JOSEPHSON JUNCTION DEVICE AND METHOD OF MANUFACTURING THE SAME

    公开(公告)号:US20240099161A1

    公开(公告)日:2024-03-21

    申请号:US18116681

    申请日:2023-03-02

    CPC classification number: H10N60/805 H10N60/0912 H10N60/12

    Abstract: A Josephson junction device and a method of manufacturing the Josephson junction device are disclosed. The Josephson junction device includes a substrate having a top surface and a trench recessed below the first surface, wherein sidewalls of the substrate define sidewalls of the trench; a first superconducting electrode formed on the top surface of the substrate with sidewalls further defining the sidewalls of the trench; a tunneling thin film formed over the sidewalls of the substrate and over the sidewalls of the first superconducting electrode; and a second superconducting electrode formed in the trench in contact with the tunneling thin film and with top surface above the top surface of the substrate, wherein a superconducting tunnel junction is formed between the first superconducting electrode and the second superconducting electrode through the tunneling thin film.

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