公开(公告)号：US20170125364A1

公开(公告)日：2017-05-04

申请号：US15251575

申请日：2016-08-30

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jung-Hyun Cho ,  Kwang-Ho Ryu ,  Ji-Hye Shin ,  Jin-Ho Chun

IPC: H01L23/00 ,  H01L23/528 ,  G11C8/10 ,  H01L23/48

CPC classification number: H01L24/02 ,  G11C5/025 ,  G11C8/10 ,  H01L21/76898 ,  H01L23/481 ,  H01L23/528 ,  H01L23/544 ,  H01L24/03 ,  H01L24/05 ,  H01L24/11 ,  H01L24/13 ,  H01L2223/54426 ,  H01L2224/0217 ,  H01L2224/02331 ,  H01L2224/02372 ,  H01L2224/02373 ,  H01L2224/03602 ,  H01L2224/0401 ,  H01L2224/05009 ,  H01L2224/05024 ,  H01L2224/05124 ,  H01L2224/05147 ,  H01L2224/05155 ,  H01L2224/05164 ,  H01L2224/05166 ,  H01L2224/05171 ,  H01L2224/0557 ,  H01L2224/05572 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05664 ,  H01L2224/11002 ,  H01L2224/11462 ,  H01L2224/1147 ,  H01L2224/13026 ,  H01L2224/13082 ,  H01L2224/14181 ,  H01L2924/00014

Abstract: An integrated circuit device can include a first Through Via (TV) region including first TV structures that are spaced apart from one another at a first pitch in first and second directions. A second TV region can include second TV structures that are spaced apart from one another at the first pitch in the first and second directions. A TV free region can separate directly adjacent first and second TV structures from one another by a spacing distance measured in the first or second direction that is greater than the first pitch and an alignment key can be defined as a geometric pattern including one of the second TV structures and the TV free region.