公开(公告)号：US20130193520A1

公开(公告)日：2013-08-01

申请号：US13828537

申请日：2013-03-14

Applicant: Xintec Inc.

Inventor： Baw-Ching PERNG ,  Ying-Nan WEN ,  Shu-Ming CHANG ,  Ching-Yu NI ,  Yun-Jui HSIEH ,  Wei-Ming CHEN ,  Chia-Lun TSAI ,  Chia-Ming CHENG

IPC: H01L29/78

CPC classification number: H01L29/78 ,  H01L23/3114 ,  H01L23/481 ,  H01L23/492 ,  H01L24/13 ,  H01L24/16 ,  H01L29/0646 ,  H01L29/0653 ,  H01L29/0878 ,  H01L29/1095 ,  H01L29/41741 ,  H01L29/41766 ,  H01L29/7802 ,  H01L29/7809 ,  H01L2224/05001 ,  H01L2224/05009 ,  H01L2224/05022 ,  H01L2224/05572 ,  H01L2224/16 ,  H01L2924/00014 ,  H01L2924/01021 ,  H01L2924/13091 ,  H01L2224/05599 ,  H01L2224/05099

Abstract: A power MOSFET package includes a semiconductor substrate having opposite first and second surfaces, having a first conductivity type, and forming a drain region, a doped region extending downward from the first surface and having a second conductivity type, a source region in the doped region and having the first conductivity type, a gate overlying or buried under the first surface, wherein a gate dielectric layer is between the gate and the semiconductor substrate, a first conducting structure overlying the semiconductor substrate, having a first terminal, and electrically connecting the drain region, a second conducting structure overlying the semiconductor substrate, having a second terminal, and electrically connecting the source region, a third conducting structure overlying the semiconductor substrate, having a third terminal, and electrically connecting the gate, wherein the first, the second, and the third terminals are substantially coplanar, and a protection layer between the semiconductor substrate and the terminals.

Abstract translation: 功率MOSFET封装包括具有相反的第一和第二表面的半导体衬底，具有第一导电类型，并形成漏极区，从第一表面向下延伸并具有第二导电类型的掺杂区，掺杂区中的源极区 并且具有第一导电类型，覆盖或掩埋在第一表面下方的栅极，其中栅极电介质层位于栅极和半导体衬底之间，覆盖半导体衬底的第一导电结构，具有第一端子，并且电连接漏极 区域，覆盖半导体衬底的第二导电结构，具有第二端子，并且电连接源极区域，覆盖半导体衬底的第三导电结构，具有第三端子和电连接栅极，其中第一，第二， 并且第三端子基本上共面，并且第三端子之间的保护层 e半导体衬底和端子。