公开(公告)号：US08253940B1

公开(公告)日：2012-08-28

申请号：US12806870

申请日：2010-08-23

申请人： Steven E. Green ,  Gerald T. Cooney ,  Martin M. Liphardt

发明人： Steven E. Green ,  Gerald T. Cooney ,  Martin M. Liphardt

IPC分类号： G01J4/00

CPC分类号： G01J3/0208 ,  G01J3/36 ,  G01N21/211 ,  G01N2021/213

摘要： An ellipsometer, polarimeter, reflectometer, spectrophotometer or scatterometer system for use in the UV and infrared range of wavelengths, characterized by the combination of a fiber optic capable of transmitting wavelengths from below 2.2 micron up to at least 3.5 microns, and a beam collimator formed from a combination of two off-axis concave astigmatism reducing spherical mirrors capable of operating between about 190 nm up to 5.5 microns.

摘要翻译： 用于紫外和红外波长范围的椭圆光度计，偏振计，反射计，分光光度计或散射仪系统，其特征在于能够传输从低于2.2微米至至少3.5微米的波长的光纤，以及形成的光束准直器 从两个离轴凹散光的组合减少球面镜，其能够在约190nm至5.5微米之间的操作。

公开(公告)号：US08189193B1

公开(公告)日：2012-05-29

申请号：US12589076

申请日：2009-10-19

申请人： Martin M. Liphardt ,  Ping He ,  James D. Welch

发明人： Martin M. Liphardt ,  Ping He ,  James D. Welch

IPC分类号： G01J4/00

CPC分类号： G01J3/0224 ,  G01J3/021 ,  G01J3/10 ,  G01N21/21 ,  G01N21/211 ,  G01N2201/061 ,  G01N2201/0636

摘要： Control of the angle-of-incidence of a beam of electromagnetic radiation provided by a horizontally oriented arc-lamp in ellipsometer, polarimeter, spectrophotometer, reflectometer, Mueller matrix measuring, or the like systems.

摘要翻译： 由椭圆光度计，偏光计，分光光度计，反射计，米勒矩阵测量等系统中的水平取向的弧光灯提供的电磁辐射束的入射角的控制。

公开(公告)号：US20100220313A1

公开(公告)日：2010-09-02

申请号：US12456791

申请日：2009-06-23

申请人： Craig M. Herzinger ,  Matias H. Schubert ,  Tino Hofmann ,  Martin M. Liphardt ,  John A. Woollam

发明人： Craig M. Herzinger ,  Matias H. Schubert ,  Tino Hofmann ,  Martin M. Liphardt ,  John A. Woollam

IPC分类号： G01J4/04

CPC分类号： G01N21/211 ,  G01J4/04 ,  G01J5/20 ,  G01J5/42 ,  G01N21/3581 ,  G01N2021/3595

摘要： The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including: a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; and a detector such as a Golay cell; a bolometer or a solid state detector; and preferably including at least one odd-bounce polarization state image rotating system, and optionally including a polarizer, at least one compensator and/or modulator, in addition to an analyzer.

摘要翻译： 本发明涉及椭偏仪和偏振计系统，更具体地说，涉及在300GHz以下的频率范围内并延伸至高于至少1Tera-Hz（THz）的椭偏仪或偏振计等。 通过红外（IR）范围，高达100THz，包括：诸如反向波振荡器的源; 史密斯 - 珀塞尔细胞; 自由电子激光器或FTIR源和固态器件; 和诸如Golay细胞的检测器; 测辐射热计或固态检测器; 并且除了分析器之外，还优选地包括至少一个奇数反弹偏振态图像旋转系统，并且可选地包括偏振器，至少一个补偿器和/或调制器。

公开(公告)号：US07777878B2

公开(公告)日：2010-08-17

申请号：US12002650

申请日：2007-12-18

申请人： Martin M. Liphardt

发明人： Martin M. Liphardt

IPC分类号： G01J3/08 ,  G01J3/42 ,  G01J4/04 ,  G01N21/21

CPC分类号： G01J3/447 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/0229 ,  G01J3/027 ,  G01J3/2823 ,  G01J3/457 ,  G01N21/211 ,  G01N2021/213

摘要： Application of digital light processor (DLP) systems in monochromator, spectrophotometer or the like systems to mediate selection of individual wavelengths, and/or to image elected regions of a sample in an imaging ellipsometer, imaging polarimeter, imaging reflectometer, imaging spectrophotometer, and/or to provide chopped beams.

摘要翻译： 数字光处理器（DLP）系统在单色仪，分光光度计或类似系统中的应用，以介导单个波长的选择，和/或在成像椭偏仪，成像偏振计，成像反射计，成像分光光度计和/ 或提供切碎的梁。

公开(公告)号：US20080117413A1

公开(公告)日：2008-05-22

申请号：US11980262

申请日：2007-10-30

申请人： Martin M. Liphardt ,  Christopher A. Goeden

发明人： Martin M. Liphardt ,  Christopher A. Goeden

IPC分类号： G01N21/00

CPC分类号： G01N21/211 ,  G01N21/47 ,  G01N21/55 ,  G01N2201/02

摘要： System and method for orienting the tilt and vertical position of samples in ellipsometer and the like systems.

摘要翻译： 用于定位椭偏仪等样品的倾斜和垂直位置的系统和方法。

公开(公告)号：US07230699B1

公开(公告)日：2007-06-12

申请号：US10652696

申请日：2003-09-02

申请人： Martin M. Liphardt ,  Ping He

发明人： Martin M. Liphardt ,  Ping He

IPC分类号： G01J4/00

CPC分类号： G01N21/274 ,  G01N21/211

摘要： Disclosed is a system comprising a stage with “X”, “Y” and “Z” translation and “X”, “Y” and optionally “Z” axes rotation capability, in combination with interrogation and monitoring means which act in functional combination to orient the surface of a sample so as to set an intended oblique approach of an electromagnetic beam with respect to a sample surface at a monitored location thereon.

摘要翻译： 公开了一种包括具有“X”，“Y”和“Z”平移和“X”，“Y”和任选的“Z”轴旋转能力的平台的系统，其结合询问和监视装置，其功能组合 使样品的表面定向，以便在其上的监视位置处相对于样品表面设置电磁波束的预期倾斜接近。

公开(公告)号：US11885738B1

公开(公告)日：2024-01-30

申请号：US16873259

申请日：2020-03-09

申请人： Martin M. Liphardt ,  Galen L Pfeiffer ,  Ping He

发明人： Martin M. Liphardt ,  Galen L Pfeiffer ,  Ping He

IPC分类号： G01N21/21 ,  G01N21/55 ,  G01J3/28

CPC分类号： G01N21/211 ,  G01J3/2823 ,  G01N21/55 ,  G01N2021/215

摘要： An imaging system, and method of its use, for viewing a sample surface at an inclined angle, preferably in functional combination with a sample investigating reflectometer, spectrophotometer, ellipsometer or polarimeter system; wherein the imaging system provides that a sample surface and multi-element imaging detector surface are oriented with respect to one another to meet the Scheimpflug condition, and wherein a telecentric lens system is simultaneously positioned between the sample surface and the input surface of the multi-element imaging detector such that an image of the sample surface produced by said multi-element imaging detector is both substantially in focus over the extent thereof, and such that substantially no keystone error is demonstrated in said image.

公开(公告)号：US10444140B1

公开(公告)日：2019-10-15

申请号：US16501699

申请日：2019-05-23

申请人： Griffin A. P. Hovorka ,  Martin M. Liphardt ,  Galen L Pfeiffer

发明人： Griffin A. P. Hovorka ,  Martin M. Liphardt ,  Galen L Pfeiffer

IPC分类号： G01J3/42 ,  G01N21/01 ,  G01N21/55 ,  G01N21/21 ,  G01N21/31

摘要： A sample positioning system having two rotation elements with offset therebetween, to the second of which rotation elements is affixed a sample supporting stage. The rotation axes of the two rotation element are parallel, or substantially so. The sample positioning system finds application in the mapping of samples by Metrology systems such as Reflectometer, Spectrophotometer and Ellipsometer systems.

公开(公告)号：US09952141B1

公开(公告)日：2018-04-24

申请号：US14999748

申请日：2016-06-22

申请人： Jeffrey S. Hale ,  Craig M. Herzinger ,  Martin M. Liphardt

发明人： Jeffrey S. Hale ,  Craig M. Herzinger ,  Martin M. Liphardt

IPC分类号： G01N21/21 ,  G01J4/04

CPC分类号： G01N21/211 ,  G01N2201/127

摘要： An approach to characterizing beams of electromagnetic radiation such as are applied in ellipsometer and the like systems, involving considering the beam to be comprised of a number of spatially distributed beam rays, each of which is represented mathematically as an effectively independent source.

公开(公告)号：US09658151B2

公开(公告)日：2017-05-23

申请号：US14544706

申请日：2015-02-06

申请人： Martin M. Liphardt ,  Galen L. Pfeiffer

发明人： Martin M. Liphardt ,  Galen L. Pfeiffer

IPC分类号： G01N21/21 ,  H04N5/232 ,  G01N21/55

CPC分类号： G01N21/211 ,  G01N21/55 ,  H04N5/23212

摘要： In the context of an ellipsometer or the like, positioning a camera other than directly above a sample being investigated by an electromagnetic beam, while said camera provides an optical view of a surface of said sample which is in focus over the entire viewed extent of the sample, and wherein a contrast improving system involving two beams provided by a beam splitting system is utilized.