摘要:
There is provided an apparatus as well as a method for polishing, observing, and additionally polishing a sample in a vacuum with a charged particle beam apparatus furnished with no other apparatus.The charged particle beam apparatus has a vacuum chamber equipped with a liquid bath containing an ion liquid and a supersonic vibration means. With the ion liquid kept in contact with a polishing target area of the sample, supersonic vibration is propagated in the ion liquid to polish the sample.Because the charged particle beam apparatus permits polishing, observation, and additional polishing of the sample in a vacuum without being furnished with any additional apparatus, throughput is improved and the effects of the atmosphere on the sample are prevented.
摘要:
An optical information recording/reproducing apparatus for an optical disc using a light beam having a wavelength of λ including: an objective lens that converges the light beam onto a recording surface of the optical disc and satisfies a condition: 0.40
摘要:
An electronic device includes: a base; a conductor pattern formed on the base; a circuit chip electrically connected to the conductor pattern; and a reinforcing member which is disposed on the base to surround the circuit chip, whose outer shape is like a ring, and which includes concentric rings as an internal structure. The electronic device further includes a sealing member which fills an inside of the reinforcing member while covering the top of the circuit chip, thereby sealing the circuit chip on the base.
摘要:
A resin filling apparatus, a filling method, and a method of manufacturing an electronic device fill a cavity between a substrate and an electronic component mounted on the substrate with resin. The resin filling apparatus includes a stage for supporting the substrate in an inclined state, and an application head for filling the cavity with resin from a lower side of the inclined substrate.
摘要:
There is provided an optical disc drive for recordation/reproduction for three types of optical discs by selectively using one of three types of light beams. The optical disc drive comprises an objective lens. The objective lens has a step structure which gives an optical path length difference to an incident beam at each step. When the third laser beam passes through the objective lens, the objective lens produces normal diffraction order light converging to a recording surface of the third optical disc and undesired diffraction order light converging to a point deviating from the recording surface of the third optical disc. A distance from a point to which the normal diffraction order light converges to a point to which the undesired diffraction order light converges is larger than or equal to twice a pull-in range of a focus error signal obtained when the third optical disc is used.
摘要:
A slider tester includes a driving unit that rotates a test medium, a set plate that detachably supports a slider as a single body, and an investigating apparatus that is electrically connected to the slider supported by the set plate and investigates the characteristics of the slider. A movable support part 30 that tiltably supports the slider is provided on the set plate. There is also provided a pressing mechanism that elastically presses the slider via the movable support part toward a surface of the medium to dispose the slider floating over the surface of the medium. The pressing mechanism includes an elastic body 56 composed of a plate spring that contacts the movable support part and elastically presses the movable support part.
摘要:
An optical pickup has a light source for emitting a plurality of laser beams with different wavelengths; and an objective lens for focusing the laser beams emitted from the light source on recording surfaces of plural types of information recording media. A diffractive lens structure is provided in a light path of the laser beam, the structure including ring zone areas divided by a plurality of phase steps for correcting a wavefront aberration of the laser beam, a diameter of an outermost phase step of the diffractive lens structure is smaller than a second largest effective diameter of effective diameters required for reproduction of the plural types of information recording media.
摘要:
An object of the present invention is to provide a scanning electron microscope including decelerating-electric-field forming means for decreasing the energy of a beam of electrons reaching a sample, and being capable of selectively detecting BSEs with high efficiency. To this end, the scanning electron microscope including the decelerating-electric-field forming means has a detector for detecting electrons. The detector includes a part for receiving the electrons at a position which is positioned outside trajectories of SEs accelerated by the decelerating-electric-field forming means, and which is further away from the optical axis of the beam of electrons than the trajectories of the SEs.
摘要:
There is provided an objective lens used for three types of optical discs including by selectively using one of three types of light beams. At least one of surfaces of the objective lens is provided with a first region converging the third light beam on a recoding surface of the third optical disc. The first region has a step structure configured to have concentric refractive surface zones and to give an optical path length difference to an incident beam at each step formed between adjacent refractive surface zones. The step structure is configured such that the optical path length difference given by each step is substantially equal to an odd multiple of a wavelength of a first light beam, and a value of differentiation of an optical path difference function defining the step structure crosses zero in a height ranging from 30% to 70% of an effective diameter of the first region.
摘要:
There is provided a scanning optical system including a collimator lens being placed on an optical path between a light source and a deflecting system. At least one of a front surface and a rear surface of the collimator lens includes a central area through which part of the laser beam in the vicinity of a central axis of the laser beam passes, at least one first outer area having an effect on the laser beam so that the laser beam after passing through said at least one first outer area is given a first phase difference not including a phase difference of zero, and at least one second outer area having an effect on the laser beam so that the laser beam after passing through said at least one second outer area is given a second phase difference being different from the first phase difference and including a phase difference of zero.