoya AIKAWA ,  Masaya TAKANASHI

IPC: H05B3/48 ,  H01L21/67 ,  H01J37/32 ,  C23C14/50 ,  C23C16/458 ,  C23C16/46

Abstract: A heater comprises a folded heater wire, a first insulator provided on the folded heater wire, a metal sheath in contact with a part of the first insulator, a first insulating member arranged in parallel to a part of a first end of the folded heater wire taken out from a first end of the metal sheath, a second insulating member arranged in parallel to a part of the first insulating member and parallel to a part of a second end of the folded heater wire taken out from the first end of the metal sheath, a third insulating member arranged in parallel to a part of the first insulating member and the second insulating member, and bundle the first insulating member and the second insulating member, and a cylindrical member arranged in parallel to a part of the metal sheath and the third insulating member.

公开(公告)号：US20180226285A1

公开(公告)日：2018-08-09

申请号：US15948473

申请日：2018-04-09

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko HANAMACHI ,  Naoya AIKAWA

IPC: H01L21/683 ,  H05B3/18 ,  H01L21/67 ,  H05B3/28

CPC classification number: H01L21/6831 ,  H01L21/02 ,  H01L21/3065 ,  H01L21/67017 ,  H01L21/67098 ,  H01L21/67103 ,  H05B3/18 ,  H05B3/28 ,  H05B3/74

Abstract: A heater unit having high in-plane temperature uniformity is provided. A heater unit includes a first heater part, a second heater part controlled independently of the first heater part, a base arranged with a groove in a region between the first heater part and the second heater part, and a cover part arranged at an opening end of the groove and providing a closed space with the groove. In addition, an insulating layer covering the first heater part and the second heater part, and an electrostatic chuck attached to the base via the insulating layer may be further included. In addition, the closed space provided by the cover part and the groove may be a vacuum.

公开(公告)号：US20210398839A1

公开(公告)日：2021-12-23

申请号：US17463786

申请日：2021-09-01

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko HANAMACHI ,  Shuhei MOROTA ,  Masaru TAKIMOTO ,  Yoshihito ARAKI ,  Hibiki YOKOYAMA ,  Masahiro FUJII

IPC: H01L21/683 ,  H01J37/32 ,  C23C4/12

Abstract: A stage includes a base material having a first surface and a second surface adjacent to the first surface, and an insulating film including a plurality of particles, each of the plurality of particles having a flat surface. The flat surface included in the insulating film is provided along the first surface and the second surface. The base material includes a third surface in a direction 180 degrees opposite to the first surface, and a part of the flat surface included in the insulating film is provided along the third surface, and a surface obtained by extending the first surface and a surface obtained by extending the second surface intersect at 90 degrees. The base material includes a third surface in a direction 180 degrees opposite to the first surface, and a part of the flat surface included in the insulating film is provided along the third surface.

公开(公告)号：US20200043638A1

公开(公告)日：2020-02-06

申请号：US16598100

申请日：2019-10-10

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko HANAMACHI ,  Kenji SEKIYA ,  Go TAKAHARA ,  Naoya AIKAWA ,  Yuta KISARA ,  Arata TATSUMI

IPC: H01C1/03

Abstract: A heather unit including a small diameter sheath heater with improved reliability is provided. The heater unit includes a first substrate having a first joint surface and a second substrate having a second joint surface being joined together, a groove arranged on at least one of the first joint surface or the second joint surface, and a sheath heater arranged inside the groove. The sheath heater includes a metal sheath, a heating wire having a band shape, the heating wire arranged with a space within the metal sheath so as to rotate with respect to an axis direction of the metal sheath, an insulating material arranged in the space, and connection terminals arranged at one end of the metal sheath, the connection terminals electrically connected with both ends of the heating wire respectively.

公开(公告)号：US20150376783A1

公开(公告)日：2015-12-31

申请号：US14845865

申请日：2015-09-04

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko HANAMACHI ,  Daisuke HASHIMOTO ,  Yasuaki ISHIOKA

IPC: C23C16/458

CPC classification number: C23C16/4586 ,  B05C21/00 ,  C23C16/463 ,  H01L21/67109 ,  H01L21/68785 ,  H01L21/68792

Abstract: A substrate support device includes a plate portion including a heater plate that includes a heating element provided in the heater plate, and also including a first cooling plate provided on a bottom surface of the heater plate and having a first flow path, and a second cooling plate provided on a top surface of the heater plate and having a second flow path; and a shaft portion supporting the plate portion and including a line connected to the heating element to supply an electric current to the heating element, and a tube supplying a coolant to the first cooling plate and the second cooling plate, the line and the tube being provided inside the shaft portion.

Abstract translation: 基板支撑装置包括板部，该板部包括加热板，该加热板包括设置在加热板中的加热元件，并且还包括设置在加热板的底面上并具有第一流路的第一冷却板， 设置在加热器板的顶表面上并具有第二流路; 以及轴部，其支撑所述板部，并且包括连接到所述加热元件的线以向所述加热元件供应电流;以及管向所述第一冷却板和所述第二冷却板供应冷却剂的管，所述管和管为 设置在轴部内。