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公开(公告)号：US11101120B2
公开(公告)日：2021-08-24
申请号：US16664389
申请日：2019-10-25
Applicant: SRI International
Inventor： Ashish Chaudhary , Robert Timothy Short
IPC: G01L21/30 , H01J41/02 , G01N27/64 , G01L21/34 , G01L21/32 , G01L21/12 , G01L9/00 , G01L19/00 , H01J41/06 , H01J41/04
Abstract: The disclosure includes an ionization chamber, a first electron multiplier, and a second electron multiplier. The ionization chamber is configured to receive gas molecules from an environment at a pressure. The first electron multiplier is configured to receive a plurality of photons from a photon source, generate a first plurality of electrons from the plurality of photons, and discharge the first plurality of electrons into the ionization chamber to generate a plurality of gas ions from at least a portion of the gas molecules. The second electron multiplier is configured to receive the plurality of gas ions from the ionization chamber and generate a second plurality of electrons from the plurality of gas ions that is proportional to a quantity of the plurality of gas ions. A quantity of electrons of the second plurality of electrons is indicative of the pressure.
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公开(公告)号：US10969290B2
公开(公告)日：2021-04-06
申请号：US15834625
申请日：2017-12-07
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney
Abstract: A cold cathode ionization gauge (CCIG) includes an extended anode, a cathode surrounding the anode along a length of the anode, and a feedthrough insulator supporting the anode. The cathode forms a discharge space around the anode to enable formation of a plasma between the anode and the cathode and a resultant ion current flow into the cathode. The CCIG further includes a magnet applying a magnetic field through the discharge space to lengthen free electron paths to sustain the plasma. A shield is electrically isolated from the insulator and shields the insulator from electrons of the plasma. The shield may be mounted to the cathode and surrounds and is spaced from the anode. An electric controller applies voltage between the anode and the cathode to create ionization with plasma discharge between the anode and the cathode, the controller determining pressure based on measured ion current flow to the cathode.
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公开(公告)号：US10352811B2
公开(公告)日：2019-07-16
申请号：US15712916
申请日：2017-09-22
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney , Brandon J. Kelly , Alfred A. Funari , Michael N. Schott , Kristian S. Schartau
Abstract: A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.
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公开(公告)号：US10337940B2
公开(公告)日：2019-07-02
申请号：US15499064
申请日：2017-04-27
Applicant: MKS Instruments, Inc.
Inventor： Timothy C. Swinney , Clinton L. Percy , Duane W. Marion , Brandon J. Kelly
Abstract: A cold cathode ionization gauge includes multiple cathodes providing different spacings between the cathodes and an anode. The multiple cathodes allow for pressure measurements over wider ranges of pressure. A first cathode with a larger spacing may provide current based on Townsend discharge; whereas, a second cathode having a smaller spacing may provide current based on both Townsend discharge at higher pressures and on Paschen's Law discharge at still higher pressures. A feature on the second cathode may support Paschen's Law discharge. Large resistances between the cathodes and a return to power supply enable control of output profiles to extend the pressure ranges with accurate responses and avoid output minima. Pressure measurements may be made based on currents from respective cathodes dependent on the outputs of the cathodes through the wide pressure range of measurement. The multiple cathodes may also provide measurements that avoid the discontinuities found in current outputs of the respective cathodes.
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公开(公告)号：US10222287B2
公开(公告)日：2019-03-05
申请号：US15797040
申请日：2017-10-30
Applicant: CANON ANELVA CORPORATION
Inventor： Yohsuke Kawasaki , Itaru Enomoto , Isao Mochizuki
Abstract: Provided are an excellent cold cathode ionization gauge and an excellent cold cathode ionization gauge cartridge. The cold cathode ionization gauge includes: an anode; a cathode, which has a tubular shape, and is arranged to surround the anode; a seal for sealing one opening of the cathode; a first member, which faces the seal inside the cathode, and has a through hole formed therein; a partition for partitioning a space surrounded by the cathode, the seal, and the first member into a first space that the first member faces and a second space that the seal faces; and a light source, which is arranged in the partition or the second space, and is configured to emit an electromagnetic wave, in which a gap is formed between at least part of an outer peripheral portion of the partition and the cathode.
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Patent Agency Ranking
公开(公告)号：US20180259417A1
公开(公告)日：2018-09-13
申请号：US15797040
申请日：2017-10-30
Applicant: CANON ANELVA CORPORATION
Inventor： YOHSUKE KAWASAKI , ITARU ENOMOTO , ISAO MOCHIZUKI
Abstract: Provided are an excellent cold cathode ionization gauge and an excellent cold cathode ionization gauge cartridge. The cold cathode ionization gauge includes: an anode; a cathode, which has a tubular shape, and is arranged to surround the anode; a seal for sealing one opening of the cathode; a first member, which faces the seal inside the cathode, and has a through hole formed therein; a partition for partitioning a space surrounded by the cathode, the seal, and the first member into a first space that the first member faces and a second space that the seal faces; and a light source, which is arranged in the partition or the second space, and is configured to emit an electromagnetic wave, in which a gap is formed between at least part of an outer peripheral portion of the partition and the cathode.
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公开(公告)号：US20180010977A1
公开(公告)日：2018-01-11
申请号：US15712916
申请日：2017-09-22
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney , Brandon J. Kelly , Alfred A. Funari , Michael N. Schott , Kristian S. Schartau
CPC classification number: G01L21/34 , G01L19/06 , H01J9/50 , H01J41/06 , Y02W30/828 , Y10T29/49007
Abstract: A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.
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公开(公告)号：US09316555B2
公开(公告)日：2016-04-19
申请号：US14260545
申请日：2014-04-24
Applicant: CANON ANELVA CORPORATION
Inventor： Itaru Enomoto , Hideo Mano
Abstract: A cold cathode ionization vacuum gauge, including: two electrodes disposed such that one of the electrodes is surrounded by the other electrode to thereby form a discharge space therebetween; and an electrode protection member disposed in the discharge space and configured to protect an inner wall surface of the other electrode, wherein the electrode protection member has electric conductivity and is elastically deformed along a shape of the inner wall surface to be electrically connected to the other electrode.
Abstract translation: 一种冷阴极电离真空计，包括：两个电极，其设置成使得一个电极被另一个电极包围，从而在它们之间形成放电空间; 以及电极保护部件，其设置在所述放电空间中并且被配置为保护所述另一电极的内壁表面，其中所述电极保护部件具有导电性并且沿着所述内壁表面的形状弹性变形以与其他电极电连接 电极。
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公开(公告)号：US20160025587A1
公开(公告)日：2016-01-28
申请号：US14773250
申请日：2013-07-09
Applicant: INFICON GMBH
Inventor： Bernhard ANDREAUS , Rolf ENDERES , Martin WUEST , Oskar UNTERMARZONER , Rudolf STOCKER
Abstract: An ionization vacuum measuring cell comprises an anode (3A) and a cathode (4K) in a measuring chamber (107). The measuring chamber (107) is arranged in a housing (101) which has a vacuum-tight feedthrough (103) for a connection rod (104) of the cathode (4K) towards the outside. The measuring chamber (107) holds the rod (104) in a feedthrough (109) which is electrically insulating only. The measuring chamber (107) in the housing (101) can be exchanged by a releasable plug connection (106).
Abstract translation: 电离真空测量池在测量室（107）中包括阳极（3A）和阴极（4K）。 测量室（107）布置在壳体（101）中，该壳体具有用于阴极（4K）的连接杆（104）朝向外部的真空密封馈通（103）。 测量室（107）将杆（104）保持在仅具有电绝缘性的馈通（109）中。 壳体（101）中的测量室（107）可以通过可释放的插头连接（106）来更换。
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100.发明授权Device for starting and/or maintaining a discharge and cold cathode vacuum gauge incorporating such a device 失效用于启动和/或维持并入这种装置的放电和冷阴极真空计的装置
公开(公告)号：US5767629A
公开(公告)日：1998-06-16
申请号：US664499
申请日：1996-06-17
Applicant: Robert Baptist
Inventor： Robert Baptist
Abstract: A device for starting and maintaining a discharge which is placed within an enclosure. The enclosure contains a discharge zone confined by an electromagnetic field. The device has a microtip electron source located in the vicinity of the discharge zone. The electron source is polarized in such a way that it emits electrons to the discharge zone in order to start and maintain the discharge. The device can be used in a cold cathode vacuum gauge.
Abstract translation: 用于启动和维护放置在外壳内的放电的装置。 外壳包含由电磁场限制的放电区域。 该器件具有位于放电区附近的微尖端电子源。 电子源以这样一种方式极化，即它向发射区发射电子，以启动和保持放电。 该装置可用于冷阴极真空计。
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