公开(公告)号：US09550663B2

公开(公告)日：2017-01-24

申请号：US14764572

申请日：2014-02-03

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Kazuo Goda ,  Takumi Taura ,  Shinichi Kishimoto ,  Hideki Ueda ,  Takeshi Mori

IPC: H01L29/84 ,  B81B3/00 ,  G01P15/125 ,  G01P15/08

CPC classification number: B81B3/0008 ,  B81B2201/0235 ,  G01P15/125 ,  G01P2015/0834 ,  H01L29/84

Abstract: A MEMS device includes a movable section, a frame, a beam, and an electrode substrate. The frame surrounds a surrounding of the movable section. The beam extends from at least a part of the frame, and is connected to the movable section. The electrode substrate includes a fixed electrode, an extended electrode, and a substrate section. The fixed electrode is formed on the electrode substrate in at least a part of a region facing a swing section. The extended electrode is connected to the fixed electrode, and is formed on the electrode substrate in at least a part of a region facing the shaft.

Abstract translation: MEMS器件包括可移动部分，框架，光束和电极基板。 框架围绕可动部分的周围。 梁从框架的至少一部分延伸，并连接到可移动部分。 电极基板包括固定电极，延伸电极和基板部分。 在面向摆动部的区域的至少一部分中，在电极基板上形成固定电极。 延伸电极连接到固定电极，并且在面向轴的区域的至少一部分中形成在电极基板上。

公开(公告)号：US10649000B2

公开(公告)日：2020-05-12

申请号：US15760615

申请日：2016-11-02

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Takahiro Shinohara ,  Hitoshi Yoshida ,  Kazuo Goda ,  Rie Okamoto ,  Hiroshi Nakatsuka ,  Masako Yamaguchi ,  Hideki Ueda ,  Takanori Aoyagi ,  Yuki Maegawa ,  Takuya Kajiwara ,  Keisuke Kuroda ,  Takeshi Mori

IPC: G01P15/08 ,  G01P15/125 ,  G01P15/18 ,  H01L29/84

Abstract: A connection assembly includes a sensor substrate, a layer substrate coupled to the sensor substrate so as to face an upper surface of the sensor substrate, and a wire connected between the sensor substrate and the layer substrate. The sensor substrate includes first and second projections provide on the upper surface of the sensor substrate and extending in an extension direction along the upper surface of the sensor substrate. The wire has a first end sandwiched between the layer substrate and the first projection, and a second end sandwiched between the layer substrate and the second projection. The connection assembly provides reliable connection.

公开(公告)号：US10609817B2

公开(公告)日：2020-03-31

申请号：US15577011

申请日：2016-06-22

Applicant: Panasonic Intellectual Property Management Co. Ltd.

Inventor： Ryosuke Meshii ,  Kazuo Goda ,  Takahiro Shinohara ,  Takanori Aoyagi ,  Kensaku Yamamoto ,  Hitoshi Yoshida

IPC: H05K1/02 ,  G01P15/125 ,  G01P15/08 ,  B81B7/00 ,  H05K1/03 ,  G01P1/00

Abstract: A wiring-buried glass substrate includes a glass substrate and a first wiring. The glass substrate includes a first surface, a second surface perpendicular to the first surface, and a third surface facing the first surface. The first wiring includes a first pillar portion and a first beam portion. The first pillar portion extends in a first direction perpendicular to the first surface of the glass substrate. The first beam portion is connected to a first surface of the first pillar portion and extends to a second direction perpendicular to a second surface of the glass substrate. The first wiring is buried in the glass substrate. The first surface of the first beam portion is exposed from a third surface of the glass substrate.

公开(公告)号：US10088497B2

公开(公告)日：2018-10-02

申请号：US15073645

申请日：2016-03-18

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Takeshi Mori ,  Keisuke Kuroda ,  Hitoshi Yoshida ,  Kazuo Goda ,  Takumi Taura ,  Hideki Ueda

IPC: G01P21/00 ,  G01P15/08 ,  G01P15/125 ,  G01P15/18

Abstract: An acceleration sensor includes a CV conversion circuit, an AD conversion circuit, and first and second registers. The CV conversion circuit outputs a voltage corresponding to the capacitance changes between a movable electrode and each of first and second fixed electrodes disposed to face the movable electrode. The AD conversion circuit is connected to the CV conversion circuit and has a first detection range and a second detection range. The first register is connected to the AD conversion circuit and holds a first value. The second register is connected to the AD conversion circuit and holds a second value. The first value contains information about an acceleration in the first detection range, and the second value contains information about an acceleration in the second detection range. The first and second values indicate accelerations in the same direction.