Couplings for fluid controllers
    3.
    发明授权
    Couplings for fluid controllers 失效
    流体控制器联轴器

    公开(公告)号:US6039360A

    公开(公告)日:2000-03-21

    申请号:US73387

    申请日:1998-05-06

    CPC分类号: F16K27/003 F16L39/00

    摘要: A coupling comprises a holding member having a U-shaped cross section, and a channel member held by the holding member. The holding member has an upper wall formed with screw bores for use in attaching the holding member to a fluid controller. The channel member comprises a body having an inner channel and fitted in a space between the upper wall of the holding member and a lower wall thereof, a tubular upward projection communicating with the inner channel of the body and having an upper end inserted in a through bore in the upper wall of the holding member to communicate with a downward channel of the fluid controller, and a tubular lateral projection communicating with the inner channel of the body and extending laterally. The upper end of the channel member has an outward flange, and the through bore of the upper wall of the holding member has an inward flange for supporting the flange.

    摘要翻译: 联轴器包括具有U形横截面的保持构件和由保持构件保持的通道构件。 保持构件具有形成有用于将保持构件附接到流体控制器的螺钉孔的上壁。 通道构件包括具有内通道并配合在保持构件的上壁和其下壁之间的空间中的主体,与主体的内部通道连通的管状向上突出部,并且具有插入通孔 位于保持构件的上壁中,以与流体控制器的向下通道连通,以及与主体的内部通道连通并且横向延伸的管状横向突出部。 通道构件的上端具有向外的凸缘,并且保持构件的上壁的通孔具有用于支撑凸缘的向内凸缘。

    Fluid control device
    7.
    发明授权
    Fluid control device 失效
    流体控制装置

    公开(公告)号:US6135155A

    公开(公告)日:2000-10-24

    申请号:US655022

    申请日:1996-05-29

    摘要: A regulator for regulating a flow rate is provided with an upper connector having a downwardly opened channel in communication with the regulator. An on-off valve connected to the regulator is provided with a lower connector having an upwardly opened channel in communication with the on-off valve. The upper connector is lapped over the lower connector and removably joined thereto with a screw so as to cause the downwardly opened channel to communicate with the upwardly opened channel. Accordingly, the regulator can be removed singly, for example, when malfunctioning.

    摘要翻译: 用于调节流速的调节器设置有具有与调节器连通的向下打开的通道的上连接器。 连接到调节器的开关阀设置有具有与开关阀连通的向上开口的通道的下连接器。 上连接器在下连接器上被覆盖并且用螺钉可拆卸地连接到其上,以便使向下打开的通道与向上打开的通道连通。 因此,可以单独地去除调节器,例如当故障时。

    Tightening device
    8.
    发明授权
    Tightening device 失效
    紧固装置

    公开(公告)号:US6105475A

    公开(公告)日:2000-08-22

    申请号:US861790

    申请日:1997-05-22

    摘要: A device for tightening a plurality of threaded members at the same time with proper torque without necessitating a cumbersome procedure of rotating the members one by one through a specified small angle at a time and without unequivalent tightening of the members, the tightening device (1) comprises two rotary shafts (6) each provided at a forward end thereof with a wrench portion (8) fittable to the threaded member (44), motors (3) for individually driving the rotary shafts (6) and a control unit (9) for detecting the tightening torque of each threaded member (44) and controlling the motor (3) based on the detected value to ensure proper tightening, the control unit (9) checking the tightening torque of each threaded member (44) as to whether the torque is within a predetermined range and whether the difference in tightening torque between the threaded members (44) is within a predetermined range.

    摘要翻译: 紧固装置(1)是用于以适当的扭矩同时紧固多个螺纹构件的装置,而不需要一次一个地将构件一个一个地旋转规定的小角度的麻烦的过程,并且没有不同的紧固构件, 包括两个旋转轴(6),每个旋转轴在其前端处设有可配合到螺纹构件(44)的扳手部分(8),用于单独驱动旋转轴(6)和控制单元(9)的马达(3) 为了检测每个螺纹构件(44)的紧固扭矩并基于检测值来控制马达(3)以确保适当的紧固,控制单元(9)检查每个螺纹构件(44)的紧固扭矩,以确定是否 扭矩在预定范围内,并且螺纹构件(44)之间的紧固扭矩的差是否在预定范围内。

    Fluid control system and valve to be used therein
    9.
    发明授权
    Fluid control system and valve to be used therein 失效
    流体控制系统和阀门用于其中

    公开(公告)号:US5850853A

    公开(公告)日:1998-12-22

    申请号:US630081

    申请日:1996-04-09

    摘要: A fluid control system, and its valve assemblies, are used to control the feeding of fluids accurately (by operating (opening and closing) valves promptly and accurately), for the manufacture of semiconductors, magnetic thin films, biotechnical products, and other products. The fluid control system comprises a principal control line (L) and plural branch control lines (L.sub.1, L.sub.2, . . . ) for feeding plural types of fluid (G.sub.1, G.sub.2, . . . ) into a processing device (C) coupled to the principal control line, and plural valve assemblies (V) incorporated in the branch control lines (L.sub.1, L.sub.2, . . . ) for switching the fluids (G.sub.1, G.sub.2, . . . ) supplied into the processing device (C). Each of the valve assemblies (V) comprises a fluid drive valve (V') having a fluid pressure actuator (1), and an electromagnetic valve (V") integrally attached, in single housing, substantially without hoses, to the fluid drive valve (V') to feed a working fluid (A) into the fluid pressure actuator (1).

    摘要翻译: 流体控制系统及其阀门组件用于精确地控制流体的供给(通过快速准确地操作(打开和关闭)阀门),用于制造半导体,磁性薄膜,生物技术产品和其他产品。 流体控制系统包括主控制线(L)和多个分支控制线(L1,L2 ...),用于将多种类型的流体(G1,G2 ...)馈送到耦合到 主控制线和并入分支控制线(L1,L2 ...)中的多个阀组件(V),用于切换供给到处理装置(C)中的流体(G1,G2 ...)。 每个阀组件(V)包括具有流体压力致动器(1)的流体驱动阀(V')和在基本上没有软管的单个壳体中一体地附接到流体驱动器的电磁阀(V“) 阀(V')将工作流体(A)输送到流体压力致动器(1)中。

    Reactor for generating moisture
    10.
    发明授权
    Reactor for generating moisture 有权
    反应器产生水分

    公开(公告)号:US06733732B2

    公开(公告)日:2004-05-11

    申请号:US09783287

    申请日:2001-02-15

    IPC分类号: B01J802

    CPC分类号: C01B5/00

    摘要: A reactor comprising a body made of a heat-resistant material and having an inlet and an outlet for water/moisture gas, having a gas-diffusing member provided in an internal space of the body, and having a platinum coating on an internal wall surface of the body. Hydrogen and oxygen fed from the inlet are diffused by the gas-diffusing member and then come into contact with the platinum coating to enhance reactivity, thereby producing water. A temperature of the reactor is held to be below an ignition temperature of hydrogen or a hydrogen-containing gas. The platinum-coated catalyst layer on the internal wall of the reactor body is formed by treating the surface of the internal wall of the body, cleaning the treated surface, forming a barrier coating of a nonmetallic material of an oxide or nitride on the wall surface, and forming the platinum coating on the barrier coating.

    摘要翻译: 一种反应器,包括由耐热材料制成并具有用于水/湿气的入口和出口的本体,其具有设置在所述主体的内部空间中的气体扩散构件,并且在内壁表面上具有铂涂层 的身体。 从入口供给的氢气和氧气被气体扩散构件扩散,然后与铂涂层接触以提高反应性,从而产生水。 反应器的温度保持在低于氢气或含氢气体的点火温度。 反应器主体内壁上的铂涂层催化剂层是通过处理体内表面,清洁处理过的表面,在壁表面上形成氧化物或氮化物的非金属材料的阻挡涂层形成的 ,并在阻挡涂层上形成铂涂层。