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公开(公告)号:US20230197549A1
公开(公告)日:2023-06-22
申请号:US18112715
申请日:2023-02-22
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: JINWOO PARK , JONGHO LEE , YEONGKWON KO
CPC classification number: H01L23/3157 , H01L21/568 , H01L23/293 , H01L23/49816 , H01L23/49827 , H01L24/16 , H01L25/18 , H01L25/50 , H01L2224/14 , H01L2224/1012 , H01L2224/8185 , H01L2224/16225
Abstract: A method of manufacture for a semiconductor package includes; forming a molding member on side surfaces of the semiconductor chips, using an adhesive to attach a carrier substrate to upper surfaces of the molding member and the semiconductor chips, using a first blade having a first blade-width to cut away selected portions of the carrier substrate and portions of the adhesive underlying the selected portions of the carrier substrate, and using the first blade to partially cut into an upper surface of the molding member to form a first cutting groove, wherein the selected portions of the carrier substrate are dispose above portions of the molding member between adjacent ones of semiconductor chips, using a second blade having a second blade-width narrower than the first blade-width to cut through a lower surface of the molding member to form a second cutting groove, wherein a combination of the first cutting groove and the second cutting groove separate a package structure including a semiconductor chip supported by a cut portion of the carrier substrate and bonding the package structure to an upper surface of a package substrate.
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2.
公开(公告)号:US20230178154A1
公开(公告)日:2023-06-08
申请号:US18103754
申请日:2023-01-31
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: WON-TAECK JUNG , SANG-WAN NAM , JINWOO PARK , JAEYONG JEONG
CPC classification number: G11C16/20 , G11C16/08 , G11C16/3427 , G11C16/0483 , G11C16/10 , H10B41/27
Abstract: A three-dimensional (3D) nonvolatile memory device includes a cell string. The cell string includes a pillar structure comprising a ground selection transistor, a plurality of memory cells, and a string selection transistor stacked vertically over a substrate. The memory cells comprise a first cell group and a second cell group stacked on the first cell group, and a horizontal width of at least a portion of the pillar structure decreases in a depth direction towards the substrate. A method of programming the memory device includes initializing a channel of a memory cell of the first cell group of the cell string through the ground selection transistor of the pillar structure, and then applying a program voltage to the memory cell of the pillar structure of the cell string.
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3.
公开(公告)号:US20220068397A1
公开(公告)日:2022-03-03
申请号:US17523385
申请日:2021-11-10
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: WON-TAECK JUNG , SANG-WAN NAM , JINWOO PARK , JAEYONG JEONG
Abstract: A three-dimensional (3D) nonvolatile memory device includes a cell string. The cell string includes a pillar structure comprising a ground selection transistor, a plurality of memory cells, and a string selection transistor stacked vertically over a substrate. The memory cells comprise a first cell group and a second cell group stacked on the first cell group, and a horizontal width of at least a portion of the pillar structure decreases in a depth direction towards the substrate. A method of programming the memory device includes initializing a channel of a memory cell of the first cell group of the cell string through the ground selection transistor of the pillar structure, and then applying a program voltage to the memory cell of the pillar structure of the cell string.
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4.
公开(公告)号:US20180374541A1
公开(公告)日:2018-12-27
申请号:US15911208
申请日:2018-03-05
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: WON-TAECK JUNG , SANG-WAN NAM , JINWOO PARK , JAEYONG JEONG
CPC classification number: G11C16/20 , G11C16/0483 , G11C16/08 , G11C16/10 , G11C16/3427 , H01L27/11524 , H01L27/11556 , H01L27/1157 , H01L27/11582
Abstract: A three-dimensional (3D) nonvolatile memory device includes a cell string. The cell string includes a pillar structure comprising a ground selection transistor, a plurality of memory cells, and a string selection transistor stacked vertically over a substrate. The memory cells comprise a first cell group and a second cell group stacked on the first cell group, and a horizontal width of at least a portion of the pillar structure decreases in a depth direction towards the substrate. A method of programming the memory device includes initializing a channel of a memory cell of the first cell group of the cell string through the ground selection transistor of the pillar structure, and then applying a program voltage to the memory cell of the pillar structure of the cell string.
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公开(公告)号:US20240142960A1
公开(公告)日:2024-05-02
申请号:US18453808
申请日:2023-08-22
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: SONGYI HAN , JISEONG DOH , JINWOO PARK , YERO LEE , HYEONKYEONG LEE , JAEHOON JEONG
IPC: G05B19/418
CPC classification number: G05B19/41875 , G05B2219/32193 , G05B2219/32368
Abstract: A method for determining suitability of a target receipe set for manufacturing a semiconductor device includes: obtaining a reference recipe set by searching a database based on the target recipe set, the reference recipe set has a similarity with a threshold to the target recipe set; performing deep learning based on the database, the target recipe set and the reference recipe set to predict a probability of defect occurring in the semiconductor device when manufactured using a manufacturing process based on the target recipe set; generating a target script set corresponding to the target recipe set by comparing the target recipe set with the reference recipe set; simulating the manufacturing process of the semiconductor device using the target script set; and determining the suitability of the target recipe set based on the probability of the defect and a result of the simulating of the manufacturing process.
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公开(公告)号:US20230113726A1
公开(公告)日:2023-04-13
申请号:US17872139
申请日:2022-07-25
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: BYOUNGSOO KWAK , JINWOO PARK
IPC: H01L23/31 , H01L25/065 , H01L23/13
Abstract: A semiconductor package includes an interposer; a first stacked chip including a first semiconductor chip disposed on the interposer and one or more second semiconductor chips disposed on the first semiconductor chip; a first molding layer surrounding the first stacked chip; and a second molding layer surrounding the first molding layer, wherein the second molding layer extends from an uppermost surface of the interposer to a trench of the interposer.
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公开(公告)号:US20220293563A1
公开(公告)日:2022-09-15
申请号:US17405130
申请日:2021-08-18
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: YEONGKWON KO , JINWOO PARK , JAEKYUNG YOO , TEAKHOON LEE
IPC: H01L25/065 , H01L21/56 , H01L25/00 , H01L23/00
Abstract: A semiconductor package includes a package substrate on which a base chip is disposed. A first semiconductor chip is disposed on the base chip. A second semiconductor chip is disposed on the first semiconductor chip. An inner mold layer surrounds an upper surface of the base chip and respective side surfaces of the first semiconductor chip and the second semiconductor chip. A first outer mold layer is interposed between the package substrate and the base chip while covering at least a portion of a side surface of the base chip. A second outer mold layer is disposed on the first outer mold layer while covering at least a portion of a side surface of the inner mold layer. The second outer mold layer is spaced apart from the package substrate. The first outer mold layer and the second outer mold layer have different viscosities.
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公开(公告)号:US20220093481A1
公开(公告)日:2022-03-24
申请号:US17177725
申请日:2021-02-17
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: JINWOO PARK , JONGHO LEE , YEONGKWON KO
Abstract: A method of manufacture for a semiconductor package includes; forming a molding member on side surfaces of the semiconductor chips, using an adhesive to attach a carrier substrate to upper surfaces of the molding member and the semiconductor chips, using a first blade having a first blade-width to cut away selected portions of the carrier substrate and portions of the adhesive underlying the selected portions of the carrier substrate, and using the first blade to partially cut into an upper surface of the molding member to form a first cutting groove, wherein the selected portions of the carrier substrate are dispose above portions of the molding member between adjacent ones of semiconductor chips, using a second blade having a second blade-width narrower than the first blade-width to cut through a lower surface of the molding member to form a second cutting groove, wherein a combination of the first cutting groove and the second cutting groove separate a package structure including a semiconductor chip supported by a cut portion of the carrier substrate and bonding the package structure to an upper surface of a package substrate.
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公开(公告)号:US20220139456A1
公开(公告)日:2022-05-05
申请号:US17353918
申请日:2021-06-22
Applicant: Samsung Electronics Co., Ltd.
Inventor: GEUNWON LIM , JINWOO PARK , ILGYU CHOI
IPC: G11C16/04 , H01L27/11519 , H01L27/11524 , H01L27/11529 , H01L27/11556 , H01L27/11565 , H01L27/1157 , H01L27/11573 , H01L27/11582
Abstract: Semiconductor devices may include a peripheral circuit structure including circuits, a substrate on the peripheral circuit structure, a pair of word line cut structures extending in a first direction on the substrate, and a memory cell block between the pair of word line cut structures and on the substrate. The memory cell block may include a memory stack structure including gate lines overlapping each other in a vertical direction, an interlayer insulation layer on an edge portion of each of the gate lines, a dam structure extending through the gate lines and the interlayer insulation layer, an intersection direction cut structure extending through the memory stack structure and the interlayer insulation layer in the vertical direction and being spaced apart from the dam structure, and a dummy channel structures between the intersection direction cut structure and the dam structure.
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