Flow sensor having an intermediate heater between two
temperature-sensing heating portions
    1.
    发明授权
    Flow sensor having an intermediate heater between two temperature-sensing heating portions 失效
    流量传感器在两个感温加热部分之间具有中间加热器

    公开(公告)号:US5852239A

    公开(公告)日:1998-12-22

    申请号:US873455

    申请日:1997-06-12

    IPC分类号: G01F1/684 G01F1/68

    CPC分类号: G01F1/6845

    摘要: A flow sensor includes a first heating portion, provided at a first position in a flow of a fluid, which heats the fluid and outputs a voltage in response to a temperature of the first position. A second heating portion, provided at a second, downstream position in the flow of the fluid, heats the fluid and outputs a voltage in response to a temperature of the second position, the first position and the second position being spaced from each other in a direction parallel to the flow of the fluid. An intermediate heater, provided between the first heating portion and the second heating portion, heats the fluid at an intermediate position between the first position and the second position.

    摘要翻译: 流量传感器包括设置在流体流中的第一位置处的第一加热部分,其加热流体并响应于第一位置的温度输出电压。 设置在流体流中的第二下游位置的第二加热部分加热流体并输出响应于第二位置的温度的电压,第一位置和第二位置彼此间隔开 方向平行于流体的流动。 设置在第一加热部分和第二加热部分之间的中间加热器在第一位置和第二位置之间的中间位置处加热流体。

    Flow sensor having first and second temperature detecting portions for
accurate measuring of a flow rate and a manufacturing method thereof
    5.
    发明授权
    Flow sensor having first and second temperature detecting portions for accurate measuring of a flow rate and a manufacturing method thereof 失效
    具有用于精确测量流量的第一和第二温度检测部分的流量传感器及其制造方法

    公开(公告)号:US5763775A

    公开(公告)日:1998-06-09

    申请号:US815529

    申请日:1997-03-12

    IPC分类号: G01F1/684 G01F1/692 G01F1/68

    摘要: A flow sensor eliminates turbulence of fluid flow due to a structure of the temperature detecting portion so that a temperature of the temperature detecting portions does not fluctuate due to the turbulence of the fluid. The flow sensor is formed on a substrate. Each of a first temperature detecting portion and a second temperature detecting portion has a heating function and a temperature detecting function, and are arranged along a direction of flow of the fluid. A supporting portion is formed on the substrate for supporting the first and second temperature detecting portions thereon. The supporting portion does not have a side surface facing substantially in the direction of flow of the fluid. A side surface of the supporting portion is protected by a guard portion formed along the side surface.

    摘要翻译: 流量传感器消除了由于温度检测部分的结构引起的流体流动的紊乱,使得温度检测部分的温度由于流体的紊流而不会波动。 流量传感器形成在基板上。 第一温度检测部和第二温度检测部都具有加热功能和温度检测功能,沿着流体的流动方向配置。 支撑部分形成在基板上,用于支撑第一和第二温度检测部分。 支撑部分不具有基本上在流体流动方向上的侧表面。 支撑部分的侧表面由沿着侧面形成的防护部分保护。

    OPTICAL DEFLECTOR AND OPTICAL DEVICE
    6.
    发明申请
    OPTICAL DEFLECTOR AND OPTICAL DEVICE 有权
    光学偏转器和光学器件

    公开(公告)号:US20080225363A1

    公开(公告)日:2008-09-18

    申请号:US12048694

    申请日:2008-03-14

    IPC分类号: G02B26/10

    CPC分类号: G02B26/0858

    摘要: An optical deflector includes a plurality of piezoelectric unimorph oscillating bodies (210a to 210d) that cause a reflecting plate (1) to oscillate rotationally, centering upon a pair of flexible support units (2a and 2b). The optical deflector forms a single structure of the oscillating plates (23a to 23b), the reflecting plate (1), the flexible support units (2a and 2b), and a support body (9), by connecting one set of the terminals of the oscillating plates (23a to 23d) of the suite of piezoelectric unimorph oscillating bodies (210a to 210d) to the flexible support units (2a and 2b), and connecting the other set of terminals to the support body (9). Furthermore, the plurality of piezoelectric unimorph oscillating bodies (210a to 210d) each respectively comprise a plurality of parallel oscillating bodies (23a1 to 23a-3, 23b-1 to 23b-3, 23c-1 to 23c-3), and (23d-1 to 23d-3), and a suite of parallel actuators (28a-1 to 28a-3, 28c-1 to 28c-3, and 28d-1 to 28d-3).

    摘要翻译: 光学偏转器包括使得反射板(1)以一对柔性支撑单元(2a和2b)为中心旋转地摆动的多个压电单晶振荡体(210a至210d)。 光学偏转器通过连接一组振动板(23a至23b),反射板(1),柔性支撑单元(2a和2b)和支撑体(9)形成单一结构 将压电单晶振荡体(210a至210d)的振动板(23a至23d)的端子连接到柔性支撑单元(2a和2b),并将另一组端子连接到 支撑体(9)。 此外,多个压电单晶体振荡体(210a〜210d)各自分别包括多个平行的振荡体(23a,1〜23a-3,23b-1〜23b-3,23c-1〜 23c-3)和(23d-1至23d-3)以及一组平行致动器(28a-1至28a-3,28c-1至28c-3和28d- 1〜28d-3)。

    Deflection mirror, a deflection mirror manufacturing method, an optical writing apparatus, and an image formation apparatus
    7.
    发明授权
    Deflection mirror, a deflection mirror manufacturing method, an optical writing apparatus, and an image formation apparatus 有权
    偏转镜,偏转镜制造方法,光学写入装置和图像形成装置

    公开(公告)号:US07190507B2

    公开(公告)日:2007-03-13

    申请号:US11082765

    申请日:2005-03-18

    申请人: Yukito Sato

    发明人: Yukito Sato

    IPC分类号: G02B26/00

    CPC分类号: G02B26/0841

    摘要: The present invention provides a deflection mirror including a mirror substrate having a mirror face that reflects a light, a beam, and a supporting member that supports the mirror substrate through the beam. A movable electrode is formed at a free side of the mirror substrate. A fixed electrode is operably linked through the movable electrode at a gap that is formed in the supporting member. The mirror substrate is driven by electrostatic force between the movable electrode and the fixed electrode and vibrates centering of the beam. An end of at least one of the fixed electrode and the movable electrode is smaller in the thickness direction than the other end.

    摘要翻译: 本发明提供了一种偏转镜,其包括具有反射光的镜面的反射镜基板,光束和通过光束支撑镜面基板的支撑部件。 可动电极形成在镜基板的自由侧。 固定电极通过可动电极以形成在支撑构件中的间隙可操作地连接。 反射镜基板由可动电极和固定电极之间的静电力驱动,并振动光束的中心。 固定电极和可动电极中的至少一个的端部的厚度方向比另一端小。

    FUNCTIONAL ELEMENT PACKAGE AND FABRICATION METHOD THEREFOR
    8.
    发明申请
    FUNCTIONAL ELEMENT PACKAGE AND FABRICATION METHOD THEREFOR 失效
    功能元件包装及其制造方法

    公开(公告)号:US20100072562A1

    公开(公告)日:2010-03-25

    申请号:US12531552

    申请日:2008-03-17

    IPC分类号: H01L29/84 H01L21/50

    摘要: A functional element package includes a silicon substrate with a functional element having one of a mobile portion and a sensor thereon; a seal member being bonded with the silicon substrate to form an airtightly sealed space therein, and including a step portion in its height direction; a first wiring portion being connected with the functional element and extending from the airtightly sealed space to an outside thereof; a second wiring portion being different from the first wiring portion and extending from the step portion to an upper surface of the seal member; and a bump on the second wiring portion, in which the first wiring portion is bent towards the airtightly sealed space and connected via a photoconductive member with the second wiring portion on the step portion.

    摘要翻译: 功能元件封装包括具有功能元件的硅衬底,功能元件具有可移动部分和传感器之一; 密封构件与硅衬底结合以在其中形成气密密封的空间,并且在其高度方向上包括台阶部分; 第一布线部分与功能元件连接并从气密密封的空间延伸到其外部; 第二布线部分,其不同于第一布线部分并且从台阶部分延伸到密封构件的上表面; 以及第二布线部分上的凸起,其中第一布线部分朝向气密密封的空间弯曲并且经由感光体与台阶部分上的第二布线部分连接。