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公开(公告)号：US07362033B2
公开(公告)日：2008-04-22
申请号：US11365655
申请日：2006-03-02
CPC分类号： H03H9/14544 , G01H9/00 , G01N21/21 , H03H9/02708 , H03H9/14547
摘要： A surface-acoustic-wave device includes a piezoelectric substrate and first and second comb-shaped electrodes each having a bus-bar portion parallel to a propagation direction of a surface acoustic wave in the substrate. Respective electrode fingers are periodically formed on the piezoelectric substrate and extend in directions perpendicular to the propagation direction, wherein the electrode fingers of the first comb-shaped electrode and the electrode fingers of the second comb-shaped electrode are separated away from the bus-bar portion of the opposing comb-shaped electrode. The respective electrode fingers being periodically arrayed in the propagation direction of the surface-acoustic-wave, and the electrode fingers of each comb-shaped electrode are inclined at root portions thereof outwardly right and left from the bus-bar portion of the corresponding comb-shaped electrode so that the inclined portions of the electrode fingers face a direction of a leaking surface-acoustic-wave perpendicularly.
摘要翻译： 表面声波装置包括压电基板和每个具有平行于基板中的表面声波的传播方向的汇流条部分的第一和第二梳状电极。 相应的电极指周期性地形成在压电基片上并且在垂直于传播方向的方向上延伸，其中第一梳状电极的电极指和第二梳状电极的电极指分离离母线 相对的梳状电极的一部分。 各个电极指沿周向排列在表面声波的传播方向上，并且每个梳状电极的电极指从其相应梳状电极的汇流条部分向右和向左的根部分倾斜， 使得电极指的倾斜部分垂直面向泄漏的表面声波的方向。
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公开(公告)号：US07054005B2
公开(公告)日：2006-05-30
申请号：US10406268
申请日：2003-04-04
IPC分类号： G01J4/00
CPC分类号： H03H9/14544 , G01H9/00 , G01N21/21 , H03H9/02708 , H03H9/14547
摘要： An elastic-wave monitoring device includes an optical system which is arranged so that a circularly polarized light from a light source is incident to a measured object and a light beam from the measured object passes through a polarizing filter to a photodetector. A detection unit detects periodic fluctuation components of an output signal of the photodetector. In the elastic-wave monitoring device, the polarizing filter is arranged to have a polarization transmission axis directed to one of directions of principal axes of an ellipse formed by intersections of an index ellipsoid of the measured object and a plane perpendicular to an incidence direction of the light beam and passing through an origin of the index ellipsoid.
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公开(公告)号：US20060146314A1
公开(公告)日：2006-07-06
申请号：US11365655
申请日：2006-03-02
CPC分类号： H03H9/14544 , G01H9/00 , G01N21/21 , H03H9/02708 , H03H9/14547
摘要： An elastic-wave monitoring device includes an optical system which is arranged so that a circularly polarized light from a light source is incident to a measured object and a light beam from the measured object passes through a polarizing filter to a photodetector. A detection unit detects periodic fluctuation components of an output signal of the photodetector. In the elastic-wave monitoring device, the polarizing filter is arranged to have a polarization transmission axis directed to one of directions of principal axes of an ellipse formed by intersections of an index ellipsoid of the measured object and a plane perpendicular to an incidence direction of the light beam and passing through an origin of the index ellipsoid.
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公开(公告)号：US20080189665A1
公开(公告)日：2008-08-07
申请号：US12073277
申请日：2008-03-03
CPC分类号： H03H9/14544 , G01H9/00 , G01N21/21 , H03H9/02708 , H03H9/14547
摘要： A surface-acoustic-wave device comprises a piezoelectric substrate and first and second comb-shaped electrodes each having a bus-bar portion parallel to a propagation direction of a surface acoustic wave in the substrate. Respective electrode fingers are periodically formed on the piezoelectric substrate and extend in directions perpendicular to the propagation direction, wherein the electrode fingers of the first comb-shaped electrode and the electrode fingers of the second comb-shaped electrode are separated away from the bus-bar portion of the opposing comb-shaped electrode. The respective electrode fingers being periodically arrayed in the propagation direction of the surface-acoustic-wave, and the electrode fingers of each comb-shaped electrode are inclined at root portions thereof outwardly right and left from the bus-bar portion of the corresponding comb-shaped electrode so that the inclined portions of the electrode fingers face a direction of a leaking surface-acoustic-wave perpendicularly.
摘要翻译： 表面声波装置包括压电基板和每个具有与基板中的表面声波的传播方向平行的汇流条部分的第一和第二梳状电极。 相应的电极指周期性地形成在压电基片上并且在垂直于传播方向的方向上延伸，其中第一梳状电极的电极指和第二梳状电极的电极指分离离母线 相对的梳状电极的一部分。 各个电极指沿周向排列在表面声波的传播方向上，并且每个梳状电极的电极指从其相应梳状电极的汇流条部分向右和向左的根部分倾斜， 使得电极指的倾斜部分垂直面向泄漏的表面声波的方向。
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公开(公告)号：US07570848B2
公开(公告)日：2009-08-04
申请号：US11984991
申请日：2007-11-26
申请人： Hideo Okada , Shinichi Wakana
发明人： Hideo Okada , Shinichi Wakana
IPC分类号： G02B6/35
CPC分类号： H04Q11/0005 , G02B6/3512 , G02B6/3518 , G02B6/3544 , G02B6/3586 , G02B7/005 , H04Q2011/003 , H04Q2011/0039 , H04Q2011/0049
摘要： An optical switch includes plural pairs of ports and first lenses, each of the ports emitting light in a diffused manner or receiving light input thereto in a collected manner, and the first lenses respectively collimating light emitted from the ports; a second lens that collects the light collimated by the first lenses; and an inclinable mirror that reflects the light collected by the second lens at different angles toward the second lens. A position of a first lens is adjusted based on a first distance between a core of the second lens and a portion of the second lens through which light collimated by the first lens passes.
摘要翻译： 光学开关包括多对端口和第一透镜，每个端口以散射方式发射光或以收集的方式接收输入光的光，并且第一透镜分别准直从端口发射的光; 第二透镜，其收集由第一透镜准直的光; 以及可倾斜的反射镜，其将由第二透镜收集的光以不同的角度反射到第二透镜。 基于第二透镜的芯与通过第一透镜准直的光通过的第二透镜的一部分之间的第一距离来调整第一透镜的位置。
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公开(公告)号：US20060139026A1
公开(公告)日：2006-06-29
申请号：US11174503
申请日：2005-07-06
申请人： Yasuhiro Endo , Shinichi Wakana
发明人： Yasuhiro Endo , Shinichi Wakana
CPC分类号： G01Q60/50 , G01Q40/02 , G01R33/0385
摘要： The magnetic field generator device comprises a plurality of magnetic field generator units, which generate distinct magnetic fields in different locations, and at least two or more of these magnetic field generator units have different external shape, configuration or size. The magnetic field formed by such a magnetic field generator device is scanned by the probe device of a magnetic force microscope, and based on the measurement result, the probe device is calibrated.
摘要翻译： 磁场发生器装置包括多个磁场发生器单元，其在不同位置产生不同的磁场，并且这些磁场发生器单元中的至少两个或更多个具有不同的外形，构造或尺寸。 由磁场发生器装置形成的磁场由磁力显微镜的探针装置进行扫描，根据测定结果对探针装置进行校准。
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公开(公告)号：US06832020B2
公开(公告)日：2004-12-14
申请号：US09986293
申请日：2001-11-08
申请人： Hideo Okada , Shinichi Wakana
发明人： Hideo Okada , Shinichi Wakana
IPC分类号： G02B626
CPC分类号： G02B6/352 , G02B6/29358 , G02B6/29394 , G02B6/29395 , G02B6/32 , G02B6/3578
摘要： Beams inputted from a fiber are collected by a lens and are angular-dispersed by a VIPA. The luminous flux from the VIPA is collected on a surface-shape variable mirror by a lens. The surface-shape variable mirror is configured in such a way that a mirror shape can be controlled by a piezo stage and necessary wavelength dispersion can be applied, if necessary. Although the beam group reflected on the surface-shape variable mirror propagates the light path backward, the beam group is inputted to a position different from the outputted position when the beam group enters the VIPA. Therefore, a desired wavelength dispersion can be given to each beam group by performing control of the input position in the VIPA for each wavelength using the surface-shape variable mirror.
摘要翻译： 从纤维输入的光束由透镜收集，并通过VIPA进行角度分散。 来自VIPA的光通量由透镜收集在表面形可变镜上。 表面形状可变镜被配置为可以通过压电级控制镜面形状，并且如果需要可以应用必要的波长色散。 尽管反射在表面形状可变镜上的光束组向后传播光路，但当光束组进入VIPA时，光束组被输入到与输出位置不同的位置。 因此，可以通过使用表面形状可变镜对每个波长的VIPA中的输入位置进行控制，可以对每个光束组给出期望的波长色散。
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公开(公告)号：US5331275A
公开(公告)日：1994-07-19
申请号：US987959
申请日：1992-12-09
申请人： Kazuyuki Ozaki , Shinichi Wakana , Yoshiro Goto , Akio Ito , Kazuo Okubo , Soichi Hama , Akira Fujii , Yoko Sato
发明人： Kazuyuki Ozaki , Shinichi Wakana , Yoshiro Goto , Akio Ito , Kazuo Okubo , Soichi Hama , Akira Fujii , Yoko Sato
CPC分类号： G01Q20/04 , B82Y35/00 , G01Q60/30 , G01R1/067 , G01R1/06705 , G01R1/06711 , G01R1/06727 , Y10S977/852
摘要： A probing device includes a minute probe in which at least an end portion is formed by conductive material, a cantilever having one end to which the probe is attached, and another end fixed to a moving member movable relatively to a sample in each direction of X, Y and Z, a unit for moving the moving member relatively to the sample, a transducing unit for generating information of voltage or current by means of light, a connecting unit having a low electric resistance, for connecting the transducing unit and the end portion of the probe, a detecting unit for detecting a change in a physical amount occurring in the cantilever by a force caused between the probe and the sample by a relative proximity of the moving member to the sample, and a voltage measuring unit for measuring a voltage at a measurement point on the sample, which is determined based on an output of the detecting unit, by way of the transducing unit when the probe is contacted with the measurement point. By the constitution, it is possible to realize a voltage measurement with both an enhanced space resolution and an enhanced time resolution. Also, by using the probing device in an integrated circuit testing apparatus or system, it is possible to realize a stable probing to a minute wiring without increasing an electrical load with respect to the minute wiring and thus contribute to an improvement in the precision of a voltage measurement.
摘要翻译： 探测装置包括微小探针，其中至少一个端部由导电材料形成，悬臂具有一个连接有探针的端部，另一端固定在可沿着X方向移动相对于样品的移动部件 ，Y和Z，用于相对于样品移动移动部件的单元，用于通过光产生电压或电流的信息的转换单元，具有低电阻的连接单元，用于连接换能单元和端部 的检测单元，用于通过所述移动构件与所述样本的相对接近来检测由所述探针和所述样本之间产生的力而在所述悬臂中产生的物理量的变化的检测单元，以及用于测量所述电极的电压的电压测量单元 在探针与测量点接触时，通过换能单元，基于检测单元的输出确定样本上的测量点。 通过该结构，可以实现具有增强的空间分辨率和增强的时间分辨率的电压测量。 此外，通过在集成电路检测装置或系统中使用探测装置，可以在不增加相对于微小布线的电负载的情况下实现对微小布线的稳定探测，并且因此有助于提高 电压测量。
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9.发明申请ELECTRIC FIELD DETECTION PROBE, METHOD THEREOF, AND MANUFACTURING METHOD OF CIRCUIT BOARD 有权电场检测探头及其制造方法及电路板的制造方法公开(公告)号：US20100219806A1
公开(公告)日：2010-09-02
申请号：US12712956
申请日：2010-02-25
申请人： Daisuke UCHIDA , Shinichi Wakana
发明人： Daisuke UCHIDA , Shinichi Wakana
CPC分类号： G01R1/07 , G01R29/0878 , G01R31/002 , G01R31/2806
摘要： An electric field detection probe includes a cable including an internal conductor line, an insulating layer that coats a surface of the internal conductor line and exposes a tip end of the internal conductor line, an external conductor layer that coats a surface of the insulating layer and exposes the tip end, and an electric field diaphragm wherein the electric field diaphragm is electrically coupled to the external conductor layer, covers the tip end surface of the cable except for an opening.
摘要翻译： 电场检测探头包括电缆，其包括内部导体线，覆盖内部导体线的表面并露出内部导体线的前端的绝缘层，覆盖绝缘层的表面的外部导体层和 暴露尖端，并且电场光阑，其中电场光阑电耦合到外导体层，覆盖除了开口之外的电缆的末端表面。
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公开(公告)号：US07233719B2
公开(公告)日：2007-06-19
申请号：US11320342
申请日：2005-12-29
申请人： Hideo Okada , Shinichi Wakana , Yasuhiro Yamauchi
发明人： Hideo Okada , Shinichi Wakana , Yasuhiro Yamauchi
CPC分类号： G02B6/29358 , G02B6/29394
摘要： In a dispersion slope compensator of the invention, angular dispersion of a WDM light in which the angular dispersion is already performed in a first direction (Y-axis) with a VIPA plate is performed in a second direction (X′-axis) perpendicular to the first direction with a diffraction grating, and the WDM light is reflected from a three-dimensional mirror and returned to the VIPA plate side. At this point, the three-dimensional mirror is mounted on a rotating stage while placed on a linear-moving stage, which moves the three-dimensional mirror in parallel in the second direction. Thereby, the rotating stage can adjust an angle of a reflection plane of the three-dimensional mirror with respect to an optical axis of the light focused with a lens, which allows optical axis shift of the reflected light to be corrected in the three-dimensional mirror according to setting of a chromatic dispersion compensation amount. Accordingly, chromatic dispersion compensation and dispersion slope compensation can be realized over a wide signal band.
摘要翻译： 在本发明的色散斜率补偿器中，在与VIPA板的第一方向（Y轴）上已经进行角度色散的WDM光的角度色散在垂直于...的第二方向（X'轴）上进行 使用衍射光栅的第一方向，并且WDM光从三维反射镜反射并返回到VIPA板侧。 此时，三维反射镜安装在旋转台上，同时放置在线性移动台上，使三维反射镜在第二方向上平行移动。 因此，旋转台可以相对于透镜聚焦的光的光轴调节三维反射镜的反射面的角度，这允许待校正的反射光的光轴移动成三维 根据色散补偿量的设定进行镜像。 因此，可以在宽的信号频带上实现色散补偿和色散斜率补偿。
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