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公开(公告)号：US20190211445A1
公开(公告)日：2019-07-11
申请号：US16160757
申请日：2018-10-15
发明人： Seokjin Ko , Myungsoo Huh , Sukwon Jung , Dongkyun Ko , Inkyo Kim
CPC分类号： C23C16/4405 , C23C16/46
摘要： An apparatus for manufacturing a display apparatus includes: a chamber; a head unit configured to supply a process gas and a cleaning gas to an inside of the chamber; which has a storage space where the process gas or the cleaning gas is temporarily stored, and including a nozzle connected to the storage space and configured to guide the process gas or the cleaning gas from the storage space to the inside of the chamber; a susceptor unit arranged to face the head unit and on which a substrate is placeable; a cleaning gas supply unit connected to the head unit and configured to plasmarize the cleaning gas and supply the cleaning gas that is plasmarized to the head unit; and a cleaning gas ejection unit connected to the cleaning gas supply unit and configured to supply the cleaning gas to at least two portions of the storage space.
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公开(公告)号：US20160097124A1
公开(公告)日：2016-04-07
申请号：US14793562
申请日：2015-07-07
发明人： Myungsoo Huh , Dongkyun Ko , Choelmin Jang , Sungchul Kim , Inkyo Kim , Cheollae Roh
IPC分类号： C23C16/455 , C23C16/50
CPC分类号： C23C16/50 , C23C16/45563 , C23C16/54 , H01J37/3244 , H01J37/32449 , H01J37/32752 , H01J37/32899 , H01L51/5256
摘要： An apparatus and a method of manufacturing a display apparatus are disclosed. In one aspect, the apparatus includes a chamber and an inorganic layer forming nozzle unit formed in the chamber and configured to form at least one inorganic layer. The apparatus also includes an organic layer forming nozzle unit formed in the chamber and configured to form at least one organic layer, wherein the organic layer forming nozzle unit is arranged substantially in line with the inorganic layer forming nozzle unit. The apparatus further includes a separating nozzle unit formed between the inorganic layer forming nozzle unit and the organic layer forming nozzle unit and configured to spray an inert gas.
摘要翻译： 公开了一种制造显示装置的装置和方法。 一方面，该装置包括腔室和形成在腔室中并构造成形成至少一个无机层的无机层形成喷嘴单元。 所述设备还包括形成在所述室中并构造成形成至少一个有机层的有机层形成喷嘴单元，其中所述有机层形成喷嘴单元基本上与所述无机层形成喷嘴单元一致。 该装置还包括形成在无机层形成喷嘴单元和有机层形成喷嘴单元之间的分离喷嘴单元，并且构造成喷射惰性气体。
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公开(公告)号：US10043998B2
公开(公告)日：2018-08-07
申请号：US15442095
申请日：2017-02-24
发明人： Myungsoo Huh , Sungmin Cho , Dongkyun Ko , Sungchul Kim , Inkyo Kim , Cheollae Roh , Sangjoon Seo , Seungwoo Seo , Choelmin Jang
IPC分类号： H01L51/50 , H01L51/52 , C23C16/455 , H01L51/56 , H01L27/32
摘要： A display apparatus and an apparatus for and method of manufacturing the display apparatus. The display apparatus includes: a substrate; a display unit formed on the substrate; and a thin film encapsulation layer formed on the display unit. The thin film encapsulation layer includes an inorganic layer, and the inorganic layer includes a first sub-inorganic layer including a compound oxide including at least two of aluminum (Al), zinc (Zn), zirconium (Zn), and hafnium (Hf).
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4.发明申请APPARATUS FOR MANUFACTURING DISPLAY APPARATUS AND METHOD OF MANUFACTURING DISPLAY APPARATUS 审中-公开制造显示装置的装置和制造显示装置的方法公开(公告)号：US20160226031A1
公开(公告)日：2016-08-04
申请号：US14929159
申请日：2015-10-30
发明人： Choelmin Jang , Dongkyun Ko , Inkyo Kim , Sukwon Jung , Nam Ha , Myungsoo Huh
CPC分类号： H01L51/56 , C23C16/4412 , C23C16/45551 , C23C16/45563 , C23C16/54 , H01L51/0097 , H01L51/5253 , H01L51/5256
摘要： An apparatus and method for manufacturing a display apparatus includes: a chamber; a first nozzle unit at the chamber, the first nozzle unit configured to deposit an organic layer or an inorganic layer on a substrate; a second nozzle unit at the chamber, the second nozzle unit configured to deposit the organic layer or the inorganic layer on a substrate and the second nozzle unit being linearly aligned with the first nozzle unit in a first direction; and an injection nozzle unit between the first nozzle unit and the second nozzle unit, the injection nozzle unit configured to inject a first gas in the chamber toward the substrate.
摘要翻译： 一种显示装置的制造装置和方法，包括：室; 在所述腔室处的第一喷嘴单元，所述第一喷嘴单元被配置为在基板上沉积有机层或无机层; 所述第二喷嘴单元被配置为将所述有机层或所述无机层沉积在基板上，并且所述第二喷嘴单元在所述第一方向上与所述第一喷嘴单元线性对准; 以及在所述第一喷嘴单元和所述第二喷嘴单元之间的喷嘴单元，所述喷射喷嘴单元被配置为将所述室中的第一气体朝向所述基板喷射。
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5.发明授权公开(公告)号：US09587311B2
公开(公告)日：2017-03-07
申请号：US14819381
申请日：2015-08-05
发明人： Myungsoo Huh , Sungmin Cho , Dongkyun Ko , Sungchul Kim , Inkyo Kim , Cheollae Roh , Sangjoon Seo , Seungwoo Seo , Choelmin Jang
CPC分类号： H01L51/5253 , C23C16/455 , C23C16/45525 , C23C16/45565 , H01L27/3244 , H01L51/5256 , H01L51/5259 , H01L51/56 , H01L2251/303
摘要： A display apparatus and an apparatus for and method of manufacturing the display apparatus. The display apparatus includes: a substrate; a display unit formed on the substrate; and a thin film encapsulation layer formed on the display unit. The thin film encapsulation layer includes an inorganic layer, and the inorganic layer includes a first sub-inorganic layer including a compound oxide including at least two of aluminum (Al), zinc (Zn), zirconium (Zn), and hafnium (Hf).
摘要翻译： 一种显示装置及其制造方法及显示装置的制造方法。 显示装置包括：基板; 形成在所述基板上的显示单元; 以及形成在所述显示单元上的薄膜封装层。 薄膜封装层包括无机层，无机层包括含有包含铝（Al），锌（Zn），锆（Zn）和铪（Hf））中的至少两种的复合氧化物的第一亚无机层， 。
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6.发明申请公开(公告)号：US20160258060A1
公开(公告)日：2016-09-08
申请号：US14819381
申请日：2015-08-05
发明人： Myungsoo Huh , Sungmin Cho , Dongkyun Ko , Sungchul Kim , Inkyo Kim , Cheollae Roh , Sangjoon Seo , Seungwoo Seo , Choelmin Jang
IPC分类号： C23C16/455 , H01L51/56 , H01L51/52
CPC分类号： H01L51/5253 , C23C16/455 , C23C16/45525 , C23C16/45565 , H01L27/3244 , H01L51/5256 , H01L51/5259 , H01L51/56 , H01L2251/303
摘要： A display apparatus and an apparatus for and method of manufacturing the display apparatus. The display apparatus includes: a substrate; a display unit formed on the substrate; and a thin film encapsulation layer formed on the display unit. The thin film encapsulation layer includes an inorganic layer, and the inorganic layer includes a first sub-inorganic layer including a compound oxide including at least two of aluminum (Al), zinc (Zn), zirconium (Zn), and hafnium (Hf).
摘要翻译： 一种显示装置及其制造方法及显示装置的制造方法。 显示装置包括：基板; 形成在所述基板上的显示单元; 以及形成在所述显示单元上的薄膜封装层。 薄膜封装层包括无机层，无机层包括含有包含铝（Al），锌（Zn），锆（Zn）和铪（Hf））中的至少两种的复合氧化物的第一亚无机层， 。
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7.发明申请公开(公告)号：US20180366688A1
公开(公告)日：2018-12-20
申请号：US16111037
申请日：2018-08-23
发明人： Choelmin Jang , Dongkyun Ko , Inkyo Kim , Sukwon Jung , Nam Ha , Myungsoo Huh
CPC分类号： H01L51/56 , C23C16/4412 , C23C16/45551 , C23C16/45563 , C23C16/54 , H01L51/0097 , H01L51/5253 , H01L51/5256
摘要： An apparatus and method for manufacturing a display apparatus includes: a chamber; a first nozzle unit at the chamber, the first nozzle unit configured to deposit an organic layer or an inorganic layer on a substrate; a second nozzle unit at the chamber, the second nozzle unit configured to deposit the organic layer or the inorganic layer on a substrate and the second nozzle unit being linearly aligned with the first nozzle unit in a first direction; and an injection nozzle unit between the first nozzle unit and the second nozzle unit, the injection nozzle unit configured to inject a first gas in the chamber toward the substrate.
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公开(公告)号：US11186908B2
公开(公告)日：2021-11-30
申请号：US16160757
申请日：2018-10-15
发明人： Seokjin Ko , Myungsoo Huh , Sukwon Jung , Dongkyun Ko , Inkyo Kim
IPC分类号： C23C16/44 , C23C16/46 , H01L21/00 , H01J37/32 , C23C16/455
摘要： An apparatus for manufacturing a display apparatus includes: a chamber; a head unit configured to supply a process gas and a cleaning gas to an inside of the chamber; which has a storage space where the process gas or the cleaning gas is temporarily stored, and including a nozzle connected to the storage space and configured to guide the process gas or the cleaning gas from the storage space to the inside of the chamber; a susceptor unit arranged to face the head unit and on which a substrate is placeable; a cleaning gas supply unit connected to the head unit and configured to plasmarize the cleaning gas and supply the cleaning gas that is plasmarized to the head unit; and a cleaning gas ejection unit connected to the cleaning gas supply unit and configured to supply the cleaning gas to at least two portions of the storage space.
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9.发明授权公开(公告)号：US10573851B2
公开(公告)日：2020-02-25
申请号：US16111037
申请日：2018-08-23
发明人： Choelmin Jang , Dongkyun Ko , Inkyo Kim , Sukwon Jung , Nam Ha , Myungsoo Huh
摘要： An apparatus and method for manufacturing a display apparatus includes: a chamber; a first nozzle unit at the chamber, the first nozzle unit configured to deposit an organic layer or an inorganic layer on a substrate; a second nozzle unit at the chamber, the second nozzle unit configured to deposit the organic layer or the inorganic layer on a substrate and the second nozzle unit being linearly aligned with the first nozzle unit in a first direction; and an injection nozzle unit between the first nozzle unit and the second nozzle unit, the injection nozzle unit configured to inject a first gas in the chamber toward the substrate.
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公开(公告)号：US10041173B2
公开(公告)日：2018-08-07
申请号：US14793562
申请日：2015-07-07
发明人： Myungsoo Huh , Dongkyun Ko , Choelmin Jang , Sungchul Kim , Inkyo Kim , Cheollae Roh
IPC分类号： C23C16/50 , C23C16/54 , H01J37/32 , C23C16/455 , H01L51/52
摘要： An apparatus and a method of manufacturing a display apparatus are disclosed. In one aspect, the apparatus includes a chamber and an inorganic layer forming nozzle unit formed in the chamber and configured to form at least one inorganic layer. The apparatus also includes an organic layer forming nozzle unit formed in the chamber and configured to form at least one organic layer, wherein the organic layer forming nozzle unit is arranged substantially in line with the inorganic layer forming nozzle unit. The apparatus further includes a separating nozzle unit formed between the inorganic layer forming nozzle unit and the organic layer forming nozzle unit and configured to spray an inert gas.
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