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公开(公告)号:US20110281443A1
公开(公告)日:2011-11-17
申请号:US13106140
申请日:2011-05-12
申请人: Pao-Hwa CHOU , Kota UMEZAWA , Yosuke WATANABE , Masayuki HASEGAWA
发明人: Pao-Hwa CHOU , Kota UMEZAWA , Yosuke WATANABE , Masayuki HASEGAWA
IPC分类号: H01L21/316 , C23C16/40
CPC分类号: C23C16/402
摘要: The film formation method includes transferring an object to be processed into a process chamber; controlling a temperature of the object to be processed to be equal to or lower than 350° C.; and supplying an aminosilane gas as a Si source gas and an oxidizing gas into the process chamber, wherein the oxidizing gas consists of a first oxidizing gas comprising at least one selected from the group consisting of an O2 gas and an O3 gas, and a second oxidizing gas comprising at least one selected from the group consisting of a H2O gas and a H2O2 gas, thereby forming a silicon oxide film on a surface of the object to be processed.
摘要翻译: 成膜方法包括将待处理物体转移到处理室中; 将待处理物体的温度控制在350℃以下; 将作为Si源气体和氧化气体的氨基硅烷气体供给到处理室中,其中,所述氧化气体由包含选自O 2气体和O 3气体中的至少一种的第一氧化气体构成, 包含选自H 2 O气体和H 2 O 2气体中的至少一种的氧化气体,从而在待处理物体的表面上形成氧化硅膜。
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2.
公开(公告)号:US20120156888A1
公开(公告)日:2012-06-21
申请号:US13330004
申请日:2011-12-19
申请人: Jun SATO , Masayuki HASEGAWA
发明人: Jun SATO , Masayuki HASEGAWA
IPC分类号: H01L21/306
CPC分类号: H01L21/0337 , C23C8/36 , H01L21/0273 , H01L21/0338 , H01L21/31138 , H01L21/31144 , H01L21/67109 , H01L21/67253
摘要: A slimming method includes transferring an object to be processed on which a patterned carbon-containing thin film is formed into a process chamber in an oxidation apparatus; and oxidizing and removing the surface of the carbon-containing thin film by an oxidizing gas while supplying moisture into the process chamber, to reduce widths of the protruded portions on the pattern of the carbon-containing thin film.
摘要翻译: 减肥方法包括将其上形成有图案的含碳薄膜的待处理物体转移到氧化装置中的处理室中; 并且在向处理室供给水分的同时通过氧化气体氧化除去含碳薄膜的表面,以减小含碳薄膜图案上的突出部分的宽度。
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3.
公开(公告)号:US20110319578A1
公开(公告)日:2011-12-29
申请号:US13171581
申请日:2011-06-29
申请人: Hidenori HANAOKA , Masato TAKANO , Naoko OCHI , Kazuo TAKAOKI , Kazuyuki ITO , Masayuki HASEGAWA
发明人: Hidenori HANAOKA , Masato TAKANO , Naoko OCHI , Kazuo TAKAOKI , Kazuyuki ITO , Masayuki HASEGAWA
CPC分类号: C07F17/00 , C07C13/553 , C07C2602/08 , C07C2603/14 , C08F4/65912 , C08F4/65916 , C08F10/00 , C08F110/06 , C08F210/16 , C08F4/65927 , C08F2500/03 , C08F2500/15 , C08F210/08 , C08F2500/09
摘要: A transition metal compound represented by the formula (1-1) or the formula (1-2) (M is a transition metal atom) and a process for producing a catalyst for olefin polymerization comprising a step of bringing the transition metal compound into contact with a co-catalytic component for activation.
摘要翻译: 由式(1-1)或式(1-2)表示的过渡金属化合物(M是过渡金属原子)和用于制备烯烃聚合催化剂的方法包括使过渡金属化合物接触的步骤 具有用于活化的助催化组分。
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