中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

326 records (took 0.025 seconds)

    Low-current pogo probe card
    93.
    发明授权
    Low-current pogo probe card 有权
    低电流pogo探针卡

    公开(公告)号：US07323895B2

    公开(公告)日：2008-01-29

    申请号：US11528808

    申请日：2006-09-27

    Applicant: Paul A. Tervo ,  Clarence E. Cowan

    Inventor： Paul A. Tervo ,  Clarence E. Cowan

    IPC: G01R31/02

    CPC classification number: G01R1/07342 ,  G01R1/067 ,  G01R1/06711 ,  G01R1/06733 ,  G01R1/06772

    Abstract: A low-current pogo probe card for measuring currents down to the femtoamp region includes a laminate board having a layer of conductive traces interposed between to dielectric layers. A plurality of probing devices, such as ceramic blades, are edge-mounted about a central opening so that the probing needles or needles included therein terminate below the opening in a pattern suitable for probing a test subject workpiece. A plurality of pogo pin receiving pad sets, each including a guard pad, occupy the periphery of the board. Each guard pad is electrically connected to a trace from the layer of conductive traces. The pad sets may be connected to the probing devices by low noise cables or traces. Air trenches separate the pad sets for reducing cross talk and signal settling times.

    Abstract translation: 用于测量下降到毫微微区域的电流的低电流pogo探针卡包括具有介于介电层之间的导电迹线层的层压板。 诸如陶瓷刀片的多个探测装置围绕中心开口边缘安装，使得包含在其中的探针或针以适合于探测测试对象工件的图案终止于开口下方。 每个包括保护垫的多个弹簧销接收垫组占据板的周边。 每个保护垫与导电迹线层的迹线电连接。 垫组可以通过低噪声电缆或迹线连接到探测装置。 空气沟槽分开焊盘组，以减少串扰和信号稳定时间。

    Membrane probing system with local contact scrub
    95.
    发明申请
    Membrane probing system with local contact scrub 失效
    膜探测系统与局部接触擦洗

    公开(公告)号：US20070296431A1

    公开(公告)日：2007-12-27

    申请号：US11897397

    申请日：2007-08-29

    Applicant: K. Gleason ,  Kenneth Smith ,  Mike Bayne

    Inventor： K. Gleason ,  Kenneth Smith ,  Mike Bayne

    IPC: G01R1/067 ,  G01R31/02

    CPC classification number: G01R1/06711 ,  G01R1/07342 ,  G01R1/0735

    Abstract: A membrane probing assembly includes a support element having an incompressible forward support tiltably coupled to a rearward base and a membrane assembly, formed of polyimide layers, with its central region interconnected to the support by an elastomeric layer. Flexible traces form data/signal lines to contacts on the central region. Each contact comprises a rigid beam and a bump located in off-centered location on the beam, which bump includes a contacting portion. After initial touchdown of these contacting portions, further over-travel of the pads causes each beam to independently tilt locally so that different portions of each beam move different distances relative to the support thus driving each contact into lateral scrubbing movement across the pad thereby clearing away oxide buildup. The elastomeric member backed by the incompressible support ensures sufficient scrub pressure and reliable tilt recovery of each contact without mechanical straining of the beam. In an alternative embodiment, the contacts comprise conductive beams each supported on a loose U-shaped flap formed in the membrane assembly where each flap and beam is tiltably supported in inclined position by an elastomeric hub interposed between the flap and support.

    Abstract translation: 膜探测组件包括支撑元件，其具有可倾斜地联接到后部基座的不可压缩的前部支撑件和由聚酰亚胺层形成的膜组件，其中心区域通过弹性体层互连到支撑件。 灵活的轨迹可以形成数据/信号线到中心区域的触点。 每个触点包括刚性梁和位于梁的偏心位置的凸块，该凸起包括接触部分。 在初始接触这些接触部分之后，垫的进一步过度行进导致每个光束独立地局部地倾斜，使得每个光束的不同部分相对于支撑件移动不同的距离，从而将每个触点驱动穿过焊盘的横向擦洗运动，从而清除 氧化物积聚。 由不可压缩支撑件支撑的弹性体构件确保了足够的擦洗压力和每个接触件的可靠的倾斜恢复，而不会使梁的机械应变。 在替代实施例中，触头包括各自支撑在形成在膜组件中的松散的U形舌片上的导电梁，其中每个翼片和梁通过插入在翼片和支撑件之间的弹性体毂倾斜支撑在倾斜位置。

    Wafer probe station having a skirting component
    96.
    发明申请
    Wafer probe station having a skirting component 失效
    具有踢脚线组件的晶圆探针台

    公开(公告)号：US20070290700A1

    公开(公告)日：2007-12-20

    申请号：US11881571

    申请日：2007-07-27

    Applicant: Randy Schwindt ,  Warren Harwood ,  Paul Tervo ,  Kenneth Smith ,  Richard Warner

    Inventor： Randy Schwindt ,  Warren Harwood ,  Paul Tervo ,  Kenneth Smith ,  Richard Warner

    IPC: G01R1/067 ,  H05K9/00

    CPC classification number: G01R31/2886 ,  A46D1/00 ,  G01R1/0416 ,  G01R1/06705 ,  G01R1/06794 ,  G01R1/07392 ,  G01R1/18 ,  G01R31/2887 ,  H01L21/68785

    Abstract: A probe station includes a fully guarded chuck assembly and connector mechanism for increasing sensitivity to low-level currents while reducing settling times. The chuck assembly includes a wafer-supporting first chuck element surrounded by a second chuck element having a lower component, skirting component and upper component each with a surface portion extending opposite the first element for guarding thereof. The connector mechanism is so connected to the second chuck element as to enable, during low-level current measurements, the potential on each component to follow that on the first chuck element as measured relative to an outer shielding enclosure surrounding each element. Leakage current from the first chuck element is thus reduced to virtually zero, hence enabling increased current sensitivity, and the reduced capacitance thus provided by the second chuck element decreases charging periods, hence reducing settling times. With similar operation and effect, where any signal line element of the connector mechanism is arranged exterior of its corresponding guard line element, such as adjacent the chuck assembly or on the probe-holding assembly, a guard enclosure is provided to surround and fully guard such signal line element in interposed relationship between that element and the outer shielding enclosure.

    Abstract translation: 探测台包括一个完全防护的卡盘组件和连接器机构，用于在降低沉降时间的同时提高对低电平电流的灵敏度。 卡盘组件包括由第二卡盘元件围绕的晶片支撑的第一卡盘元件，所述第二卡盘元件具有下部元件，裙边元件和上部元件，每个元件具有与第一元件相对延伸的表面部分，用于保护其。 连接器机构被连接到第二卡盘元件，以便在低电平电流测量期间，每个部件上的电位能够相对于围绕每个元件的外部屏蔽外壳测量的跟随第一卡盘元件上的电位。 因此，来自第一卡盘元件的泄漏电流几乎为零，因此能够提高电流灵敏度，并且由第二卡盘元件提供的减小的电容减少了充电周期，因此降低了稳定时间。 具有类似的操作和效果，其中连接器机构的任何信号线元件布置在其对应的保护线元件的外部，例如邻近卡盘组件或探针保持组件，防护罩被设置成围绕并完全保护 信号线元件在该元件和外屏蔽外壳之间的插入关系中。

Patent Agency Ranking