-
公开(公告)号：US5561833A
公开(公告)日：1996-10-01
申请号：US345690
申请日：1994-11-21
CPC分类号： H01J37/3426 , C22C32/0026 , C23C14/3414 , H01J37/3491 , B22F2998/00
摘要： To provide a raw material for high oxygen chromium targets containing oxygen in a form capable of effectively preventing the dust ejection phenomenon. A raw material for high oxygen chromium targets comprising chromium crystalline particles dispersed in metallic chromium wherein at least a portion of the surface of all the crystals constituting the oxide crystalline particles is in contact with the matrix of the metallic chromium. A method of producing a raw material for high oxygen chromium targets comprising chromium oxide crystalline particles dispersed in metallic chromium characterized by heat-treating metallic chromium containing a solid solution of oxygen or oxide particles as a starting material, and precipitating or crystal-growing the oxygen or oxide particles as chromium oxide crystalline particles having a particle size of 0.1 to 100 .mu.m, thereby obtaining a raw material for chromium targets.
摘要翻译： 为能够有效防止灰尘喷射现象的形式提供含有氧的高氧铬靶的原料。 一种用于高氧铬靶的原料，其包含分散在金属铬中的铬结晶颗粒，其中构成氧化物结晶颗粒的所有晶体的至少一部分表面与金属铬的基体接触。 一种生产高氧铬靶的原料的方法，其包括分散在金属铬中的氧化铬结晶颗粒，其特征在于，以含有氧或氧化物颗粒的固溶体为原料的金属铬进行热处理，并沉淀或晶体生长氧 或氧化物粒子作为氧化铬结晶粒子，其粒径为0.1〜100μm，得到铬靶材的原料。
-
公开(公告)号：US5320973A
公开(公告)日：1994-06-14
申请号：US002130
申请日：1993-01-08
申请人： Kenichi Kobayashi
发明人： Kenichi Kobayashi
IPC分类号： H01L21/768 , H01L23/482 , H01L23/532 , H01L29/78 , H01L29/786 , H01L21/336
CPC分类号： H01L23/4825 , H01L23/5329 , H01L2924/0002
摘要： A method for easily fabricating a thin-film transistor device which has a high reliability. A thin-film transistor is formed on a substrate, the transistor including a first conducting layer deposited on the substrate, a gate insulating layer formed on the first conducting layer, a semiconductor layer deposited on the gate insulating layer, and source and drain electrodes on the semiconductor layer. A multi-layer wiring section is provided adjacent the thin-film transistor, including a first conducting wiring layer formed on the substrate, wiring insulating layer formed on the first conducting wiring layer, and a second conducting wiring layer deposited on the wiring insulating layer and contacting the first conducting wiring layer as well as a portion of the thin-film transistor. The gate insulating layer and the wiring insulating layer are made of the same inorganic material and are of the same thickness.
摘要翻译： 一种易于制造具有高可靠性的薄膜晶体管器件的方法。 薄膜晶体管形成在基板上，晶体管包括沉积在基板上的第一导电层，形成在第一导电层上的栅极绝缘层，沉积在栅极绝缘层上的半导体层，以及源极和漏极上的源极和漏极 半导体层。 在薄膜晶体管附近设置多层布线部，包括形成在基板上的第一导电布线层，形成在第一导电布线层上的布线绝缘层和沉积在布线绝缘层上的第二导电布线层，以及 使第一导电布线层以及薄膜晶体管的一部分接触。 栅极绝缘层和布线绝缘层由相同的无机材料制成并且具有相同的厚度。
-
公开(公告)号：USD345963S
公开(公告)日：1994-04-12
申请号：US876211
申请日：1992-04-29
-
公开(公告)号：US5092921A
公开(公告)日：1992-03-03
申请号：US603222
申请日：1990-10-25
CPC分类号： C22B34/32 , C22B5/04 , Y10S75/959
摘要： High-purity metallic chromium is produced by a method of initially preparing a mixture of chromium oxide, aluminum, carbon and an easily sulfidable metallic powder, and subsequently providing a thermite-reaction with the mixture to produce thermite-crude metallic chromium and a solid solution of carbon and easily sulfidable metal. Residual impurities in the thermite-crude metallic chromium are subsequently removed by heat treating the crude metallic chromium. This method produces high-purity metallic chromium advantageous for preparing corrosion and heat resistant chromium-containing alloys.
-
公开(公告)号：US4818919A
公开(公告)日：1989-04-04
申请号：US113203
申请日：1987-10-27
申请人： Kenichi Kobayashi , Hiroyuki Koba , Naoto Nakamura
发明人： Kenichi Kobayashi , Hiroyuki Koba , Naoto Nakamura
CPC分类号： H01J29/705 , H01J29/566 , H01J2229/5687
摘要： A color picture tube apparatus comprises a color picture tube including an envelope having a phosphor screen excited by a plurality of electron beams, and deflection means generating horizontal deflection field and barrel type vertical deflection field for the beams, including non-linear magnetic field correction means generating an additional pin-cushion type magnetic field in the vertical field to have preferably convergence characteristics such that vertical direction coma errors can be appropriately corrected throughout every portion of the vertical axis on the screen, whereby high-definition color images can be obtained thereon.
摘要翻译： 一种彩色显像管装置，包括：彩色显像管，其包括具有由多个电子束激励的荧光屏的外壳，以及用于产生水平偏转场和用于波束的筒型垂直偏转场的偏转装置，包括非线性磁场校正装置 在垂直场中产生附加的引脚缓冲型磁场以具有优选的会聚特性，使得可以在屏幕上的垂直轴的每个部分上适当地校正垂直方向的彗形像差，由此可以获得高分辨率的彩色图像。
-
公开(公告)号：US4701859A
公开(公告)日：1987-10-20
申请号：US659425
申请日：1984-10-10
IPC分类号： G03F1/38 , G03F1/84 , G03F7/20 , H01L21/027 , H01L21/30 , H01L21/308 , H01L21/66 , G06F15/60 , G01B11/00 , G06K9/68 , H04N7/18
CPC分类号： G03F1/42 , G03F1/44 , G03F1/84 , G03F7/70633 , H01L21/30
摘要： A method and the apparatus for inspecting the unit pattern arrangements on a photomask to determine relative shear between the unit patterns where each unit pattern has the same shape and size and is printed repeatedly at equal intervals on the photomask. Shear-detecting-patterns are provided on each unit pattern. Adjacent shear-detecting-patterns on adjacent unit patterns are designated as combined patterns. The combined patterns arranged in the same directions make a group. To detect an irregular shear, a standard pattern is designated from the combined patterns in a group and comparison is made between each combined pattern in the group and the standard pattern. An optical image of each combined pattern in a group is and converted into electric signals. The electrical signals for the standard pattern and for the other combined patters are stored a memory. The two sets of signals are read out and compared to provide a shear difference between the patterns. The difference is determined by counting the number of occupied or unoccupied memory locations in both the standard and the other images. The difference in count produces the shear difference. The shear difference is compared with a or tolerance level and it is determined whether the combined pattern arrangement in the group is correct based on the comparison.By repeating the comparison in other groups, it can be determined whether the unit pattern arrangement is correct.
摘要翻译： 一种用于检查光掩模上的单元图案布置的方法和装置，以确定单元图案之间的相对剪切，其中每个单元图案具有相同的形状和尺寸，并且在光掩模上以相等的间隔重复印刷。 在每个单元图案上提供剪切检测图案。 相邻单元图案上的相邻剪切检测图案被指定为组合图案。 以相同方向布置的组合图案组成一组。 为了检测不规则剪切，从组中的组合图案中指定标准图案，并且在组中的每个组合图案与标准图案之间进行比较。 组中的每个组合图案的光学图像被转换成电信号。 标准图案和其他组合图案的电信号被存储在存储器中。 读出两组信号并进行比较，以提供图案之间的剪切差。 差异是通过对标准图像和其他图像中的被占用或未占用的存储器位置的数量进行计数来确定的。 计数差异产生剪切差异。 将剪切差与一个或公差等级进行比较，并且基于该比较来确定组中的组合图案布置是否正确。通过重复其他组中的比较，可以确定单位图案布置是否正确。
-
公开(公告)号：US4580076A
公开(公告)日：1986-04-01
申请号：US469449
申请日：1983-02-24
IPC分类号： H01J29/06
CPC分类号： H01J29/06
摘要： A color cathode ray tube having an inner magnetic shield for controlling the magnetic field distribution inside of the tube. The inner shield is formed to have a pair of long side walls and a pair of short side walls provided along an inner wall of the tube's funnel. The long side wall has formed therein more than two elongated openings in each of two regions divided by a center of the long side wall. The center of the openings are offset toward the center of the long side wall.
摘要翻译： 一种彩色阴极射线管，其具有用于控制管内部的磁场分布的内磁屏蔽。 内护罩形成为具有一对长侧壁和沿管漏斗内壁设置的一对短侧壁。 长侧壁在两侧区域中形成有两个以上长边侧壁的中心分隔的细长开口。 开口的中心偏向长边壁的中心。
-
公开(公告)号：US4527070A
公开(公告)日：1985-07-02
申请号：US409983
申请日：1982-08-20
CPC分类号： G03F7/70616 , G01N21/956 , G06T7/001 , G06T2207/10056 , G06T2207/30148
摘要： In a method for inspecting a pattern produced by using pattern data of a predetermined reference pattern, comparison is carried out between the pattern reproduced from the scanning signal of the pattern and the pattern produced from the signal of a modified form of the predetermined reference pattern.
摘要翻译： 在用于检查通过使用预定参考图案的图案数据产生的图案的方法中，在从图案的扫描信号再现的图案和由预定参考图案的修改形式的信号产生的图案之间进行比较。
-
公开(公告)号：US09266069B2
公开(公告)日：2016-02-23
申请号：US13264233
申请日：2010-04-13
IPC分类号： B01D39/00 , B01D39/14 , B01D29/46 , C08J5/20 , B01J49/00 , B01D69/10 , B01D61/44 , B01D67/00 , C08J5/22
CPC分类号： B01D69/10 , B01D61/44 , B01D67/0013 , B01D2323/30 , C08J5/2206 , C08J2329/04 , Y02A20/134
摘要： There is provided an ion-exchange membrane comprising an ion-exchange layer made of a cationic polymer and/or an anionic polymer and a supporting layer, wherein the ion-exchange layer is formed on the supporting layer by printing. Such an ion-exchange membrane exhibits excellent anti-organic fouling and low membrane resistance, thereby high efficient and long-time stable electrodialysis can be achieved. Formation of the ion-exchange layer as a charge-mosaic layer consisting of the cationic polymer domains and the anionic polymer domains provides a charge-mosaic membrane exhibiting excellent electrolyte permselectivity and mechanical strength.
摘要翻译： 提供了包含由阳离子聚合物和/或阴离子聚合物和支持层制成的离子交换层的离子交换膜，其中通过印刷在支撑层上形成离子交换层。 这种离子交换膜表现出优异的抗有机污垢和低膜电阻，从而可以实现高效且长时间稳定的电渗析。 作为由阳离子聚合物区域和阴离子聚合物区域构成的电荷 - 马赛克层的离子交换层的形成提供了显示优异的电解质选择性和机械强度的电荷镶嵌膜。
-
100.发明授权Method of lowering temperature of substrate table, computer-readable storage medium, and substrate processing system 有权降低衬底台，计算机可读存储介质和衬底处理系统温度的方法公开(公告)号：US09070728B2
公开(公告)日：2015-06-30
申请号：US12958955
申请日：2010-12-02
申请人： Kenichi Kobayashi , Youichi Nakayama , Kozo Kai , Kenji Shirasaka
发明人： Kenichi Kobayashi , Youichi Nakayama , Kozo Kai , Kenji Shirasaka
IPC分类号： F28F7/00 , H01L21/677 , C23C16/46 , H01L21/67
CPC分类号： H01L21/67745 , C23C16/46 , H01L21/67103 , H01L21/67109
摘要： A method of lowering a temperature of a substrate table uses a substrate W processing system including a first substrate table 2b; one or more processing chambers 1b, in each of which the first substrate table 2b is disposed, the processing chamber being configured to perform a predetermined process, with the substrate being placed on the first substrate table 2b; a substrate transfer apparatus 31 configured to transfer the substrate to the processing chamber 1b; a transfer chamber in which the substrate transfer apparatus 31 is disposed; and a second substrate table configured to cool the substrate. The method of lowering a temperature of a substrate table comprises the steps of first transfer in which the substrate W placed on the first substrate table 2b is transferred to the second substrate table by the substrate transfer apparatus 31, and second transfer in which the substrate placed on the second substrate table is transferred to the first substrate table 2b. By repeating the step of first transfer and the step of second transfer, a heat of the first substrate table 2b is absorbed by the substrate W placed on the first substrate table 2b, so that a temperature of the first substrate table 2b is lowered.
摘要翻译： 降低衬底台的温度的方法使用包括第一衬底台2b的衬底W处理系统; 一个或多个处理室1b，其中每个处理室1b设置有第一衬底台2b，处理室被配置为执行预定处理，衬底被放置在第一衬底台2b上; 被配置为将衬底转移到处理室1b的衬底传送装置31; 传送室，其中设置有基板传送装置31; 以及被配置为冷却所述基板的第二基板台。 降低衬底台的温度的方法包括以下步骤：第一转印，其中放置在第一衬底台2b上的衬底W通过衬底转移装置31转移到第二衬底台，第二次转印，其中衬底放置 在第二衬底台上转移到第一衬底台2b。 通过重复第一次转印步骤和第二次转印步骤，第一衬底台2b的热量被放置在第一衬底台2b上的衬底W吸收，使得第一衬底台2b的温度降低。
-
-
-
-
-
-
-
-
-
搜索结果
235 条记录 (耗时 0.029 秒)
