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公开(公告)号：US20210123950A1
公开(公告)日：2021-04-29
申请号：US17139782
申请日：2020-12-31
Applicant: Technoprobe S.p.A.
Inventor： Riccardo VETTORI
Abstract: A probe card for testing a device under test having a plurality of contact pads includes a support plate having first contact pads thereon. A flexible membrane has a first face and a peripheral portion including second contact pads thereon. A plurality of contact probes are associated with a first face of the flexible membrane and are configured to abut onto the plurality of contact pads of the device under test. A sliding contact area includes: the first contact pads formed on the support plate; the second contact pads formed on the peripheral portion of the flexible membrane, the peripheral portion of the flexible membrane configured to come in pressing contact onto the support plate at the sliding contact area. A pressing element contacts the peripheral portion of the flexible membrane at the sliding contact area, and the pressing element puts the second contact pads into pressing contact with the first contact pads.
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公开(公告)号：US20200379015A1
公开(公告)日：2020-12-03
申请号：US16997726
申请日：2020-08-19
Applicant: Technoprobe S.p.A.
Inventor： Roberto SUBRANNI , David HERIBAN , Jean-Christophe VILLAIN , Jocelyn PERREAU , Florent PERROCHEAU , Anne DELETTRE
Abstract: An apparatus for the automated assembly of a probe head for testing electronic devices integrated on a semiconductor wafer, includes a support adapted to support at least two parallel guides, which are provided with a plurality of respective guides holes, and at least one holding means adapted to hold a contact probe to be housed in the guides holes, of the guides. Suitably, the support is a movable support adapted to be moved according to a preset trajectory between a first position, wherein the contact probe is held by the holding means at a predetermined position outside the guides holes, and a second position wherein the contact probe, which is held at the predetermined position, is housed in a set of guides holes that are substantially concentric to each other.
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公开(公告)号：US20200379009A1
公开(公告)日：2020-12-03
申请号：US16903948
申请日：2020-06-17
Applicant: Technoprobe S.p.A.
Inventor： Fabio MORGANA
Abstract: A contact probe for a testing head for testing electronic devices includes a rod-like body made of a first conductive material and extending along a longitudinal axis, and a contact tip supported by the body at an end portion thereof. The contact tip is made of a second conductive material that is different from the first conductive material. The contact tip includes a contact zone configured to perform mechanical and electrical contact with contact pads of a device under test. The body and the contact tip include respective contact surfaces in contact with each other. The contact surfaces are complementary to each other and include respective connection elements engaging each other. The connection elements include a protruding element projecting from the contact surface of one among the body and the contact tip, and a recess made in the other among the body and the contact tip.
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公开(公告)号：US20200348337A1
公开(公告)日：2020-11-05
申请号：US16931188
申请日：2020-07-16
Applicant: Technoprobe S.p.A.
Inventor： Riccardo VETTORI
Abstract: A cantilever contact probe includes a shaped probe body included between a descending probe section and an ascending probe section. At least one end portion is formed in the descending probe section, and bent with respect to a longitudinal axis starting from a bending point and ending with a contact tip of the cantilever contact probe that is configured to abut onto a contact pad of a device under test of that wafer. Suitably, the shaped probe body comprises at least one base portion, an upper portion extending, starting from the base portion, along a longitudinal extension axis of the shaped probe body, orthogonally to the reference plane and a top portion, connected to the upper portion and having a greater diameter than a diameter of the upper portion to form a T, the upper portion being the stem of the T and the top portion being the crosspiece of the T.
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公开(公告)号：US20200348336A1
公开(公告)日：2020-11-05
申请号：US16931183
申请日：2020-07-16
Applicant: Technoprobe S.p.A.
Inventor： Riccardo VETTORI
Abstract: A cantilever probe head includes a support ring associated with a PCB board and a plurality of contact probes, protruding from the support ring in a cantilever manner and being held by a support associated with the support ring. Each contact probe has a rod-like body having a longitudinal axis inclined with respect to a reference plane corresponding to a plane of a wafer of devices under test by the cantilever probe head, as well as at least one first end portion, provided in a first probe section protruding from the support in the direction of the wafer of devices under test, the first end portion being bent with respect to the longitudinal axis starting from a bending point and ending with a contact tip of the contact probe able to abut onto a contact pad of a device under test of the wafer.
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Patent Agency Ranking
公开(公告)号：US10578646B2
公开(公告)日：2020-03-03
申请号：US15703627
申请日：2017-09-13
Applicant: TECHNOPROBE S.p.A.
Inventor： Daniele Acconcia
Abstract: A testing head for functionality testing a device under test comprises a plurality of contact probes, each contact probe having a rod-like body having a preset length less than 5000 μm extending between a first and a second end, the second end being a contact tip and an opening extending all over its length and defining a plurality of arms, parallel to each other, separated by the opening and connected to the end portions of the contact probe, and an auxiliary guide, arranged transverse to the body and provided with suitable guide holes, the contact probes sliding through each of them, the auxiliary guide defining a gap including one end of the opening being a critical portion of the body and a zone more prone to breakings in the body undergoing low or even no bending stresses in the gap with respect to the rest of the body.
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公开(公告)号：US20190302148A1
公开(公告)日：2019-10-03
申请号：US16442385
申请日：2019-06-14
Applicant: TECHNOPROBE S.P.A.
Inventor： Flavio MAGGIONI
Abstract: A testing head apt to verify the operation of a device under test integrated on a semiconductor wafer comprises a plurality of contact elements, each comprising a body that extends between a first end portion and a second end portion, and a guide provided with a plurality of guide holes apt to house the contact elements, the guide comprising a conductive portion that includes and electrically connects the holes of a group of guide holes to each other and is apt to contact a corresponding group of contact elements apt to carry a same type of signal.
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公开(公告)号：US20190293686A1
公开(公告)日：2019-09-26
申请号：US16439527
申请日：2019-06-12
Applicant: TECHNOPROBE S.P.A.
Inventor： Roberto CRIPPA , Raffaele VALLAURI
Abstract: A contact probe comprises a probe body being extended in a longitudinal direction between respective end portions adapted to realize a contact with respective contact pads, at least one end portion having transverse dimensions greater than the probe body. Suitably, the end portion comprises at least one indentation adapted to house a material scrap being on the contact probe after a separation from a substrate wherein the contact probe has been realized.
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公开(公告)号：US10365299B2
公开(公告)日：2019-07-30
申请号：US15640130
申请日：2017-06-30
Applicant: Technoprobe S.p.A.
Inventor： Giuseppe Crippa , Roberto Crippa
Abstract: A manufacturing method of a semi-finished product that includes a plurality of contact for a testing head of electronic devices comprises the steps of: providing a substrate made of a conductive material; and defining each contact probe by removing material from the substrate, each contact probes being anchored to the substrate by at least one bridge of material. The step of defining the contact probes includes a step of laser cutting, in correspondence with a contour of the contact probes and of that at least one bridge of material.
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公开(公告)号：US10228392B2
公开(公告)日：2019-03-12
申请号：US15352448
申请日：2016-11-15
Applicant: TECHNOPROBE S.P.A.
Inventor： Roberto Crippa , Giuseppe Crippa , Raffaele Vallauri
Abstract: A contact probe of a testing head of a testing apparatus of electronic devices comprises respective end portions adapted to contact respective contact pads and a body essentially extended in a longitudinal direction between the end portions, at least one end portion comprising an insert made of a first conductive material having a hardness being greater than a second conductive material making the contact probe which is supported by a section of the end portion, the section being made of the second conductive material and being shaped in a complementary way with respect to the insert and having respective abutting surfaces facing and adhering to respective abutting surfaces of the insert.
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