SAMPLE PREPARATION APPARATUS, SAMPLE PREPARATION METHOD, AND CHARGED PARTICLE BEAM APPARATUS USING THE SAME
    1.
    发明申请
    SAMPLE PREPARATION APPARATUS, SAMPLE PREPARATION METHOD, AND CHARGED PARTICLE BEAM APPARATUS USING THE SAME 审中-公开
    样品制备装置,样品制备方法和使用其的带电粒子束装置

    公开(公告)号:US20140124367A1

    公开(公告)日:2014-05-08

    申请号:US14128646

    申请日:2012-04-25

    摘要: There is provided an apparatus as well as a method for polishing, observing, and additionally polishing a sample in a vacuum with a charged particle beam apparatus furnished with no other apparatus.The charged particle beam apparatus has a vacuum chamber equipped with a liquid bath containing an ion liquid and a supersonic vibration means. With the ion liquid kept in contact with a polishing target area of the sample, supersonic vibration is propagated in the ion liquid to polish the sample.Because the charged particle beam apparatus permits polishing, observation, and additional polishing of the sample in a vacuum without being furnished with any additional apparatus, throughput is improved and the effects of the atmosphere on the sample are prevented.

    摘要翻译: 提供了一种装置以及用没有其他装置的带电粒子束装置在真空中抛光,观察和附加抛光样品的方法。 带电粒子束装置具有配备有含有离子液体和超音速振动装置的液体浴的真空室。 当离子液体与样品的抛光目标区域保持接触时,在离子液体中传播超音速振动以抛光样品。 由于带电粒子束装置允许在没有任何附加装置的情况下在真空中抛光,观察和附加抛光样品,因此提高了生产能力并防止了样品对样品的影响。

    Optical disc drive and objective lens for the same
    5.
    发明授权
    Optical disc drive and objective lens for the same 有权
    光盘驱动器和物镜相同

    公开(公告)号:US07839752B2

    公开(公告)日:2010-11-23

    申请号:US11536004

    申请日:2006-09-28

    IPC分类号: G11B7/135

    摘要: There is provided an optical disc drive for recordation/reproduction for three types of optical discs by selectively using one of three types of light beams. The optical disc drive comprises an objective lens. The objective lens has a step structure which gives an optical path length difference to an incident beam at each step. When the third laser beam passes through the objective lens, the objective lens produces normal diffraction order light converging to a recording surface of the third optical disc and undesired diffraction order light converging to a point deviating from the recording surface of the third optical disc. A distance from a point to which the normal diffraction order light converges to a point to which the undesired diffraction order light converges is larger than or equal to twice a pull-in range of a focus error signal obtained when the third optical disc is used.

    摘要翻译: 通过选择性地使用三种类型的光束之一,提供了用于三种类型的光盘的记录/再现的光盘驱动器。 光盘驱动器包括物镜。 物镜具有在每个步骤中给入射光束的光程长度差的阶梯结构。 当第三激光束通过物镜时,物镜产生会聚到第三光盘的记录表面的正常衍射级光,并且不期望的衍射级光会聚到偏离第三光盘的记录表面的点。 从法线衍射级光收敛到不期望的衍射级光会聚的点的距离大于或等于当使用第三光盘时获得的聚焦误差信号的拉入范围的两倍。

    Slider tester
    6.
    发明申请
    Slider tester 审中-公开
    滑块测试仪

    公开(公告)号:US20090146652A1

    公开(公告)日:2009-06-11

    申请号:US12292650

    申请日:2008-11-24

    IPC分类号: G01R33/12

    摘要: A slider tester includes a driving unit that rotates a test medium, a set plate that detachably supports a slider as a single body, and an investigating apparatus that is electrically connected to the slider supported by the set plate and investigates the characteristics of the slider. A movable support part 30 that tiltably supports the slider is provided on the set plate. There is also provided a pressing mechanism that elastically presses the slider via the movable support part toward a surface of the medium to dispose the slider floating over the surface of the medium. The pressing mechanism includes an elastic body 56 composed of a plate spring that contacts the movable support part and elastically presses the movable support part.

    摘要翻译: 滑块测试器包括使测试介质旋转的驱动单元,可拆卸地支撑滑块作为单个主体的固定板,以及与由固定板支撑的滑块电连接的调查装置,并且调查滑块的特性。 在该固定板上设置有可滑动地支承滑块的可动支承部30。 还提供了一种按压机构,其通过可移动支撑部件朝向介质的表面弹性地按压滑块以将滑块设置在介质表面上。 按压机构包括弹性体56,其由与所述可动支撑部接触并弹性地按压所述可动支撑部的板簧构成。

    Optical pickup, optical element, and information reproducing apparatus configured for use with any of plural types of recording media
    7.
    发明授权
    Optical pickup, optical element, and information reproducing apparatus configured for use with any of plural types of recording media 失效
    配置为与多种类型的记录介质中的任何一种配合使用的光学拾取器,光学元件和信息再现装置

    公开(公告)号:US07468942B2

    公开(公告)日:2008-12-23

    申请号:US10840479

    申请日:2004-05-07

    IPC分类号: G11B7/135

    摘要: An optical pickup has a light source for emitting a plurality of laser beams with different wavelengths; and an objective lens for focusing the laser beams emitted from the light source on recording surfaces of plural types of information recording media. A diffractive lens structure is provided in a light path of the laser beam, the structure including ring zone areas divided by a plurality of phase steps for correcting a wavefront aberration of the laser beam, a diameter of an outermost phase step of the diffractive lens structure is smaller than a second largest effective diameter of effective diameters required for reproduction of the plural types of information recording media.

    摘要翻译: 光拾取器具有用于发射具有不同波长的多个激光束的光源; 以及用于将从光源发射的激光束聚焦在多种类型的信息记录介质的记录表面上的物镜。 衍射透镜结构设置在激光束的光路中,该结构包括由用于校正激光束的波前像差的多个相位分割的环区域,衍射透镜结构的最外相阶段的直径 小于再现多种类型的信息记录介质所需的有效直径的第二大有效直径。

    Scanning Electron Microscope
    8.
    发明申请
    Scanning Electron Microscope 有权
    扫描电子显微镜

    公开(公告)号:US20080191135A1

    公开(公告)日:2008-08-14

    申请号:US12021810

    申请日:2008-01-29

    IPC分类号: G01N23/00

    摘要: An object of the present invention is to provide a scanning electron microscope including decelerating-electric-field forming means for decreasing the energy of a beam of electrons reaching a sample, and being capable of selectively detecting BSEs with high efficiency. To this end, the scanning electron microscope including the decelerating-electric-field forming means has a detector for detecting electrons. The detector includes a part for receiving the electrons at a position which is positioned outside trajectories of SEs accelerated by the decelerating-electric-field forming means, and which is further away from the optical axis of the beam of electrons than the trajectories of the SEs.

    摘要翻译: 本发明的目的是提供一种扫描电子显微镜,其包括用于降低到达样品的电子束的能量的减速电场形成装置,并且能够以高效率选择性地检测BSE。 为此,包括减速电场形成装置的扫描电子显微镜具有用于检测电子的检测器。 检测器包括用于在位于由减速电场形成装置加速的SE的轨迹外的位置处接收电子的部分,并且远离SE的轨迹远离电子束的光轴 。

    OPTICAL DISC DRIVE AND OBJECTIVE LENS FOR THE SAME
    9.
    发明申请
    OPTICAL DISC DRIVE AND OBJECTIVE LENS FOR THE SAME 失效
    光盘驱动器和目标镜头

    公开(公告)号:US20070014211A1

    公开(公告)日:2007-01-18

    申请号:US11456943

    申请日:2006-07-12

    IPC分类号: G11B7/00

    CPC分类号: G11B7/1374 G11B2007/0006

    摘要: There is provided an objective lens used for three types of optical discs including by selectively using one of three types of light beams. At least one of surfaces of the objective lens is provided with a first region converging the third light beam on a recoding surface of the third optical disc. The first region has a step structure configured to have concentric refractive surface zones and to give an optical path length difference to an incident beam at each step formed between adjacent refractive surface zones. The step structure is configured such that the optical path length difference given by each step is substantially equal to an odd multiple of a wavelength of a first light beam, and a value of differentiation of an optical path difference function defining the step structure crosses zero in a height ranging from 30% to 70% of an effective diameter of the first region.

    摘要翻译: 提供了一种用于三种类型的光盘的物镜,包括通过选择性地使用三种类型的光束之一。 物镜的至少一个表面设置有将第三光束会聚在第三光盘的记录表面上的第一区域。 第一区域具有构造成具有同心折射表面区域并且在相邻折射表面区域之间形成的每个台阶处的入射光束的光程长度差异的台阶结构。 台阶结构被配置为使得由每个步骤给出的光程长度差基本上等于第一光束的波长的奇数倍,并且限定步骤结构的光程差函数的微分值在零 高度为第一区域的有效直径的30%至70%。

    Scanning optical system
    10.
    发明授权
    Scanning optical system 失效
    扫描光学系统

    公开(公告)号:US07019768B2

    公开(公告)日:2006-03-28

    申请号:US10721908

    申请日:2003-11-26

    IPC分类号: G02B26/10 B41J2/47

    摘要: There is provided a scanning optical system including a collimator lens being placed on an optical path between a light source and a deflecting system. At least one of a front surface and a rear surface of the collimator lens includes a central area through which part of the laser beam in the vicinity of a central axis of the laser beam passes, at least one first outer area having an effect on the laser beam so that the laser beam after passing through said at least one first outer area is given a first phase difference not including a phase difference of zero, and at least one second outer area having an effect on the laser beam so that the laser beam after passing through said at least one second outer area is given a second phase difference being different from the first phase difference and including a phase difference of zero.

    摘要翻译: 提供了一种扫描光学系统,其包括放置在光源和偏转系统之间的光路上的准直透镜。 准直透镜的前表面和后表面中的至少一个包括激光束的中心轴附近的激光束的一部分通过的中心区域,至少一个第一外部区域, 激光束,使得在穿过所述至少一个第一外部区域之后的激光束被给予不包括零相位差的第一相位差和至少一个对激光束具有影响的第二外部区域,使得激光束 在通过所述至少一个第二外部区域之后,给予不同于第一相位差并包括零相位差的第二相位差。