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    SEMICONDUCTOR DEVICE
    4.
    发明申请
    SEMICONDUCTOR DEVICE 审中-公开

    公开(公告)号：US20180158669A1

    公开(公告)日：2018-06-07

    申请号：US15886372

    申请日：2018-02-01

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Chan Sic Yoon ,  Ki Seok Lee ,  Dong Oh Kim ,  Yong Jae Kim

    IPC: H01L21/027 ,  H01L21/02 ,  G03F1/38

    CPC classification number: H01L21/027 ,  G03F1/38 ,  H01L21/02107 ,  H01L21/02697 ,  H01L27/0207 ,  H01L27/10888

    Abstract: Methods for manufacturing a semiconductor device include forming a gate line extending in a first direction in a substrate, and an impurity region on a side surface of the gate line, forming an insulating film pattern on the substrate, the insulating film pattern extending in the first direction and comprising a first through-hole that is configured to expose the impurity region, forming a barrier metal layer on the first through-hole, forming a conductive line contact that fills the first through-hole and that is electrically connected to the impurity region, fowling a first mask pattern on the conductive line contact and the insulating film pattern, the first mask pattern extending in a second direction that is different from the first direction and the first mask pattern comprising a first opening, and removing corners of the barrier metal layer by partially etching the barrier metal layer.

    Link unit and arm module having the same
    7.
    发明授权
    Link unit and arm module having the same 有权
    链接单元和臂模块具有相同的功能

    公开(公告)号：US09393702B2

    公开(公告)日：2016-07-19

    申请号：US13772746

    申请日：2013-02-21

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Jeong Hun Kim ,  Yong Jae Kim

    IPC: B25J18/06 ,  B25J9/06 ,  B25J9/10 ,  A61B1/005

    CPC classification number: B25J18/06 ,  A61B1/0055 ,  B25J9/06 ,  B25J9/104 ,  Y10T74/20305

    Abstract: An arm module having a structure capable of precisely moving each link unit while flexibly moving with sufficient stiffness includes a plurality of link units each having a ring shape, a plurality of joint units each disposed in a middle portion of a corresponding one of the plurality of link units to connect the plurality of link units, wherein the plurality of link units includes a first link unit, a second link unit disposed while being rotated with respect to the first link unit, the second link unit linked at an upper side of the first link unit while passing through a middle portion of the first link unit, and a third link unit disposed while being rotated with respect to the second link unit, the third link unit linked at an upper side of the second link unit while passing through a middle portion of the second link unit.

    Abstract translation: 具有能够以足够的刚度灵活地移动的能够精确地移动每个连杆单元的结构的臂模块包括多个环形单元，每个连接单元各自具有环形，多个接头单元各自设置在多个 链接单元以连接多个链接单元，其中所述多个链接单元包括第一链接单元，在相对于所述第一链接单元旋转的同时设置的第二链接单元，所述第二链接单元连接在所述第一链接单元的上侧 连杆单元，同时穿过第一连杆单元的中间部分;以及第三连杆单元，其在相对于第二连杆单元旋转的同时设置，第三连杆单元连接在第二连杆单元的上侧，同时穿过中间 第二链接单元的一部分。

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