公开(公告)号：US06791934B2

公开(公告)日：2004-09-14

申请号：US10076663

申请日：2002-02-19

申请人： Takeshi Shimano ,  Tetsuo Ariyoshi ,  Kazuo Shigematsu ,  Koichi Maruyama ,  Shuichi Takeuchi

发明人： Takeshi Shimano ,  Tetsuo Ariyoshi ,  Kazuo Shigematsu ,  Koichi Maruyama ,  Shuichi Takeuchi

IPC分类号： G11B700

CPC分类号： G11B7/1378 ,  G11B7/093 ,  G11B7/0935 ,  G11B7/0943 ,  G11B7/13927

摘要： When it is intended to realize a lens having a large NA with one lens, an adjustment precision between both surfaces of the lens is very strict. Accordingly an objective lens having an NA of 0.8 or more was usually realized by two lenses. However, a working distance is small, and collision of the objective lens with a disc is apt to occur. A coma corrector for compensating coma caused by decentering of both surfaces in realizing the high NA lens with one lens is added. However, in this case, astigmatism occurs when the objective lens decenters from the coma corrector relatively accompanied with a tracking operation. The objective lens and the coma corrector are fixed to a mirror barrel so as to be unified with each other, and driven by a two-dimensional lens actuator. With such a constitution, decentering of the objective lens and the coma corrector does not occur, and hence astigmatism does not occur.

摘要翻译： 当想要实现具有一个透镜的具有大NA的透镜时，透镜的两个表面之间的调节精度非常严格。 因此，通常通过两个透镜实现NA为0.8以上的物镜。 然而，工作距离小，容易发生物镜与盘的碰撞。 添加了一个用于补偿由两个表面偏心造成的实现具有一个透镜的高NA透镜的昏迷校正器。 然而，在这种情况下，当物镜相对于跟踪操作相对于昏迷校正器偏离时，发生散光。 物镜和彗差校正器被固定到镜筒上，以便彼此一体化，并由二维透镜致动器驱动。 通过这样的结构，不会发生物镜和昏迷校正器的偏心，因此不发生散光。

公开(公告)号：US06734890B2

公开(公告)日：2004-05-11

申请号：US10173769

申请日：2002-06-19

申请人： Shuichi Takeuchi ,  Daisuke Koreeda

发明人： Shuichi Takeuchi ,  Daisuke Koreeda

IPC分类号： G02B2608

CPC分类号： B41J2/473 ,  G02B26/123

摘要： A scanning optical system that emits a plurality of beams to a plurality of surfaces to be scanned, respectively. The scanning optical system includes a light source and a polygonal mirror. The plurality of beams incident on the polygonal mirror are inclined with respect each other in an auxiliary scanning direction. The scanning optical system further includes an imaging optical system that converges the deflected beams on the plurality of surfaces, respectively. The imaging optical system includes a front lens group and a plurality of rear lens groups. All the beams are incident on the front lens group, and then incident on the respective rear lens groups. Each of the plurality of rear lens groups has a shape which is designed in accordance with an angle of a beam incident thereon with respect to an optical axis of the front lens group.

摘要翻译： 一种扫描光学系统，其分别将多个光束发射到要被扫描的多个表面。 扫描光学系统包括光源和多面镜。 入射在多面镜上的多个光束在辅助扫描方向上相对倾斜。 扫描光学系统还包括成像光学系统，其将偏转的光束分别会聚在多个表面上。 成像光学系统包括前透镜组和多个后透镜组。 所有的光束入射在前透镜组上，然后入射到各个后透镜组上。 多个后透镜组中的每一个具有根据相对于前透镜组的光轴入射的光束的角度而设计的形状。

公开(公告)号：US5973813A

公开(公告)日：1999-10-26

申请号：US95939

申请日：1998-06-12

申请人： Shuichi Takeuchi

发明人： Shuichi Takeuchi

IPC分类号： G02B26/12 ,  G02B26/08

CPC分类号： G02B26/126

摘要： A reflection type optical scanning system includes a cylindrical lens having positive power in the sub-scanning direction, a deflector, an image forming curved reflection mirror, and an anamorphic lens between the curved reflection mirror and an object surface to be scanned and having at least one toroidal surface with positive power in the sub-scanning direction, along a light path in this order from a light source side. The deflector is arranged so that light emitted from the cylindrical lens is made incident thereupon at a predetermined incident angle in the sub-scanning direction. The curved reflection mirror is made of a barrel-shaped toroidal surface, a cross-sectional in the main scanning direction being a concave arc having a single center of curvature or an arc and a cross-sectional shape in the sub-scanning direction being an arc having a single center of curvature, with respect to the incident light. The position of the center of curvature varies depending on the image height in the main scanning direction. The curved reflection mirror is inclined so that the light incident thereupon from the deflector is reflected by the curved reflection mirror in the sub-scanning direction at a predetermined angle toward the object surface. The axis of the anamorphic lens is deviated from the optical axis of the optical scanning system in the sub-scanning direction.

摘要翻译： 反射型光扫描系统包括在副扫描方向上具有正功率的柱面透镜，偏转器，成像弯曲反射镜和弯曲反射镜与待扫描物体表面之间的变形透镜，并且至少具有 在副扫描方向上具有正功率的一个环形表面，沿着来自光源侧的顺序沿着光路。 偏转器被布置成使得从柱面透镜发射的光在副扫描方向上以预定的入射角入射到其上。 弯曲反射镜由筒状环形面构成，主扫描方向的截面为具有单个曲率中心或圆弧的凹弧，副扫描方向的截面形状为 具有相对于入射光的单个曲率中心的弧。 曲率中心的位置根据主扫描方向上的图像高度而变化。 弯曲反射镜倾斜，使得从偏转器入射的光在副扫描方向上以预定角度朝向物体表面被弯曲反射镜反射。 变形透镜的轴在副扫描方向上偏离光学扫描系统的光轴。

公开(公告)号：US20140124367A1

公开(公告)日：2014-05-08

申请号：US14128646

申请日：2012-04-25

申请人： Shuichi Takeuchi ,  Hisayuki Takasu ,  Asako Kaneko

发明人： Shuichi Takeuchi ,  Hisayuki Takasu ,  Asako Kaneko

IPC分类号： H01J37/30 ,  H01J37/16 ,  H01J37/305

CPC分类号： H01J37/3005 ,  G01N1/286 ,  G01N1/32 ,  H01J37/16 ,  H01J37/20 ,  H01J37/3056 ,  H01J2237/31 ,  H01J2237/31745

摘要： There is provided an apparatus as well as a method for polishing, observing, and additionally polishing a sample in a vacuum with a charged particle beam apparatus furnished with no other apparatus.The charged particle beam apparatus has a vacuum chamber equipped with a liquid bath containing an ion liquid and a supersonic vibration means. With the ion liquid kept in contact with a polishing target area of the sample, supersonic vibration is propagated in the ion liquid to polish the sample.Because the charged particle beam apparatus permits polishing, observation, and additional polishing of the sample in a vacuum without being furnished with any additional apparatus, throughput is improved and the effects of the atmosphere on the sample are prevented.

摘要翻译： 提供了一种装置以及用没有其他装置的带电粒子束装置在真空中抛光，观察和附加抛光样品的方法。 带电粒子束装置具有配备有含有离子液体和超音速振动装置的液体浴的真空室。 当离子液体与样品的抛光目标区域保持接触时，在离子液体中传播超音速振动以抛光样品。 由于带电粒子束装置允许在没有任何附加装置的情况下在真空中抛光，观察和附加抛光样品，因此提高了生产能力并防止了样品对样品的影响。

公开(公告)号：US08570849B2

公开(公告)日：2013-10-29

申请号：US13096337

申请日：2011-04-28

申请人： Satoshi Inoue ,  Shuichi Takeuchi

发明人： Satoshi Inoue ,  Shuichi Takeuchi

IPC分类号： G11B7/00

CPC分类号： G11B7/0956 ,  G11B7/13927 ,  G11B2007/0013

摘要： A method for adjusting a tilt angle of an objective lens with respect to one of a multilayer optical disc having a plurality of recording layers and an optical axis of an optical information recording/reproducing apparatus, wherein a use wavelength λ and a numerical aperture NA are defined by conditions: 390

摘要翻译： 一种用于调整物镜相对于具有多个记录层的多层光盘和光信息记录/再现装置的光轴之一的倾斜角的方法，其中使用波长λ和数值孔径NA为 由条件限定：390 <λ<420和0.75

公开(公告)号：US08483033B2

公开(公告)日：2013-07-09

申请号：US13547342

申请日：2012-07-12

申请人： Naoki Yamagata ,  Satoshi Inoue ,  Shuichi Takeuchi

发明人： Naoki Yamagata ,  Satoshi Inoue ,  Shuichi Takeuchi

IPC分类号： G11B7/135

CPC分类号： G11B7/13922 ,  G11B7/1367 ,  G11B7/1374 ,  G11B2007/0006

摘要： An objective optical system for an optical information recording/reproducing apparatus, at least one surface of the objective optical system being configured to be a phase shift surface having a phase shift structure, wherein: the phase shift surface has a first area contributing to converging first, second and third light beams onto recording surfaces of first, second and third optical discs, respectively; in the first area, the phase shift surface has at least two types of phase shift structures including a first phase shift structure having first steps and a second phase shift structure having second steps; the phase shift surface has a plurality of combinations of annular zones which satisfy a condition: 0.95

摘要翻译： 一种用于光学信息记录/再现装置的物镜光学系统，所述物镜光学系统的至少一个表面被配置为具有相移结构的相移表面，其中：所述相移表面具有有助于首先收敛的第一区域 ，第二和第三光束分别连接到第一，第二和第三光盘的记录表面上; 在第一区域中，相移表面具有至少两种类型的相移结构，包括具有第一步骤的第一相移结构和具有第二步骤的第二相移结构; 相移面具有满足条件：0.95

公开(公告)号：US08270279B2

公开(公告)日：2012-09-18

申请号：US13069762

申请日：2011-03-23

申请人： Satoshi Inoue ,  Shuichi Takeuchi

发明人： Satoshi Inoue ,  Shuichi Takeuchi

IPC分类号： G11B7/00

CPC分类号： G11B7/1353 ,  G11B7/1367 ,  G11B7/1374 ,  G11B7/13922 ,  G11B2007/0006

摘要： An objective lens for an optical information recording/reproducing apparatus, at least one of optical surfaces of the objective lens comprising a diffraction surface having a diffraction structure defined by an optical path difference function, and wherein: the diffraction surface has a first region contributing to converging first and second light beams and having a diffraction structure configured such that diffraction orders at which the diffraction efficiencies are maximized for the first and second light beams are 1st order; the diffraction surface has a second region located outside the first region, and the second region is configured to contribute to converging the first light beam and not to contribute to convergence of the second light beam; and the objective lens satisfies a condition: 35

摘要翻译： 一种用于光学信息记录/再现装置的物镜，所述物镜的光学表面中的至少一个包括具有由光程差函数限定的衍射结构的衍射面，并且其中：所述衍射面具有有助于 会聚第一和第二光束并且具有被构造为使得第一和第二光束的衍射效率最大化的衍射级为1级的衍射结构; 所述衍射面具有位于所述第一区域外的第二区域，所述第二区域被配置为有助于会聚所述第一光束，并且不有助于所述第二光束的会聚; 并且物镜满足条件：35

公开(公告)号：US08089705B2

公开(公告)日：2012-01-03

申请号：US12103910

申请日：2008-04-16

申请人： Naoki Yamagata ,  Shuichi Takeuchi

发明人： Naoki Yamagata ,  Shuichi Takeuchi

IPC分类号： G02B13/18

CPC分类号： G11B7/1374 ,  G11B7/22

摘要： There is provided an objective lens for an optical pick-up. The objective lens includes a first surface on a light source side, and a second surface on an optical disc side. The first surface has a convex shape. The objective lens is formed to be a single-element lens having a numerical aperture of 0.75 or more. In this configuration, the objective lens satisfies a condition: 0.95

摘要翻译： 提供了用于光学拾取器的物镜。 物镜包括光源侧的第一表面和光盘侧的第二表面。 第一表面具有凸形。 物镜形成为数值孔径为0.75以上的单像素透镜。 在该结构中，物镜满足以下条件：0.95 <（n-1）·tan＆Thetas; max <1.50（1）其中＆thetas; max表示与第一表面相对于光轴的法线的最大角度 第一表面的有效直径，n表示物镜的折射率。

公开(公告)号：US08018816B2

公开(公告)日：2011-09-13

申请号：US12609273

申请日：2009-10-30

申请人： Naoki Yamagata ,  Shuichi Takeuchi

发明人： Naoki Yamagata ,  Shuichi Takeuchi

IPC分类号： G11B7/135

CPC分类号： G11B7/1392 ,  G02B3/04 ,  G11B7/1374

摘要： A resin objective lens having a numerical aperture NA≧0.75. The objective lens satisfies a condition: 0≦|SC|MAX/f

摘要翻译： 数值孔径NA≥0.75的树脂物镜。 物镜满足条件：0＆nlE; | SC | MAX / f <0.002其中f表示波长λ处的焦距，| SC | MAX表示在大于或等于的范围内针对正弦条件的犯罪的最大绝对值 等于相对于光轴的有效光束半径的0％且小于90％。 物镜被配置为使得在有效光束半径的100％点处的正弦条件的攻击小于在90％点处限定的正弦条件。 物镜的至少一个光源侧表面形成为非球面，物镜满足条件：1.40 <（n-1）·（SAG1）'MAX·/ NA2 <1.95其中（SAG1）' MAX表示有效光束直径内的光源侧表面的最大梯度。

公开(公告)号：US20110122758A1

公开(公告)日：2011-05-26

申请号：US12949023

申请日：2010-11-18

申请人： Daisuke Koreeda ,  Shuichi Takeuchi

发明人： Daisuke Koreeda ,  Shuichi Takeuchi

IPC分类号： G11B7/24

CPC分类号： G11B7/13922 ,  G02B5/1895 ,  G11B7/1353 ,  G11B7/1374 ,  G11B2007/0006

摘要： An objective optical system for an optical information recording/reproducing apparatus for recording/reproducing for first, second and third optical discs by selectively using three types of substantially collimated light beams including first, second and third light beams respectively having first, second and third wavelengths, wherein at least one of optical surfaces of the objective optical system comprises a diffraction surface having a diffraction structure, the diffraction surface includes a first region defined by first and second optical path difference functions, a second region defined by at least one type of optical path difference function, and a third region defined by at least one type of optical path difference function, the first region satisfies a condition: −0.15

摘要翻译： 一种用于光信息记录/再现装置的物镜光学系统，用于通过选择性地使用分别具有第一，第二和第三波长的第一，第二和第三光束的三种基本上准直的光束来记录/再现第一，第二和第三光盘 其中所述物镜光学系统的至少一个光学表面包括具有衍射结构的衍射表面，所述衍射表面包括由第一和第二光程差函数限定的第一区域，由至少一种类型的光学 路径差分函数和由至少一种类型的光程差函数定义的第三区域，第一区域满足条件：-0.15