摘要:
In an electroacoustic transducer (21) with a stationary transducer part (23) and with a membrane configuration (17) comprising a membrane (15) and a handling ring (1) for the membrane (15) connected with the membrane (15), the membrane configuration (17) is connected with the stationary transducer part (23) via the handling ring (1), and the handling ring (1) and membrane (15) are connected together via an interlocking connection.
摘要:
Pressure non-linearity in a low pressure sensor device formed from a silicon diaphragm with an embedded piezoresistive transducer is reduced by using a shallow boss or thin stiffener on an ultra-thin diaphragm while the pressure sensitivity of the device is increased with corner trenches.
摘要:
A RF resonator for sensing a physical or an environmental parameter includes a substrate having a substrate surface. A polymer-derived ceramic (PDC) element is positioned on or within the substrate surface. The RF resonator has a resonant frequency that changes as a function of the physical or environmental parameter. A system for wirelessly sensing at least one physical or environmental parameter includes at least one RF resonator and a wireless RF reader located remotely from the RF resonator for transmitting a wide-band RF interrogation signal that excites the RF resonator. The wireless RF reader detects a sensing signal retransmitted by the RF resonator and includes a processor for determining the physical or environmental parameter at the location of the RF resonator from the sensing signal.
摘要:
Method for producing a vacuum measuring cell having a pressure transducer diaphragm with housing plates sealed on opposite sides to form reference and measuring vacuum chambers. An opening in one plate communicates with the measuring vacuum chamber and has a sealed connection for joining to medium to be measured. The diaphragm and plates are aluminum oxide ceramic and at least one of the seals is aluminum with a thickness of 0.5 μm to 30 μm. The ceramic parts are pressed together at increased temperature of 600° C. to 680° C. in a process gas atmosphere including a reducing gas, during a time of 30 to 90 minutes, and subsequently a tempering step is carried out in a second process gas atmosphere including oxygen, tempering taking place at a temperature of 450° C. to 575° C. such that the metallic aluminum is oxidized into aluminum oxide.
摘要:
The present invention provides an inertial sensor and a producing method thereof. The inertial sensor measures the acceleration and angular acceleration of a moving object according to the sensed pressure difference (pressure gradient). The inertial sensor comprises a substrate; a circuit disposed on the substrate; a pressure device comprising an annular chamber that has a first end and a second end; a channel having a first end and a second end, with the second end being connected to the second end of the annular chamber; a pressure meter connected respectively to the first end of the annular chamber and the first end of the channel, wherein the pressure meter is electrically connected to the circuit; and a liquid filling the annular chamber. Hence, the present invention provides a highly sensitive planar inertial sensor, which simplifies the structure, makes easy the manufacturing process, and lowers the costs. The inertial sensor based on this invention can measure the acceleration and angular acceleration of a moving or rotating object, further allowing multi-axis measurements as a result of mutual integrations.
摘要:
The present invention is intended as a method for producing an electromagnetic transducer of variable reluctance type, where the transducer's seismic mass side and load side are mounted together in a first step while the inner and/or outer air gaps are supplied with shims in order to create balanced air gaps in an axial direction between the bobbin core's arms and the inner and outer yokes, whereupon in a second step the bobbin core is fixed through the side piece to an adapter already attached in a corresponding free moving end of a spring suspension, with compliant properties working in an axial direction and arranged between the seismic mass side and the load side in resting state in order to maintain balanced air gaps when finally, in a third step, the shims are removed and the air gaps are released.
摘要:
A bimorphic structure responsive to changes in an environmental condition, sensor structures incorporating one or more of such bimorphic structures, and a method of forming such bimorphic structures. The sensor structure has an electrically-conductive first contact on a substrate, and a bimorph beam anchored to the substrate so that a portion thereof is suspended above the first contact. The bimorph beam has a multilayer structure that includes first and second layers, with the second layer between the first layer and the substrate. A portion of the first layer projects through an opening in the second layer toward the first contact so as to define an electrically-conductive second contact located on the beam so as to be spaced apart and aligned with the first contact for contact with the first contact when the beam sufficiently deflects toward the substrate.
摘要:
A cantilever includes: a lever portion; a holder portion supporting the proximal end of the lever portion; a probe portion arranged at the distal end of the lever portion and having a spherical surface to face a sample; and a retaining portion fixed to the distal end of the lever portion and retaining the probe portion to surround a periphery of the probe portion. There is provided a cantilever allowing mounting of a probe portion with little effect in a short time without using any adhesive.
摘要:
A method for measuring the number of fine particles in ultrapure water includes subjecting the ultrapure water to internal pressure filtration through a hollow fiber membrane having a skin layer capable of trapping the fine particles in the ultrapure water at least on an inner surface thereof, exposing the inner surface of the hollow fiber membrane, and measuring the number of fine particles on the exposed inner surface.
摘要:
A nanowire magnetic sensor includes an array of magneto-resistive (MR) nanosensors with each MR nanosensor including a set of MR nanowires that are all aligned in the same position for one direction. The substrate can be a flexible substrate bent into a circular configuration for compass applications. A plurality of individual nanosensors can be connected into resistive Wheatstone bridge configurations by metallization.