公开(公告)号：US08124934B2

公开(公告)日：2012-02-28

申请号：US12264605

申请日：2008-11-04

Applicant: Tatsuya Maeda

Inventor： Tatsuya Maeda

IPC: G01N23/00

CPC classification number: H04N5/76 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2487 ,  H01J2237/2817 ,  H04N5/772 ,  H04N5/775 ,  H04N5/781 ,  H04N5/907 ,  H04N9/8205

Abstract: It is facilitated in a scanning electron microscope to save the labor of executing the reproduction test, conduct basic analysis on a problem caused in execution of the automatic observation process, and confirm details resulting in the error. Upon detecting an error from an abnormality, the scanning electron microscope extracts a sample image lm(t2) obtained by retroceding from a sample image lm(te) stored so as to be associated with time te of error occurrence by a predetermined video quantity (for example, total recording time period t2) previously set and registered by an input-output device, from sample images stored in a recording device while being overwritten, and stores a resultant sample image in another recording device.

Abstract translation: 在扫描电子显微镜中便于执行再现测试的劳动，对执行自动观察过程所引起的问题进行基本分析，并确认导致错误的细节。 扫描电子显微镜从检测到异常的误差时，提取通过从存储的与样品图像lm（te）相反的获得的样本图像lm（t2），以使与出现错误的时间t相关联的预定视频量（对于 例如，由输入 - 输出设备预先设置和登记的总记录时间段t2）从存储在记录设备中的样本图像被重写，并将所得到的样本图像存储在另一个记录设备中。

公开(公告)号：US07807980B2

公开(公告)日：2010-10-05

申请号：US11647348

申请日：2006-12-29

Applicant: Chie Shishido ,  Mayuka Oosaki ,  Mitsugu Sato ,  Hiroki Kawada ,  Tatsuya Maeda

Inventor： Chie Shishido ,  Mayuka Oosaki ,  Mitsugu Sato ,  Hiroki Kawada ,  Tatsuya Maeda

IPC: G21K7/00 ,  A61N5/00 ,  G21G5/00

CPC classification number: H01J37/263 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2826

Abstract: The present invention provides a charged particle beam apparatus used to measure micro-dimensions (CD value) of a semiconductor apparatus or the like which captures images for measurement. For the present invention, a sample for calibration, on which a plurality of polyhedral structural objects with known angles on surfaces produced by the crystal anisotropic etching technology are arranged in a viewing field, is used. A beam landing angle at each position within a viewing field is calculated based on geometric deformation on an image of each polyhedral structural object. Beam control parameters for equalizing the beam landing angle at each position within the viewing field are pre-registered. The registered beam control parameters are applied according to the position of the pattern to be measured within the viewing field when performing dimensional measurement. Accordingly, the present invention provides methods for reducing the variation in the CD value caused by the variation in the electron beam landing angle with respect to the sample with an equal beam landing angle and methods for reducing the instrumental error caused by the difference in the electron beam landing angle between apparatuses.

Abstract translation: 本发明提供一种用于测量捕获用于测量的图像的半导体装置等的微尺寸（CD值）的带电粒子束装置。 对于本发明，使用用于校准的样品，其上在视场中排列有通过晶体各向异性蚀刻技术产生的表面上具有已知角度的多个多面体结构物体。 基于每个多面体结构物体的图像上的几何变形来计算视野内的每个位置处的束着陆角。 用于均衡视场内每个位置的束着陆角的光束控制参数被预先注册。 当进行尺寸测量时，根据待测图案的位置在观察区域中应用登记的光束控制参数。 因此，本发明提供了减少相对于具有相同束着陆角的样品的电子束着角的变化引起的CD值的变化的方法，以及用于减少由电子差异引起的仪器误差的方法 设备之间的束着陆角度。

公开(公告)号：US20090032693A1

公开(公告)日：2009-02-05

申请号：US12182704

申请日：2008-07-30

Applicant: Junichi Kakuta ,  Kazuhiro Ueda ,  Tatsuya Maeda ,  Hiroyuki Saito ,  Katsuhiro Sasada

Inventor： Junichi Kakuta ,  Kazuhiro Ueda ,  Tatsuya Maeda ,  Hiroyuki Saito ,  Katsuhiro Sasada

IPC: G01D18/00 ,  G01N23/00

CPC classification number: G01N23/225 ,  H01J37/1471 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/1501 ,  H01J2237/1532

Abstract: The present invention aims to provide an axis alignment method, astigmatism correction method and SEM for implementing these methods, which can prevent an alignment or correction error attributable to conditions of a specimen. A first aspect is to obtain the difference between the optimal values acquired from an automatic axis alignment result on a standard sample and from each of automatic axis alignment results on a observation target sample, and to correct an optimal value adjusted using the standard sample by use of the difference thus obtained. A second aspect is to acquire an optimal stigmator value (astigmatism correction signal) by using the standard sample, to store the optimal stigmator value as a default value, to add the optimal stigmator value and the default value depending on the height of an observation target sample pattern, and to perform an astigmatism correction on the basis of the resultant stigmator value.

Abstract translation: 本发明旨在提供一种用于实现这些方法的轴对准方法，像散校正方法和SEM，其可以防止由于样品的条件引起的对准或校正误差。 第一方面是获得从标准样品的自动轴对准结果获取的最佳值与观察目标样品上的自动轴对准结果中的每一种之间的差异，并且通过使用校正使用标准样品调整的最佳值 的差异。 第二方面是通过使用标准样本来获取最佳标称值（像散校正信号），以将最佳标称值作为默认值来存储，以根据观察目标的高度添加最优标示符值和默认值 样本图案，并且基于得到的标记值进行散光校正。

公开(公告)号：US20060290716A1

公开(公告)日：2006-12-28

申请号：US11446287

申请日：2006-06-05

Applicant: Takahisa Gunji ,  Tatsuya Maeda

Inventor： Takahisa Gunji ,  Tatsuya Maeda

IPC: G09G5/00

CPC classification number: G06F8/38 ,  G06F8/34

Abstract: A program creation apparatus creates a program for a microcomputer that includes an input section, a processor and an output section. The apparatus includes a GUI display section displaying a plurality of icons, each corresponding to each operation of the input section, the processor and the output section, and a program creator creating a program according to manipulation of the icons by a user.

公开(公告)号：US07006681B2

公开(公告)日：2006-02-28

申请号：US09963710

申请日：2001-09-27

Applicant: Tatsuya Maeda ,  Shigenori Miyawaki

Inventor： Tatsuya Maeda ,  Shigenori Miyawaki

IPC: G06K9/00

CPC classification number: G06T7/0004 ,  G01N21/8851 ,  G06T2207/30148

Abstract: An inspection apparatus of an electric junction box is provided, by which improper mounting of electric parts can be detected. The inspection apparatus 1 has a CCD camera 5, an image-processing device 7 and a control device 8. The CCD camera picks up images of fuse 14 in the electric junction box 12 as a subject of the inspection. The image-processing device 7 stores an image consulting data 60. The image consulting data 60 includes a plurality of images of each fuse 14 having the same item symbol with regard to every item symbol, the fuses 14 being used in the electric junction box 12. The control device 8 stores normal data indicating the proper item symbol of the fuse 14 to be mounted on a corresponding mount 13. The image-processing device 7 extracts the image most analogous to the image picked up by the CCD camera 5 from the images in the image consulting data. The control device 8 judge the quality of the item symbol of the fuse 14 having the most analogous image on the basis of the normal data.

公开(公告)号：US20050189501A1

公开(公告)日：2005-09-01

申请号：US11038478

申请日：2005-01-21

Applicant: Mitsugu Sato ,  Atsushi Takane ,  Shigeto Isakozawa ,  Takashi Iizumi ,  Tatsuya Maeda ,  Hiromi Inada

Inventor： Mitsugu Sato ,  Atsushi Takane ,  Shigeto Isakozawa ,  Takashi Iizumi ,  Tatsuya Maeda ,  Hiromi Inada

IPC: G21K5/00 ,  G03F7/20 ,  G21K5/04 ,  H01J37/08 ,  H01J37/22 ,  H01J37/256 ,  H01J37/28 ,  H01L21/027 ,  H01L21/66

CPC classification number: H01J37/28 ,  H01J2237/2826

Abstract: A charged particle beam apparatus capable of automatically measuring an image magnification error of an apparatus and capable of automatically calibrating the image magnification in high precision is provided. To this end, while an image processing operation of either an auto-correlation function or an FFT transformation is employed with respect to a scanning image of a reference material having a periodic structure, the averaged pitch dimension of which is known, averaged periodic information owned by the scanning image is detected so as to measure an image magnification error of the apparatus. Also, the information as to the acquired image magnification error is fed back to an image magnification control means of the apparatus so as to automatically execute a calibration as to the image magnification in high precision.

Abstract translation: 提供一种能够自动测量装置的图像放大误差并且能够以高精度自动校准图像放大率的带电粒子束装置。 为此，当对具有周期性结构的参考材料的扫描图像采用自相关函数或FFT变换的图像处理操作时，其平均间距尺寸已知，所拥有的平均周期信息 检测扫描图像以测量装置的图像放大误差。 此外，关于获取的图像放大误差的信息被反馈到装置的图像倍率控制装置，以便以高精度自动执行关于图像放大的校准。

公开(公告)号：US6115800A

公开(公告)日：2000-09-05

申请号：US902523

申请日：1997-07-29

Applicant: Tatsuya Maeda

Inventor： Tatsuya Maeda

IPC: G06F12/02 ,  G06F17/30 ,  H04H20/42 ,  H04H60/27 ,  H04H60/44

CPC classification number: H04H20/42 ,  H04H60/27 ,  H04H2201/13 ,  H04H60/44

Abstract: A data storing method and a data searching method for the stored data for improving memory employment efficiency of RDS reception data while maintaining searching processing speed of PI code, in the data storing method and the data searching method for the stored data, read-address is set to head of PI area, there is judged whether or not the read-address agrees with PI code of storing candidate, when the read-address disagrees with PI code of storing candidate, the read-address is set to next PI storing position. Next, there is judged whether or not check of all PI code is terminated. When the check is not terminated, the processing after judgement of agreement between address PI code and PI code of storing candidate is implemented repeatedly. When there is no agreed PI code in spite of termination of check of all PI code, the storing candidate PI code and AF data are stored at the next of the rearmost of the AF data. When PI codes agree therewith each other, head of AF area of the read PI code is searched, AF data is stored in the free area.

Abstract translation: 数据存储方法和数据搜索方法，用于在保持数据存储方法和存储数据的数据搜索方法的读取地址的同时保持PI代码的搜索处理速度的同时提高RDS接收数据的存储器使用效率的存储数据 设置为PI区域的头部，当读取地址与存储候选的PI代码不一致时，判断读取地址是否与存储候选的PI代码一致，读取地址被设置为下一个PI存储位置。 接下来，判断是否终止了所有PI代码的检查。 当检查未终止时，重复执行地址PI代码和存储候选的PI代码之间的协商判断之后的处理。 当不存在所有PI代码的检查结束时，没有约定的PI代码时，存储候选PI代码和AF数据被存储在AF数据的最后面的下一个处。 当PI代码彼此一致时，搜索读取的PI代码的AF区域的头部，AF数据被存储在空闲区域中。

公开(公告)号：US5901440A

公开(公告)日：1999-05-11

申请号：US872147

申请日：1997-06-10

Applicant: Tatsuya Maeda ,  Chiaki Hatano

Inventor： Tatsuya Maeda ,  Chiaki Hatano

IPC: G01R31/04 ,  B30B15/14 ,  B30B15/28 ,  G08B23/00 ,  H01R43/048 ,  H01R43/04

CPC classification number: H01R43/0488 ,  B30B15/14 ,  B30B15/281 ,  Y10T29/49185 ,  Y10T29/53022 ,  Y10T29/53213 ,  Y10T29/53235

Abstract: A method of controlling the terminal crimping device is proposed by providing an elevating crimper for crimping terminals onto exposed conductors of cables, positioning an anvil opposite to said crimper, elevating the drive means including a servo motor. The standard value for determining whether or not the crimper height is out of conformity with the standard value, the administration value for administering the crimper height, and the decision value for determining whether or not the crimping performance is good or not on the basis of the crimper height are recorded such that an alarm is issued when the crimper height is out of conformity with said standard value, said administration value, and said decision value at the time of terminal crimping operation.

Abstract translation: 提出了一种控制端子压接装置的方法，该方法通过提供用于将端子压接在电缆暴露导体上的升降压接器，定位与所述压接器相对的砧板，升高包括伺服电动机的驱动装置。 用于确定卷边机高度是否不符合标准值的标准值，用于施加卷曲机高度的管理值以及用于基于该压接器高度确定卷曲性能是否良好的判定值 记录卷边器高度，使得当卷边机高度与端子压接操作时的标准值，所述管理值和所述判定值不一致时发出报警。

公开(公告)号：US5887469A

公开(公告)日：1999-03-30

申请号：US901281

申请日：1997-07-29

Applicant: Tatsuya Maeda ,  Chiaki Hatano

Inventor： Tatsuya Maeda ,  Chiaki Hatano

IPC: B30B1/26 ,  B30B15/14 ,  H01R43/048 ,  B21B37/00

CPC classification number: H01R43/0486 ,  B30B1/266 ,  B30B15/14 ,  Y10T29/53022 ,  Y10T29/53235

Abstract: A terminal crimping device includes an elevating crimper for crimping terminals onto exposed conductors of cables and an anvil positioned opposite to said elevating crimper so that the ascend/descend of the crimper is carried out by a servo motor. The terminal crimping device further includes a height sensor for outputting a crimp height at the time of crimping said terminals, a data storage unit for storing a pressing time range for determination on whether or not terminal crimping is normal and a crimper height value for determination of said pressing time; and determining unit for time measuring the time during which an output from said height sensor is not larger than the crimper height and determining that crimping is normal if the measured time is within said pressing time range. Thus, the determination on whether or not the terminal crimping is normal can be surely made.

Abstract translation: 端子压接装置包括用于将端子压接在暴露的电缆导体上的升降压接器和与所述升降压接器相对定位的砧座，使得压接器的上升/下降由伺服电动机执行。 端子压接装置还包括用于在压接所述端子时输出压接高度的高度传感器，用于存储用于确定端子压接是否正常的按压时间范围的数据存储单元，以及用于确定端子压接装置的压接器高度值 说压力时间 以及确定单元，用于时间测量来自所述高度传感器的输出不大于所述压接器高度的时间，并且如果所测量的时间在所述按压时间范围内，则确定所述压接正常。 因此，可以确定端子压接是否正常的判定。

公开(公告)号：US5614713A

公开(公告)日：1997-03-25

申请号：US617030

申请日：1996-03-18

Applicant: Atsushi Kobaru ,  Tadashi Otaka ,  Tatsuya Maeda ,  Katsuhiro Sasada

Inventor： Atsushi Kobaru ,  Tadashi Otaka ,  Tatsuya Maeda ,  Katsuhiro Sasada

IPC: H01J37/20 ,  H01J37/21 ,  H01J37/22 ,  H01J37/244 ,  H01J37/26

CPC classification number: H01J37/22 ,  H01J2237/216 ,  H01J2237/2482

Abstract: An electron beam is focused on a specimen by a focusing lens. A light beam is incident on the position of irradiation of the specimen with the electron beam and the reflected light beam is detected by a linear light detector. The output of the detector is used to measure the height of the specimen at the position of irradiation of the electron beam. The specimen is moved in a plane perpendicular to an optical axis of the focusing lens. A specimen height measuring device carries out the height measurement of the specimen at a position to be observed on the specimen and at positions thereon which are in the vicinity of the position to be observed, when those positions are located at the position of irradiation of the electron beam. The specimen height measuring device averages the measured values so as to produce a focusing correction signal on the basis thereof and controls the focusing lens on the basis of the focusing correction signal.

Abstract translation: 电子束通过聚焦透镜聚焦在样本上。 光束入射到具有电子束的样本的照射位置，并且通过线性光检测器检测反射光束。 检测器的输出用于测量样品在电子束照射位置的高度。 样本在垂直于聚焦透镜的光轴的平面内移动。 样本高度测量装置在样本上观察的位置和在待观察位置附近的位置上执行样本的高度测量，当这些位置位于待观察位置的位置时 电子束。 样本高度测量装置对测量值进行平均，以便基于此产生聚焦校正信号，并且基于聚焦校正信号控制聚焦透镜。