-
公开(公告)号：US10364147B2
公开(公告)日：2019-07-30
申请号：US15687618
申请日：2017-08-28
Applicant: STMicroelectronics S.r.l.
Inventor： Marco Rossi , Sergio Mansueto Reina , Giacomo Calcaterra
Abstract: A probe card fits in a system for testing a micro-electro-mechanical device having an element sensitive to a magnetic field. The probe card is formed by a PCB having a through-opening and probe tips for electrically contacting the micro-electro-mechanical device. A housing structure is received within the through-opening. The housing structure includes a planar peripheral region surrounding seats that protrude and extend at least partly into the through-opening. Magnetic elements are arranged in the seats, with the magnetic elements configured to generate a test magnetic field for testing operation of the micro-electro-mechanical device.
-
2.发明申请公开(公告)号：US20180237293A1
公开(公告)日：2018-08-23
申请号：US15687618
申请日：2017-08-28
Applicant: STMicroelectronics S.r.l.
Inventor： Marco Rossi , Sergio Mansueto Reina , Giacomo Calcaterra
CPC classification number: B81C99/005 , G01M11/005 , G01R1/067 , G01R1/07307 , G01R31/2886 , G01R31/2889
Abstract: A probe card fits in a system for testing a micro-electro-mechanical device having an element sensitive to a magnetic field. The probe card is formed by a PCB having a through-opening and probe tips for electrically contacting the micro-electro-mechanical device. A housing structure is received within the through-opening. The housing structure includes a planar peripheral region surrounding seats that protrude and extend at least partly into the through-opening. Magnetic elements are arranged in the seats, with the magnetic elements configured to generate a test magnetic field for testing operation of the micro-electro-mechanical device.
-
公开(公告)号：US10048491B2
公开(公告)日：2018-08-14
申请号：US15266063
申请日：2016-09-15
Applicant: STMicroelectronics S.r.l.
Inventor： Massimiliano Merli , Roberto Carminati , Marco Rossi
IPC: G02B26/08 , H01L41/09 , H03H9/02 , G01L1/18 , G01L1/16 , G01L5/00 , G02B26/10 , H04N5/225 , G06F3/042
Abstract: A MEMS device includes a platform carried by a frame via elastic connection elements configured to enable rotation of the platform about a first axis. A bearing structure supports the frame through first and second elastic suspension arms configured to enable rotation of the frame about a second axis transverse to the first axis. The first and second elastic suspension arms are anchored to the bearing structure through respective anchorage portions arranged offset with respect to the second axis. A stress sensor formed by first and second sensor elements respectively arranged on the first and second suspension arms is positioned in proximity of the anchorage portions, on a same side of the second axis, in a symmetrical position with respect to the first axis.
-
4.发明申请公开(公告)号：US20170285332A1
公开(公告)日：2017-10-05
申请号：US15266063
申请日：2016-09-15
Applicant: STMicroelectronics S.r.l.
Inventor： Massimiliano Merli , Roberto Carminati , Marco Rossi
CPC classification number: G02B26/0858 , G01L1/16 , G01L1/18 , G01L5/00 , G02B26/085 , G02B26/101 , G02B26/105 , G06F3/0423 , H01L41/09 , H03H9/02275 , H04N5/225
Abstract: A MEMS device includes a platform carried by a frame via elastic connection elements configured to enable rotation of the platform about a first axis. A bearing structure supports the frame through first and second elastic suspension arms configured to enable rotation of the frame about a second axis transverse to the first axis. The first and second elastic suspension arms are anchored to the bearing structure through respective anchorage portions arranged offset with respect to the second axis. A stress sensor formed by first and second sensor elements respectively arranged on the first and second suspension arms is positioned in proximity of the anchorage portions, on a same side of the second axis, in a symmetrical position with respect to the first axis.
-
-
-
Search Results
4
records
(took 0.012 seconds)
