Thin film forming apparatus, film thickness measuring method and film thickness sensor
    92.
    发明授权
    Thin film forming apparatus, film thickness measuring method and film thickness sensor 有权
    薄膜成膜装置,薄膜​​厚度测定方法及薄膜厚度传感器

    公开(公告)号:US08226802B2

    公开(公告)日:2012-07-24

    申请号:US12725658

    申请日:2010-03-17

    IPC分类号: C23C14/00 C23C14/32

    摘要: A technology which is capable of an accurate measurement of the film thickness even if an exfoliation occurs is provided. A difference frequency Δf0 is calculated from a resonance frequency f0 of a film thickness sensor at a current time a0 and a resonance frequency f1 at an immediate past time a1, and whether the exfoliation has occurred or not is detected from its sign and a comparison result relative to a reference value. When the exfoliation has occurred, a corrected film thickness value T′ is obtained by adding the thickness Δt0 of the exfoliation film to an increased film thickness value T which is determined from a resonance frequency fx measured at a future time ax to be converted to the thickness of a film on a film forming object, and whether the formation of the film should be terminated is judged in comparison to an aimed value. Thus, even if the exfoliation occurs in the film thickness sensor, the film thickness value of the thin film on the surface of the film forming object can be accurately obtained.

    摘要翻译: 提供即使发生剥离也能够精确测量膜厚度的技术。 从当前时间a0的膜厚度传感器的谐振频率f0和紧接着的时刻a1的谐振频率f1计算差频率Dgr; f0,从其符号检测出剥离是否发生, 比较结果相对于参考值。 当发生剥离时,通过将剥离膜的厚度> t0添加到从将来的时间ax测量的共振频率fx确定的增加的膜厚度值T来获得校正的膜厚度值T'以进行转换 相对于成膜物体上的膜的厚度,以及膜的形成是否应该终止,与目标值相比较。 因此,即使在膜厚传感器中发生剥离,也能够精确地得到成膜体表面的薄膜的膜厚值。

    COOLING APPARATUS, ELECTRONIC APPARATUS, AND BLOWER APPARATUS
    93.
    发明申请
    COOLING APPARATUS, ELECTRONIC APPARATUS, AND BLOWER APPARATUS 审中-公开
    冷却装置,电子装置和鼓风装置

    公开(公告)号:US20100084123A1

    公开(公告)日:2010-04-08

    申请号:US12567274

    申请日:2009-09-25

    IPC分类号: F28F27/00 F28D15/00 F28F13/12

    摘要: Disclosed is a cooling apparatus including a heat sink, a blower mechanism, an opening member, and a movement mechanism. The blower mechanism has a blower opening that has a predetermined area and is opposed to the heat sink. The opening member has a first opening that has an area smaller than the area of the blower opening. The movement mechanism moves the opening member so that switching between a first state and a second state is performed. The first state is a state in which the first opening is disposed between the blower opening and the heat sink, and the second state is a state in which the first opening is removed from between the blower opening and the heat sink.

    摘要翻译: 公开了一种冷却装置,包括散热器,鼓风机构,开口部件和移动机构。 鼓风机构具有鼓风机开口,该鼓风机开口具有预定区域并与散热器相对。 打开构件具有第一开口,该第一开口的面积小于鼓风机开口的面积。 移动机构移动开口构件,从而执行第一状态和第二状态之间的切换。 第一状态是其中第一开口设置在鼓风机开口和散热器之间的状态,第二状态是第一开口从鼓风机开口和散热器之间移除的状态。

    HEAT SINK
    94.
    发明申请
    HEAT SINK 审中-公开
    散热器

    公开(公告)号:US20090114372A1

    公开(公告)日:2009-05-07

    申请号:US11994501

    申请日:2005-09-13

    IPC分类号: F28D15/00

    摘要: A heat sink includes a heat-transfer container incorporating a flow path through which a cooling fluid flows, for cooling a heating element in contact with the heat-transfer container The flow path includes a first cross-sectional portion that becomes narrower as the distance between a given point in the flow path and a side of the heat-transfer container which makes contact with the heating element becomes longer in a direction perpendicular to the direction in which the cooling fluid flows, and a second cross-sectional portion that is approximately constant in the direction perpendicular to the direction in which the cooling fluid flows. The first cross-sectional portion and the second cross-sectional portion alternately continue in the direction in which the cooling fluid flows causing a three-dimensional flow so the heat-transfer properties are enhanced with a simplified structure.

    摘要翻译: 散热器包括一个传热容器,该传热容器包括冷却流体流过的流动通道,用于冷却与传热容器接触的加热元件。流路包括第一横截面部分,该第一横截面部分随着 与该加热元件接触的传热容器中的给定点和与传热容器接触的一侧在与冷却流体流动方向垂直的方向上变长,第二横截面部分大致恒定 在垂直于冷却流体流动方向的方向上。 第一横截面部分和第二横截面部分在冷却流体流动的方向上交替地继续,导致三维流动,从而以简化的结构增强了传热性能。

    DIFFRACTIVE OPTICAL ELEMENT AND OPTICAL PICKUP APPARATUS
    95.
    发明申请
    DIFFRACTIVE OPTICAL ELEMENT AND OPTICAL PICKUP APPARATUS 审中-公开
    衍射光学元件和光学拾取器

    公开(公告)号:US20080310284A1

    公开(公告)日:2008-12-18

    申请号:US12179751

    申请日:2008-07-25

    IPC分类号: G11B7/00

    摘要: An optical pickup apparatus includes a diffractive optical element, and an objective lens that focuses a light beam of a first wavelength λ1, a light beam of a second wavelength λ2 and a light beam of a third wavelength λ3 on a first recording medium, a second recording medium, and a third recording medium, respectively, the wavelengths λ1, λ2, and λ3 being different from each other. The diffractive optical element includes a first diffractive surface that neither diffracts the light beam of the first wavelength λ1 nor the light beam of the third wavelength λ3 but diffracts the light beam of the second wavelength λ2, and a second diffractive surface that neither diffracts the light beam of the first wavelength λ1 nor the light beam of the second wavelength λ2 but diffracts the light beam of the third wavelength λ3, and each of the first and second diffractive surfaces satisfies the following condition inequality: Λ/λ≧8 wherein Λ represents the minimum pitch in the case that the width which generates a phase difference of one wavelength when the closest wavefronts resulting from adjacent steps in each of the diffractive surfaces are linked with each other is defined as one pitch, and λ represents the wavelength of the diffracted light.

    摘要翻译: 光拾取装置包括衍射光学元件和将第一波长λ1的光束,第二波长λ2的光束和第三波长λ3的光束的光束聚焦在第一记录介质上的物镜,第二 记录介质和第三记录介质,波长λ1,λ2和λ3彼此不同。 衍射光学元件包括:第一衍射面,其既不衍射第一波长λ1的光束也不衍射第三波长λ3的光束,但衍射第二波长λ2的光束;以及第二衍射面,其不衍射光 第一波长λ1的光束和第二波长λ2的光束,但是衍射第三波长λ3的光束,并且第一和第二衍射面中的每一个满足以下条件不等式:<βin-line-formula description = “In-line Formulas”end =“lead”?>λ/λ> = 8 <?in-line-formula description =“In-line Formulas”end =“tail”?>其中Lambda表示该情况下的最小间距 当由每个衍射表面中的相邻步骤产生的最接近的波前相互连接时产生一个波长的相位差的宽度被定义为一个间距,并且λ表示 衍射光的波长。

    Cooling apparatus and electronic equipment
    96.
    发明授权
    Cooling apparatus and electronic equipment 失效
    冷却设备和电子设备

    公开(公告)号:US07458415B2

    公开(公告)日:2008-12-02

    申请号:US11440556

    申请日:2006-05-25

    摘要: The rotation of axial-flow blades permits air entered through an inlet port to exit directly to outside of a case in the axial direction, and the rotation of centrifugal blades permits air entered through the inlet port to exit through a side surface outlet port to the outside of the case in the centrifugal direction. Accordingly, the amount of flow of air exiting from inside of the case can be increased so that the amount of heat dissipation is increased. It is therefore able to provide a cooling apparatus and electronic equipment mounting the cooling apparatus with improved cooling efficiency while achieving a small thickness.

    摘要翻译: 轴流叶片的旋转允许通过入口进入的空气在轴向方向上直接离开壳体外部,并且离心叶片的旋转允许通过入口进入的空气通过侧表面出口端口离开到 在离心方向外面的情况。 因此,可以增加从壳体内部排出的空气流量,从而增加散热量。 因此,能够提供一种冷却装置和电子设备,其安装冷却装置,同时实现较小的冷却效率。

    Tiller handle for outboard motors
    98.
    发明申请

    公开(公告)号:US20080038967A1

    公开(公告)日:2008-02-14

    申请号:US11790324

    申请日:2007-04-25

    IPC分类号: B63H20/00

    CPC分类号: B63H20/106

    摘要: Proposed is a height adjusting mechanism for a tiller handle (23) of an outboard motor (1). An adjustment piece (45) is detachably attached to the front end of a handle support bracket (22) which extends rearwards from the outboard motor main body (3). The adjustment piece is configured to be attached to the front end of the handle support member in two or more different positions and provided with a corresponding number of spacer portions (47-50) having different thicknesses so as to interpose a selected one of the spacer portions between corresponding stopper surfaces (41, 42) of the tiller handle and handle support bracket depending on the positions of the adjustment piece. Thereby, the height adjusting mechanism for the tiller handle is avoided from protruding laterally or vertically from the base end of the tiller handle so that the external appearance is not impaired and interferences with the surrounding parts can be effectively prevented. Also, the height of the tiller handle can be selected from two or more possible positions.

    Copolymer and Top Coating Composition
    99.
    发明申请
    Copolymer and Top Coating Composition 有权
    共聚物和顶部涂料组合物

    公开(公告)号:US20080038661A1

    公开(公告)日:2008-02-14

    申请号:US11664296

    申请日:2005-09-28

    IPC分类号: C08F12/30 G03C1/73

    摘要: A resin composition for forming a top coat which can be formed on a photoresist film without causing intermixing with the photoresist film, can maintain a stable film coating which is not eluted into a medium during immersion lithography, does not impair pattern profiles during dry exposure (which is not immersion lithography), and can be easily dissolved in an alkaline developer. The resin is a copolymer which comprises at least one recurring unit (I) selected from the group consisting of a recurring unit having a group shown by the following formula (1), a recurring unit having a group shown by the following formula (2), and a recurring unit having a carboxyl group, and a recurring unit (II) having a sulfo group, the copolymer having a weight average molecular weight determined by gel permeation chromatography of 2,000 to 100,000, wherein at least one of R1 and R2 is a fluoroalkyl group having 1 to 4 carbon atoms and R3 in the formula (2) represents a fluoroalkyl group having 1 to 20 carbon atoms.

    摘要翻译: 用于形成表面涂层的树脂组合物可以形成在光致抗蚀剂膜上而不与光致抗蚀剂膜混合,可以保持在浸没光刻期间不溶于介质的稳定的膜涂层,在干燥曝光期间不损害图案轮廓( 这不是浸没式光刻法),并且可以容易地溶解在碱性显影剂中。 树脂是包含至少一种选自由下式(1)表示的基团的重复单元,由下式(2)表示的基团的重复单元)的重复单元(I)的共聚物, 和具有羧基的重复单元和具有磺基的重复单元(II),所述共聚物的重均分子量通过凝胶渗透色谱法测定为2,000〜100,000,其中R 1〜 R 2是具有1〜4个碳原子的氟代烷基,式(2)中的R 3表示碳原子数1〜20的氟代烷基 。

    Outboard engine unit
    100.
    发明申请
    Outboard engine unit 有权
    舷外发动机单元

    公开(公告)号:US20070254539A1

    公开(公告)日:2007-11-01

    申请号:US11785632

    申请日:2007-04-19

    IPC分类号: B63H20/32

    摘要: In an outboard engine unit, a cover assembly, defining a lower half section of an engine room, is composed of left and right cover members each formed of resin, and a bracket is fixed to a rear portion of the engine or engine support structure. The left and right cover members are fixed at their respective rear portions to the bracket. Centerline of an engine cylinder is offset from a centerline of the engine room toward one of left and right sides of the unit, and an ignition plug is provided on the other side opposite from the one side toward which the engine cylinder centerline is offset.

    摘要翻译: 在舷外发动机单元中,限定发动机室的下半部分的盖组件由每个由树脂形成的左和右盖构件组成,并且支架固定到发动机或发动机支撑结构的后部。 左和右盖构件在它们各自的后部固定到支架。 发动机气缸的中心线偏离发动机室的中心线朝向该单元的左侧和右侧之一,并且在与发动机气缸中心线偏移的一侧相对的另一侧设置火花塞。