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公开(公告)号:US06615871B2
公开(公告)日:2003-09-09
申请号:US10277147
申请日:2002-10-22
申请人: Tadahiro Ohmi , Hiroshi Morokoshi , Michio Yamaji , Shigeaki Tanaka , Keiji Hirao , Yuji Kawano , Takashi Hirose , Kosuke Yokoyama , Michio Kuramochi , Masayuki Hatano , Nobukazu Ikeda
发明人: Tadahiro Ohmi , Hiroshi Morokoshi , Michio Yamaji , Shigeaki Tanaka , Keiji Hirao , Yuji Kawano , Takashi Hirose , Kosuke Yokoyama , Michio Kuramochi , Masayuki Hatano , Nobukazu Ikeda
IPC分类号: F16K1110
CPC分类号: F15B13/0817 , F15B13/0871 , F15B13/0892 , F15B13/0896 , F15B2013/006 , Y10T137/87249 , Y10T137/87265 , Y10T137/87885
摘要: An on-off device disposed at each of the inlet and the outlet of a fluid controller is one of five kinds of on-off devices, i.e., on-off device having a two-port valve, on-off device having a two-port valve and a three-port valve, on-off device having a two-port valve and two three-port valves, on-off device having two three-port valves, and on-off device having three three-port valves, The main bodies of two-port valves of all types of on-off devices are identical in configuration and each have an inlet and an outlet in a bottom face thereof. Main bodies of three-port valves of all types of on-off devices are identical in configuration and each formed in a bottom face thereof with an inlet, an outlet always in communication with the inlet, and an inlet-outlet subopening.
摘要翻译: 设置在流体控制器的每个入口和出口处的开关装置是五种开关装置中的一种,即具有双端口阀的开关装置,开 - 关装置具有二通阀, 开口阀和三通阀,具有双口阀和两个三通阀的开关装置,具有两个三通阀的开关装置和具有三个三通阀的开关装置。 所有类型的开 - 关装置的双口阀的主体构造相同,并且每个在其底面具有入口和出口。 所有类型的开关装置的三通阀的主体的结构相同,并且在其底面中形成有入口,总是与入口连通的出口以及入口 - 出口开口。
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公开(公告)号:US5983933A
公开(公告)日:1999-11-16
申请号:US974550
申请日:1997-11-19
申请人: Tadahiro Ohmi , Yuji Kawano , Keiji Hirao , Hisashi Tanaka , Naoya Masuda , Yukio Minami , Masayuki Hatano , Shigeaki Tanaka , Michio Yamaji , Hiroshi Morokoshi , Michio Kuramochi , Nobukazu Ikeda , Shigeru Itoi , Michihiro Kashiwa
发明人: Tadahiro Ohmi , Yuji Kawano , Keiji Hirao , Hisashi Tanaka , Naoya Masuda , Yukio Minami , Masayuki Hatano , Shigeaki Tanaka , Michio Yamaji , Hiroshi Morokoshi , Michio Kuramochi , Nobukazu Ikeda , Shigeru Itoi , Michihiro Kashiwa
CPC分类号: F15B13/0832 , F15B13/0817 , F15B13/0871 , F15B13/0892 , F15B13/0896 , F16K27/003 , Y10T137/87249 , Y10T137/87684 , Y10T137/87917
摘要: A valve mount having two valves removably installed thereon from above as arranged in a direction comprises an inflow channel forming member having a channel in communication with an inlet of the valve disposed at one end thereof, a communication channel forming member having a channel for causing an outlet of the valve at the end to communicate with an inlet of the other valve adjacent thereto, an outflow channel forming member having a channel in communication with an outlet of the other valve, and a subchannel forming member having a channel in communication with an inlet-outlet port formed in the other valve.
摘要翻译: 具有两个可自由拆卸地安装在其上的阀的阀座具有一个流入通道形成构件,该流入通道形成构件具有与设置在其一端的阀的入口连通的通道;连通通道形成构件,具有通道, 所述阀的端部的出口与与其相邻的另一阀的入口连通,具有与所述另一个阀的出口连通的通道的流出通道形成构件,以及具有与入口连通的通道的子通道形成构件 - 出口端口形成在另一个阀门中。
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公开(公告)号:US6039360A
公开(公告)日:2000-03-21
申请号:US73387
申请日:1998-05-06
申请人: Tadahiro Ohmi , Michio Yamaji , Tsutomu Shinohara , Shigeru Itoi , Keiji Hirao , Yuji Kawano , Shigeaki Tanaka , Kosuke Yokoyama , Hiroshi Morokoshi , Nobukazu Ikeda
发明人: Tadahiro Ohmi , Michio Yamaji , Tsutomu Shinohara , Shigeru Itoi , Keiji Hirao , Yuji Kawano , Shigeaki Tanaka , Kosuke Yokoyama , Hiroshi Morokoshi , Nobukazu Ikeda
CPC分类号: F16K27/003 , F16L39/00
摘要: A coupling comprises a holding member having a U-shaped cross section, and a channel member held by the holding member. The holding member has an upper wall formed with screw bores for use in attaching the holding member to a fluid controller. The channel member comprises a body having an inner channel and fitted in a space between the upper wall of the holding member and a lower wall thereof, a tubular upward projection communicating with the inner channel of the body and having an upper end inserted in a through bore in the upper wall of the holding member to communicate with a downward channel of the fluid controller, and a tubular lateral projection communicating with the inner channel of the body and extending laterally. The upper end of the channel member has an outward flange, and the through bore of the upper wall of the holding member has an inward flange for supporting the flange.
摘要翻译: 联轴器包括具有U形横截面的保持构件和由保持构件保持的通道构件。 保持构件具有形成有用于将保持构件附接到流体控制器的螺钉孔的上壁。 通道构件包括具有内通道并配合在保持构件的上壁和其下壁之间的空间中的主体,与主体的内部通道连通的管状向上突出部,并且具有插入通孔 位于保持构件的上壁中,以与流体控制器的向下通道连通,以及与主体的内部通道连通并且横向延伸的管状横向突出部。 通道构件的上端具有向外的凸缘,并且保持构件的上壁的通孔具有用于支撑凸缘的向内凸缘。
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公开(公告)号:US5988217A
公开(公告)日:1999-11-23
申请号:US972436
申请日:1997-11-18
申请人: Tadahiro Ohmi , Keiji Hirao , Shigeaki Tanaka , Michio Yamaji , Hiroshi Morokoshi , Nobukazu Ikeda
发明人: Tadahiro Ohmi , Keiji Hirao , Shigeaki Tanaka , Michio Yamaji , Hiroshi Morokoshi , Nobukazu Ikeda
CPC分类号: F16K27/003 , F16K51/00 , Y10T137/7783 , Y10T137/87917 , Y10T137/88054
摘要: A valve body has a main body formed with an inflow channel for a first fluid, an inflow channel for a second fluid, and an outflow channel for the first and second fluids in common. The first fluid inflow channel is always in communication with the common outflow channel through a valve chamber. A valve element operates to bring the second fluid inflow channel into or out of communication with the first fluid inflow channel and the common outflow channel.
摘要翻译: 阀体具有形成有用于第一流体的流入通道,第二流体的流入通道和用于第一流体和第二流体的流出通道的主体。 第一流体流入通道总是通过阀室与公共流出通道连通。 阀元件操作以使第二流体流入通道进入或流出与第一流体流入通道和公共流出通道的连通。
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公开(公告)号:US5769110A
公开(公告)日:1998-06-23
申请号:US672668
申请日:1996-06-28
申请人: Tadahiro Ohmi , Keiji Hirao , Michio Yamaji , Shigeru Itoi , Tsutomu Shinohara , Nobukazu Ikeda , Hiroshi Morokoshi , Tetsuya Kojima
发明人: Tadahiro Ohmi , Keiji Hirao , Michio Yamaji , Shigeru Itoi , Tsutomu Shinohara , Nobukazu Ikeda , Hiroshi Morokoshi , Tetsuya Kojima
CPC分类号: F15B13/0832 , F15B13/0817 , F15B13/0871 , Y10T137/5109 , Y10T137/5283 , Y10T137/87885
摘要: A fluid control apparatus comprises a mass flow controller, two on-off valves disposed at the inlet side of the controller and three on-off valves disposed at the outlet side of the controller. At the inlet side, a main fluid on-off valve is positioned on a purge fluid on-off valve, and at the outlet side, a vent on-off valve is positioned on a vacuum suction on-off valve, with a main passage on-off valve further positioned on the vent on-off valve.
摘要翻译: 流体控制装置包括质量流量控制器,设置在控制器入口侧的两个开关阀和设置在控制器出口侧的三个开关阀。 在入口侧,主流体开关阀位于净化流体开关阀上,并且在出口侧,通气开关阀位于真空吸入开关阀上,主通道 开关阀进一步定位在通气开关阀上。
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公开(公告)号:US5837907A
公开(公告)日:1998-11-17
申请号:US862292
申请日:1997-05-22
申请人: Tadahiro Ohmi , Eiji Ideta , Hiroyuki Fukuda , Keiji Hirao , Tsutomu Shinohara , Michio Yamaji , Hiroshi Morokoshi , Tetsuya Kojima
发明人: Tadahiro Ohmi , Eiji Ideta , Hiroyuki Fukuda , Keiji Hirao , Tsutomu Shinohara , Michio Yamaji , Hiroshi Morokoshi , Tetsuya Kojima
CPC分类号: B23P19/069 , B23P19/066 , B25B23/14
摘要: A method is provided for tightening up threaded members with proper tightening torque free of unequivalent tightening. In tightening a plurality of threaded members by drive means, the amount of tightening and tightening torque of each threaded member are detected as the members are progressively tightened, and when the tightening amount of each member has reached a value within a specified range, the difference in tightening torque between the threaded members is checked as to whether it is within a predetermined range.
摘要翻译: 提供了一种方法,用于以不受等效收紧的适当紧固扭矩拧紧螺纹部件。 在通过驱动装置拧紧多个螺纹构件时,随着构件逐渐紧固,检测每个螺纹构件的拧紧和紧固扭矩的量,并且当每个构件的紧固量达到特定范围内的值时, 检查螺纹构件之间的紧固扭矩是否在预定范围内。
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公开(公告)号:US6135155A
公开(公告)日:2000-10-24
申请号:US655022
申请日:1996-05-29
申请人: Tadahiro Ohmi , Michio Yamaji , Hiroshi Morokoshi , Shigeru Itoi , Nobukazu Ikeda , Tetsuya Kojima
发明人: Tadahiro Ohmi , Michio Yamaji , Hiroshi Morokoshi , Shigeru Itoi , Nobukazu Ikeda , Tetsuya Kojima
CPC分类号: F16K27/003 , G05D16/04 , G05D7/01 , Y10T137/87885
摘要: A regulator for regulating a flow rate is provided with an upper connector having a downwardly opened channel in communication with the regulator. An on-off valve connected to the regulator is provided with a lower connector having an upwardly opened channel in communication with the on-off valve. The upper connector is lapped over the lower connector and removably joined thereto with a screw so as to cause the downwardly opened channel to communicate with the upwardly opened channel. Accordingly, the regulator can be removed singly, for example, when malfunctioning.
摘要翻译: 用于调节流速的调节器设置有具有与调节器连通的向下打开的通道的上连接器。 连接到调节器的开关阀设置有具有与开关阀连通的向上开口的通道的下连接器。 上连接器在下连接器上被覆盖并且用螺钉可拆卸地连接到其上,以便使向下打开的通道与向上打开的通道连通。 因此,可以单独地去除调节器,例如当故障时。
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公开(公告)号:US6105475A
公开(公告)日:2000-08-22
申请号:US861790
申请日:1997-05-22
申请人: Tadahiro Ohmi , Eiji Ideta , Hiroyuki Fukuda , Keiji Hirao , Tsutomu Shinohara , Michio Yamaji , Hiroshi Morokoshi , Tetsuya Kojima
发明人: Tadahiro Ohmi , Eiji Ideta , Hiroyuki Fukuda , Keiji Hirao , Tsutomu Shinohara , Michio Yamaji , Hiroshi Morokoshi , Tetsuya Kojima
CPC分类号: B25B23/108 , B23P19/066 , B23P19/069 , B25B15/008 , B25B21/00 , B25B23/101 , B25B23/14
摘要: A device for tightening a plurality of threaded members at the same time with proper torque without necessitating a cumbersome procedure of rotating the members one by one through a specified small angle at a time and without unequivalent tightening of the members, the tightening device (1) comprises two rotary shafts (6) each provided at a forward end thereof with a wrench portion (8) fittable to the threaded member (44), motors (3) for individually driving the rotary shafts (6) and a control unit (9) for detecting the tightening torque of each threaded member (44) and controlling the motor (3) based on the detected value to ensure proper tightening, the control unit (9) checking the tightening torque of each threaded member (44) as to whether the torque is within a predetermined range and whether the difference in tightening torque between the threaded members (44) is within a predetermined range.
摘要翻译: 紧固装置(1)是用于以适当的扭矩同时紧固多个螺纹构件的装置,而不需要一次一个地将构件一个一个地旋转规定的小角度的麻烦的过程,并且没有不同的紧固构件, 包括两个旋转轴(6),每个旋转轴在其前端处设有可配合到螺纹构件(44)的扳手部分(8),用于单独驱动旋转轴(6)和控制单元(9)的马达(3) 为了检测每个螺纹构件(44)的紧固扭矩并基于检测值来控制马达(3)以确保适当的紧固,控制单元(9)检查每个螺纹构件(44)的紧固扭矩,以确定是否 扭矩在预定范围内,并且螺纹构件(44)之间的紧固扭矩的差是否在预定范围内。
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公开(公告)号:US5850853A
公开(公告)日:1998-12-22
申请号:US630081
申请日:1996-04-09
IPC分类号: B01J4/00 , C30B25/14 , C30B31/16 , F16K31/122 , F16K31/42
CPC分类号: C23C16/45561 , B01J4/008 , C30B25/14 , C30B31/16 , F16K31/1226 , F16K31/42 , Y10T137/87684
摘要: A fluid control system, and its valve assemblies, are used to control the feeding of fluids accurately (by operating (opening and closing) valves promptly and accurately), for the manufacture of semiconductors, magnetic thin films, biotechnical products, and other products. The fluid control system comprises a principal control line (L) and plural branch control lines (L.sub.1, L.sub.2, . . . ) for feeding plural types of fluid (G.sub.1, G.sub.2, . . . ) into a processing device (C) coupled to the principal control line, and plural valve assemblies (V) incorporated in the branch control lines (L.sub.1, L.sub.2, . . . ) for switching the fluids (G.sub.1, G.sub.2, . . . ) supplied into the processing device (C). Each of the valve assemblies (V) comprises a fluid drive valve (V') having a fluid pressure actuator (1), and an electromagnetic valve (V") integrally attached, in single housing, substantially without hoses, to the fluid drive valve (V') to feed a working fluid (A) into the fluid pressure actuator (1).
摘要翻译: 流体控制系统及其阀门组件用于精确地控制流体的供给(通过快速准确地操作(打开和关闭)阀门),用于制造半导体,磁性薄膜,生物技术产品和其他产品。 流体控制系统包括主控制线(L)和多个分支控制线(L1,L2 ...),用于将多种类型的流体(G1,G2 ...)馈送到耦合到 主控制线和并入分支控制线(L1,L2 ...)中的多个阀组件(V),用于切换供给到处理装置(C)中的流体(G1,G2 ...)。 每个阀组件(V)包括具有流体压力致动器(1)的流体驱动阀(V')和在基本上没有软管的单个壳体中一体地附接到流体驱动器的电磁阀(V“) 阀(V')将工作流体(A)输送到流体压力致动器(1)中。
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公开(公告)号:US06733732B2
公开(公告)日:2004-05-11
申请号:US09783287
申请日:2001-02-15
申请人: Tadahiro Ohmi , Koji Kawada , Yoshikazu Tanabe , Takahisa Nitta , Nobukazu Ikeda , Akihiro Morimoto , Keiji Hirao , Hiroshi Morokoshi , Yukio Minami
发明人: Tadahiro Ohmi , Koji Kawada , Yoshikazu Tanabe , Takahisa Nitta , Nobukazu Ikeda , Akihiro Morimoto , Keiji Hirao , Hiroshi Morokoshi , Yukio Minami
IPC分类号: B01J802
CPC分类号: C01B5/00
摘要: A reactor comprising a body made of a heat-resistant material and having an inlet and an outlet for water/moisture gas, having a gas-diffusing member provided in an internal space of the body, and having a platinum coating on an internal wall surface of the body. Hydrogen and oxygen fed from the inlet are diffused by the gas-diffusing member and then come into contact with the platinum coating to enhance reactivity, thereby producing water. A temperature of the reactor is held to be below an ignition temperature of hydrogen or a hydrogen-containing gas. The platinum-coated catalyst layer on the internal wall of the reactor body is formed by treating the surface of the internal wall of the body, cleaning the treated surface, forming a barrier coating of a nonmetallic material of an oxide or nitride on the wall surface, and forming the platinum coating on the barrier coating.
摘要翻译: 一种反应器,包括由耐热材料制成并具有用于水/湿气的入口和出口的本体,其具有设置在所述主体的内部空间中的气体扩散构件,并且在内壁表面上具有铂涂层 的身体。 从入口供给的氢气和氧气被气体扩散构件扩散,然后与铂涂层接触以提高反应性,从而产生水。 反应器的温度保持在低于氢气或含氢气体的点火温度。 反应器主体内壁上的铂涂层催化剂层是通过处理体内表面,清洁处理过的表面,在壁表面上形成氧化物或氮化物的非金属材料的阻挡涂层形成的 ,并在阻挡涂层上形成铂涂层。
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